JP5064094B2 - 半導体記憶装置およびその製造方法 - Google Patents
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- 239000004065 semiconductor Substances 0.000 title claims description 121
- 238000004519 manufacturing process Methods 0.000 title claims description 12
- 230000010287 polarization Effects 0.000 claims description 61
- 239000000758 substrate Substances 0.000 claims description 44
- 229910052451 lead zirconate titanate Inorganic materials 0.000 claims description 42
- 239000013078 crystal Substances 0.000 claims description 33
- 230000002269 spontaneous effect Effects 0.000 claims description 26
- 230000005669 field effect Effects 0.000 claims description 9
- RKTYLMNFRDHKIL-UHFFFAOYSA-N copper;5,10,15,20-tetraphenylporphyrin-22,24-diide Chemical compound [Cu+2].C1=CC(C(=C2C=CC([N-]2)=C(C=2C=CC=CC=2)C=2C=CC(N=2)=C(C=2C=CC=CC=2)C2=CC=C3[N-]2)C=2C=CC=CC=2)=NC1=C3C1=CC=CC=C1 RKTYLMNFRDHKIL-UHFFFAOYSA-N 0.000 claims description 7
- 239000000463 material Substances 0.000 claims description 7
- 229910052984 zinc sulfide Inorganic materials 0.000 claims description 5
- HFGPZNIAWCZYJU-UHFFFAOYSA-N lead zirconate titanate Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[Ti+4].[Zr+4].[Pb+2] HFGPZNIAWCZYJU-UHFFFAOYSA-N 0.000 claims description 3
- 239000010408 film Substances 0.000 description 214
- XLOMVQKBTHCTTD-UHFFFAOYSA-N Zinc monoxide Chemical compound [Zn]=O XLOMVQKBTHCTTD-UHFFFAOYSA-N 0.000 description 97
- 239000011787 zinc oxide Substances 0.000 description 48
- 238000000034 method Methods 0.000 description 21
- 230000015654 memory Effects 0.000 description 16
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 11
- 230000007423 decrease Effects 0.000 description 7
- 230000014759 maintenance of location Effects 0.000 description 7
- 230000008569 process Effects 0.000 description 7
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 6
- 238000010586 diagram Methods 0.000 description 6
- 239000000203 mixture Substances 0.000 description 6
- 229910052710 silicon Inorganic materials 0.000 description 6
- 239000010703 silicon Substances 0.000 description 6
- 238000002441 X-ray diffraction Methods 0.000 description 5
- 238000009825 accumulation Methods 0.000 description 5
- 239000003990 capacitor Substances 0.000 description 5
- 230000015572 biosynthetic process Effects 0.000 description 4
- 238000010894 electron beam technology Methods 0.000 description 4
- 239000012528 membrane Substances 0.000 description 4
- 239000000969 carrier Substances 0.000 description 3
- 238000005566 electron beam evaporation Methods 0.000 description 3
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- 229910004121 SrRuO Inorganic materials 0.000 description 2
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 2
- 230000002238 attenuated effect Effects 0.000 description 2
- 238000000151 deposition Methods 0.000 description 2
- 230000006866 deterioration Effects 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
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- 239000011777 magnesium Substances 0.000 description 2
- 238000005259 measurement Methods 0.000 description 2
- 239000010955 niobium Substances 0.000 description 2
- 239000001301 oxygen Substances 0.000 description 2
- 229910052760 oxygen Inorganic materials 0.000 description 2
- 238000000059 patterning Methods 0.000 description 2
- 230000000717 retained effect Effects 0.000 description 2
- 238000004544 sputter deposition Methods 0.000 description 2
- GYHNNYVSQQEPJS-UHFFFAOYSA-N Gallium Chemical compound [Ga] GYHNNYVSQQEPJS-UHFFFAOYSA-N 0.000 description 1
- JMASRVWKEDWRBT-UHFFFAOYSA-N Gallium nitride Chemical compound [Ga]#N JMASRVWKEDWRBT-UHFFFAOYSA-N 0.000 description 1
