JP5148629B2 - 情報記録媒体、及びその製造法、ならびに記録再生装置 - Google Patents
情報記録媒体、及びその製造法、ならびに記録再生装置 Download PDFInfo
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Description
前記記録層が、Te、O、MA(MAはAuおよびPdから選ばれる少なくとも1種の元素である)及びMB(MBはAg、CuおよびNiから選ばれる少なくとも1種の元素である)から成るTe−O−MA−MB材料を含み、
前記Te−O−MA−MB材料において、Te原子の含有割合が10原子%以上50原子%以下であり、O原子の含有割合が40原子%以上70原子%以下であり、MA原子の含有割合が3原子%以上15原子%以下であり、MB原子の含有割合が3原子%以上15原子%以下である情報記録媒体を提供する。この情報記録媒体によれば、経年劣化による反射率の低下がない又は抑えられた、低コストの情報記録媒体を実現できる。
図1に示す情報記録媒体1は、基板2上に、反射層3、第1の誘電体層4、記録層5、第2の誘電体層6から成る情報層が設けられた構成を有する。図示した形態においては、情報層の上に光透明層7(カバー層または保護層とも呼ばれる)が形成されている。記録特性等に影響がなければ、反射層3、第1の誘電体層4、および第2の誘電体層6のいずれか又は全部を、形成しなくてよい。層の数が少なければ、コストを低くできる。あるいは、必要に応じて、第1の誘電体層4と記録層5との間、および/または第2の誘電体層6と記録層5との間に、物質移動を防止するための界面層を形成してよい。この情報記録媒体について、記録再生は、光透明層7の側からレーザ光8を照射して行う。
Te−O−MA−MB材料において、Te原子の含有割合が低すぎると、記録層5、13、19、28、34、39、48、53、58に含まれるTeO2の量が少なくなり、後述するように、十分な耐湿性および良好なコントラストを得られない。また、Oと結合しないTeの量が少ないと、良好なコントラストを得られない。Te原子の含有割合が50原子%を超えると、信号を記録後、再生用のレーザ光により、記録マークが劣化しやすくなる。よって、Te原子の含有割合は、10原子%以上50原子%以下とする。
図2〜図4に示すような多層記録媒体においては、レーザ入射側の層(例えば図2における第2の情報層21)に本発明のTe−O−MA−MB材料を適用すると、従来のTe−O−Pd記録材料に比べて良好なコントラストが得られ、より優れた信号品質が確保される。
図5に、光ディスクの記録および再生に用いる装置の一例の概略を示す。信号の記録および再生には、レーザ光を集光させる対物レンズ66およびレーザ67と搭載した光学ヘッド(図示省略)と、レーザ光を照射する位置を所定の位置へ導くための駆動装置(図示省略)、トラック方向及び膜面に垂直な方向の位置を制御するためのトラッキング制御装置及びフォーカシング制御装置(図示省略)と、レーザパワーを変調するためのレーザ駆動装置(図示省略)、媒体を回転させるためのスピンドルモータ69とを備えた記録再生装置を用いる。
(実施例1)
実施例1では、記録材料として、Te−O−Pd−Cu材料を用いた場合に、記録層の組成がC/N比、再生耐久性に及ぼす影響を調べた。記録層の組成がそれぞれ異なる複数の情報記録媒体をサンプルとして作製し、評価した。以下にその詳細を示す。
実施例2では、記録材料として、Te−O−Pd−Ag材料、Te−O−Pd−Ni材料、Te−O−Au−Ag材料、Te−O−Au−Ni材料、およびTe−O−Au−Cu材料を用いた場合に、記録材料がC/N比、記録感度、反射率変動、コストに及ぼす影響を調べた。情報記録媒体は実施例1と同様の方法で作製し、評価条件も実施例1で採用した条件と同様である。サンプルを評価した結果を表3に示す。
実施例3では、2つの情報層から成る情報記録媒体に、Te−O−MA−MB材料(ここでは代表例としてTe−O−Pd−Cuを使用)及びTe−O−Pdを適用し、実施例1と同様に、記録層の組成が、C/N比、記録感度、および反射率変動を評価した。
また、サンプル23とサンプル24のCN比を比較すると、第1の情報層において、組成の違いによるCN比の差は見られなかったものの、第2の情報層において、組成の違いによるCN比の差が生じた。具体的には、第2の情報層が、Te:O:Pd:Cu=32:58:5:5[原子%]の組成比を有するTe−O−Pd−Cu材料で構成したサンプル24において、より良好なCN比が得られた。
