JP5197342B2 - インプリントによる基板の加工方法 - Google Patents

インプリントによる基板の加工方法 Download PDF

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Publication number
JP5197342B2
JP5197342B2 JP2008321838A JP2008321838A JP5197342B2 JP 5197342 B2 JP5197342 B2 JP 5197342B2 JP 2008321838 A JP2008321838 A JP 2008321838A JP 2008321838 A JP2008321838 A JP 2008321838A JP 5197342 B2 JP5197342 B2 JP 5197342B2
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Japan
Prior art keywords
pattern
substrate
region
resin layer
substrate processing
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JP2008321838A
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English (en)
Japanese (ja)
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JP2009177146A (ja
JP2009177146A5 (OSRAM
Inventor
真吾 奥島
淳一 関
敦則 寺崎
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Canon Inc
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Canon Inc
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    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/0002—Lithographic processes using patterning methods other than those involving the exposure to radiation, e.g. by stamping
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y10/00—Nanotechnology for information processing, storage or transmission, e.g. quantum computing or single electron logic
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y40/00—Manufacture or treatment of nanostructures

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  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Nanotechnology (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Mathematical Physics (AREA)
  • Theoretical Computer Science (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Manufacturing & Machinery (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Shaping Of Tube Ends By Bending Or Straightening (AREA)
JP2008321838A 2007-12-26 2008-12-18 インプリントによる基板の加工方法 Expired - Fee Related JP5197342B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2008321838A JP5197342B2 (ja) 2007-12-26 2008-12-18 インプリントによる基板の加工方法

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2007334646 2007-12-26
JP2007334646 2007-12-26
JP2008321838A JP5197342B2 (ja) 2007-12-26 2008-12-18 インプリントによる基板の加工方法

Publications (3)

Publication Number Publication Date
JP2009177146A JP2009177146A (ja) 2009-08-06
JP2009177146A5 JP2009177146A5 (OSRAM) 2012-02-02
JP5197342B2 true JP5197342B2 (ja) 2013-05-15

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JP2008321838A Expired - Fee Related JP5197342B2 (ja) 2007-12-26 2008-12-18 インプリントによる基板の加工方法

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US (1) US20090166317A1 (OSRAM)
JP (1) JP5197342B2 (OSRAM)

Families Citing this family (20)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009182075A (ja) * 2008-01-30 2009-08-13 Canon Inc インプリントによる構造体の製造方法
NL2003875A (en) 2009-02-04 2010-08-05 Asml Netherlands Bv Imprint lithography method and apparatus.
JP5477562B2 (ja) * 2009-09-16 2014-04-23 凸版印刷株式会社 インプリント方法および組みインプリントモールド
US8980751B2 (en) * 2010-01-27 2015-03-17 Canon Nanotechnologies, Inc. Methods and systems of material removal and pattern transfer
JP5460541B2 (ja) * 2010-03-30 2014-04-02 富士フイルム株式会社 ナノインプリント方法、液滴配置パターン作成方法および基板の加工方法
JP5744590B2 (ja) * 2011-03-28 2015-07-08 キヤノン株式会社 インプリント方法、型、それらを用いた物品の製造方法
WO2012172755A1 (ja) * 2011-06-16 2012-12-20 パナソニック株式会社 シートおよびモールドならびにその製造方法
WO2013154077A1 (ja) * 2012-04-09 2013-10-17 旭硝子株式会社 微細パターンを表面に有する物品およびその製造方法、ならびに光学物品、その製造方法および複製モールドの製造方法
WO2014145036A1 (en) * 2013-03-15 2014-09-18 The Trustees Of Princeton University Rapid and sensitive analyte measurement assay
KR102243630B1 (ko) * 2013-12-30 2021-04-23 캐논 나노테크놀로지즈 인코퍼레이티드 20ｎｍ 이하 특징부의 균일한 임프린트 패턴 전사 방법
US10026609B2 (en) * 2014-10-23 2018-07-17 Board Of Regents, The University Of Texas System Nanoshape patterning techniques that allow high-speed and low-cost fabrication of nanoshape structures
JP6537277B2 (ja) * 2015-01-23 2019-07-03 キヤノン株式会社 インプリント装置、物品製造方法
JP6441181B2 (ja) * 2015-08-04 2018-12-19 東芝メモリ株式会社 インプリント用テンプレートおよびその製造方法、および半導体装置の製造方法
US10211051B2 (en) * 2015-11-13 2019-02-19 Canon Kabushiki Kaisha Method of reverse tone patterning
KR102535820B1 (ko) * 2016-05-19 2023-05-24 삼성디스플레이 주식회사 임프린트 리소그래피 방법, 임프린트용 마스터 템플릿, 이를 이용하여 제조된 와이어 그리드 편광소자 및 이를 포함하는 표시 기판
US11194247B2 (en) 2018-01-31 2021-12-07 Canon Kabushiki Kaisha Extrusion control by capillary force reduction
CN113169045A (zh) * 2018-10-16 2021-07-23 Ｓｃｉｖａｘ株式会社 微细图案成形方法、压印用模具制造方法及压印用模具、以及光学设备
JP7414680B2 (ja) * 2020-09-17 2024-01-16 キオクシア株式会社 インプリント方法、インプリント装置、及び膜形成装置
US12235577B2 (en) * 2020-12-21 2025-02-25 3M Innovative Properties Company Arrayed structured replication articles and methods
KR102379451B1 (ko) * 2021-04-27 2022-03-28 창원대학교 산학협력단 대면적 패턴 제작용 몰드, 이의 제조 방법 및 이를 이용한 패턴 성형 방법

