JP5197468B2 - 放射線検出装置 - Google Patents

放射線検出装置 Download PDF

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Publication number
JP5197468B2
JP5197468B2 JP2009087826A JP2009087826A JP5197468B2 JP 5197468 B2 JP5197468 B2 JP 5197468B2 JP 2009087826 A JP2009087826 A JP 2009087826A JP 2009087826 A JP2009087826 A JP 2009087826A JP 5197468 B2 JP5197468 B2 JP 5197468B2
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substrate
radiation
tft substrate
tft
conversion layer
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Japanese (ja)
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JP2010237162A5 (enExample
JP2010237162A (ja
Inventor
書史 成行
美広 岡田
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Fujifilm Corp
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Fujifilm Corp
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Priority to JP2009087826A priority Critical patent/JP5197468B2/ja
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  • Measurement Of Radiation (AREA)
  • Solid State Image Pick-Up Elements (AREA)
JP2009087826A 2009-03-31 2009-03-31 放射線検出装置 Active JP5197468B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2009087826A JP5197468B2 (ja) 2009-03-31 2009-03-31 放射線検出装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2009087826A JP5197468B2 (ja) 2009-03-31 2009-03-31 放射線検出装置

Publications (3)

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JP2010237162A JP2010237162A (ja) 2010-10-21
JP2010237162A5 JP2010237162A5 (enExample) 2012-06-07
JP5197468B2 true JP5197468B2 (ja) 2013-05-15

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JP2009087826A Active JP5197468B2 (ja) 2009-03-31 2009-03-31 放射線検出装置

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Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2015092518A (ja) * 2012-02-22 2015-05-14 富士フイルム株式会社 半導体素子、放射線検出器、及び半導体素子の製造方法
JP6650676B2 (ja) 2015-02-26 2020-02-19 キヤノン株式会社 放射線撮像装置および放射線撮像システム

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60217671A (ja) * 1984-04-13 1985-10-31 Toshiba Corp 半導体放射線検出器の製造方法
JP3486515B2 (ja) * 1996-12-13 2004-01-13 キヤノン株式会社 ガラス基板保持構造及び放射線撮影装置
JPH10221456A (ja) * 1997-02-07 1998-08-21 Shimadzu Corp 放射線検出器
US6350990B1 (en) * 1999-11-04 2002-02-26 General Electric Company End cap and sealing method for imager
JP2002164523A (ja) * 2000-11-27 2002-06-07 Canon Inc 放射線撮像装置及びその製造方法
JP2004061116A (ja) * 2002-07-24 2004-02-26 Canon Inc 放射線検出装置及びシステム
JP2004325126A (ja) * 2003-04-22 2004-11-18 Canon Inc 放射線検出装置
US7019304B2 (en) * 2003-10-06 2006-03-28 General Electric Company Solid-state radiation imager with back-side irradiation
JP4208790B2 (ja) * 2004-08-10 2009-01-14 キヤノン株式会社 放射線検出装置の製造方法
JP4612876B2 (ja) * 2004-08-10 2011-01-12 キヤノン株式会社 放射線検出装置、シンチレータパネル、これらの製造方法及び放射線検出システム

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