JP5085679B2 - 圧電振動片および圧電デバイス - Google Patents

圧電振動片および圧電デバイス Download PDF

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Publication number
JP5085679B2
JP5085679B2 JP2010069447A JP2010069447A JP5085679B2 JP 5085679 B2 JP5085679 B2 JP 5085679B2 JP 2010069447 A JP2010069447 A JP 2010069447A JP 2010069447 A JP2010069447 A JP 2010069447A JP 5085679 B2 JP5085679 B2 JP 5085679B2
Authority
JP
Japan
Prior art keywords
electrode
base
groove
vibrating piece
vibrating arm
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP2010069447A
Other languages
English (en)
Japanese (ja)
Other versions
JP2011216924A (ja
JP2011216924A5 (enExample
Inventor
宏樹 岩井
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nihon Dempa Kogyo Co Ltd
Original Assignee
Nihon Dempa Kogyo Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nihon Dempa Kogyo Co Ltd filed Critical Nihon Dempa Kogyo Co Ltd
Priority to JP2010069447A priority Critical patent/JP5085679B2/ja
Priority to US13/040,078 priority patent/US8736152B2/en
Publication of JP2011216924A publication Critical patent/JP2011216924A/ja
Publication of JP2011216924A5 publication Critical patent/JP2011216924A5/ja
Application granted granted Critical
Publication of JP5085679B2 publication Critical patent/JP5085679B2/ja
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/15—Constructional features of resonators consisting of piezoelectric or electrostrictive material
    • H03H9/21—Crystal tuning forks
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02007—Details of bulk acoustic wave devices
    • H03H9/02062—Details relating to the vibration mode
    • H03H9/0207—Details relating to the vibration mode the vibration mode being harmonic
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/05—Holders or supports
    • H03H9/0504—Holders or supports for bulk acoustic wave devices
    • H03H9/0514—Holders or supports for bulk acoustic wave devices consisting of mounting pads or bumps
    • H03H9/0519—Holders or supports for bulk acoustic wave devices consisting of mounting pads or bumps for cantilever
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/05—Holders or supports
    • H03H9/10—Mounting in enclosures
    • H03H9/1007—Mounting in enclosures for bulk acoustic wave [BAW] devices
    • H03H9/1014—Mounting in enclosures for bulk acoustic wave [BAW] devices the enclosure being defined by a frame built on a substrate and a cap, the frame having no mechanical contact with the BAW device
    • H03H9/1021—Mounting in enclosures for bulk acoustic wave [BAW] devices the enclosure being defined by a frame built on a substrate and a cap, the frame having no mechanical contact with the BAW device the BAW device being of the cantilever type
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/05—Holders or supports
    • H03H9/10—Mounting in enclosures
    • H03H9/1007—Mounting in enclosures for bulk acoustic wave [BAW] devices
    • H03H9/1035—Mounting in enclosures for bulk acoustic wave [BAW] devices the enclosure being defined by two sealing substrates sandwiching the piezoelectric layer of the BAW device

Landscapes

  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Chemical & Material Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
JP2010069447A 2010-03-15 2010-03-25 圧電振動片および圧電デバイス Expired - Fee Related JP5085679B2 (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP2010069447A JP5085679B2 (ja) 2010-03-15 2010-03-25 圧電振動片および圧電デバイス
US13/040,078 US8736152B2 (en) 2010-03-15 2011-03-03 Piezoelectric vibrating pieces and associated devices exhibiting enhanced electrical field

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2010057253 2010-03-15
JP2010057253 2010-03-15
JP2010069447A JP5085679B2 (ja) 2010-03-15 2010-03-25 圧電振動片および圧電デバイス

Publications (3)

Publication Number Publication Date
JP2011216924A JP2011216924A (ja) 2011-10-27
JP2011216924A5 JP2011216924A5 (enExample) 2012-02-16
JP5085679B2 true JP5085679B2 (ja) 2012-11-28

Family

ID=44559299

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2010069447A Expired - Fee Related JP5085679B2 (ja) 2010-03-15 2010-03-25 圧電振動片および圧電デバイス

Country Status (2)

Country Link
US (1) US8736152B2 (enExample)
JP (1) JP5085679B2 (enExample)

