JP5107539B2 - 半導体装置および半導体装置の製造方法 - Google Patents
半導体装置および半導体装置の製造方法 Download PDFInfo
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- B81B2207/00—Microstructural systems or auxiliary parts thereof
- B81B2207/01—Microstructural systems or auxiliary parts thereof comprising a micromechanical device connected to control or processing electronics, i.e. Smart-MEMS
- B81B2207/012—Microstructural systems or auxiliary parts thereof comprising a micromechanical device connected to control or processing electronics, i.e. Smart-MEMS the micromechanical device and the control or processing electronics being separate parts in the same package
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- H01L2224/16151—Disposition the bump connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
- H01L2224/16221—Disposition the bump connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
- H01L2224/16225—Disposition the bump connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation
- H01L2224/16235—Disposition the bump connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation the bump connector connecting to a via metallisation of the item
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- H01L23/488—Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor consisting of soldered or bonded constructions
- H01L23/498—Leads, i.e. metallisations or lead-frames on insulating substrates, e.g. chip carriers
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- H01L2924/16195—Flat cap [not enclosing an internal cavity]
Description
前記第1の半導体基板を貫通しないように形成された穴部と、前記第2の半導体基板を貫通する穴部とが連通してなり、段差形状を有する凹部と、前記凹部に実装される半導体素子と、前記第1の半導体基板を貫通しないように形成された穴部より外側であって、前記第2の半導体基板を貫通する穴部の内側の部分に形成されたビアプラグと、を有することを特徴とする半導体装置により、解決する。
前記シリコン酸化膜が露出するように、前記第2の半導体基板を貫通する穴部を形成する第2の工程と、
前記第2の半導体基板を貫通する穴部から露出するシリコン酸化膜を除去する第3の工程と、
前記第2の半導体基板上に、前記第2の半導体基板を貫通する穴部の開口面積よりも開口面積の大きいレジストパターンを形成し、エッチングを行うことにより、前記第2の半導体基板を貫通する穴部と、前記第1の半導体基板を貫通しないよう形成した穴部とからなる段差形状の凹部を形成する第4の工程と、
前記第4の工程で形成された、前記第1の半導体基板を貫通しないように形成した穴部より外側であって、前記第2の半導体基板を貫通する穴部の内側の部分にビアホールを形成する第5の工程と、
前記ビアホールにビアプラグを形成する第6の工程と、
前記凹部に半導体素子を実装する第7の工程と、を有することを特徴とする半導体装置の製造方法により、解決する。
101,103,201,203 半導体基板
101A,103A,201A,203A,201B 穴部
103B,208 凹部
102,202 接合層
104,204 合わせ基板
105,106,205,206,207 レジストパターン
105A,106A,205A,206A,207A 開口部
107,209 絶縁膜
108,210 ビアプラグ
109,211,213 半導体素子
110,212,214 バンプ
111,215 蓋部
Claims (7)
- シリコン基板よりなる第1の半導体基板及び第2の半導体基板が、シリコン酸化膜を介して貼り合わされて形成される合わせ基板と、
前記第1の半導体基板を貫通しないように形成された穴部と、前記第2の半導体基板を貫通する穴部とが連通してなり、段差形状を有する凹部と、
前記凹部に実装される半導体素子と、
前記第1の半導体基板を貫通しないように形成された穴部より外側であって、前記第2の半導体基板を貫通する穴部の内側の部分に形成されたビアプラグと、を有することを特徴とする半導体装置。 - 前記凹部上に、前記半導体素子を封止するための蓋部が設けられており、
