DE60333774D1 - Piezoelektrischer vibrator, filter damit und verfahren zur einstellung des piezoelektrischen vibrators - Google Patents

Piezoelektrischer vibrator, filter damit und verfahren zur einstellung des piezoelektrischen vibrators

Info

Publication number
DE60333774D1
DE60333774D1 DE60333774T DE60333774T DE60333774D1 DE 60333774 D1 DE60333774 D1 DE 60333774D1 DE 60333774 T DE60333774 T DE 60333774T DE 60333774 T DE60333774 T DE 60333774T DE 60333774 D1 DE60333774 D1 DE 60333774D1
Authority
DE
Germany
Prior art keywords
piezoelectric vibrator
filter
adjusting
vibrator
piezoelectric
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE60333774T
Other languages
English (en)
Inventor
Yukinori Sasaki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Corp
Original Assignee
Panasonic Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Panasonic Corp filed Critical Panasonic Corp
Application granted granted Critical
Publication of DE60333774D1 publication Critical patent/DE60333774D1/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H3/00—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators
    • H03H3/007—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks
    • H03H3/02—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks for the manufacture of piezoelectric or electrostrictive resonators or networks
    • H03H3/04—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks for the manufacture of piezoelectric or electrostrictive resonators or networks for obtaining desired frequency or temperature coefficient
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/02—Details
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02007—Details of bulk acoustic wave devices
    • H03H9/02062—Details relating to the vibration mode
    • H03H9/0207—Details relating to the vibration mode the vibration mode being harmonic
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02007—Details of bulk acoustic wave devices
    • H03H9/02086—Means for compensation or elimination of undesirable effects
    • H03H9/02102—Means for compensation or elimination of undesirable effects of temperature influence
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02007—Details of bulk acoustic wave devices
    • H03H9/02086—Means for compensation or elimination of undesirable effects
    • H03H9/02133—Means for compensation or elimination of undesirable effects of stress
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/15—Constructional features of resonators consisting of piezoelectric or electrostrictive material
    • H03H9/17—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator
    • H03H9/171—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator implemented with thin-film techniques, i.e. of the film bulk acoustic resonator [FBAR] type
    • H03H9/172—Means for mounting on a substrate, i.e. means constituting the material interface confining the waves to a volume
    • H03H9/174—Membranes
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/15—Constructional features of resonators consisting of piezoelectric or electrostrictive material
    • H03H9/17—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator
    • H03H9/177—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator of the energy-trap type
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/46—Filters
    • H03H9/54—Filters comprising resonators of piezoelectric or electrostrictive material
    • H03H9/56—Monolithic crystal filters
    • H03H9/562—Monolithic crystal filters comprising a ceramic piezoelectric layer
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/46—Filters
    • H03H9/54—Filters comprising resonators of piezoelectric or electrostrictive material
    • H03H9/56—Monolithic crystal filters
    • H03H9/564—Monolithic crystal filters implemented with thin-film techniques
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/46—Filters
    • H03H9/54—Filters comprising resonators of piezoelectric or electrostrictive material
    • H03H9/58—Multiple crystal filters
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/46—Filters
    • H03H9/54—Filters comprising resonators of piezoelectric or electrostrictive material
    • H03H9/58—Multiple crystal filters
    • H03H9/582—Multiple crystal filters implemented with thin-film techniques
    • H03H9/586—Means for mounting to a substrate, i.e. means constituting the material interface confining the waves to a volume
    • H03H9/588—Membranes
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/80—Constructional details
    • H10N30/85—Piezoelectric or electrostrictive active materials
    • H10N30/853—Ceramic compositions

Landscapes

  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Chemical & Material Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Engineering & Computer Science (AREA)
  • Ceramic Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
DE60333774T 2002-10-28 2003-10-24 Piezoelektrischer vibrator, filter damit und verfahren zur einstellung des piezoelektrischen vibrators Expired - Lifetime DE60333774D1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2002312444A JP2004147246A (ja) 2002-10-28 2002-10-28 圧電振動子、それを用いたフィルタ及び圧電振動子の調整方法
PCT/JP2003/013633 WO2004038914A1 (ja) 2002-10-28 2003-10-24 圧電振動子、それを用いたフィルタ及び圧電振動子の調整方法

