JP5067948B2 - レジンブリードアウト防止剤及びレジンブリードアウト防止方法 - Google Patents

レジンブリードアウト防止剤及びレジンブリードアウト防止方法 Download PDF

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JP5067948B2
JP5067948B2 JP2008541530A JP2008541530A JP5067948B2 JP 5067948 B2 JP5067948 B2 JP 5067948B2 JP 2008541530 A JP2008541530 A JP 2008541530A JP 2008541530 A JP2008541530 A JP 2008541530A JP 5067948 B2 JP5067948 B2 JP 5067948B2
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resin
resin bleed
bleed
group
integer
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JPWO2008142960A1 (ja
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玲宏 相場
智晴 三村
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JX Nippon Mining and Metals Corp
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JX Nippon Mining and Metals Corp
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    • C—CHEMISTRY; METALLURGY
    • C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09J—ADHESIVES; NON-MECHANICAL ASPECTS OF ADHESIVE PROCESSES IN GENERAL; ADHESIVE PROCESSES NOT PROVIDED FOR ELSEWHERE; USE OF MATERIALS AS ADHESIVES
    • C09J5/00—Adhesive processes in general; Adhesive processes not provided for elsewhere, e.g. relating to primers
    • C09J5/02—Adhesive processes in general; Adhesive processes not provided for elsewhere, e.g. relating to primers involving pretreatment of the surfaces to be joined
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    • H01L23/00—Details of semiconductor or other solid state devices
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    • H01L23/29—Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection characterised by the material, e.g. carbon
    • H01L23/293—Organic, e.g. plastic
    • C—CHEMISTRY; METALLURGY
    • C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08K—Use of inorganic or non-macromolecular organic substances as compounding ingredients
    • C08K5/00—Use of organic ingredients
