JP5148593B2 - 液滴射出装置 - Google Patents
液滴射出装置 Download PDFInfo
- Publication number
- JP5148593B2 JP5148593B2 JP2009503646A JP2009503646A JP5148593B2 JP 5148593 B2 JP5148593 B2 JP 5148593B2 JP 2009503646 A JP2009503646 A JP 2009503646A JP 2009503646 A JP2009503646 A JP 2009503646A JP 5148593 B2 JP5148593 B2 JP 5148593B2
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- 239000012530 fluid Substances 0.000 claims abstract description 39
- 239000000463 material Substances 0.000 claims abstract description 24
- 238000004891 communication Methods 0.000 claims abstract description 8
- 229920000642 polymer Polymers 0.000 claims description 8
- 239000004642 Polyimide Substances 0.000 claims description 6
- 229920001721 polyimide Polymers 0.000 claims description 6
- 229920001486 SU-8 photoresist Polymers 0.000 claims description 4
- 229910045601 alloy Inorganic materials 0.000 claims description 4
- 239000000956 alloy Substances 0.000 claims description 4
- 229910052751 metal Inorganic materials 0.000 claims description 3
- 239000002184 metal Substances 0.000 claims description 3
- 239000002131 composite material Substances 0.000 claims description 2
- 230000005684 electric field Effects 0.000 claims description 2
- 229920002120 photoresistant polymer Polymers 0.000 claims 2
- 230000008021 deposition Effects 0.000 abstract description 8
- 238000000926 separation method Methods 0.000 abstract description 2
- 238000007789 sealing Methods 0.000 abstract 1
- 239000000758 substrate Substances 0.000 description 19
- 238000002347 injection Methods 0.000 description 9
- 239000007924 injection Substances 0.000 description 9
- 230000008859 change Effects 0.000 description 7
- 238000000151 deposition Methods 0.000 description 7
- 238000004519 manufacturing process Methods 0.000 description 6
- 238000000034 method Methods 0.000 description 6
- 230000004044 response Effects 0.000 description 6
- 230000008901 benefit Effects 0.000 description 5
- PXHVJJICTQNCMI-UHFFFAOYSA-N nickel Substances [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 3
- 239000004696 Poly ether ether ketone Substances 0.000 description 2
- 230000009471 action Effects 0.000 description 2
- 239000000853 adhesive Substances 0.000 description 2
- 230000001070 adhesive effect Effects 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 2
- 239000000919 ceramic Substances 0.000 description 2
- 239000011248 coating agent Substances 0.000 description 2
- 238000000576 coating method Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000010304 firing Methods 0.000 description 2
- 238000003698 laser cutting Methods 0.000 description 2
- 229920002530 polyetherether ketone Polymers 0.000 description 2
- 238000007639 printing Methods 0.000 description 2
- 230000009467 reduction Effects 0.000 description 2
- 239000000243 solution Substances 0.000 description 2
- 229910000640 Fe alloy Inorganic materials 0.000 description 1
- 229910000990 Ni alloy Inorganic materials 0.000 description 1
- 230000001133 acceleration Effects 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 238000002144 chemical decomposition reaction Methods 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 238000005520 cutting process Methods 0.000 description 1
