DE102006017705B4 - Spektralanalytische Einheit mit einem Beugungsgitter und Laserscanning-Mikroskop - Google Patents

Spektralanalytische Einheit mit einem Beugungsgitter und Laserscanning-Mikroskop Download PDF

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Publication number
DE102006017705B4
DE102006017705B4 DE102006017705A DE102006017705A DE102006017705B4 DE 102006017705 B4 DE102006017705 B4 DE 102006017705B4 DE 102006017705 A DE102006017705 A DE 102006017705A DE 102006017705 A DE102006017705 A DE 102006017705A DE 102006017705 B4 DE102006017705 B4 DE 102006017705B4
Authority
DE
Germany
Prior art keywords
diffraction
light beam
diffraction grating
order
light
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
DE102006017705A
Other languages
German (de)
English (en)
Other versions
DE102006017705A1 (de
Inventor
Hans-Jürgen DOBSCHAL
Ralf Wolleschensky
Wolfgang Bathe
Jörg STEINERT
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Carl Zeiss Microscopy GmbH
Carl Zeiss AG
Original Assignee
Carl Zeiss AG
Carl Zeiss MicroImaging GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Carl Zeiss AG, Carl Zeiss MicroImaging GmbH filed Critical Carl Zeiss AG
Priority to DE102006017705A priority Critical patent/DE102006017705B4/de
Priority to JP2007047506A priority patent/JP5189777B2/ja
Priority to EP07007384A priority patent/EP1845349B1/de
Priority to DE502007000014T priority patent/DE502007000014D1/de
Priority to AT07007384T priority patent/ATE395580T1/de
Priority to US11/785,153 priority patent/US7852474B2/en
Publication of DE102006017705A1 publication Critical patent/DE102006017705A1/de
Application granted granted Critical
Publication of DE102006017705B4 publication Critical patent/DE102006017705B4/de
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00—Microscopes
    • G02B21/0004—Microscopes specially adapted for specific applications
    • G02B21/002—Scanning microscopes
    • G02B21/0024—Confocal scanning microscopes (CSOMs) or confocal "macroscopes"; Accessories which are not restricted to use with CSOMs, e.g. sample holders
    • G02B21/0052—Optical details of the image generation
    • G02B21/0064—Optical details of the image generation multi-spectral or wavelength-selective arrangements, e.g. wavelength fan-out, chromatic profiling
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G01J3/0205—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows
    • G01J3/0208—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows using focussing or collimating elements, e.g. lenses or mirrors; performing aberration correction
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G01J3/0205—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows
    • G01J3/021—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows using plane or convex mirrors, parallel phase plates, or particular reflectors
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G01J3/0256—Compact construction
    • G01J3/0259—Monolithic
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/12—Generating the spectrum; Monochromators
    • G01J3/18—Generating the spectrum; Monochromators using diffraction elements, e.g. grating
    • G01J3/1804—Plane gratings
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00—Microscopes
    • G02B21/16—Microscopes adapted for ultraviolet illumination ; Fluorescence microscopes

Landscapes

  • Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Optics & Photonics (AREA)
  • Spectrometry And Color Measurement (AREA)
  • Diffracting Gratings Or Hologram Optical Elements (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
  • Holo Graphy (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
DE102006017705A 2006-04-15 2006-04-15 Spektralanalytische Einheit mit einem Beugungsgitter und Laserscanning-Mikroskop Active DE102006017705B4 (de)

Priority Applications (6)

Application Number Priority Date Filing Date Title
DE102006017705A DE102006017705B4 (de) 2006-04-15 2006-04-15 Spektralanalytische Einheit mit einem Beugungsgitter und Laserscanning-Mikroskop
JP2007047506A JP5189777B2 (ja) 2006-04-15 2007-02-27 回折格子を備えるスペクトル分析ユニット
EP07007384A EP1845349B1 (de) 2006-04-15 2007-04-11 Spektralanalytische Einheit mit einem Beugungsgitter
DE502007000014T DE502007000014D1 (de) 2006-04-15 2007-04-11 Spektralanalytische Einheit mit einem Beugungsgitter
AT07007384T ATE395580T1 (de) 2006-04-15 2007-04-11 Spektralanalytische einheit mit einem beugungsgitter
US11/785,153 US7852474B2 (en) 2006-04-15 2007-04-16 Spectral analysis unit with a diffraction grating

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE102006017705A DE102006017705B4 (de) 2006-04-15 2006-04-15 Spektralanalytische Einheit mit einem Beugungsgitter und Laserscanning-Mikroskop

Publications (2)

Publication Number Publication Date
DE102006017705A1 DE102006017705A1 (de) 2007-10-18
DE102006017705B4 true DE102006017705B4 (de) 2010-01-07

Family

ID=38175821

Family Applications (2)

Application Number Title Priority Date Filing Date
DE102006017705A Active DE102006017705B4 (de) 2006-04-15 2006-04-15 Spektralanalytische Einheit mit einem Beugungsgitter und Laserscanning-Mikroskop
DE502007000014T Active DE502007000014D1 (de) 2006-04-15 2007-04-11 Spektralanalytische Einheit mit einem Beugungsgitter

Family Applications After (1)

Application Number Title Priority Date Filing Date
DE502007000014T Active DE502007000014D1 (de) 2006-04-15 2007-04-11 Spektralanalytische Einheit mit einem Beugungsgitter

Country Status (5)