- FYYHWMGAXLPEAU-UHFFFAOYSA-N Magnesium Chemical compound [Mg] FYYHWMGAXLPEAU-UHFFFAOYSA-N 0.000 description 1
- 229910052777 Praseodymium Inorganic materials 0.000 description 1
- 229910052772 Samarium Inorganic materials 0.000 description 1
- 229910006404 SnO 2 Inorganic materials 0.000 description 1
- 229910002367 SrTiO Inorganic materials 0.000 description 1
- 238000003917 TEM image Methods 0.000 description 1
- HCHKCACWOHOZIP-UHFFFAOYSA-N Zinc Chemical compound [Zn] HCHKCACWOHOZIP-UHFFFAOYSA-N 0.000 description 1
- QAKZFDCCFWBSGH-UHFFFAOYSA-N [Ru].[Sr] Chemical compound [Ru].[Sr] QAKZFDCCFWBSGH-UHFFFAOYSA-N 0.000 description 1
- 230000009471 action Effects 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 230000003321 amplification Effects 0.000 description 1
- 238000000137 annealing Methods 0.000 description 1
- NWAIGJYBQQYSPW-UHFFFAOYSA-N azanylidyneindigane Chemical compound [In]#N NWAIGJYBQQYSPW-UHFFFAOYSA-N 0.000 description 1
- 230000004888 barrier function Effects 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 238000005229 chemical vapour deposition Methods 0.000 description 1
- 238000002425 crystallisation Methods 0.000 description 1
- 230000008025 crystallization Effects 0.000 description 1
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- 238000001514 detection method Methods 0.000 description 1
- 230000002542 deteriorative effect Effects 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 230000002349 favourable effect Effects 0.000 description 1
- 229910052733 gallium Inorganic materials 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 239000001257 hydrogen Substances 0.000 description 1
- 229910052739 hydrogen Inorganic materials 0.000 description 1
- 125000004435 hydrogen atom Chemical class [H]* 0.000 description 1
- AMGQUBHHOARCQH-UHFFFAOYSA-N indium;oxotin Chemical compound [In].[Sn]=O AMGQUBHHOARCQH-UHFFFAOYSA-N 0.000 description 1
- 229910052741 iridium Inorganic materials 0.000 description 1
- GKOZUEZYRPOHIO-UHFFFAOYSA-N iridium atom Chemical compound [Ir] GKOZUEZYRPOHIO-UHFFFAOYSA-N 0.000 description 1
- 229910052746 lanthanum Inorganic materials 0.000 description 1
- FZLIPJUXYLNCLC-UHFFFAOYSA-N lanthanum atom Chemical compound [La] FZLIPJUXYLNCLC-UHFFFAOYSA-N 0.000 description 1
- 230000007774 longterm Effects 0.000 description 1
- 229910052749 magnesium Inorganic materials 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000001451 molecular beam epitaxy Methods 0.000 description 1
- 229910021334 nickel silicide Inorganic materials 0.000 description 1
- RUFLMLWJRZAWLJ-UHFFFAOYSA-N nickel silicide Chemical compound [Ni]=[Si]=[Ni] RUFLMLWJRZAWLJ-UHFFFAOYSA-N 0.000 description 1
- 229910052758 niobium Inorganic materials 0.000 description 1
- GUCVJGMIXFAOAE-UHFFFAOYSA-N niobium atom Chemical compound [Nb] GUCVJGMIXFAOAE-UHFFFAOYSA-N 0.000 description 1
- 238000003199 nucleic acid amplification method Methods 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 229910052697 platinum Inorganic materials 0.000 description 1
- 238000005498 polishing Methods 0.000 description 1
- PUDIUYLPXJFUGB-UHFFFAOYSA-N praseodymium atom Chemical compound [Pr] PUDIUYLPXJFUGB-UHFFFAOYSA-N 0.000 description 1
- 230000001681 protective effect Effects 0.000 description 1
- 230000003252 repetitive effect Effects 0.000 description 1
- KZUNJOHGWZRPMI-UHFFFAOYSA-N samarium atom Chemical compound [Sm] KZUNJOHGWZRPMI-UHFFFAOYSA-N 0.000 description 1
- 229910052594 sapphire Inorganic materials 0.000 description 1
- 239000010980 sapphire Substances 0.000 description 1
- 238000004335 scaling law Methods 0.000 description 1
- 229910021332 silicide Inorganic materials 0.000 description 1
