JP5150939B2 - 光学特性測定装置および光学特性測定方法 - Google Patents

光学特性測定装置および光学特性測定方法 Download PDF

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Publication number
JP5150939B2
JP5150939B2 JP2009187734A JP2009187734A JP5150939B2 JP 5150939 B2 JP5150939 B2 JP 5150939B2 JP 2009187734 A JP2009187734 A JP 2009187734A JP 2009187734 A JP2009187734 A JP 2009187734A JP 5150939 B2 JP5150939 B2 JP 5150939B2
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Prior art keywords
spectrum
measurement
correction
dark
photodetector
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JP2009187734A
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Japanese (ja)
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JP2010117343A5 (enExample
JP2010117343A (ja
Inventor
弘幸 佐野
真 大川内
浩正 大嶋
和明 大久保
勉 水口
史郎 志摩
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Otsuka Electronics Co Ltd
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Otsuka Electronics Co Ltd
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Priority to JP2009187734A priority Critical patent/JP5150939B2/ja
Priority to US12/573,140 priority patent/US8169607B2/en
Priority to TW98133802A priority patent/TWI468654B/zh
Priority to KR1020090097472A priority patent/KR101603344B1/ko
Priority to CN2009101781731A priority patent/CN101726361B/zh
Publication of JP2010117343A publication Critical patent/JP2010117343A/ja
Priority to US13/306,941 priority patent/US8169608B2/en
Publication of JP2010117343A5 publication Critical patent/JP2010117343A5/ja
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G01J3/0205—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows
    • G01J3/0232—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows using shutters
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/28—Investigating the spectrum
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J1/00—Photometry, e.g. photographic exposure meter
    • G01J1/02—Details
    • G01J1/0219—Electrical interface; User interface

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  • Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • General Physics & Mathematics (AREA)
  • Spectrometry And Color Measurement (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
JP2009187734A 2008-10-15 2009-08-13 光学特性測定装置および光学特性測定方法 Active JP5150939B2 (ja)

Priority Applications (6)

Application Number Priority Date Filing Date Title
JP2009187734A JP5150939B2 (ja) 2008-10-15 2009-08-13 光学特性測定装置および光学特性測定方法
US12/573,140 US8169607B2 (en) 2008-10-15 2009-10-04 Optical characteristic measurement device and optical characteristic measurement method suitable for spectrum measurement
TW98133802A TWI468654B (zh) 2008-10-15 2009-10-06 適合光譜測定之光學特性測定裝置及光學特性測定方法
KR1020090097472A KR101603344B1 (ko) 2008-10-15 2009-10-14 스펙트럼 측정에 적합한 광학 특성 측정 장치 및 광학 특성 측정 방법
CN2009101781731A CN101726361B (zh) 2008-10-15 2009-10-15 适于光谱测定的光学特性测定装置以及光学特性测定方法
US13/306,941 US8169608B2 (en) 2008-10-15 2011-11-29 Optical characteristic measurement device and optical characteristic measurement method suitable for spectrum measurement

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2008266056 2008-10-15
JP2008266056 2008-10-15
JP2009187734A JP5150939B2 (ja) 2008-10-15 2009-08-13 光学特性測定装置および光学特性測定方法

Publications (3)

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JP2010117343A JP2010117343A (ja) 2010-05-27
JP2010117343A5 JP2010117343A5 (enExample) 2012-09-13
JP5150939B2 true JP5150939B2 (ja) 2013-02-27

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JP2009187734A Active JP5150939B2 (ja) 2008-10-15 2009-08-13 光学特性測定装置および光学特性測定方法

Country Status (5)

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US (2) US8169607B2 (enExample)
JP (1) JP5150939B2 (enExample)
KR (1) KR101603344B1 (enExample)
CN (1) CN101726361B (enExample)
TW (1) TWI468654B (enExample)