    • C08K5/49—Phosphorus-containing compounds
    • C08K5/51—Phosphorus bound to oxygen
    • C08K5/52—Phosphorus bound to oxygen only
    • C08K5/521—Esters of phosphoric acids, e.g. of H3PO4
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    • C09J5/00—Adhesive processes in general; Adhesive processes not provided for elsewhere, e.g. relating to primers
    • C09J5/06—Adhesive processes in general; Adhesive processes not provided for elsewhere, e.g. relating to primers involving heating of the applied adhesive
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C26/00—Coating not provided for in groups C23C2/00 - C23C24/00
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Description

本発明は、リードフレームやプリント配線板等の半導体配線基材とＩＣチップとを樹脂によって接着固定するダイボンディング工程におけるレジンブリードアウト防止剤及び防止方法に関する。
半導体チップとリードフレームやプリント配線板等の基材は、通常ダイボンディング樹脂によって接着固定されている。基材の接着面は、金、銀、パラジウム、銅、ニッケル等のめっきが施されているのが一般的であるが、表面粗さが大き過ぎたり、表面がめっき添加剤、変色防止剤、封孔処理剤等の有機物で汚染されていると、ダイボンディング工程におけるダイボンディング樹脂塗布時に、樹脂または添加剤の滲み出し（レジンブリードアウト（ＲＢＯ））が発生する。このＲＢＯは、ダイボンディング強度を低下させたり、その後の工程であるワイヤーボンディングやモールディングに悪影響を与える。
従来、ＲＢＯを防止するために、接着面のめっき面の表面粗さを小さくし、毛細管現象を抑制したり、表面を洗浄し汚染物を取り除いたりしていた。しかし、接着面の表面粗さは、ダイボンディング強度や、アセンブリマシンの画像認識能力に影響を与えるため、一概に小さくすることはできない。また、表面を洗浄する場合、変色防止被膜や封孔処理被膜まで脱離してしまい問題であった。
これらの問題を解決するために、カルボン酸、チオール等を主成分とする溶液に基材を浸漬し、１〜数分子程度の有機被膜を吸着させることで、基材面の表面粗さを変えたり、変色防止被膜や封孔処理被膜を洗浄剥離することなく、また、吸着する有機被膜が非常に薄いため、ワイヤーボンディング性、モールディング性等のアセンブリ特性に悪影響を与えず、ＲＢＯを防止できることが特許文献１に示されている。
また、更に本発明者らは検討を進めた結果、極性基を有するフルオロアルキル化合物が特許文献１のカルボン酸、チオール化合物等よりＲＢＯ防止効果が高いことを示した（特許文献２）。
しかし、フルオロアルキル化合物はフッ素を含むため、排水が問題となる場合がある。
特開平１１−１９５６６２号公報 特願２００７−５２８９０号
本発明は、排水処理の負荷が小さく、低応力タイプのダイボンディング樹脂を用いた場合においても、ダイボンディング強度や、アセンブリ特性に悪影響を与えず、変色防止処理や封孔処理効果を損なうことのないレジンブリードアウト防止剤を提供することを目的とする。
本発明者らは、鋭意研究を行った結果、レジンブリードアウト防止剤を含有する溶液に基材を浸漬し、めっき面の表面に有機被膜を吸着させることによってレジンブリードアウトを防止する工程で、フッ素を含む化合物よりも排水処理の負荷が小さく、低応力タイプのダイボンディング樹脂を用いた場合においても、ダイボンディング強度や、アセンブリ特性に悪影響を与えず、変色防止処理や封孔処理効果を損なうことのないレジンブリードアウト防止効果をもつ一群の有機化合物を見出し、本発明に至った。
