JP5089020B2 - 基板上に作製された半導体電子デバイス - Google Patents
基板上に作製された半導体電子デバイス Download PDFInfo
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- JP5089020B2 JP5089020B2 JP2005011248A JP2005011248A JP5089020B2 JP 5089020 B2 JP5089020 B2 JP 5089020B2 JP 2005011248 A JP2005011248 A JP 2005011248A JP 2005011248 A JP2005011248 A JP 2005011248A JP 5089020 B2 JP5089020 B2 JP 5089020B2
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- 239000000758 substrate Substances 0.000 title claims description 94
- 239000004065 semiconductor Substances 0.000 title claims description 83
- 229910000476 molybdenum oxide Inorganic materials 0.000 claims description 126
- PQQKPALAQIIWST-UHFFFAOYSA-N oxomolybdenum Chemical compound [Mo]=O PQQKPALAQIIWST-UHFFFAOYSA-N 0.000 claims description 126
- 229910052751 metal Inorganic materials 0.000 claims description 30
- 239000002184 metal Substances 0.000 claims description 30
- 239000013078 crystal Substances 0.000 claims description 26
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 20
- 229910052710 silicon Inorganic materials 0.000 claims description 20
- 239000010703 silicon Substances 0.000 claims description 20
- 230000005669 field effect Effects 0.000 claims description 18
- 238000000034 method Methods 0.000 claims description 18
- 150000001875 compounds Chemical class 0.000 claims description 10
- 239000011521 glass Substances 0.000 claims description 5
- 229910021480 group 4 element Inorganic materials 0.000 claims description 4
- 238000007740 vapor deposition Methods 0.000 claims description 2
- 239000000463 material Substances 0.000 description 19
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 description 17
- JMASRVWKEDWRBT-UHFFFAOYSA-N Gallium nitride Chemical compound [Ga]#N JMASRVWKEDWRBT-UHFFFAOYSA-N 0.000 description 15
- 229910010271 silicon carbide Inorganic materials 0.000 description 13
- 229910002601 GaN Inorganic materials 0.000 description 12
- 238000004519 manufacturing process Methods 0.000 description 12
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 description 10
- 238000000151 deposition Methods 0.000 description 10
- 230000008021 deposition Effects 0.000 description 10
- 229910052750 molybdenum Inorganic materials 0.000 description 10
- 239000011733 molybdenum Substances 0.000 description 10
- XLOMVQKBTHCTTD-UHFFFAOYSA-N Zinc monoxide Chemical compound [Zn]=O XLOMVQKBTHCTTD-UHFFFAOYSA-N 0.000 description 9
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 8
- 238000004088 simulation Methods 0.000 description 8
- 238000001947 vapour-phase growth Methods 0.000 description 8
- 230000007613 environmental effect Effects 0.000 description 7
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 7
- 229910052737 gold Inorganic materials 0.000 description 7