Publications (1)

Publication Number Publication Date
DE60333774D1 true DE60333774D1 (de) 2010-09-23

Family

ID=32171126

Family Applications (1)

Application Number Title Priority Date Filing Date
DE60333774T Expired - Lifetime DE60333774D1 (de) 2002-10-28 2003-10-24 Piezoelektrischer vibrator, filter damit und verfahren zur einstellung des piezoelektrischen vibrators

Country Status (7)

Country Link
US (1) US7414349B2 (de)
EP (1) EP1557945B1 (de)
JP (1) JP2004147246A (de)
KR (1) KR100669088B1 (de)
CN (1) CN1685610B (de)
DE (1) DE60333774D1 (de)
WO (1) WO2004038914A1 (de)

Families Citing this family (59)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7275292B2 (en) * 2003-03-07 2007-10-02 Avago Technologies Wireless Ip (Singapore) Pte. Ltd. Method for fabricating an acoustical resonator on a substrate
US7242270B2 (en) 2003-10-30 2007-07-10 Avago Technologies Wireless Ip (Singapore) Pte. Ltd. Decoupled stacked bulk acoustic resonator-based band-pass filter
US7358831B2 (en) * 2003-10-30 2008-04-15 Avago Technologies Wireless Ip (Singapore) Pte. Ltd. Film bulk acoustic resonator (FBAR) devices with simplified packaging
US7388454B2 (en) 2004-10-01 2008-06-17 Avago Technologies Wireless Ip Pte Ltd Acoustic resonator performance enhancement using alternating frame structure
US8981876B2 (en) 2004-11-15 2015-03-17 Avago Technologies General Ip (Singapore) Pte. Ltd. Piezoelectric resonator structures and electrical filters having frame elements
US7202560B2 (en) 2004-12-15 2007-04-10 Avago Technologies Wireless Ip (Singapore) Pte. Ltd. Wafer bonding of micro-electro mechanical systems to active circuitry
US7791434B2 (en) 2004-12-22 2010-09-07 Avago Technologies Wireless Ip (Singapore) Pte. Ltd. Acoustic resonator performance enhancement using selective metal etch and having a trench in the piezoelectric
US7369013B2 (en) 2005-04-06 2008-05-06 Avago Technologies Wireless Ip Pte Ltd Acoustic resonator performance enhancement using filled recessed region
JP4550658B2 (ja) * 2005-04-28 2010-09-22 富士通メディアデバイス株式会社 圧電薄膜共振器およびフィルタ
US7868522B2 (en) * 2005-09-09 2011-01-11 Avago Technologies Wireless Ip (Singapore) Pte. Ltd. Adjusted frequency temperature coefficient resonator
US7737807B2 (en) * 2005-10-18 2010-06-15 Avago Technologies Wireless Ip (Singapore) Pte. Ltd. Acoustic galvanic isolator incorporating series-connected decoupled stacked bulk acoustic resonators
US7675390B2 (en) 2005-10-18 2010-03-09 Avago Technologies Wireless Ip (Singapore) Pte. Ltd. Acoustic galvanic isolator incorporating single decoupled stacked bulk acoustic resonator
US7463499B2 (en) 2005-10-31 2008-12-09 Avago Technologies General Ip (Singapore) Pte Ltd. AC-DC power converter
US7746677B2 (en) 2006-03-09 2010-06-29 Avago Technologies Wireless Ip (Singapore) Pte. Ltd. AC-DC converter circuit and power supply
US20070210748A1 (en) * 2006-03-09 2007-09-13 Mark Unkrich Power supply and electronic device having integrated power supply
US7479685B2 (en) 2006-03-10 2009-01-20 Avago Technologies General Ip (Singapore) Pte. Ltd. Electronic device on substrate with cavity and mitigated parasitic leakage path
US7851970B2 (en) * 2006-12-22 2010-12-14 The Charles Stark Draper Laboratory, Inc. Structures for crystal packaging including flexible membranes
JP2008206139A (ja) 2007-01-25 2008-09-04 Matsushita Electric Ind Co Ltd 二重モード圧電フィルタ、その製造方法、およびそれを用いた高周波回路部品および通信機器
US7791435B2 (en) 2007-09-28 2010-09-07 Avago Technologies Wireless Ip (Singapore) Pte. Ltd. Single stack coupled resonators having differential output
JP5054491B2 (ja) * 2007-11-21 2012-10-24 パナソニック株式会社 圧電振動子およびその製造方法
US7855618B2 (en) 2008-04-30 2010-12-21 Avago Technologies Wireless Ip (Singapore) Pte. Ltd. Bulk acoustic resonator electrical impedance transformers
US7732977B2 (en) 2008-04-30 2010-06-08 Avago Technologies Wireless Ip (Singapore) Transceiver circuit for film bulk acoustic resonator (FBAR) transducers
US8902023B2 (en) 2009-06-24 2014-12-02 Avago Technologies General Ip (Singapore) Pte. Ltd. Acoustic resonator structure having an electrode with a cantilevered portion
US8248185B2 (en) 2009-06-24 2012-08-21 Avago Technologies Wireless Ip (Singapore) Pte. Ltd. Acoustic resonator structure comprising a bridge
US8484823B2 (en) * 2009-08-28 2013-07-16 The Charles Stark Draper Laboratory, Inc. Methods and apparatus for mounting a crystal