- 238000013016 damping Methods 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000006073 displacement reaction Methods 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 238000007641 inkjet printing Methods 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 239000002905 metal composite material Substances 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- 238000011017 operating method Methods 0.000 description 1
- 238000000206 photolithography Methods 0.000 description 1
- 239000004033 plastic Substances 0.000 description 1
- 238000004528 spin coating Methods 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
Images
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/14—Structure thereof only for on-demand ink jet heads
- B41J2/14201—Structure of print heads with piezoelectric elements
- B41J2/14209—Structure of print heads with piezoelectric elements of finger type, chamber walls consisting integrally of piezoelectric material
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/14—Structure thereof only for on-demand ink jet heads
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/14—Structure thereof only for on-demand ink jet heads
- B41J2002/14362—Assembling elements of heads
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/14—Structure thereof only for on-demand ink jet heads
- B41J2002/14419—Manifold
Landscapes
- Particle Formation And Scattering Control In Inkjet Printers (AREA)
- Coating Apparatus (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
- Confectionery (AREA)
Description
該可撓性の基材上に電導性トラックを形成して該チェンバー壁上に形成された電極への電導性接続をもたらす。
12 回路ボード
14 接続トラック
16 カバー
18 ノズル板
20 コーティング
22 アクチュエーター壁
23 配置
24 ノズル板
26 カバー部材
27 マニホールド
28 ピエゾ電気部材
29 チャンネル(開口)
30 ノズル
32 マニホールド
34 マニホールド
36 基材
502 基体
504 ピエゾ電気チャンネルの列
506 開口
508 マニホールド域
510 カバー部材
512 ノズル
610 カバー部材
614 壁要素
710 PZTの本体
720 チャンネル
722 カバー部材(可撓性部材)
724 ノズル板
726 開口
728 マニホールド域
730 駆動エレクトロニックス
Claims (9)
- ピエゾ電気材料から形成され細長く延出し電場の適用を受けて変形する相対して配置された一対のチェンバー壁によって画成され、チェンバー壁間隔で互いに分離されて、細長く延出する複数の流体チェンバーからなる列と、
前記複数のチェンバーの夫々に流体連絡し外部へと液滴が射出されるノズルが形成され、該複数のチェンバー壁の延出方向に並行な面に接合されて該チェンバーの1つの側面をシールするカバー部材と、を備え、
該カバー部材の厚さは、該チェンバー壁間隔よりも薄く、
該チェンバー壁がすべりモードで変形し、
該カバー部材の厚さは、該チェンバー壁間隔の5分の1以下である、ことを特徴とする液滴射出装置。 - 該カバー部材は、100×109N/m2以下のヤング率を有し、その厚さが5−150μmの範囲内である請求項1の装置。
- 該カバー部材が、該チェンバーから離れるように延出して流体マニホールド域と境を接している請求項1または2の装置。
- 該カバー部材がポリマーから形成されている請求項1−3のいずれか1項の装置。
- 該カバー部材がポリイミドから形成されている請求項4の装置。
- 該カバー部材が合金から形成されている請求項1−3のいずれか1項の装置。
- 該カバー部材がポリマーと金属又は合金との複合材料から形成されている請求項1−3のいずれか1項の装置。
- 該カバー部材がフォトレジスト材料からなる請求項1−4のいずれか1項の装置。
- 該フォトレジスト材料がSU−8である請求項8の装置。
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
GBGB0606685.6A GB0606685D0 (en) | 2006-04-03 | 2006-04-03 | Droplet Deposition Apparatus |
GB0606685.6 | 2006-04-03 | ||
PCT/GB2007/001228 WO2007113554A2 (en) | 2006-04-03 | 2007-04-03 | Droplet deposition apparatus |
Related Child Applications (2)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2012220823A Division JP5709811B2 (ja) | 2006-04-03 | 2012-10-02 | 液滴射出装置 |
JP2012220824A Division JP5709812B2 (ja) | 2006-04-03 | 2012-10-02 | 液滴射出装置 |
Publications (3)
Publication Number | Publication Date |
---|---|
JP2009532237A JP2009532237A (ja) | 2009-09-10 |
JP2009532237A5 JP2009532237A5 (ja) | 2012-01-26 |