前記蓋部が接合される接合面を除いて、前記合わせ基板の表面には絶縁膜が形成されていることを特徴とする請求項1に記載の半導体装置。 - 前記第1の半導体基板と、前記第2の半導体基板の結晶方位が異なるように、当該第1の半導体基板と第2の半導体基板とが貼り合わせられて前記合わせ基板が構成されていることを特徴とする請求項1または2に記載の半導体装置。
- シリコン基板よりなる第1の半導体基板と第2の半導体基板とを、シリコン酸化膜を介して貼り合わせて合わせ基板を形成する第1の工程と、
前記シリコン酸化膜が露出するように、前記第2の半導体基板を貫通する穴部を形成する第2の工程と、
前記第2の半導体基板を貫通する穴部から露出するシリコン酸化膜を除去する第3の工程と、
前記第2の半導体基板上に、前記第2の半導体基板を貫通する穴部の開口面積よりも開口面積の大きいレジストパターンを形成し、エッチングを行うことにより、前記第2の半導体基板を貫通する穴部と、前記第1の半導体基板を貫通しないよう形成した穴部とからなる段差形状の凹部を形成する第4の工程と、
前記第4の工程で形成された、前記第1の半導体基板を貫通しないように形成した穴部より外側であって、前記第2の半導体基板を貫通する穴部の内側の部分にビアホールを形成する第5の工程と、
前記ビアホールにビアプラグを形成する第6の工程と、
前記凹部に半導体素子を実装する第7の工程と、を有することを特徴とする半導体装置の製造方法。 - 前記半導体装置は前記凹部上に、前記半導体素子を封止するための蓋部が設けられており、
前記第4の工程と前記第5の工程の間に、前記蓋部が接合される接合面を除いて、前記合わせ基板の表面に絶縁膜を形成する工程を有することを特徴とする請求項4に記載の半導体装置の製造方法。 - 前記第7の工程の後に、前記凹部上に前記半導体素子を封止するための蓋部を陽極接合する工程を有することを特徴とする請求項4または5に記載の半導体装置の製造方法。
- 前記第1の工程では、前記第1の半導体基板と、前記第2の半導体基板の結晶方位が異なるように、当該第1の半導体基板と、前記第2の半導体基板とが貼り合わせられることを特徴とする請求項4乃至6のいずれか1項記載の半導体装置の製造方法。
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JP2006212491A JP5107539B2 (ja) | 2006-08-03 | 2006-08-03 | 半導体装置および半導体装置の製造方法 |
US11/882,568 US7705451B2 (en) | 2006-08-03 | 2007-08-02 | Semiconductor device and method of manufacturing the same |
TW096128588A TWI424546B (zh) | 2006-08-03 | 2007-08-03 | 半導體裝置及其製造方法 |
EP07015307.7A EP1884994B1 (en) | 2006-08-03 | 2007-08-03 | Semiconductor device and method of manufacturing the same |
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JP2006212491A JP5107539B2 (ja) | 2006-08-03 | 2006-08-03 | 半導体装置および半導体装置の製造方法 |
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JP5107539B2 true JP5107539B2 (ja) | 2012-12-26 |
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EP (1) | EP1884994B1 (ja) |
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TW (1) | TWI424546B (ja) |
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JP2006100406A (ja) * | 2004-09-28 | 2006-04-13 | Toshiba Ceramics Co Ltd | Soiウェーハの製造方法 |
US7098070B2 (en) * | 2004-11-16 | 2006-08-29 | International Business Machines Corporation | Device and method for fabricating double-sided SOI wafer scale package with through via connections |
JP4979213B2 (ja) * | 2005-08-31 | 2012-07-18 | オンセミコンダクター・トレーディング・リミテッド | 回路基板、回路基板の製造方法および回路装置 |
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JP2008041837A (ja) | 2008-02-21 |
US20080029852A1 (en) | 2008-02-07 |
US7705451B2 (en) | 2010-04-27 |
EP1884994A2 (en) | 2008-02-06 |
TW200810067A (en) | 2008-02-16 |
EP1884994B1 (en) | 2018-10-10 |
TWI424546B (zh) | 2014-01-21 |
EP1884994A3 (en) | 2010-08-04 |
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