Families Citing this family (27)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5769453B2 (ja) * 2011-03-10 2015-08-26 大塚電子株式会社 分光特性測定方法および分光特性測定装置
CN102155991B (zh) * 2011-03-18 2012-08-08 杭州远方光电信息股份有限公司 一种高级光谱校正方法
JP5605318B2 (ja) * 2011-06-21 2014-10-15 株式会社島津製作所 分光光度計
CN102445326A (zh) * 2011-09-20 2012-05-09 电子科技大学 基于时域的光谱探测系统
CN104040309B (zh) 2011-11-03 2019-06-07 威利食品有限公司 用于最终使用者食品分析的低成本光谱测定系统
TWI454679B (zh) * 2012-08-08 2014-10-01 Chroma Ate Inc Optical detection system and optical property detection method
CN102818623B (zh) * 2012-08-31 2014-08-20 广东威创视讯科技股份有限公司 一种亮色度计的校准方法和系统
JP5484537B2 (ja) * 2012-09-03 2014-05-07 大塚電子株式会社 分光特性測定装置および分光特性測定方法
WO2015015493A2 (en) 2013-08-02 2015-02-05 Verifood, Ltd. Spectrometry system and method, spectroscopic devices and systems
CN106461461A (zh) 2014-01-03 2017-02-22 威利食品有限公司 光谱测定系统、方法和应用
EP3209983A4 (en) 2014-10-23 2018-06-27 Verifood Ltd. Accessories for handheld spectrometer
WO2016125165A2 (en) 2015-02-05 2016-08-11 Verifood, Ltd. Spectrometry system with visible aiming beam
WO2016125164A2 (en) 2015-02-05 2016-08-11 Verifood, Ltd. Spectrometry system applications
WO2016162865A1 (en) 2015-04-07 2016-10-13 Verifood, Ltd. Detector for spectrometry system
KR102433371B1 (ko) 2015-06-24 2022-08-16 삼성전자주식회사 스펙트로미터 및 광차폐 상태 모니터링 장치
JP6613063B2 (ja) * 2015-07-07 2019-11-27 大塚電子株式会社 光学特性測定システム
US10066990B2 (en) 2015-07-09 2018-09-04 Verifood, Ltd. Spatially variable filter systems and methods
JP6441759B2 (ja) * 2015-07-24 2018-12-19 株式会社堀場製作所 分光分析器に用いられる光検出器の出力補正方法
US10203246B2 (en) 2015-11-20 2019-02-12 Verifood, Ltd. Systems and methods for calibration of a handheld spectrometer
EP3184975B1 (en) * 2015-12-23 2023-08-30 Spectricity A spectrometer module
US10254215B2 (en) 2016-04-07 2019-04-09 Verifood, Ltd. Spectrometry system applications
EP3488204A4 (en) 2016-07-20 2020-07-22 Verifood Ltd. ACCESSORIES FOR HANDLABLE SPECTROMETERS
US10791933B2 (en) 2016-07-27 2020-10-06 Verifood, Ltd. Spectrometry systems, methods, and applications
JP6683092B2 (ja) 2016-09-26 2020-04-15 株式会社島津製作所 分光分析装置およびキャリブレーション方法
WO2020075036A1 (en) 2018-10-08 2020-04-16 Verifood Ltd. Accessories for optical spectrometers
JP7448088B2 (ja) * 2021-03-04 2024-03-12 株式会社島津製作所 分光測定装置
WO2023228450A1 (ja) * 2022-05-27 2023-11-30 浜松ホトニクス株式会社 分光測定装置

Family Cites Families (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5657925A (en) * 1979-10-17 1981-05-20 Hitachi Ltd Multiwavelength spectrophotometer
JPS58158528A (ja) * 1982-03-16 1983-09-20 Union Giken:Kk 測光装置
JPS60239649A (ja) * 1984-05-15 1985-11-28 Shimadzu Corp デンシトメ−タにおける測光信号処理方法
EP0399057B1 (en) * 1989-05-20 1992-12-09 Hewlett-Packard GmbH Method for operating a photodiode array spectrometer and photodiode array spectrometer
JPH07128144A (ja) * 1993-11-04 1995-05-19 Matsushita Electric Ind Co Ltd 分光測定装置
JPH1130552A (ja) 1997-07-10 1999-02-02 Otsuka Denshi Kk 迷光補正方法
JP3927702B2 (ja) * 1998-09-24 2007-06-13 キヤノン株式会社 画像処理装置、自動焦点検出装置、補正装置、補正方法及び記憶媒体
JP4372314B2 (ja) * 2000-06-21 2009-11-25 大塚電子株式会社 スペクトル測定装置
JP2002195884A (ja) * 2000-12-22 2002-07-10 Ando Electric Co Ltd 光検出装置、暗出力補正方法および光スペクトラムアナライザ
JP2002318190A (ja) * 2001-04-20 2002-10-31 Hitachi Ltd 医用光度計
US6594010B2 (en) * 2001-07-06 2003-07-15 Praxair Technology, Inc. Emission spectrometer having a charge coupled device detector
WO2005073682A1 (en) * 2004-01-30 2005-08-11 Lastek Laboratories Pty Ltd A method for producing high signal to noise spectral measurements in optical detector arrays
CN201051012Y (zh) * 2007-06-15 2008-04-23 杭州远方光电信息有限公司 低杂散光快速光谱仪
CN102007389B (zh) * 2008-04-15 2013-05-15 株式会社拓普康 测光装置
US9098562B2 (en) * 2009-03-30 2015-08-04 The Boeing Company Computer architectures using shared storage

Also Published As

Publication number Publication date
KR20100042227A (ko) 2010-04-23
US20100091280A1 (en) 2010-04-15
US8169607B2 (en) 2012-05-01
TW201027049A (en) 2010-07-16
TWI468654B (zh) 2015-01-11
CN101726361A (zh) 2010-06-09
JP2010117343A (ja) 2010-05-27
KR101603344B1 (ko) 2016-03-14
CN101726361B (zh) 2013-08-21
US20120075628A1 (en) 2012-03-29
US8169608B2 (en) 2012-05-01

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