US8193877B2 (en) 2009-11-30 2012-06-05 Avago Technologies Wireless Ip (Singapore) Pte. Ltd. Duplexer with negative phase shifting circuit
US9243316B2 (en) 2010-01-22 2016-01-26 Avago Technologies General Ip (Singapore) Pte. Ltd. Method of fabricating piezoelectric material with selected c-axis orientation
US8796904B2 (en) 2011-10-31 2014-08-05 Avago Technologies General Ip (Singapore) Pte. Ltd. Bulk acoustic resonator comprising piezoelectric layer and inverse piezoelectric layer
US8962443B2 (en) 2011-01-31 2015-02-24 Avago Technologies General Ip (Singapore) Pte. Ltd. Semiconductor device having an airbridge and method of fabricating the same
US9048812B2 (en) 2011-02-28 2015-06-02 Avago Technologies General Ip (Singapore) Pte. Ltd. Bulk acoustic wave resonator comprising bridge formed within piezoelectric layer
US9148117B2 (en) 2011-02-28 2015-09-29 Avago Technologies General Ip (Singapore) Pte. Ltd. Coupled resonator filter comprising a bridge and frame elements
US9136818B2 (en) 2011-02-28 2015-09-15 Avago Technologies General Ip (Singapore) Pte. Ltd. Stacked acoustic resonator comprising a bridge
US9154112B2 (en) 2011-02-28 2015-10-06 Avago Technologies General Ip (Singapore) Pte. Ltd. Coupled resonator filter comprising a bridge
US9203374B2 (en) 2011-02-28 2015-12-01 Avago Technologies General Ip (Singapore) Pte. Ltd. Film bulk acoustic resonator comprising a bridge
US9083302B2 (en) 2011-02-28 2015-07-14 Avago Technologies General Ip (Singapore) Pte. Ltd. Stacked bulk acoustic resonator comprising a bridge and an acoustic reflector along a perimeter of the resonator
US9425764B2 (en) 2012-10-25 2016-08-23 Avago Technologies General Ip (Singapore) Pte. Ltd. Accoustic resonator having composite electrodes with integrated lateral features
US9444426B2 (en) 2012-10-25 2016-09-13 Avago Technologies General Ip (Singapore) Pte. Ltd. Accoustic resonator having integrated lateral feature and temperature compensation feature
US8575820B2 (en) 2011-03-29 2013-11-05 Avago Technologies General Ip (Singapore) Pte. Ltd. Stacked bulk acoustic resonator
US8350445B1 (en) 2011-06-16 2013-01-08 Avago Technologies Wireless Ip (Singapore) Pte. Ltd. Bulk acoustic resonator comprising non-piezoelectric layer and bridge
US8922302B2 (en) 2011-08-24 2014-12-30 Avago Technologies General Ip (Singapore) Pte. Ltd. Acoustic resonator formed on a pedestal
JP6110182B2 (ja) * 2013-03-29 2017-04-05 日本碍子株式会社 圧電／電歪素子
US9359261B2 (en) 2013-05-07 2016-06-07 Corning Incorporated Low-color scratch-resistant articles with a multilayer optical film
US9684097B2 (en) * 2013-05-07 2017-06-20 Corning Incorporated Scratch-resistant articles with retained optical properties
US9110230B2 (en) 2013-05-07 2015-08-18 Corning Incorporated Scratch-resistant articles with retained optical properties
US9703011B2 (en) 2013-05-07 2017-07-11 Corning Incorporated Scratch-resistant articles with a gradient layer
US9366784B2 (en) 2013-05-07 2016-06-14 Corning Incorporated Low-color scratch-resistant articles with a multilayer optical film
TWI686620B (zh) * 2013-09-13 2020-03-01 美商康寧公司 具有保留光學性質的防刮物件
JP6241684B2 (ja) * 2014-01-17 2017-12-06 株式会社村田製作所 圧電振動子及び圧電振動装置
US11267973B2 (en) 2014-05-12 2022-03-08 Corning Incorporated Durable anti-reflective articles
US9335444B2 (en) 2014-05-12 2016-05-10 Corning Incorporated Durable and scratch-resistant anti-reflective articles
US9790593B2 (en) 2014-08-01 2017-10-17 Corning Incorporated Scratch-resistant materials and articles including the same
JP6387289B2 (ja) * 2014-09-29 2018-09-05 新科實業有限公司ＳＡＥ Ｍａｇｎｅｔｉｃｓ（Ｈ．Ｋ．）Ｌｔｄ． 薄膜圧電体素子およびその製造方法並びにそれを有するヘッドジンバルアセンブリ、ハードディスク装置、インクジェットヘッド、可変焦点レンズおよびセンサ
WO2016098868A1 (ja) * 2014-12-17 2016-06-23 株式会社村田製作所 圧電振動子及び圧電振動装置
JP2018536177A (ja) 2015-09-14 2018-12-06 コーニング インコーポレイテッド 高光線透過性かつ耐擦傷性反射防止物品
JP2017118412A (ja) * 2015-12-25 2017-06-29 日本電波工業株式会社 圧電振動片、圧電デバイス、及び圧電振動片の製造方法
FI20175553A1 (en) * 2017-06-14 2018-12-15 Spindeco Tech Oy Additional unit or cable that can be connected to a power supply or signal line for an electrical appliance
JP2021503229A (ja) * 2017-11-14 2021-02-04 安徽▲雲▼塔▲電▼子科技有限公司 圧電共振器および圧電共振器の製造方法
KR20230146673A (ko) 2018-08-17 2023-10-19 코닝 인코포레이티드 얇고, 내구성 있는 반사-방지 구조를 갖는 무기산화물 물품
CN111079231B (zh) * 2019-11-13 2024-06-04 合肥工业大学 一种直线超声波电机多物理场综合设计方法

