JP5077538B2 - Ｔｆｔアレイ検査装置 - Google Patents

Ｔｆｔアレイ検査装置 Download PDF

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Publication number
JP5077538B2
JP5077538B2 JP2007197562A JP2007197562A JP5077538B2 JP 5077538 B2 JP5077538 B2 JP 5077538B2 JP 2007197562 A JP2007197562 A JP 2007197562A JP 2007197562 A JP2007197562 A JP 2007197562A JP 5077538 B2 JP5077538 B2 JP 5077538B2
Authority
JP
Japan
Prior art keywords
tft array
pixel
potential
voltage
array substrate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP2007197562A
Other languages
English (en)
Japanese (ja)
Other versions
JP2009031208A (ja
Inventor
尚規 吉岡
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shimadzu Corp
Original Assignee
Shimadzu Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shimadzu Corp filed Critical Shimadzu Corp
Priority to JP2007197562A priority Critical patent/JP5077538B2/ja
Priority to KR1020080043589A priority patent/KR100950209B1/ko
Priority to TW097120781A priority patent/TWI419245B/zh
Priority to CN2008101112668A priority patent/CN101359613B/zh
Publication of JP2009031208A publication Critical patent/JP2009031208A/ja
Application granted granted Critical
Publication of JP5077538B2 publication Critical patent/JP5077538B2/ja
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

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Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/136—Liquid crystal cells structurally associated with a semi-conducting layer or substrate, e.g. cells forming part of an integrated circuit
    • G02F1/1362—Active matrix addressed cells
    • G02F1/136259—Repairing; Defects
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/1306—Details
    • G02F1/1309—Repairing; Testing
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/136—Liquid crystal cells structurally associated with a semi-conducting layer or substrate, e.g. cells forming part of an integrated circuit
    • G02F1/1362—Active matrix addressed cells
    • G02F1/1368—Active matrix addressed cells in which the switching element is a three-electrode device
    • G—PHYSICS
    • G09—EDUCATION; CRYPTOGRAPHY; DISPLAY; ADVERTISING; SEALS
    • G09G—ARRANGEMENTS OR CIRCUITS FOR CONTROL OF INDICATING DEVICES USING STATIC MEANS TO PRESENT VARIABLE INFORMATION
    • G09G3/00—Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes
    • G09G3/006—Electronic inspection or testing of displays and display drivers, e.g. of LED or LCD displays

Landscapes

  • Physics & Mathematics (AREA)
  • Nonlinear Science (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Optics & Photonics (AREA)
  • Chemical & Material Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Mathematical Physics (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Liquid Crystal (AREA)
  • Computer Hardware Design (AREA)
  • Theoretical Computer Science (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
  • Devices For Indicating Variable Information By Combining Individual Elements (AREA)
JP2007197562A 2007-07-30 2007-07-30 Ｔｆｔアレイ検査装置 Expired - Fee Related JP5077538B2 (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP2007197562A JP5077538B2 (ja) 2007-07-30 2007-07-30 Ｔｆｔアレイ検査装置
KR1020080043589A KR100950209B1 (ko) 2007-07-30 2008-05-09 Ｔｆｔ 어레이 검사장치
TW097120781A TWI419245B (zh) 2007-07-30 2008-06-04 Ｔｆｔ陣列檢測裝置
CN2008101112668A CN101359613B (zh) 2007-07-30 2008-06-05 Tft阵列检测装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2007197562A JP5077538B2 (ja) 2007-07-30 2007-07-30 Ｔｆｔアレイ検査装置

Publications (2)

Publication Number Publication Date
JP2009031208A JP2009031208A (ja) 2009-02-12
JP5077538B2 true JP5077538B2 (ja) 2012-11-21

Family

ID=40332012

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2007197562A Expired - Fee Related JP5077538B2 (ja) 2007-07-30 2007-07-30 Ｔｆｔアレイ検査装置

Country Status (4)

Country Link
JP (1) JP5077538B2 (ko)
KR (1) KR100950209B1 (ko)
CN (1) CN101359613B (ko)
TW (1) TWI419245B (ko)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5321787B2 (ja) * 2008-05-15 2013-10-23 株式会社島津製作所 Ｔｆｔアレイ検査装置
WO2011114449A1 (ja) * 2010-03-17 2011-09-22 株式会社島津製作所 Ｔｆｔアレイ検査方法およびｔｆｔアレイ検査装置
CN102792172B (zh) * 2010-06-10 2015-03-25 株式会社岛津制作所 Tft阵列检查的电子束扫描方法以及tft阵列检查装置
CN102456592A (zh) 2010-10-15 2012-05-16 北京京东方光电科技有限公司 测试阵列基板上薄膜晶体管特性的方法和装置
CN104809970B (zh) 2015-05-14 2017-11-28 京东方科技集团股份有限公司 用于检测显示面板的方法

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2889132B2 (ja) * 1994-10-12 1999-05-10 株式会社フロンテック 薄膜トランジスタの検査装置
US6410924B1 (en) * 1999-11-16 2002-06-25 Schlumberger Technologies, Inc. Energy filtered focused ion beam column
JP2004228431A (ja) * 2003-01-24 2004-08-12 Shimadzu Corp Ｔｆｔアレイ検査装置
US7012583B2 (en) * 2003-02-07 2006-03-14 Shimadzu Corporation Apparatus and method for testing pixels of flat panel display
JP4144035B2 (ja) * 2003-12-24 2008-09-03 株式会社島津製作所 Ｔｆｔアレイ検査装置

Also Published As

Publication number Publication date
CN101359613B (zh) 2011-01-12
KR100950209B1 (ko) 2010-03-29
TWI419245B (zh) 2013-12-11
CN101359613A (zh) 2009-02-04
TW200905773A (en) 2009-02-01
KR20090013016A (ko) 2009-02-04
JP2009031208A (ja) 2009-02-12

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