JP5189777B2 - 回折格子を備えるスペクトル分析ユニット - Google Patents

回折格子を備えるスペクトル分析ユニット Download PDF

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Publication number
JP5189777B2
JP5189777B2 JP2007047506A JP2007047506A JP5189777B2 JP 5189777 B2 JP5189777 B2 JP 5189777B2 JP 2007047506 A JP2007047506 A JP 2007047506A JP 2007047506 A JP2007047506 A JP 2007047506A JP 5189777 B2 JP5189777 B2 JP 5189777B2
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JP
Japan
Prior art keywords
light beam
diffraction grating
order diffracted
diffracted light
analysis unit
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP2007047506A
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English (en)
Japanese (ja)
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JP2007286043A5 (enExample
JP2007286043A (ja
Inventor
ドプシャール ハンス−ユルゲン
ヴォレシェンスキー ラルフ
バッセ ウォルフガング
シュタイネルト イェルク
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Carl Zeiss Microscopy GmbH
Original Assignee
Carl Zeiss Microscopy GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Carl Zeiss Microscopy GmbH filed Critical Carl Zeiss Microscopy GmbH
Publication of JP2007286043A publication Critical patent/JP2007286043A/ja
Publication of JP2007286043A5 publication Critical patent/JP2007286043A5/ja
Application granted granted Critical
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Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

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Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00—Microscopes
    • G02B21/0004—Microscopes specially adapted for specific applications
    • G02B21/002—Scanning microscopes
    • G02B21/0024—Confocal scanning microscopes (CSOMs) or confocal "macroscopes"; Accessories which are not restricted to use with CSOMs, e.g. sample holders
    • G02B21/0052—Optical details of the image generation
    • G02B21/0064—Optical details of the image generation multi-spectral or wavelength-selective arrangements, e.g. wavelength fan-out, chromatic profiling
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G01J3/0205—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows
    • G01J3/0208—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows using focussing or collimating elements, e.g. lenses or mirrors; performing aberration correction
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G01J3/0205—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows
    • G01J3/021—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows using plane or convex mirrors, parallel phase plates, or particular reflectors
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G01J3/0256—Compact construction
    • G01J3/0259—Monolithic
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/12—Generating the spectrum; Monochromators
    • G01J3/18—Generating the spectrum; Monochromators using diffraction elements, e.g. grating
    • G01J3/1804—Plane gratings
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00—Microscopes
    • G02B21/16—Microscopes adapted for ultraviolet illumination ; Fluorescence microscopes

Landscapes

  • Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Optics & Photonics (AREA)
  • Spectrometry And Color Measurement (AREA)
  • Diffracting Gratings Or Hologram Optical Elements (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
  • Holo Graphy (AREA)
JP2007047506A 2006-04-15 2007-02-27 回折格子を備えるスペクトル分析ユニット Expired - Fee Related JP5189777B2 (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102006017705.3 2006-04-15
DE102006017705A DE102006017705B4 (de) 2006-04-15 2006-04-15 Spektralanalytische Einheit mit einem Beugungsgitter und Laserscanning-Mikroskop

Publications (3)

Publication Number Publication Date
JP2007286043A JP2007286043A (ja) 2007-11-01
JP2007286043A5 JP2007286043A5 (enExample) 2010-02-25
JP5189777B2 true JP5189777B2 (ja) 2013-04-24

Family

ID=38175821

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2007047506A Expired - Fee Related JP5189777B2 (ja) 2006-04-15 2007-02-27 回折格子を備えるスペクトル分析ユニット

Country Status (5)

Country Link
US (1) US7852474B2 (enExample)
EP (1) EP1845349B1 (enExample)
JP (1) JP5189777B2 (enExample)
AT (1) ATE395580T1 (enExample)
DE (2) DE102006017705B4 (enExample)

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP2211154B1 (en) * 2009-01-22 2017-03-15 CSEM Centre Suisse d'Electronique et de Microtechnique SA - Recherche et Développement Monochromator having a tunable grating
JP5335729B2 (ja) * 2010-04-01 2013-11-06 浜松ホトニクス株式会社 分光モジュール
JP5325829B2 (ja) 2010-04-01 2013-10-23 浜松ホトニクス株式会社 分光モジュール
JP5567887B2 (ja) * 2010-04-23 2014-08-06 オリンパス株式会社 分光装置
DE102010046107A1 (de) 2010-09-21 2012-03-22 Carl Zeiss Ag Spektrometer
JP5988691B2 (ja) 2012-05-18 2016-09-07 オリンパス株式会社 分光装置、及び、それを備えた共焦点走査型顕微鏡
DE112014007080B4 (de) 2014-12-22 2021-09-09 Spectro Analytical Instruments Gmbh Gitterspektrometer mit umschaltbarem Lichtweg
WO2016154261A1 (en) * 2015-03-24 2016-09-29 Samtec, Inc. Optical block with textured surface
CN114599946B (zh) * 2019-08-23 2025-07-22 安斯威雷有限公司 光谱仪和成像装置
EP3819612B1 (en) 2019-11-05 2023-07-26 Hitachi High-Tech Analytical Science GmbH Optical system for spectrometers
EP4414671A1 (en) * 2023-02-07 2024-08-14 Hitachi High-Tech Analytical Science GmbH An optical spectrometer assembly

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DD292078A5 (de) 1990-02-15 1991-07-18 ���k���������������@����@�����@���@�������������k�� Fchelle-polychromator
DE19622359B4 (de) * 1996-06-04 2007-11-22 Carl Zeiss Jena Gmbh Vorrichtung zur Einkopplung der Strahlung von Kurzpulslasern in einem mikroskopischen Strahlengang
DE19702753C2 (de) 1997-01-27 2003-04-10 Zeiss Carl Jena Gmbh Laser-Scanning-Mikroskop
US6167173A (en) 1997-01-27 2000-12-26 Carl Zeiss Jena Gmbh Laser scanning microscope
US5815261A (en) * 1997-04-16 1998-09-29 General Atomics Correlation spectrometer with high-resolution, broad-band optical characteristics
DE19933290A1 (de) * 1999-04-09 2001-03-08 Campus Technologies Ag Zug Vorrichtung und Verfahren zur optischen Spektroskopie
DE10121499B4 (de) * 2001-05-03 2007-08-02 Campus Technologies Ag Vorrichtung und Verfahren zur optischen Spektroskopie und optischen Sensorik sowie Verwendung der Vorrichtung
DE10151217B4 (de) * 2001-10-16 2012-05-16 Carl Zeiss Microlmaging Gmbh Verfahren zum Betrieb eines Laser-Scanning-Mikroskops
CN1650151B (zh) * 2002-07-12 2010-08-04 河流诊断公司 光学分光计
WO2004008092A1 (de) * 2002-07-15 2004-01-22 Campus Technologies Ag Vorrichtung und verfahren zur optischen spektroskopie und optischen sensorik sowie verwendung der vorrichtung
JP4475501B2 (ja) * 2003-10-09 2010-06-09 インターナショナル・ビジネス・マシーンズ・コーポレーション 分光素子、回折格子、複合回折格子、カラー表示装置、および分波器

Also Published As

Publication number Publication date
EP1845349B1 (de) 2008-05-14
DE102006017705A1 (de) 2007-10-18
EP1845349A1 (de) 2007-10-17
US7852474B2 (en) 2010-12-14
DE502007000014D1 (de) 2008-06-26
ATE395580T1 (de) 2008-05-15
DE102006017705B4 (de) 2010-01-07
US20070242268A1 (en) 2007-10-18
JP2007286043A (ja) 2007-11-01

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