実施例4では、3つの情報層から成る情報記録媒体に、Te−O−MA−MB材料(ここでは代表例としてTe−O−Pd−Cuを使用)を適用し、実施例1と同様に、C/N比、記録感度、および反射率変動を評価した。
実施例5では、4つの情報層から成る情報記録媒体に、Te−O−MA−MB材料(ここでは代表例としてTe−O−Pd−Cuを使用)を適用し、実施例1と同様に、C/N比、記録感度、および反射率変動を評価した。
実施例6では、6つの情報層から成る情報記録媒体に、Te−O−MA−MB材料(ここでは代表例としてTe−O−Pd−Cuを使用)を適用し、実施例1と同様に、記録層の組成が、C/N比、記録感度、および反射率変動を評価した。
実施例7では、記録材料としてTe−O−Pd−Cu材料を用いた場合に、記録層の厚さがC/N比に及ぼす影響を調べた。情報記録媒体は実施例1で用いた方法と同様の方法で作製し、評価条件も実施例1で採用した条件と同様である。記録層の厚さが互いに異なるサンプル28−34を評価した結果を表8に示す。
2、10、25、45 基板
4、12、18、27、33、38、47、52、57 第1の誘電体層
5、13、19、28、34、39、48、53、58 記録層
7、22、42、61 光透明層
8、23、43、45、62、65 レーザ光
3、11、17、26、32、46 反射層
6、14、20、29、35、40、49、54、59 第2の誘電体層
15、30、50 第1の情報層
16、31、37、51、56 中間層
21、36、55、 第2の情報層
41 第3の情報層
60 第nの情報層
63 記録再生装置
66 対物レンズ
67 レーザ
68 光検出器
69 スピンドルモータ
Claims (9)
- 基板と、記録層を有する情報層とを備え、レーザ光の照射により情報の記録及び再生を行う情報記録媒体であって、
前記記録層が、Te、O、MA(MAはAuおよびPdから選ばれる少なくとも1種の元素である)及びMB(MBはAg、CuおよびNiから選ばれる少なくとも1種の元素である)から成るTe−O−MA−MB材料を含み、
前記Te−O−MA−MB材料において、Te原子の含有割合が10原子%以上50原子%以下であり、O原子の含有割合が40原子%以上70原子%以下であり、MA原子の含有割合が3原子%以上15原子%以下であり、MB原子の含有割合が3原子%以上15原子%以下であり、
前記Te−O−M A −M B 材料におけるM A 原子の含有割合X A とM B 原子の含有割合X B の和に対するM B 原子の含有割合の比{X B /(X A +X B )}が、0.25以上0.75以下である、
情報記録媒体。 - MA原子がPd原子である、請求項1に記載の情報記録媒体。
- Pd原子の含有割合が、3原子%以上5原子%以下である、請求項2に記載の情報記録媒体。
- MB原子がCu原子である、請求項1〜3のいずれかに記載の情報記録媒体。
- 前記記録層の厚さが2nm以上50nm以下である、請求項1〜4のいずれかに記載の情報記録媒体。
- 前記情報層を2以上含み、前記2以上の情報層のうち少なくとも1つの情報層が、前記Te−O−MA−MB材料を含む記録層を有する、請求項1に記載の情報記録媒体。
- 波長が350nm以上500nm以下であるレーザ光を用いて情報を記録および再生する、請求項1〜6のいずれかに記載の情報記録媒体。
- 請求項1に記載の情報記録媒体の製造方法であって、記録層を形成する工程が、Te、O、MA(MAはAuおよびPdから選ばれる少なくとも1種の元素である)及びMB(MBはAg、CuおよびNiから選ばれる少なくとも1種の元素である)から成る材料を含むスパッタリングターゲットを使用して、希ガスを含む雰囲気中で、スパッタリングすることを含む、情報記録媒体の製造方法。
- 請求項1に記載の情報記録媒体の製造方法であって、記録層を形成する工程が、Te、MA(MAはAuおよびPdから選ばれる少なくとも1種の元素である)及びMB(MBはAg、CuおよびNiから選ばれる少なくとも1種の元素である)から成る材料を含むスパッタリングターゲットを使用して、希ガスと酸素との混合ガスを含む雰囲気中で、反応性スパッタリングすることを含む、情報記録媒体の製造方法。
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