Families Citing this family (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5385037B2 (ja) * 2009-07-21 2014-01-08 エスアイアイ・クリスタルテクノロジー株式会社 圧電振動片、圧電振動子、発振器、電子機器及び電波時計並びに圧電振動片の製造方法
JP2012039509A (ja) * 2010-08-10 2012-02-23 Seiko Instruments Inc 圧電振動片、圧電振動子、発振器、電子機器および電波時計
JP2014165573A (ja) * 2013-02-22 2014-09-08 Seiko Epson Corp 振動片、振動子、電子デバイス、電子機器、および移動体
KR20140118792A (ko) * 2013-03-29 2014-10-08 세이코 엡슨 가부시키가이샤 진동 소자, 진동자, 발진기, 전자 기기, 센서, 및 이동체
JP2014200051A (ja) * 2013-03-29 2014-10-23 セイコーエプソン株式会社 振動素子、振動子、発振器、電子機器および移動体
JP6107333B2 (ja) 2013-03-29 2017-04-05 セイコーエプソン株式会社 振動子、発振器、電子機器および移動体
JPWO2014208251A1 (ja) * 2013-06-26 2017-02-23 株式会社大真空 音叉型圧電振動片、および音叉型圧電振動子
JP6435596B2 (ja) 2013-08-09 2018-12-12 セイコーエプソン株式会社 振動素子、振動デバイス、電子機器、および移動体
JP2015097366A (ja) * 2013-11-16 2015-05-21 セイコーエプソン株式会社 振動素子、振動子、発振器、電子機器および移動体
JP6479509B2 (ja) * 2015-03-09 2019-03-06 シチズン時計株式会社 圧電振動子
JP6552225B2 (ja) * 2015-03-12 2019-07-31 エスアイアイ・クリスタルテクノロジー株式会社 圧電振動片及び圧電振動子
CN110235363B (zh) 2017-03-30 2023-05-26 株式会社大真空 音叉型压电振动片及使用该音叉型压电振动片的音叉型压电振子
JP6318418B1 (ja) * 2017-07-24 2018-05-09 有限会社ピエデック技術研究所 圧電振動子、圧電ユニット、圧電発振器と電子機器
EP3468036A1 (fr) * 2017-10-03 2019-04-10 Micro Crystal AG Résonateur piezo-electrique de petite taille
JP6614227B2 (ja) * 2017-11-15 2019-12-04 セイコーエプソン株式会社 振動素子、振動子、発振器、電子機器および移動体

Family Cites Families (22)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2467487A1 (fr) * 1979-10-15 1981-04-17 Ebauches Sa Resonateur piezoelectrique
FR2784752B1 (fr) * 1998-10-20 2000-11-17 Onera (Off Nat Aerospatiale) Accelerometre miniature monolithique
JP4329286B2 (ja) * 2001-08-27 2009-09-09 セイコーエプソン株式会社 振動片、振動子、発振器及び電子機器
JP3646258B2 (ja) * 2001-10-31 2005-05-11 有限会社ピエデック技術研究所 水晶ユニットとその製造方法
JP2003273703A (ja) * 2002-01-11 2003-09-26 Piedekku Gijutsu Kenkyusho:Kk 水晶振動子と水晶振動子の製造方法
US6897743B2 (en) 2002-03-06 2005-05-24 Piedek Technical Laboratory Electronic apparatus with two quartz crystal oscillators utilizing different vibration modes
US7412764B2 (en) * 2002-03-06 2008-08-19 Piedek Technical Laboratory Method for manufacturing quartz crystal unit and electronic apparatus having quartz crystal unit
US6791243B2 (en) * 2002-03-06 2004-09-14 Piedek Technical Laboratory Quartz crystal unit and its manufacturing method
JP2004260718A (ja) * 2003-02-27 2004-09-16 Seiko Epson Corp 音叉型振動片及び音叉型振動片の製造方法並びに圧電デバイス
ATE467268T1 (de) * 2004-09-03 2010-05-15 Eta Sa Mft Horlogere Suisse Quartzresonator mit sehr kleinen abmessungen
JP4548148B2 (ja) * 2005-02-24 2010-09-22 セイコーエプソン株式会社 圧電振動片および圧電デバイス
JP4442521B2 (ja) * 2005-06-29 2010-03-31 セイコーエプソン株式会社 圧電振動片および圧電デバイス
JPWO2007004348A1 (ja) 2005-06-30 2009-01-22 株式会社大真空 圧電振動片及び圧電振動デバイス
JP2007096900A (ja) * 2005-09-29 2007-04-12 Seiko Epson Corp 圧電振動片および圧電デバイス
JP4319657B2 (ja) * 2006-01-30 2009-08-26 日本電波工業株式会社 圧電振動子
JP2008099144A (ja) * 2006-10-13 2008-04-24 Nippon Dempa Kogyo Co Ltd 圧電振動片および圧電デバイス
JP5154977B2 (ja) * 2008-02-29 2013-02-27 日本電波工業株式会社 圧電振動片、圧電デバイス及び音叉型圧電振動子の周波数調整方法
JP2010004456A (ja) * 2008-06-23 2010-01-07 Nippon Dempa Kogyo Co Ltd 圧電振動片および圧電デバイス
JP4885206B2 (ja) * 2008-12-22 2012-02-29 日本電波工業株式会社 音叉型圧電振動片および圧電デバイス
JP5652122B2 (ja) * 2009-12-25 2015-01-14 セイコーエプソン株式会社 振動片、振動デバイス及び電子機器
JP5839919B2 (ja) * 2011-09-28 2016-01-06 エスアイアイ・クリスタルテクノロジー株式会社 圧電振動片、圧電振動子、発振器、電子機器、および電波時計
JP5793387B2 (ja) * 2011-09-30 2015-10-14 エスアイアイ・クリスタルテクノロジー株式会社 圧電振動片、圧電振動子、発振器、電子機器、及び電波時計

Also Published As

Publication number Publication date
US20110221311A1 (en) 2011-09-15
JP2011216924A (ja) 2011-10-27
US8736152B2 (en) 2014-05-27

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