- 239000010931 gold Substances 0.000 description 7
- 238000010586 diagram Methods 0.000 description 6
- 230000008569 process Effects 0.000 description 6
- 229910052594 sapphire Inorganic materials 0.000 description 6
- 239000010980 sapphire Substances 0.000 description 6
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 5
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 5
- 239000001301 oxygen Substances 0.000 description 5
- 229910052760 oxygen Inorganic materials 0.000 description 5
- 229910052719 titanium Inorganic materials 0.000 description 5
- 239000010936 titanium Substances 0.000 description 5
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 4
- 230000015556 catabolic process Effects 0.000 description 4
- 238000005259 measurement Methods 0.000 description 4
- 230000001590 oxidative effect Effects 0.000 description 4
- 230000000704 physical effect Effects 0.000 description 4
- 239000011787 zinc oxide Substances 0.000 description 4
- 239000000969 carrier Substances 0.000 description 3
- 230000007423 decrease Effects 0.000 description 3
- 239000002019 doping agent Substances 0.000 description 3
- 229910052757 nitrogen Inorganic materials 0.000 description 3
- 230000002093 peripheral effect Effects 0.000 description 3
- 239000010409 thin film Substances 0.000 description 3
- 238000001771 vacuum deposition Methods 0.000 description 3
- 229910052782 aluminium Inorganic materials 0.000 description 2
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 2
- 239000003054 catalyst Substances 0.000 description 2
- 238000011161 development Methods 0.000 description 2
- 229910001873 dinitrogen Inorganic materials 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 230000006870 function Effects 0.000 description 2
- 230000006872 improvement Effects 0.000 description 2
- 239000012212 insulator Substances 0.000 description 2
- 150000002739 metals Chemical class 0.000 description 2
- 239000000203 mixture Substances 0.000 description 2
- 229910052759 nickel Inorganic materials 0.000 description 2
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 2
- 230000003252 repetitive effect Effects 0.000 description 2
- 238000011160 research Methods 0.000 description 2
- PFNQVRZLDWYSCW-UHFFFAOYSA-N (fluoren-9-ylideneamino) n-naphthalen-1-ylcarbamate Chemical compound C12=CC=CC=C2C2=CC=CC=C2C1=NOC(=O)NC1=CC=CC2=CC=CC=C12 PFNQVRZLDWYSCW-UHFFFAOYSA-N 0.000 description 1
- WUPHOULIZUERAE-UHFFFAOYSA-N 3-(oxolan-2-yl)propanoic acid Chemical compound OC(=O)CCC1CCCO1 WUPHOULIZUERAE-UHFFFAOYSA-N 0.000 description 1
- PIGFYZPCRLYGLF-UHFFFAOYSA-N Aluminum nitride Chemical compound [Al]#N PIGFYZPCRLYGLF-UHFFFAOYSA-N 0.000 description 1
- JBRZTFJDHDCESZ-UHFFFAOYSA-N AsGa Chemical compound [As]#[Ga] JBRZTFJDHDCESZ-UHFFFAOYSA-N 0.000 description 1