Country Link
US (1) US7852474B2 (enExample)
EP (1) EP1845349B1 (enExample)
JP (1) JP5189777B2 (enExample)
AT (1) ATE395580T1 (enExample)
DE (2) DE102006017705B4 (enExample)

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP2211154B1 (en) * 2009-01-22 2017-03-15 CSEM Centre Suisse d'Electronique et de Microtechnique SA - Recherche et Développement Monochromator having a tunable grating
JP5335729B2 (ja) * 2010-04-01 2013-11-06 浜松ホトニクス株式会社 分光モジュール
JP5325829B2 (ja) 2010-04-01 2013-10-23 浜松ホトニクス株式会社 分光モジュール
JP5567887B2 (ja) * 2010-04-23 2014-08-06 オリンパス株式会社 分光装置
DE102010046107A1 (de) * 2010-09-21 2012-03-22 Carl Zeiss Ag Spektrometer
JP5988691B2 (ja) 2012-05-18 2016-09-07 オリンパス株式会社 分光装置、及び、それを備えた共焦点走査型顕微鏡
WO2016101986A1 (de) * 2014-12-22 2016-06-30 Spectro Analytical Instruments Gmbh Gitterspektrometer mit umschaltbarem lichtweg
CN114791653A (zh) * 2015-03-24 2022-07-26 申泰公司 具有纹理化表面的光学块
WO2021040063A1 (ko) * 2019-08-23 2021-03-04 주식회사 스킨어세이 분광기 및 이미징 장치
EP3819612B1 (en) 2019-11-05 2023-07-26 Hitachi High-Tech Analytical Science GmbH Optical system for spectrometers
EP4414671A1 (en) * 2023-02-07 2024-08-14 Hitachi High-Tech Analytical Science GmbH An optical spectrometer assembly

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE10121499A1 (de) * 2001-05-03 2002-11-14 Campus Technologies Ag Ipsach Vorrichtung und Verfahren zur optischen Spektroskopie und optischen Sensorik sowie Verwendung der Vorrichtung

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DD292078A5 (de) 1990-02-15 1991-07-18 ���k���������������@����@�����@���@�������������k�� Fchelle-polychromator
DE19622359B4 (de) * 1996-06-04 2007-11-22 Carl Zeiss Jena Gmbh Vorrichtung zur Einkopplung der Strahlung von Kurzpulslasern in einem mikroskopischen Strahlengang
US6167173A (en) 1997-01-27 2000-12-26 Carl Zeiss Jena Gmbh Laser scanning microscope
DE19702753C2 (de) 1997-01-27 2003-04-10 Zeiss Carl Jena Gmbh Laser-Scanning-Mikroskop
US5815261A (en) * 1997-04-16 1998-09-29 General Atomics Correlation spectrometer with high-resolution, broad-band optical characteristics
DE19933290A1 (de) * 1999-04-09 2001-03-08 Campus Technologies Ag Zug Vorrichtung und Verfahren zur optischen Spektroskopie
DE10151217B4 (de) 2001-10-16 2012-05-16 Carl Zeiss Microlmaging Gmbh Verfahren zum Betrieb eines Laser-Scanning-Mikroskops
WO2004008089A1 (en) * 2002-07-12 2004-01-22 River Diagnostics B.V. Optical spectrometer
WO2004008092A1 (de) * 2002-07-15 2004-01-22 Campus Technologies Ag Vorrichtung und verfahren zur optischen spektroskopie und optischen sensorik sowie verwendung der vorrichtung
JP4475501B2 (ja) * 2003-10-09 2010-06-09 インターナショナル・ビジネス・マシーンズ・コーポレーション 分光素子、回折格子、複合回折格子、カラー表示装置、および分波器

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE10121499A1 (de) * 2001-05-03 2002-11-14 Campus Technologies Ag Ipsach Vorrichtung und Verfahren zur optischen Spektroskopie und optischen Sensorik sowie Verwendung der Vorrichtung

Also Published As

Publication number Publication date
EP1845349B1 (de) 2008-05-14
ATE395580T1 (de) 2008-05-15
DE102006017705A1 (de) 2007-10-18
DE502007000014D1 (de) 2008-06-26
JP5189777B2 (ja) 2013-04-24
JP2007286043A (ja) 2007-11-01
EP1845349A1 (de) 2007-10-17
US7852474B2 (en) 2010-12-14
US20070242268A1 (en) 2007-10-18

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Legal Events

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OP8 Request for examination as to paragraph 44 patent law
8364 No opposition during term of opposition
R081 Change of applicant/patentee

Owner name: CARL ZEISS MICROSCOPY GMBH, DE

Free format text: FORMER OWNERS: CARL ZEISS MICROIMAGING GMBH, 07745 JENA, DE; CARL ZEISS AG, 73447 OBERKOCHEN, DE

Effective date: 20130204

Owner name: CARL ZEISS AG, DE

Free format text: FORMER OWNERS: CARL ZEISS MICROIMAGING GMBH, 07745 JENA, DE; CARL ZEISS AG, 73447 OBERKOCHEN, DE

Effective date: 20130204

Owner name: CARL ZEISS AG, DE

Free format text: FORMER OWNER: CARL ZEISS MICROIMAGING GMBH, CARL ZEISS AG, , DE

Effective date: 20130204

Owner name: CARL ZEISS MICROSCOPY GMBH, DE

Free format text: FORMER OWNER: CARL ZEISS MICROIMAGING GMBH, CARL ZEISS AG, , DE

Effective date: 20130204