- FVBUAEGBCNSCDD-UHFFFAOYSA-N silicide(4-) Chemical compound [Si-4] FVBUAEGBCNSCDD-UHFFFAOYSA-N 0.000 description 1
- 235000012239 silicon dioxide Nutrition 0.000 description 1
- 239000000377 silicon dioxide Substances 0.000 description 1
- 238000009751 slip forming Methods 0.000 description 1
- 238000003860 storage Methods 0.000 description 1
- 229910052712 strontium Inorganic materials 0.000 description 1
- CIOAGBVUUVVLOB-UHFFFAOYSA-N strontium atom Chemical compound [Sr] CIOAGBVUUVVLOB-UHFFFAOYSA-N 0.000 description 1
- VEALVRVVWBQVSL-UHFFFAOYSA-N strontium titanate Chemical compound [Sr+2].[O-][Ti]([O-])=O VEALVRVVWBQVSL-UHFFFAOYSA-N 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 230000002194 synthesizing effect Effects 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
- XOLBLPGZBRYERU-UHFFFAOYSA-N tin dioxide Chemical compound O=[Sn]=O XOLBLPGZBRYERU-UHFFFAOYSA-N 0.000 description 1
- 229910001887 tin oxide Inorganic materials 0.000 description 1
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 1
- 229910052721 tungsten Inorganic materials 0.000 description 1
- 239000010937 tungsten Substances 0.000 description 1
- LEONUFNNVUYDNQ-UHFFFAOYSA-N vanadium atom Chemical compound [V] LEONUFNNVUYDNQ-UHFFFAOYSA-N 0.000 description 1
- 229910052725 zinc Inorganic materials 0.000 description 1
- 239000011701 zinc Substances 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
- H01L29/76—Unipolar devices, e.g. field effect transistors
- H01L29/772—Field effect transistors
- H01L29/78—Field effect transistors with field effect produced by an insulated gate
- H01L29/78391—Field effect transistors with field effect produced by an insulated gate the gate comprising a layer which is used for its ferroelectric properties
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/40—Electrodes ; Multistep manufacturing processes therefor
- H01L29/401—Multistep manufacturing processes
- H01L29/4011—Multistep manufacturing processes for data storage electrodes
- H01L29/40111—Multistep manufacturing processes for data storage electrodes the electrodes comprising a layer which is used for its ferroelectric properties
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/66007—Multistep manufacturing processes
- H01L29/66075—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials
- H01L29/66227—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials the devices being controllable only by the electric current supplied or the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched, e.g. three-terminal devices
- H01L29/66409—Unipolar field-effect transistors
- H01L29/66477—Unipolar field-effect transistors with an insulated gate, i.e. MISFET
- H01L29/6684—Unipolar field-effect transistors with an insulated gate, i.e. MISFET with a ferroelectric gate insulator
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10B—ELECTRONIC MEMORY DEVICES
- H10B53/00—Ferroelectric RAM [FeRAM] devices comprising ferroelectric memory capacitors
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- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Physics & Mathematics (AREA)
- Ceramic Engineering (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Manufacturing & Machinery (AREA)
- Semiconductor Memories (AREA)
- Non-Volatile Memory (AREA)
- Thin Film Transistor (AREA)
Description
アプライド・フィジックス・レターズ(Applied Physics Letters)Vol. 68、1996年6月17日、p.3650〜3652 アプライド・フィジックス・レターズ(Applied Physics Letters)(Applied Physics Letters) Vol.86 2005年4月 p.162902−1〜162902−3 ジャパニーズ・ジャーナル・オブ・アプライド・フィジックス(Japanese Journal of Applied Physics)Vol.48、2006年12月、p.L1266〜L1269
。そのため、図15に示すように、c軸に垂直な(0001)面、即ちc面(酸素面で終端された面を−c面、亜鉛面で終端された面を+c面という)は、極性面となり、−c面に垂直な方向に向いた自発分極が生じる。
図1は、本発明の第1の実施形態における半導体記憶装置の構成を模式的に示した断面図である。