Family Cites Families (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5829211A (ja) * 1981-08-13 1983-02-21 Nec Corp 薄膜圧電振動子
JPS58121815A (ja) 1982-01-14 1983-07-20 Murata Mfg Co Ltd 圧電共振子
JPS58137317A (ja) * 1982-02-09 1983-08-15 Nec Corp 圧電薄膜複合振動子
JPS58137318A (ja) * 1982-02-10 1983-08-15 Nec Corp 薄膜圧電振動子
JPS60189307A (ja) * 1984-03-09 1985-09-26 Toshiba Corp 圧電薄膜共振器およびその製造方法
JPS6281807A (ja) * 1985-10-05 1987-04-15 Toshiba Corp 圧電薄膜共振子
JP2657530B2 (ja) * 1988-09-09 1997-09-24 日本無線株式会社 薄膜共振子の製造方法
JPH06103823B2 (ja) * 1989-07-19 1994-12-14 株式会社村田製作所 圧電共振子
US5692279A (en) * 1995-08-17 1997-12-02 Motorola Method of making a monolithic thin film resonator lattice filter
JP2000040931A (ja) * 1998-07-23 2000-02-08 Matsushita Electric Ind Co Ltd 圧電共振子、圧電共振子の製造方法および圧電共振子の周波数調整方法
JP2000209063A (ja) * 1998-11-12 2000-07-28 Mitsubishi Electric Corp 薄膜圧電素子
JP3088407B2 (ja) * 1999-02-02 2000-09-18 日本電気アイシーマイコンシステム株式会社 インサーキットエミュレータおよびインサーキットエミュレーション方法
JP2001168674A (ja) 1999-12-09 2001-06-22 Murata Mfg Co Ltd 圧電共振子及び電子機器
EP1170862B1 (de) * 2000-06-23 2012-10-10 Murata Manufacturing Co., Ltd. Piezoelektrischer Resonator und diesen enthaltendes piezoelektrisches Filter

