JP5061653B2 - 半導体装置及びその製造方法 - Google Patents
半導体装置及びその製造方法 Download PDFInfo
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- JP5061653B2 JP5061653B2 JP2007051268A JP2007051268A JP5061653B2 JP 5061653 B2 JP5061653 B2 JP 5061653B2 JP 2007051268 A JP2007051268 A JP 2007051268A JP 2007051268 A JP2007051268 A JP 2007051268A JP 5061653 B2 JP5061653 B2 JP 5061653B2
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- 239000004065 semiconductor Substances 0.000 title claims description 50
- 238000004519 manufacturing process Methods 0.000 title claims description 16
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims description 32
- 229910052802 copper Inorganic materials 0.000 claims description 28
- 239000010949 copper Substances 0.000 claims description 28
- 238000000034 method Methods 0.000 claims description 16
- 230000001681 protective effect Effects 0.000 claims description 14
- 238000001039 wet etching Methods 0.000 claims description 8
- 238000001312 dry etching Methods 0.000 claims description 5
- 230000015572 biosynthetic process Effects 0.000 claims description 3
- 239000010410 layer Substances 0.000 description 32
- 238000005530 etching Methods 0.000 description 9
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 7
- 229910052814 silicon oxide Inorganic materials 0.000 description 7
- 229920001721 polyimide Polymers 0.000 description 6
- 238000010586 diagram Methods 0.000 description 4
- 238000000206 photolithography Methods 0.000 description 4
- QTBSBXVTEAMEQO-UHFFFAOYSA-N Acetic acid Chemical compound CC(O)=O QTBSBXVTEAMEQO-UHFFFAOYSA-N 0.000 description 3
- 239000007789 gas Substances 0.000 description 3
- 239000000243 solution Substances 0.000 description 3
- 239000000758 substrate Substances 0.000 description 3
- NBIIXXVUZAFLBC-UHFFFAOYSA-N Phosphoric acid Chemical compound OP(O)(O)=O NBIIXXVUZAFLBC-UHFFFAOYSA-N 0.000 description 2
- 239000004642 Polyimide Substances 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000001020 plasma etching Methods 0.000 description 2
- 238000007747 plating Methods 0.000 description 2
- MYMOFIZGZYHOMD-UHFFFAOYSA-N Dioxygen Chemical compound O=O MYMOFIZGZYHOMD-UHFFFAOYSA-N 0.000 description 1
- GRYLNZFGIOXLOG-UHFFFAOYSA-N Nitric acid Chemical compound O[N+]([O-])=O GRYLNZFGIOXLOG-UHFFFAOYSA-N 0.000 description 1
- 206010034972 Photosensitivity reaction Diseases 0.000 description 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 239000002253 acid Substances 0.000 description 1
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- 229910000147 aluminium phosphate Inorganic materials 0.000 description 1
- 239000007864 aqueous solution Substances 0.000 description 1
- 229910001882 dioxygen Inorganic materials 0.000 description 1
- OJCDKHXKHLJDOT-UHFFFAOYSA-N fluoro hypofluorite;silicon Chemical compound [Si].FOF OJCDKHXKHLJDOT-UHFFFAOYSA-N 0.000 description 1
- 239000011229 interlayer Substances 0.000 description 1
- 150000002500 ions Chemical class 0.000 description 1
- 229910017604 nitric acid Inorganic materials 0.000 description 1
- 229920002120 photoresistant polymer Polymers 0.000 description 1
- 230000036211 photosensitivity Effects 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
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- H01L23/28—Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection
- H01L23/31—Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection characterised by the arrangement or shape
- H01L23/3157—Partial encapsulation or coating
- H01L23/3192—Multilayer coating