JP5148593B2 true JP5148593B2 (ja) | 2013-02-20 |
Family
ID=36425157
Family Applications (5)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2009503646A Active JP5148593B2 (ja) | 2006-04-03 | 2007-04-03 | 液滴射出装置 |
JP2012220823A Active JP5709811B2 (ja) | 2006-04-03 | 2012-10-02 | 液滴射出装置 |
JP2012220824A Active JP5709812B2 (ja) | 2006-04-03 | 2012-10-02 | 液滴射出装置 |
JP2014246684A Active JP5980300B2 (ja) | 2006-04-03 | 2014-12-05 | 液滴射出装置 |
JP2014246687A Pending JP2015166176A (ja) | 2006-04-03 | 2014-12-05 | 液滴射出装置 |
Family Applications After (4)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2012220823A Active JP5709811B2 (ja) | 2006-04-03 | 2012-10-02 | 液滴射出装置 |
JP2012220824A Active JP5709812B2 (ja) | 2006-04-03 | 2012-10-02 | 液滴射出装置 |
JP2014246684A Active JP5980300B2 (ja) | 2006-04-03 | 2014-12-05 | 液滴射出装置 |
JP2014246687A Pending JP2015166176A (ja) | 2006-04-03 | 2014-12-05 | 液滴射出装置 |
Country Status (16)
Country | Link |
---|---|
US (2) | US8123337B2 (ja) |
EP (2) | EP2007584B2 (ja) |
JP (5) | JP5148593B2 (ja) |
KR (2) | KR101363461B1 (ja) |
CN (2) | CN101415561B (ja) |
AT (1) | ATE528138T1 (ja) |
AU (1) | AU2007232337A1 (ja) |
BR (1) | BRPI0709906A2 (ja) |
CA (1) | CA2648226A1 (ja) |
ES (2) | ES2374658T5 (ja) |
GB (1) | GB0606685D0 (ja) |
IL (1) | IL194361A (ja) |
PL (2) | PL2007584T3 (ja) |
RU (1) | RU2008143349A (ja) |
TW (1) | TWI376315B (ja) |
WO (1) | WO2007113554A2 (ja) |
Families Citing this family (19)
Publication number | Priority date | Publication date | Assignee | Title |
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GB0606685D0 (en) | 2006-04-03 | 2006-05-10 | Xaar Technology Ltd | Droplet Deposition Apparatus |
JP5032613B2 (ja) * | 2010-03-02 | 2012-09-26 | 東芝テック株式会社 | インクジェットヘッド、インクジェット記録装置 |
JP5473140B2 (ja) | 2010-08-11 | 2014-04-16 | 東芝テック株式会社 | インクジェットヘッドおよびその製造方法 |
JP5427730B2 (ja) * | 2010-08-19 | 2014-02-26 | 東芝テック株式会社 | インクジェットプリントヘッド及びインクジェットプリントヘッド製造方法 |
JP5915186B2 (ja) * | 2012-01-10 | 2016-05-11 | 株式会社リコー | 液滴吐出ヘッド及び画像形成装置 |
JP2014087949A (ja) | 2012-10-29 | 2014-05-15 | Sii Printek Inc | 液体噴射ヘッド、液体噴射装置及び液体噴射ヘッドの製造方法 |
JP2014091310A (ja) * | 2012-11-06 | 2014-05-19 | Sii Printek Inc | 液体噴射ヘッド及び液体噴射装置 |
JP6243720B2 (ja) | 2013-02-06 | 2017-12-06 | エスアイアイ・セミコンダクタ株式会社 | Esd保護回路を備えた半導体装置 |
JP6172441B2 (ja) * | 2013-03-28 | 2017-08-02 | セイコーエプソン株式会社 | 液体噴射ヘッド及び液体噴射装置 |
GB2520574B (en) | 2013-11-26 | 2015-10-07 | Xaar Technology Ltd | Droplet deposition apparatus and method for manufacturing the same |
JP6251108B2 (ja) * | 2014-04-02 | 2017-12-20 | 株式会社東芝 | インクジェットプリンタヘッド |
KR102285832B1 (ko) | 2014-07-25 | 2021-08-05 | 삼성전자주식회사 | 기판 처리 장치 및 기판 처리 방법 |
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GB2563235B (en) | 2017-06-06 | 2021-05-26 | Xaar Technology Ltd | Method and apparatus for droplet deposition |
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JP4461758B2 (ja) * | 2003-09-30 | 2010-05-12 | コニカミノルタホールディングス株式会社 | インクジェットヘッドの製造方法 |
JP2005249436A (ja) | 2004-03-02 | 2005-09-15 | Enplas Corp | 液滴吐出装置及び液滴吐出装置の製造方法 |
JP2006234215A (ja) | 2005-02-23 | 2006-09-07 | Matsushita Electric Ind Co Ltd | 給水装置を備えた冷蔵庫 |
GB0606685D0 (en) * | 2006-04-03 | 2006-05-10 | Xaar Technology Ltd | Droplet Deposition Apparatus |
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