即ち、本発明は以下のとおりである。
（１）下記一般式で表されるリン酸エステルを含有することを特徴とするエポキシ樹脂またはアクリル樹脂から選ばれるダイボンディング樹脂用レジンブリードアウト防止剤。
（式中、Ｒ1は炭素数４〜３０の飽和もしくは不飽和の炭化水素基を表し、Ｒ2は低級アルキレン基を表し、ｎは１〜６の整数、ｍは１または２の整数を表す。）
（２）上記リン酸エステルのＲ1が炭素数８〜２０のアルキル基、アルケニル基、アルキニル基のいずれかであり、Ｒ2がエチレン基であり、ｎは１〜６の整数、ｍは１又は２の整数であることを特徴とする前記（１）に記載のレジンブリードアウト防止剤。
（３）更に、テトラゾール誘導体、トリアゾール誘導体、イミダゾール誘導体、チアゾール誘導体のいずれかを含む含窒素複素環状化合物系の変色防止剤を含有することを特徴とする前記（１）または（２）に記載のレジンブリードアウト防止剤。
（４）前記（１）〜（３）のいずれか一項に記載のレジンブリードアウト防止剤を用いてレジンブリードアウト防止処理を施すことを特徴とするレジンブリードアウト防止方法。
（５）前記（１）〜（３）いずれか一項に記載のレジンブリードアウト防止剤を用いてレジンブリードアウト防止処理され、該レジンブリードアウト防止剤の被膜を有することを特徴とする基材。
本発明のレジンブリードアウト防止剤を用いてリードフレーム、プリント配線板等の半導体配線基材表面にレジンブリードアウト防止機能を有する有機化合物を吸着させるレジンブリードアウト防止処理を行うことによって、変色防止効果や封孔処理効果を損なうことなくダイボンディング工程におけるレジンブリードアウトを防止することが可能である。また、ワイヤーボンディング性やモールディング性等のアセンブリ特性にも悪影響を与えることがない。更に非フッ素系のレジンブリードアウト防止剤であるため、排水処理の負荷が小さい。
図１は、実施例の耐レジンブリードアウト性評価におけるレジンブリードアウト量の測定方法を示す図である。
本発明のレジンブリードアウト防止剤は、下記式で表されるリン酸エステルを含有する。
（式中、Ｒ1は炭素数４〜３０の飽和もしくは不飽和の炭化水素基を表し、Ｒ2は低級アルキレン基を表し、ｎは０〜１０の整数、ｍは１〜３の整数を表す。）
Ｒ1は炭素数４〜３０の飽和もしくは不飽和の炭化水素基を表す。中でも炭素数８〜２０の飽和もしくは不飽和の炭化水素基が好ましい。炭素数が少なすぎるとレジンブリードアウト防止効果が低く、多すぎるとモールディング性（モールディング樹脂の密着性）を低下させる。
飽和もしくは不飽和の炭化水素基としては、二重結合、三重結合を２つ以上有していても良く、また、直鎖状であっても、側鎖を有していても良い。更に、環状炭化水素基や芳香族炭化水素基が主鎖に連結していてもよいが、直鎖状のアルキル基、アルケニル基、アルキニル基が好ましく、直鎖状のアルキル基が特に好ましい。アルケニル基、アルキニル基においては、二重結合、三重結合の位置は特に制限はない。
Ｒ2は炭素数１〜４の低級アルキレン基を示し、メチレン基、エチレン基、プロピレン基が好ましく、エチレン基が特に好ましい。
ｎは０〜１０の整数を表し、１〜６の整数が好ましい。
ｍは１〜３の整数を表す。上記リン酸エステルは、モノエステル、ジエステル、トリエステルのいずれも有用であり、混合物として得られる場合は単離するする必要はなく、混合物として用いることができる。また、ｍが複数の場合、Ｒ1、Ｒ2、およびｎは異なっていても良い。
本発明のレジンブリードアウト防止剤は、水等の溶媒に溶解させ、レジンブリードアウト防止剤溶液として用いる。前記レジンブリードアウト防止剤溶液中の上記リン酸エステルの濃度は１ｍｇ／Ｌ〜１００ｇ／Ｌが好ましく、１０ｍｇ／Ｌ〜１０ｇ／Ｌがより好ましい。上記濃度が１ｍｇ／Ｌ未満ではＲＢＯ防止効果が弱く、１００ｇ／Ｌを超えても効果が飽和し、それ以上の効果を期待できないため好ましくない。
さらに本発明のレジンブリードアウト防止剤は、金属の酸化変色防止剤を含有することができる。該変色防止剤としては、具体的には公知の変色防止剤が使用できるが、特にテトラゾール誘導体、トリアゾール誘導体、イミダゾール誘導体、チアゾール誘導体のいずれかを含む含窒素複素環状化合物系の変色防止剤が好ましい。