- MYMOFIZGZYHOMD-UHFFFAOYSA-N Dioxygen Chemical compound O=O MYMOFIZGZYHOMD-UHFFFAOYSA-N 0.000 description 1
- 229910005540 GaP Inorganic materials 0.000 description 1
- 229910001218 Gallium arsenide Inorganic materials 0.000 description 1
- GPXJNWSHGFTCBW-UHFFFAOYSA-N Indium phosphide Chemical compound [In]#P GPXJNWSHGFTCBW-UHFFFAOYSA-N 0.000 description 1
- HCHKCACWOHOZIP-UHFFFAOYSA-N Zinc Chemical compound [Zn] HCHKCACWOHOZIP-UHFFFAOYSA-N 0.000 description 1
- 238000004458 analytical method Methods 0.000 description 1
- 229910052980 cadmium sulfide Inorganic materials 0.000 description 1
- JJWKPURADFRFRB-UHFFFAOYSA-N carbonyl sulfide Chemical compound O=C=S JJWKPURADFRFRB-UHFFFAOYSA-N 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- PMHQVHHXPFUNSP-UHFFFAOYSA-M copper(1+);methylsulfanylmethane;bromide Chemical compound Br[Cu].CSC PMHQVHHXPFUNSP-UHFFFAOYSA-M 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 239000010408 film Substances 0.000 description 1
- HZXMRANICFIONG-UHFFFAOYSA-N gallium phosphide Chemical compound [Ga]#P HZXMRANICFIONG-UHFFFAOYSA-N 0.000 description 1
- 239000007789 gas Substances 0.000 description 1
- 229910052732 germanium Inorganic materials 0.000 description 1
- GNPVGFCGXDBREM-UHFFFAOYSA-N germanium atom Chemical compound [Ge] GNPVGFCGXDBREM-UHFFFAOYSA-N 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 230000031700 light absorption Effects 0.000 description 1
- 230000007257 malfunction Effects 0.000 description 1
- 229910044991 metal oxide Inorganic materials 0.000 description 1
- 150000004706 metal oxides Chemical class 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 229910052697 platinum Inorganic materials 0.000 description 1
- 239000000843 powder Substances 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- -1 telluride selenide Chemical class 0.000 description 1
- 238000012360 testing method Methods 0.000 description 1
- 229910052725 zinc Inorganic materials 0.000 description 1
- 239000011701 zinc Substances 0.000 description 1
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- H01L29/02—Semiconductor bodies ; Multistep manufacturing processes therefor
- H01L29/12—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by the materials of which they are formed
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- H01L29/76—Unipolar devices, e.g. field effect transistors
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- Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
- Junction Field-Effect Transistors (AREA)
- Metal-Oxide And Bipolar Metal-Oxide Semiconductor Integrated Circuits (AREA)
Description
(i)純度99.99%のモリブデン板を、純度99.9995%の酸素中で酸化し、その物性を評価するために、550℃で120分間酸化することにより作製された酸化モリブデンの光反射特性を実測した。この試料の酸化形成された酸化モリブデン層の厚さは10.2μmである。結果として、光の吸収は338nm以下の波長で起り、3.66eVという大きな禁制帯幅の値を得た。試料の厚さが10.2μmと厚いことから、基板の影響はなく、この禁制帯幅は酸化モリブデン固有の値と考えられる。