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- H01L2224/02—Bonding areas; Manufacturing methods related thereto
- H01L2224/0212—Auxiliary members for bonding areas, e.g. spacers
- H01L2224/02122—Auxiliary members for bonding areas, e.g. spacers being formed on the semiconductor or solid-state body
- H01L2224/02123—Auxiliary members for bonding areas, e.g. spacers being formed on the semiconductor or solid-state body inside the bonding area
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- H01L2224/04—Structure, shape, material or disposition of the bonding areas prior to the connecting process
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- H01L2224/05571—Disposition the external layer being disposed in a recess of the surface
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Description
Claims (5)
- 半導体集積回路チップのパッド形成面に形成された銅からなる電極パッドと、
前記電極パッドの周囲の前記パッド形成面に前記電極パッドを囲うように形成され、前記電極パッドの形成において発生した前記電極パッドの周囲の前記パッド形成面に残る銅の層を分断する溝部と、
前記電極パッドの一部上面が露出し、かつ前記溝部を含む前記電極パッドの周囲を覆うように前記パッド形成面の上に形成された保護膜と
を少なくとも備えることを特徴とする半導体装置。 - 請求項1記載の半導体装置において、
前記溝部は、前記電極パッド部が形成された後に形成されたものである
ことを特徴とする半導体装置。 - 請求項1又は2記載の半導体装置において、
前記電極パッドの周囲に、複数の前記溝部が形成されている
ことを特徴とする半導体装置。 - 半導体集積回路チップのパッド形成面に銅からなる膜が形成された状態とする第1工程と、
前記銅からなる膜をマスクパターンを用いた選択的なウエットエッチングにより加工して前記パッド形成面に電極パッドが形成された状態とする第2工程と、
前記電極パッドが形成された後で、マスクパターンを用いた選択的なドライエッチングにより、前記電極パッドの周囲の前記パッド形成面に前記電極パッドを囲う溝部が形成された状態とする第3工程と、
前記電極パッドの一部上面が露出し、かつ前記溝部を含む前記電極パッドの周囲を覆う保護膜が、前記パッド形成面の上に形成された状態とする第4工程と
を少なくとも備えることを特徴とする半導体装置の製造方法。 - 請求項4記載の半導体装置の製造方法において、
前記電極パッドの周囲に、複数の前記溝部が形成された状態とする
ことを特徴とする半導体装置の製造方法。
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2007051268A JP5061653B2 (ja) | 2007-03-01 | 2007-03-01 | 半導体装置及びその製造方法 |
US12/035,964 US7772699B2 (en) | 2007-03-01 | 2008-02-22 | Semiconductor device and method of manufacturing the same |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2007051268A JP5061653B2 (ja) | 2007-03-01 | 2007-03-01 | 半導体装置及びその製造方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2008218553A JP2008218553A (ja) | 2008-09-18 |
JP5061653B2 true JP5061653B2 (ja) | 2012-10-31 |
Family
ID=39732492
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2007051268A Expired - Fee Related JP5061653B2 (ja) | 2007-03-01 | 2007-03-01 | 半導体装置及びその製造方法 |
Country Status (2)
Country | Link |
---|---|
US (1) | US7772699B2 (ja) |
JP (1) | JP5061653B2 (ja) |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US10658395B2 (en) | 2017-03-24 | 2020-05-19 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
KR20230143273A (ko) * | 2022-04-05 | 2023-10-12 | 삼성전자주식회사 | 반도체 패키지 |
Family Cites Families (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH03286541A (ja) * | 1990-04-03 | 1991-12-17 | Nec Corp | 半導体装置 |
JPH11340265A (ja) * | 1998-05-22 | 1999-12-10 | Sony Corp | 半導体装置及びその製造方法 |
JP3849110B2 (ja) * | 1998-06-29 | 2006-11-22 | 富士通株式会社 | 金属配線形成方法 |
JP3511172B2 (ja) * | 2001-03-30 | 2004-03-29 | 富士通カンタムデバイス株式会社 | 高周波半導体装置 |
JP2004071906A (ja) | 2002-08-07 | 2004-03-04 | Rohm Co Ltd | 半導体装置 |
JP2004281491A (ja) * | 2003-03-13 | 2004-10-07 | Toshiba Corp | 半導体装置及びその製造方法 |
JP3739375B2 (ja) * | 2003-11-28 | 2006-01-25 | 沖電気工業株式会社 | 半導体装置及びその製造方法 |
-
2007
- 2007-03-01 JP JP2007051268A patent/JP5061653B2/ja not_active Expired - Fee Related
-
2008
- 2008-02-22 US US12/035,964 patent/US7772699B2/en not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
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JP2008218553A (ja) | 2008-09-18 |
US7772699B2 (en) | 2010-08-10 |
US20080211094A1 (en) | 2008-09-04 |
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