Also Published As

Publication number Publication date
EP1557945A1 (de) 2005-07-27
EP1557945B1 (de) 2010-08-11
WO2004038914A1 (ja) 2004-05-06
CN1685610A (zh) 2005-10-19
JP2004147246A (ja) 2004-05-20
KR100669088B1 (ko) 2007-01-15
KR20040101214A (ko) 2004-12-02
US20050012569A1 (en) 2005-01-20
EP1557945A4 (de) 2005-07-27
US7414349B2 (en) 2008-08-19
CN1685610B (zh) 2010-10-06

Similar Documents

Publication Publication Date Title
DE60333774D1 (de) Piezoelektrischer vibrator, filter damit und verfahren zur einstellung des piezoelektrischen vibrators
EP1679393A4 (de) Piezoelektrischer einkristall, element mit piezoelektrischem einkristall und herstellungsverfahren dafür
GB2403064B (en) Piezoelectric apparatus
DE50212077D1 (de) Piezoelektrisches bauelement und verfahren zu dessen herstellung
BRPI0400713B1 (pt) aparelho de filtro e mÉtodo associado.
GB2413214B (en) Piezoelectric device and fabrication method thereof
DE602005025022D1 (de) Piezoelektrisches Resonatorelement und piezoelektrische Vorrichtung
EP1526640A4 (de) Piezoelektrische komponente und verfahren zu ihrer herstellung
EP1458094A4 (de) Piezoelektrische komponente und herstellungsverfahren dafür
DE60225362D1 (de) Piezoelektrisches/elektrostriktives Bauelement und dessen Herstellungsverfahren
DE60217754D1 (de) Piezoelektrische Vorrichtung
DE50206836D1 (de) Vorrichtung zur dämpfung von drehschwingungen
DE602004015053D1 (de) Vorrichtung und Verfahren zur Realisation von VoIP services
DE50308656D1 (de) Vorrichtung zum kontinuierlichen filtern von materialgemischen
DE602006006485D1 (de) Piezoelektrischer Vibrator, Verfahren zur Einstellung desselben, piezoelektrischer Aktor, Uhr und elektronisches Gerät
EP1619925A4 (de) Ultraschallvibrator und herstellungsverfahren dafür
DE60335527D1 (de) Cvd-vorrichtung und verfahren zur reinigung der cvd-vorrichtung
DE602004023343D1 (de) Vibratoren und Vibrationskreisel
DE60203753D1 (de) Verfahren zur Steuerung eines elliptischen Vibrators
DE50214272D1 (de) Piezoelektrisches bauelement und verfahren zu dessen herstellung
DE60312284D1 (de) Flüssigkeitsfilter, Entleerungsvorrichtung und Verfahren zur Entleerung des Filters
DE60226297D1 (de) Piezoelektrisches/elektrostriktives Bauelement und dessen Herstellungsverfahren
AU2003267835A8 (en) Piezoelectric vibrator and fabricating method thereof
DE60229488D1 (de) Piezoelektrisches Bauelement und Verfahren zu dessen Herstellung
DE60236790D1 (de) Piezoelektrischer oszillator und verfahren zu seiner herstellung