・第1のp形酸化モリブデン層、第1のn形酸化モリブデン層、第2のp形酸化モリブデン層及び第2のn形酸化モリブデン層を、この順序で前記基板上に積層した構造。
・酸化モリブデンのバッファ層、第1のp形酸化モリブデン層、第1のn形酸化モリブデン層、第2のp形酸化モリブデン層及び第2のn形酸化モリブデン層をこの順序で前記基板上に積層した構造。
・第1のn形酸化モリブデン層、第1のp形酸化モリブデン層、第2のn形酸化モリブデン層及び第2のp形酸化モリブデン層を、この順序で前記基板上に積層した構造。
・酸化モリブデンのバッファ層、第1のn形酸化モリブデン層、第1のp形酸化モリブデン層、第2のn形酸化モリブデン層及び第2のp形酸化モリブデン層を、この順序で前記基板上に積層した構造。
(v)本発明の半導体電子デバイスが、電界効果トランジスタとして用いられる場合は、次のような構造となる。
・前記酸化モリブデンの層が、少なくとも前記電界効果トランジスタのチャンネル層として用いられる。
・デバイス特性の向上が望まれる場合は、少なくとも1つの酸化モリブデンから成るバッファ層が、前記チャネル層と前記基板との間に含まれる。
(vi)本発明の半導体電子デバイスがバイポーラトランジスタとして用いられる場合は、次のような構造となる。
・前記酸化モリブデンの層が、前記バイポーラトランジスタのエミッタ、ベースおよびコレクタの少なくとも1つの領域において用いられる。
・デバイス特性の向上が望まれる場合は、少なくとも1つの酸化モリブデンから成るバッファ層が、前記コレクタと基板との間又は前記エミッタと基板との間に含まれる。
なお、図5にはカソード電極が形成された最も上の層から、下に向かって各層の伝導形がnpnpとなる構造が示されているが、サイリスタとしては原理的にはpnpnでもさしつかえない。
また、バイポーラトランジスタは2つのpn接合を含むが、バイポーラトランジスタが形成できるということは、当然にpn接合1個を含むダイオードが形成できることは、当業者には明らかである。従って、pn接合ダイオードも本発明の技術的範囲に含まれる。
また、本発明の方法において、酸化モリブデンの層は、基板温度700℃以下、多くの場合650度以下で作製することができるが、電子デバイスの構造又はその製造プロセス上、特に制約がなければ、これ以上の温度で作製することは可能である。
101 基板
102 層
103 酸化モリブデン層
110 ショットキー電極
111 ソース電極
112 ドレイン電極
200 バイポーラトランジスタ
201 基板
202 層
203 n形酸化モリブデン層、層
204 p形酸化モリブデン層、層
205 n形酸化モリブデン層、層
210 コレクタ電極
211 ベース電極
212 エミッタ電極
300 サイリスタ
301 基板
302 層
303 p形酸化モリブデン層、層
304 n形酸化モリブデン層、層
305 p形酸化モリブデン層、層
306 n形酸化モリブデン層、層
311 カソード電極
312 ゲート電極
313 アノード電極
1001,1002,1003 直線
Claims (15)
- 半導体電子デバイスであって、前記半導体電子デバイスが、ダイオード、トランジスタ又はサイリスタであり、
IV族元素半導体、III−V族化合物半導体、IV族化合物半導体、有機半導体、金属結晶もしくはそれらの誘導体又はガラスから成る、半導体電子デバイスの動作原理上は必要としない基板上に形成された、半導体電子デバイスの動作原理上不可欠な酸化モリブデンから成る結晶層を有することを特徴とする半導体電子デバイス。 - 請求項1に記載の半導体電子デバイスにおいて、
前記酸化モリブデンの禁制帯幅が、3.45eV以上3.70eV未満である半導体電子デバイス。 - 請求項1に記載の半導体電子デバイスにおいて、
前記酸化モリブデンから成る結晶層が、気相成長法によって形成されるものである半導体電子デバイス。 - 請求項1に記載の半導体電子デバイスにおいて、
酸化モリブデンから成る結晶層がシリコン基板上に形成されている半導体電子デバイス。 - 請求項1に記載の半導体電子デバイスにおいて、
前記半導体電子デバイスがサイリスタであり、および
前記酸化モリブデンから成る結晶層が、第1のp形酸化モリブデン層、第1のn形酸化モリブデン層、第2のp形酸化モリブデン層及び第2のn形酸化モリブデン層を、この順序で前記基板上に積層した構造を有する半導体電子デバイス。 - 請求項1に記載の半導体電子デバイスにおいて、
前記半導体電子デバイスがサイリスタであり、及び
前記酸化モリブデンから成る結晶層が、酸化モリブデンのバッファ層、第1のp形酸化モリブデン層、第1のn形酸化モリブデン層、第2のp形酸化モリブデン層及び第2のn形酸化モリブデン層をこの順序で前記基板上に積層した構造を有する半導体電子デバイス。 - 請求項1に記載の半導体電子デバイスにおいて、
前記半導体電子デバイスがサイリスタであり、及び
前記酸化モリブデンから成る結晶層が、第1のn形酸化モリブデン層、第1のp形酸化モリブデン層、第2のn形酸化モリブデン層及び第2のp形酸化モリブデン層を、この順序で前記基板上に積層した構造を有する半導体電子デバイス。 - 請求項1に記載の半導体電子デバイスにおいて、
前記半導体デバイスがサイリスタであり、及び
前記酸化モリブデンから成る結晶層が、酸化モリブデンのバッファ層、第1のn形酸化モリブデン層、第1のp形酸化モリブデン層、第2のn形酸化モリブデン層及び第2のp形酸化モリブデン層を、この順序で前記基板上に積層した構造を有する半導体電子デバイス。 - 請求項5ないし8のうちのいずれかに記載の半導体電子デバイスにおいて、
前記基板が、シリコンから成るものである半導体電子デバイス。 - 請求項1に記載の半導体電子デバイスにおいて、
前記半導体電子デバイスが電界効果トランジスタであり、および
前記酸化モリブデンから成る結晶層は、少なくとも該電界効果トランジスタのチャンネル層として用いられるものである半導体電子デバイス。 - 請求項1に記載の半導体電子デバイスにおいて、
前記半導体電子デバイスが電界効果トランジスタであり、および
前記酸化モリブデン層がシリコン基板上に形成されるものである半導体電子デバイス。 - 請求項1に記載の半導体電子デバイスにおいて、
前記半導体電子デバイスが電界効果トランジスタであり、および
