ATE467268T1 - Quartzresonator mit sehr kleinen abmessungen - Google Patents

Quartzresonator mit sehr kleinen abmessungen

Info

Publication number
ATE467268T1
ATE467268T1 AT04104267T AT04104267T ATE467268T1 AT E467268 T1 ATE467268 T1 AT E467268T1 AT 04104267 T AT04104267 T AT 04104267T AT 04104267 T AT04104267 T AT 04104267T AT E467268 T1 ATE467268 T1 AT E467268T1
Authority
AT
Austria
Prior art keywords
zone
arms
small dimensions
quartz resonator
resonator
Prior art date
Application number
AT04104267T
Other languages
English (en)
Inventor
Piazza Silvio Dalla
Bruno Studer
Thomas Luethi
Original Assignee
Eta Sa Mft Horlogere Suisse
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Eta Sa Mft Horlogere Suisse filed Critical Eta Sa Mft Horlogere Suisse
Application granted granted Critical
Publication of ATE467268T1 publication Critical patent/ATE467268T1/de

Links

Classifications

    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02007—Details of bulk acoustic wave devices
    • H03H9/02086—Means for compensation or elimination of undesirable effects
    • H03H9/02133—Means for compensation or elimination of undesirable effects of stress
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/15—Constructional features of resonators consisting of piezoelectric or electrostrictive material
    • H03H9/21—Crystal tuning forks
    • H03H9/215—Crystal tuning forks consisting of quartz

Landscapes

  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Chemical & Material Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
AT04104267T 2004-09-03 2004-09-03 Quartzresonator mit sehr kleinen abmessungen ATE467268T1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
EP04104267A EP1633042B1 (de) 2004-09-03 2004-09-03 Quartzresonator mit sehr kleinen Abmessungen

Publications (1)

Publication Number Publication Date
ATE467268T1 true ATE467268T1 (de) 2010-05-15

Family

ID=34929536

Family Applications (1)

Application Number Title Priority Date Filing Date
AT04104267T ATE467268T1 (de) 2004-09-03 2004-09-03 Quartzresonator mit sehr kleinen abmessungen

Country Status (6)

Country Link
US (1) US7253554B2 (de)
EP (1) EP1633042B1 (de)
JP (1) JP4646744B2 (de)
CN (1) CN100593283C (de)
AT (1) ATE467268T1 (de)
DE (1) DE602004027033D1 (de)

Families Citing this family (31)

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Publication number Priority date Publication date Assignee Title
EP1603147A3 (de) * 2004-06-01 2008-07-23 Canon Kabushiki Kaisha Bildanzeigevorrichtung
JP4277818B2 (ja) 2005-03-22 2009-06-10 セイコーエプソン株式会社 圧電振動片および圧電デバイス
JP4415389B2 (ja) * 2005-04-27 2010-02-17 セイコーエプソン株式会社 圧電デバイス
JP4442521B2 (ja) * 2005-06-29 2010-03-31 セイコーエプソン株式会社 圧電振動片および圧電デバイス
JP4595913B2 (ja) * 2006-09-21 2010-12-08 株式会社大真空 音叉型圧電振動デバイス
JP2008249489A (ja) * 2007-03-30 2008-10-16 Tdk Corp 角速度センサ素子および角速度センサ装置
EP2017960B1 (de) 2007-07-19 2009-12-30 ETA SA Manufacture Horlogère Suisse Piezoelektrischer Resonator mit optimierten Bewegungsfähigkeiten
JP5089298B2 (ja) * 2007-08-31 2012-12-05 リバーエレテック株式会社 音叉型屈曲振動子
US7802466B2 (en) * 2007-11-28 2010-09-28 Sierra Sensors Gmbh Oscillating sensor and fluid sample analysis using an oscillating sensor
ATE499746T1 (de) * 2007-12-13 2011-03-15 Eta Sa Mft Horlogere Suisse Piezoelektrischer resonator in einer kleinen verpackung
WO2009143492A1 (en) * 2008-05-23 2009-11-26 Statek Corporation Piezoelectric resonator
US8067880B2 (en) * 2008-12-27 2011-11-29 Seiko Epson Corporation Flexural vibration element and electronic component
JP5350101B2 (ja) * 2009-06-30 2013-11-27 京セラクリスタルデバイス株式会社 音叉型屈曲水晶振動子
TWI398097B (zh) * 2009-11-18 2013-06-01 Wafer Mems Co Ltd 音叉型石英晶體諧振器
TWI420811B (zh) * 2009-11-18 2013-12-21 Wafer Mems Co Ltd 音叉型石英晶體諧振器
CN103152007B (zh) * 2009-12-02 2016-12-28 威华微机电股份有限公司 音叉型石英晶体谐振器
CN103199817B (zh) * 2009-12-02 2015-11-18 威华微机电股份有限公司 音叉型石英晶体谐振器
JP2011151562A (ja) * 2010-01-21 2011-08-04 Kyocera Kinseki Corp 音叉型屈曲水晶振動素子
JP5482250B2 (ja) * 2010-02-02 2014-05-07 セイコーエプソン株式会社 振動体および振動デバイス
JP5479931B2 (ja) * 2010-02-03 2014-04-23 エスアイアイ・クリスタルテクノロジー株式会社 圧電振動子、発振器、電子機器および電波時計
JP2011176701A (ja) * 2010-02-25 2011-09-08 Kyocera Kinseki Corp 音叉型屈曲水晶振動素子
US20110215680A1 (en) * 2010-03-05 2011-09-08 Seiko Epson Corporation Resonator element, resonator, oscillator, and electronic device
JP5085679B2 (ja) * 2010-03-15 2012-11-28 日本電波工業株式会社 圧電振動片および圧電デバイス
JP5592812B2 (ja) * 2011-01-27 2014-09-17 エスアイアイ・クリスタルテクノロジー株式会社 圧電振動片、圧電振動子、発振器、電子機器、および電波時計
JP5819151B2 (ja) * 2011-09-28 2015-11-18 エスアイアイ・クリスタルテクノロジー株式会社 圧電振動片、圧電振動子、発振器、電子機器および電波時計
JP5839919B2 (ja) 2011-09-28 2016-01-06 エスアイアイ・クリスタルテクノロジー株式会社 圧電振動片、圧電振動子、発振器、電子機器、および電波時計
JP5902546B2 (ja) * 2012-04-25 2016-04-13 京セラクリスタルデバイス株式会社 音叉型屈曲水晶振動素子
JP6080449B2 (ja) * 2012-09-18 2017-02-15 エスアイアイ・クリスタルテクノロジー株式会社 圧電振動片、圧電振動子、発振器、電子機器及び電波時計
JP2014123911A (ja) * 2012-12-21 2014-07-03 Daishinku Corp 音叉型水晶振動片
CN110663176A (zh) * 2017-05-25 2020-01-07 株式会社村田制作所 谐振器以及谐振装置
EP3468036A1 (de) 2017-10-03 2019-04-10 Micro Crystal AG Piezoelektrischer resonator kleiner grösse

