JP5102426B2 - 両面粘着シート及び研磨布積層体 - Google Patents

両面粘着シート及び研磨布積層体 Download PDF

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Publication number
JP5102426B2
JP5102426B2 JP2003286784A JP2003286784A JP5102426B2 JP 5102426 B2 JP5102426 B2 JP 5102426B2 JP 2003286784 A JP2003286784 A JP 2003286784A JP 2003286784 A JP2003286784 A JP 2003286784A JP 5102426 B2 JP5102426 B2 JP 5102426B2
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JP
Japan
Prior art keywords
sheet
sensitive adhesive
pressure
double
adhesive layer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
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JP2003286784A
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English (en)
Japanese (ja)
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JP2005054072A (ja
JP2005054072A5 (enExample
Inventor
龍也 中尾
秀幸 高橋
敏則 町田
吉明 堅尾
安二 横道
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nitta DuPont Inc
Artience Co Ltd
Original Assignee
Nitta Haas Inc
Toyo Ink SC Holdings Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nitta Haas Inc, Toyo Ink SC Holdings Co Ltd filed Critical Nitta Haas Inc
Priority to JP2003286784A priority Critical patent/JP5102426B2/ja
Publication of JP2005054072A publication Critical patent/JP2005054072A/ja
Publication of JP2005054072A5 publication Critical patent/JP2005054072A5/ja
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Publication of JP5102426B2 publication Critical patent/JP5102426B2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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  • Mechanical Treatment Of Semiconductor (AREA)
  • Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
  • Adhesive Tapes (AREA)
  • Adhesives Or Adhesive Processes (AREA)
JP2003286784A 2003-08-05 2003-08-05 両面粘着シート及び研磨布積層体 Expired - Lifetime JP5102426B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2003286784A JP5102426B2 (ja) 2003-08-05 2003-08-05 両面粘着シート及び研磨布積層体

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2003286784A JP5102426B2 (ja) 2003-08-05 2003-08-05 両面粘着シート及び研磨布積層体

Publications (3)

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JP2005054072A JP2005054072A (ja) 2005-03-03
JP2005054072A5 JP2005054072A5 (enExample) 2006-08-17
JP5102426B2 true JP5102426B2 (ja) 2012-12-19

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JP2003286784A Expired - Lifetime JP5102426B2 (ja) 2003-08-05 2003-08-05 両面粘着シート及び研磨布積層体

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JP (1) JP5102426B2 (enExample)

Families Citing this family (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4937538B2 (ja) * 2005-07-13 2012-05-23 ニッタ・ハース株式会社 研磨布固定用の両面粘着テープおよびこれを備えた研磨布
JP4859093B2 (ja) * 2005-08-05 2012-01-18 東洋ゴム工業株式会社 積層研磨パッド及びその製造方法
JP4902376B2 (ja) 2007-02-01 2012-03-21 キヤノン株式会社 画像形成装置
JP4930837B2 (ja) * 2007-03-09 2012-05-16 東洋ゴム工業株式会社 研磨パッド
JP5288715B2 (ja) * 2007-03-14 2013-09-11 東洋ゴム工業株式会社 研磨パッド
JP5021669B2 (ja) * 2007-03-20 2012-09-12 株式会社クラレ 研磨パッド用クッションおよびそれを用いた研磨パッド
JP5339940B2 (ja) * 2008-11-21 2013-11-13 積水化学工業株式会社 研磨布固定用両面粘着テープ
JP5230500B2 (ja) * 2009-03-26 2013-07-10 大王製紙株式会社 工程剥離紙
JP5328467B2 (ja) * 2009-04-24 2013-10-30 積水化学工業株式会社 研磨布固定用両面粘着テープ
JP2011218517A (ja) * 2010-04-13 2011-11-04 Toray Coatex Co Ltd 研磨パッド
JP5583098B2 (ja) * 2011-09-28 2014-09-03 古河電気工業株式会社 脆性ウェハ加工用粘着テープ及びそれを用いた脆性ウェハの加工方法
JP5583099B2 (ja) * 2011-09-28 2014-09-03 古河電気工業株式会社 脆性ウェハ加工用粘着テープ
WO2016063802A1 (ja) * 2014-10-20 2016-04-28 積水化成品工業株式会社 接着用途を有する粘着性ゲルシート、その製造方法、一対の被着体の固定方法及び複合材
JP6169067B2 (ja) * 2014-12-24 2017-07-26 古河電気工業株式会社 電子部品加工用粘着テープ
CN111148812A (zh) * 2017-10-03 2020-05-12 株式会社Moresco 粘合剂组合物

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001131500A (ja) * 1999-11-02 2001-05-15 Sekisui Chem Co Ltd 研磨布固定用両面粘着テープ
JP2002047462A (ja) * 2000-07-31 2002-02-12 Nitto Denko Corp 両面接着テープ、及びこれを用いた研磨材の固定方法
JP2002192455A (ja) * 2000-12-25 2002-07-10 Toyobo Co Ltd 研磨パッド
JP2003292912A (ja) * 2002-03-29 2003-10-15 Sekisui Chem Co Ltd 両面粘着テープ及び両面粘着テープ付き研磨パッド
JP2004189846A (ja) * 2002-12-10 2004-07-08 Sekisui Chem Co Ltd 研磨材固定用両面粘着テープ

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JP2005054072A (ja) 2005-03-03

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