少なくとも1つの酸化モリブデンから成るバッファ層が、前記電界効果トランジスタのチャネル層と前記基板との間に含まれる半導体電子デバイス。 - 請求項1に記載の半導体電子デバイスにおいて、
前記半導体電子デバイスがバイポーラトランジスタであり、及び
前記酸化モリブデンから成る結晶層が、前記バイポーラトランジスタのエミッタ、ベースおよびコレクタを構成する半導体電子デバイス。 - 請求項1に記載の半導体電子デバイスにおいて、
前記半導体電子デバイスがバイポーラトランジスタであり、および
前記酸化モリブデンから成る結晶層がシリコン基板上に形成されるものである半導体電子デバイス。 - 請求項1記載の半導体電子デバイスにおいて、
前記半導体電子デバイスがバイポーラトランジスタであり、および
少なくとも1つの酸化モリブデンから成るバッファ層が、前記バイポーラトランジスタのコレクタと基板との間又は前記バイポーラトランジスタのエミッタと基板との間に含まれる半導体電子デバイス。
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JP2005011248A JP5089020B2 (ja) | 2005-01-19 | 2005-01-19 | 基板上に作製された半導体電子デバイス |
US11/330,153 US7557385B2 (en) | 2005-01-19 | 2006-01-12 | Electronic devices formed on substrates and their fabrication methods |
EP06000614A EP1684355A3 (en) | 2005-01-19 | 2006-01-12 | Semiconductor devices comprising molybdenum oxide and their fabrication methods |
DE06000614T DE06000614T1 (de) | 2005-01-19 | 2006-01-12 | Halbleiteranordnungen mit Molybdänoxid und Verfahren zur Herstellung |
TW095101470A TWI413250B (zh) | 2005-01-19 | 2006-01-13 | 半導體電子裝置 |
KR1020060004788A KR101240700B1 (ko) | 2005-01-19 | 2006-01-17 | 기판상에 형성된 전자 장치 및 그 제조 방법 |
CNA2006100049723A CN1828930A (zh) | 2005-01-19 | 2006-01-18 | 在基片上形成的电子器件及其制造方法 |
KR1020120151998A KR20130006584A (ko) | 2005-01-19 | 2012-12-24 | 기판상에 형성된 전자 장치 및 그 제조 방법 |
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EP (1) | EP1684355A3 (ja) |
JP (1) | JP5089020B2 (ja) |
KR (2) | KR101240700B1 (ja) |
CN (1) | CN1828930A (ja) |
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TW (1) | TWI413250B (ja) |
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JP4519423B2 (ja) * | 2003-05-30 | 2010-08-04 | 創世理工株式会社 | 半導体を用いた光デバイス |
JP4351869B2 (ja) * | 2003-06-10 | 2009-10-28 | 隆 河東田 | 半導体を用いた電子デバイス |
JP4603370B2 (ja) * | 2005-01-18 | 2010-12-22 | 創世理工株式会社 | 基板上に作製された半導体光デバイスおよびその作製方法 |
JP5214194B2 (ja) * | 2007-08-10 | 2013-06-19 | 住友化学株式会社 | 金属ドープモリブデン酸化物層を含む有機エレクトロルミネッセンス素子及び製造方法 |
EP2674992A1 (en) | 2012-06-15 | 2013-12-18 | Imec | Led and method for making led |
CN107946322A (zh) * | 2017-12-15 | 2018-04-20 | 京东方科技集团股份有限公司 | 阵列基板及其制造方法、显示装置 |
JP2020205405A (ja) | 2019-06-17 | 2020-12-24 | 三星電子株式会社Samsung Electronics Co.,Ltd. | メモリスタ、及びそれを含むニューロモーフィック装置 |
KR20230116914A (ko) | 2020-12-07 | 2023-08-04 | 오티아이 루미오닉스 인크. | 핵 생성 억제 코팅 및 하부 금속 코팅을 사용한 전도성 증착 층의 패턴화 |
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EP1684355A2 (en) | 2006-07-26 |
JP2006202872A (ja) | 2006-08-03 |
DE06000614T1 (de) | 2007-01-18 |
TW200701450A (en) | 2007-01-01 |
CN1828930A (zh) | 2006-09-06 |
US20060157695A1 (en) | 2006-07-20 |
KR20060084366A (ko) | 2006-07-24 |
US7557385B2 (en) | 2009-07-07 |
KR101240700B1 (ko) | 2013-03-18 |
KR20130006584A (ko) | 2013-01-17 |
EP1684355A3 (en) | 2009-03-18 |
TWI413250B (zh) | 2013-10-21 |
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