これらの変色防止剤としては、例えば、テトラゾール、ベンゾトリアゾール、ベンズイミダゾール、ベンゾチアゾール、メルカプトベンゾチアゾール等が挙げられる。
前記変色防止剤は、レジンブリードアウト防止剤溶液中１ｍｇ／Ｌ〜１００ｇ／Ｌ含有するのが好ましく、１０ｍｇ／Ｌ〜１０ｇ／Ｌがより好ましい。１ｍｇ／Ｌ未満では変色防止効果が弱く、１００ｇ／Ｌを超えても効果が飽和し、それ以上の効果を期待できないため好ましくない。
変色防止剤を含有させることにより、レジンブリードアウト防止効果とともに変色防止効果を同時に付与することができる。
溶媒として水を用いる場合、上記リン酸エステルが水に溶けにくい場合には、必要に応じてアルコール、ケトンなどの有機溶剤を添加することができる。添加する量は、上記リン酸エステルが水に溶けるのに必要な濃度でよいが、通常０．１ｇ／Ｌ〜２００ｇ／Ｌが好ましく、１ｇ／Ｌ〜５０ｇ／Ｌがより好ましい。添加する量が少なすぎると溶解性が低く、また多すぎても上記リン酸エステルを溶解する効果は変わらないので好ましくない。
さらに、上記リン酸エステルが水に溶けにくい場合には、必要に応じて、アニオン系、カチオン系、ノニオン系の界面活性剤のいずれか、またはこれらの混合物を１μｇ／Ｌ〜１０ｇ／Ｌ、好ましくは１０μｇ／Ｌ〜１ｇ／Ｌ添加してもよい。添加する量が少なすぎると溶解性が低く、また多すぎても上記リン酸エステルを溶解する効果は変わらないので好ましくない。
また、レジンブリードアウト防止剤溶液中には、液のｐＨ緩衝性を向上させたい場合は、必要に応じて、リン酸系、ホウ酸系、有機酸系のｐＨ緩衝剤を０．１ｇ／Ｌ〜２００ｇ／Ｌ、好ましくは１〜５０ｇ／Ｌ添加してもよい。０．１ｇ／Ｌ未満ではｐＨ緩衝効果が低く、２００ｇ／Ｌを超えても効果が飽和し、それ以上の効果を期待できないため好ましくない。
また、レジンブリードアウト防止剤溶液中に金属の溶出がある場合は必要に応じて、金属隠蔽剤を使用することができる。この金属隠蔽剤としては、基本的には公知のものが使用できるが、特にアミン系、アミノカルボン酸系、カルボン酸系の錯化剤が好ましく、０．１ｇ／Ｌ〜２００ｇ／Ｌ、好ましくは１ｇ／Ｌ〜５０ｇ／Ｌ添加してもよい。０．１ｇ／Ｌ未満であると金属の錯化力が低く、２００ｇ／Ｌを超えても効果が飽和し、それ以上の効果を期待できないため好ましくない。
レジンブリードアウト防止剤溶液のｐＨは特に限定する必要はないが、通常はｐＨ１〜１４の間であり、ｐＨ２〜１２で処理することが好ましい。この範囲を逸脱すると、素材のダメージが大きく、レジンブリードアウト防止効果が低い。
また、レジンブリードアウト防止剤溶液の温度は、水溶液で行いうる温度範囲で可能であるが、通常５〜９０℃、好ましくは１０〜６０℃とする。温度が低すぎるとレジンブリードアウト効果が低く、９０℃を超えても作業性が悪くなるだけで、温度を高くするメリットがない。
さらに、レジンブリードアウト防止剤溶液での処理時間は、０．１秒〜３００秒で効果を見て適宜調整すればよく、作業の再現性と効率を考慮すると１秒〜６０秒が好ましい。０．１秒未満であると、レジンブリードアウト防止の効果が低く、また作業の再現性が難しくなるし、３００秒を超えても効果が飽和し、かつ作業効率が低くなる。
また、本発明のレジンブリードアウト防止方法は、レジンブリードアウト防止剤溶液に配線基材を浸漬するか、またはレジンブリードアウト防止剤溶液を基材にシャワー、スプレーなどにより散布するか、スピンコーターなどにより塗布するなどして接触させた後、水洗、乾燥すればよい。
配線基材としては、リードフレームやプリント配線板等の半導体配線基材が挙げられ、レジンブリードアウト防止処理を行う基材の表面は、金、銀、パラジウム、銅、ニッケル等のめっきが施されているものが好ましい。
上記のようなレジンブリードアウト防止処理を行うことによって、配線基材表面のめっき面には上記リン酸エステルが吸着し、１〜数分子程度の厚さのリン酸エステルからなる被膜が形成される。そのため、めっき面とダイボンディング樹脂との接触角を増加させ、ダイボンディング樹脂の滲み出しを抑制することが可能となる。なお、吸着するリン酸エステルの被膜は非常に薄いため、ワイヤーボンディング性、モールディング性等のアセンブリ特性には悪影響を与えない。また、変色防止効果や封孔処理効果を損なうこともない。上記の方法によってレジンブリードアウト防止処理を施し、該防止剤の被膜を形成した配線基材、およびそれを用いた半導体パッケージも本発明に包含される。