第1の実施形態では、半導体膜4の結晶配向(自発分極の方向)を、強誘電体膜3の結晶配向によって制御したが、強誘電体膜3の結晶配向を定めるには、特定の結晶構造、及び結晶配向を有する基板を用いる必要がある。本実施形態においては、基板の種類に制約を受けずに、結晶配向が所定の方向に制御された半導体膜を備えた半導体記憶装置の製造方法を提供する。
2 ゲート電極(SRO膜)
3 強誘電体膜(PZT膜)
4 半導体膜(ZnO膜)
5、6 ソース、ドレイン電極(Ti膜/Pt膜)
22 レジスト膜
81 ZnO基板
82 MgZnO膜
83 半導体膜(ZnO膜)
84 ソース、ドレイン電極(Pt膜)
85 強誘電体膜(PZT膜)
86 ゲート電極(Pt膜)
87 AlN膜
88 支持基板
Claims (13)
- 強誘電体膜と半導体膜との界面をチャネルとする電界効果トランジスタを備えた半導体記憶装置であって、
前記電界効果トランジスタは、
前記強誘電体膜の分極状態を制御する電圧が印加されるゲート電極と、
前記チャネルの両端に設けられ、前記分極状態に応じて前記チャネルを流れる電流を検出するソース、ドレイン電極と
を備え、
前記半導体膜は、自発分極を有する材料からなり、該自発分極の方向が、前記強誘電体膜と半導体膜との界面に対して平行であり、
前記半導体膜は、ウルツ鉱型の結晶構造を有し、<11-20>方向、または<1-100>方向が、前記半導体膜の主面に対して垂直である、半導体記憶装置。 - 前記半導体膜は、前記強誘電体膜上にエピタキシャル成長により形成されたものであり、
前記自発分極の方向は、前記強誘電体膜の結晶配向によって制御されている、請求項1に記載の半導体記憶装置。 - 前記半導体膜は、ZnO、GaN、InN、またはInGaNからなる、請求項1に記載の半導体記憶装置。
- 前記半導体膜の膜厚は、60nm以下である、請求項1に記載の半導体記憶装置。
- 前記半導体膜のキャリア濃度は、1×1017cm−3以下である、請求項4に記載の半導体記憶装置。
- 前記強誘電体膜は、正方晶の結晶構造を有するチタン酸ジルコン酸鉛(Pb(Zr1−x,Tix)O3(0≦x≦1)からなり、<001>方向が、前記強誘電体膜の主面に対して垂直である、請求項2に記載の半導体記憶装置。
- 前記強誘電体膜の面内の<100>方向と、前記半導体膜の面内の<1-102>方向とが一致している、請求項6に記載の半導体記憶装置。
- 前記強誘電体膜は、菱面晶の結晶構造を有するチタン酸ジルコン酸鉛(Pb(Zr1−x,Tix)O3(0≦x≦1)からなり、<100>方向が、前記強誘電体膜の主面に対して垂直である、請求項2に記載の半導体記憶装置。
- 前記強誘電体膜の面内の<001>方向と、前記半導体膜の面内の<1-102>方向とが一致している、請求項8に記載の半導体記憶装置。
- 請求項1に記載の半導体記憶装置の製造方法であって、
基板上にゲート電極を形成する工程と、
前記基板上に、前記ゲート電極を覆うように、強誘電体膜及び半導体膜を連続して形成する工程と、
前記半導体膜の表面に、ソース、ドレイン電極を形成する工程と
を有し、
前記半導体膜の自発分極の方向は、前記強誘電体膜の結晶配向によって制御されている、半導体記憶装置の製造方法。 - 前記半導体膜は、前記強誘電体膜上を、エピタキシャル成長により形成される、請求項10に記載の半導体記憶装置の製造方法。
- 請求項1に記載の半導体記憶装置の製造方法であって、
表面が無極性面になるように切り出された基板を用意する工程と、
前記基板上に、半導体膜をエピタキシャル成長により形成する工程と、
前記半導体膜上に、ソース、ドレイン電極を形成する工程と、
前記半導体膜上に、前記ソース、ドレイン電極を覆うように、強誘電体膜を形成する工程と、
前記強誘電体膜上に、ゲート電極を形成する工程と、
前記強誘電体膜上に、前記ゲート電極を覆うように、絶縁膜を形成する工程と、
前記絶縁膜を、前記ゲート電極の表面が露出するまで平坦化する工程と、
前記平坦化された面を支持基板に接着する工程と、
前記基板を、前記半導体膜が露出するまで除去する工程と
を有する、半導体記憶装置の製造方法。 - 前記基板は、前記半導体膜と同じ材料からなる、請求項12に記載の半導体記憶装置の製造方法。
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JP2007107088A JP5064094B2 (ja) | 2007-04-16 | 2007-04-16 | 半導体記憶装置およびその製造方法 |
US12/033,481 US7732847B2 (en) | 2007-04-16 | 2008-02-19 | Semiconductor memory device including a semiconductor film made of a material having a spontaneous polarization and method for fabricating the same |
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JP5064094B2 true JP5064094B2 (ja) | 2012-10-31 |
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Families Citing this family (24)
Publication number | Priority date | Publication date | Assignee | Title |
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JP5190275B2 (ja) * | 2008-01-09 | 2013-04-24 | パナソニック株式会社 | 半導体メモリセル及びそれを用いた半導体メモリアレイ |
JP5419983B2 (ja) * | 2009-07-31 | 2014-02-19 | 株式会社東芝 | 不揮発性記憶装置 |
KR101547328B1 (ko) * | 2009-09-25 | 2015-08-25 | 삼성전자주식회사 | 강유전체 메모리 소자 및 그 동작 방법 |
KR101788521B1 (ko) | 2009-10-30 | 2017-10-19 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | 반도체 장치 |
JP5899519B2 (ja) | 2009-11-05 | 2016-04-06 | パナソニックIpマネジメント株式会社 | 固体撮像装置 |
WO2011062029A1 (en) * | 2009-11-18 | 2011-05-26 | Semiconductor Energy Laboratory Co., Ltd. | Memory device |
WO2011070929A1 (en) | 2009-12-11 | 2011-06-16 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and electronic device |
KR20190038687A (ko) | 2010-02-05 | 2019-04-08 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | 반도체 장치, 및 반도체 장치의 제조 방법 |
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US6329741B1 (en) * | 1999-04-30 | 2001-12-11 | The Trustees Of Princeton University | Multilayer ceramic piezoelectric laminates with zinc oxide conductors |
US6396094B1 (en) * | 2000-05-12 | 2002-05-28 | Agilent Technologies, Inc. | Oriented rhombohedral composition of PbZr1-xTixO3 thin films for low voltage operation ferroelectric RAM |
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