Family Cites Families (20)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4962064A (en) * 1988-05-12 1990-10-09 Advanced Micro Devices, Inc. Method of planarization of topologies in integrated circuit structures
JP3437517B2 (ja) * 1999-02-16 2003-08-18 キヤノン株式会社 二次元位相型光学素子の作製方法
JP3978706B2 (ja) * 2001-09-20 2007-09-19 セイコーエプソン株式会社 微細構造体の製造方法
US7077992B2 (en) * 2002-07-11 2006-07-18 Molecular Imprints, Inc. Step and repeat imprint lithography processes
US7396475B2 (en) * 2003-04-25 2008-07-08 Molecular Imprints, Inc. Method of forming stepped structures employing imprint lithography
JP4393244B2 (ja) * 2004-03-29 2010-01-06 キヤノン株式会社 インプリント装置
EP1768846B1 (en) * 2004-06-03 2010-08-11 Molecular Imprints, Inc. Fluid dispensing and drop-on-demand dispensing for nano-scale manufacturing
US7686970B2 (en) * 2004-12-30 2010-03-30 Asml Netherlands B.V. Imprint lithography
US7354698B2 (en) * 2005-01-07 2008-04-08 Asml Netherlands B.V. Imprint lithography
US8999218B2 (en) * 2005-06-06 2015-04-07 Canon Kabushiki Kaisha Process for producing member having pattern, pattern transfer apparatus, and mold
JP3958344B2 (ja) * 2005-06-07 2007-08-15 キヤノン株式会社 インプリント装置、インプリント方法及びチップの製造方法
JP4290177B2 (ja) * 2005-06-08 2009-07-01 キヤノン株式会社 モールド、アライメント方法、パターン形成装置、パターン転写装置、及びチップの製造方法
US7927089B2 (en) * 2005-06-08 2011-04-19 Canon Kabushiki Kaisha Mold, apparatus including mold, pattern transfer apparatus, and pattern forming method
US7517211B2 (en) * 2005-12-21 2009-04-14 Asml Netherlands B.V. Imprint lithography
JP4865356B2 (ja) * 2006-02-24 2012-02-01 キヤノン株式会社 パターン形成方法
JP4861044B2 (ja) * 2006-04-18 2012-01-25 キヤノン株式会社 基板の加工方法、パターン領域を有する部材の製造方法
JP2008132722A (ja) * 2006-11-29 2008-06-12 Toshiba Corp ナノインプリント用モールドおよびその作成方法、ならびにデバイスの製造方法
JP4996488B2 (ja) * 2007-03-08 2012-08-08 東芝機械株式会社 微細パターン形成方法
JP5110924B2 (ja) * 2007-03-14 2012-12-26 キヤノン株式会社 モールド、モールドの製造方法、加工装置及び加工方法
JP5137635B2 (ja) * 2007-03-16 2013-02-06 キヤノン株式会社 インプリント方法、チップの製造方法及びインプリント装置

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Publication number Publication date
US20090166317A1 (en) 2009-07-02
JP2009177146A (ja) 2009-08-06

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