本発明のレジンブリードアウト防止処理を行った後に用いるダイボンディング樹脂として有効なダイボンディング樹脂としては、低応力タイプのダイボンディング樹脂であってもよく、エポキシ樹脂、アクリル系樹脂等が挙げられ、エポキシ樹脂が好ましい。
以下、実施例に基づいて本発明を説明するが、本発明はこれらの実施例に限定されるものではない。
実施例１〜６、比較例１〜２
銅合金（Ｃｕ：９７．７％−Ｓｎ：２．０％−Ｎｉ：０．２％−Ｐ：０．０３％）製リードフレーム基材に密着性向上のために下地として銅ストライクめっきを行った後、リードフレーム全面に銀めっき、金めっき、銅めっきのいずれかを施した。その後表１に記載したレジンブリードアウト防止剤処理を浸漬により行った。
これらの基材について、ダイボンディングを行い、耐レジンブリードアウト性（耐ＲＢＯ性）、ワイヤーボンディング性（Ｗ／Ｂ性）、モールディング性、耐変色性の評価を行った。結果を表１に示す。表１中、浴組成における「−」は添加しないことを示し、評価における「−」は評価対象外であることを示す。
尚、表１中、Ｒ1、Ｒ2、ｎは、上記一般式で表されるリン酸エステルにおけるＲ1、Ｒ2、ｎを示し、リン酸エステルは、モノエステルとジエステルの１：１混合物を用いた。用いたリン酸エステルのＲ1のアルキル基、アルケニル基はすべて直鎖状であり、実施例５、６におけるアルケニル基は、中央に二重結合を有する１０−エイコセニル基、１１−ドコセニル基である。
耐レジンブリードアウト性の評価は以下の方法で行った。
市販の低応力ダイボンディング用エポキシ樹脂（エイブルボンド８３４０、エイブルスティック社製）をレジンブリードアウト防止処理を行っためっき面に塗布後、大気中、室温で２時間放置した。次に、大気中ホットプレートで、１７５℃、１時間熱硬化した後、エポキシ樹脂塗布部を金属顕微鏡（１００倍）で観察し、図１に示すように最もレジンブリードアウトが激しい部分の滲み量（ＲＢＯ量）を測定し、以下のように評価した。
○： １０μｍ未満
△： １０μｍ以上５０μｍ未満
×： ５０μｍ以上
ワイヤーボンディング性の評価は以下の方法で行った。
２５μｍの金ワイヤーを用いて、超音波併用熱圧着方式（温度：２００℃、荷重：５０ｇ、時間：１０ｍｓ）でワイヤーボンディングを行い、プルテスターでプル強度を測定し、以下のように評価した。
○： １０ｇｆ以上
×： １０ｇｆ未満
モールディング特性の評価は以下の方法で行った。
市販のモールディング用エポキシ樹脂（住友ベークライト製 ＥＭＥ−６３００）をレジンブリードアウト防止処理を行っためっき面に塗布した後、１７５℃、５時間加熱硬化し、その後、密着性（せん断強度）を測定し、以下のように評価した。
○： ２０ｋｇｆ／ｃｍ2以上
△： １０ｋｇｆ／ｃｍ2以上２０ｋｇｆ／ｃｍ2未満
×： １０ｋｇｆ／ｃｍ2未満
耐変色性の評価は、以下の方法で行った。
４０℃、湿度９０％で９６時間加湿後、外観観察を行い、以下のように評価した。
○： 変色がない
×： 変色がある

Claims (5)

  1. 下記一般式で表されるリン酸エステルを含有することを特徴とするエポキシ樹脂またはアクリル樹脂から選ばれるダイボンディング樹脂用レジンブリードアウト防止剤。
    （式中、Ｒ1は炭素数４〜３０の飽和もしくは不飽和の炭化水素基を表し、Ｒ2は低級アルキレン基を表し、ｎは１〜６の整数、ｍは１または２の整数を表す。）
  2. 上記リン酸エステルのＲ1が炭素数８〜２０のアルキル基、アルケニル基、アルキニル基のいずれかであり、Ｒ2がエチレン基であり、ｎは１〜６の整数、ｍは１又は２の整数であることを特徴とする請求項１に記載のレジンブリードアウト防止剤。
  3. 更に、テトラゾール誘導体、トリアゾール誘導体、イミダゾール誘導体、チアゾール誘導体のいずれかを含む含窒素複素環状化合物系の変色防止剤を含有することを特徴とする請求項１または２に記載のレジンブリードアウト防止剤。
  4. 請求項１〜３のいずれか一項に記載のレジンブリードアウト防止剤を用いてレジンブリードアウト防止処理を施すことを特徴とするレジンブリードアウト防止方法。
  5. 請求項１〜３のいずれか一項に記載のレジンブリードアウト防止剤を用いてレジンブリードアウト防止処理され、該レジンブリードアウト防止剤の被膜を有することを特徴とする基材。
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