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JPS5360594A (en) * 1976-11-11 1978-05-31 Seiko Epson Corp Electronic watch
JPS55162612A (en) * 1979-06-05 1980-12-18 Citizen Watch Co Ltd Tuning fork type crystal resonator
FR2467487A1 (fr) * 1979-10-15 1981-04-17 Ebauches Sa Resonateur piezoelectrique
JPS5862917A (ja) * 1981-10-08 1983-04-14 Seiko Instr & Electronics Ltd 音叉型水晶振動子
JP3811226B2 (ja) * 1996-07-26 2006-08-16 トヨタ自動車株式会社 水晶振動子及びその製造方法
US6018212A (en) * 1996-11-26 2000-01-25 Ngk Insulators, Ltd. Vibrator, vibratory gyroscope, and vibration adjusting method
US6651498B1 (en) * 1997-10-06 2003-11-25 Ngk Insulators, Ltd. Vibratory gyroscope, vibrator used in this gyroscope, method for analyzing vibration of the vibrator, method for supporting the vibrator, and method for manufacturing the vibratory gyroscope
EP1788702A3 (de) * 2000-12-25 2008-01-16 Seiko Epson Corporation Schwingelement, Vibrator, Oszillator und elektronisches Gerät
JP2003069368A (ja) * 2001-08-22 2003-03-07 Seiko Epson Corp 圧電デバイスと圧電振動片の接合方法、及び圧電デバイスを利用した携帯電話装置ならびに圧電デバイスを利用した電子機器
JP2003087078A (ja) * 2001-09-07 2003-03-20 Citizen Watch Co Ltd 水晶振動子構造体
JP2004129181A (ja) * 2002-10-03 2004-04-22 Herutsu Kk 水晶振動子の電極構造
JP2004200914A (ja) * 2002-12-17 2004-07-15 Seiko Epson Corp 圧電デバイス、及び圧電デバイスを利用した携帯電話装置、電子機器
JP2005291937A (ja) * 2004-03-31 2005-10-20 Kyocera Kinseki Corp 慣性センサ素子

Also Published As

Publication number Publication date
US20060049722A1 (en) 2006-03-09
JP4646744B2 (ja) 2011-03-09
JP2006074793A (ja) 2006-03-16
EP1633042B1 (de) 2010-05-05
CN100593283C (zh) 2010-03-03
EP1633042A1 (de) 2006-03-08
US7253554B2 (en) 2007-08-07
DE602004027033D1 (de) 2010-06-17
CN1744432A (zh) 2006-03-08

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