JP5051860B2 - メカニカルシール装置 - Google Patents
メカニカルシール装置 Download PDFInfo
- Publication number
- JP5051860B2 JP5051860B2 JP2011143621A JP2011143621A JP5051860B2 JP 5051860 B2 JP5051860 B2 JP 5051860B2 JP 2011143621 A JP2011143621 A JP 2011143621A JP 2011143621 A JP2011143621 A JP 2011143621A JP 5051860 B2 JP5051860 B2 JP 5051860B2
- Authority
- JP
- Japan
- Prior art keywords
- rotary
- stationary
- ring
- seal ring
- arc
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16J—PISTONS; CYLINDERS; SEALINGS
- F16J15/00—Sealings
- F16J15/16—Sealings between relatively-moving surfaces
- F16J15/34—Sealings between relatively-moving surfaces with slip-ring pressed against a more or less radial face on one member
- F16J15/3404—Sealings between relatively-moving surfaces with slip-ring pressed against a more or less radial face on one member and characterised by parts or details relating to lubrication, cooling or venting of the seal
- F16J15/3408—Sealings between relatively-moving surfaces with slip-ring pressed against a more or less radial face on one member and characterised by parts or details relating to lubrication, cooling or venting of the seal at least one ring having an uneven slipping surface
- F16J15/3412—Sealings between relatively-moving surfaces with slip-ring pressed against a more or less radial face on one member and characterised by parts or details relating to lubrication, cooling or venting of the seal at least one ring having an uneven slipping surface with cavities
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16J—PISTONS; CYLINDERS; SEALINGS
- F16J15/00—Sealings
- F16J15/16—Sealings between relatively-moving surfaces
- F16J15/34—Sealings between relatively-moving surfaces with slip-ring pressed against a more or less radial face on one member
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16J—PISTONS; CYLINDERS; SEALINGS
- F16J15/00—Sealings
- F16J15/16—Sealings between relatively-moving surfaces
- F16J15/34—Sealings between relatively-moving surfaces with slip-ring pressed against a more or less radial face on one member
- F16J15/3404—Sealings between relatively-moving surfaces with slip-ring pressed against a more or less radial face on one member and characterised by parts or details relating to lubrication, cooling or venting of the seal
- F16J15/3408—Sealings between relatively-moving surfaces with slip-ring pressed against a more or less radial face on one member and characterised by parts or details relating to lubrication, cooling or venting of the seal at least one ring having an uneven slipping surface
- F16J15/3412—Sealings between relatively-moving surfaces with slip-ring pressed against a more or less radial face on one member and characterised by parts or details relating to lubrication, cooling or venting of the seal at least one ring having an uneven slipping surface with cavities
- F16J15/342—Sealings between relatively-moving surfaces with slip-ring pressed against a more or less radial face on one member and characterised by parts or details relating to lubrication, cooling or venting of the seal at least one ring having an uneven slipping surface with cavities with means for feeding fluid directly to the face
Landscapes
- Engineering & Computer Science (AREA)
- General Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Mechanical Sealing (AREA)
Description
明の実施形態を図面に基づいて説明する。
吹き出した圧力流体が、回転シール面11に形成された円弧状溝12に導入される共にシール面11、21同士の間にも広がり、圧力流体の圧縮性に起因したニューマティックハンマ現象が抑制され、回転密封環10の振動が抑制される。
った加速度を計測し、当該加速度の値に基づいて振動の有無の評価を行った。計測された加速度が0.05G未満である場合には振動無しと評価し、計測された加速度が0.05以上である場合には振動有りと評価した。
Claims (4)
-
回転軸とハウジングとの嵌合間に回転密封環と静止密封環とが対向して配置されたメカニカルシール装置であって、
前記回転軸に連結されて回転シール面を有し、前記回転軸の軸心を中心として円環状に配置されると共に仕切壁により仕切られて形成された複数の円弧状溝が前記回転シール面に設けられた前記回転密封環と、
前記回転密封環の回転シール面に対向する静止シール面を有する前記静止密封環と、
前記静止密封環を前記回転密封環に向けて押圧する付勢手段と、
前記静止密封環の前記静止シール面に形成されて、圧力ガスを供給する流体供給通路と連通可能な吐出開口部と、を具備し、
前記吐出開口部の周方向長さ(W3)が、前記仕切壁の周方向長さ(W1)に対して1/2以上(W3≧W1/2)に形成され、
前記吐出開口部の周方向長さ(W3)が、前記円弧状溝の周方向長さ(W2)より小さく(W3<W2)形成されているメカニカルシール装置。 -
前記吐出開口部は、円形状又は円弧状に開口するように形成されている請求項1記載のメカニカルシール装置。
- 前記回転密封環の前記回転シール面又は前記静止密封環の前記静止シール面の少なくともいずれか一方に、前記回転軸の回転により動圧を発生する動圧発生溝が形成されていることを特徴とする請求項1又は2記載のメカニカルシール装置。
- 前記仕切壁は、前記回転シール面より相対的に低く、且つ、前記円弧状溝の底面より相対的に高く形成されている請求項1〜3の何れかに記載のメカニカルシール装置。
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2011143621A JP5051860B2 (ja) | 2004-11-09 | 2011-06-29 | メカニカルシール装置 |
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2004325471 | 2004-11-09 | ||
JP2004325471 | 2004-11-09 | ||
JP2011143621A JP5051860B2 (ja) | 2004-11-09 | 2011-06-29 | メカニカルシール装置 |
Related Parent Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2006544835A Division JP4820471B2 (ja) | 2004-11-09 | 2005-10-28 | メカニカルシール装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2011220528A JP2011220528A (ja) | 2011-11-04 |
JP5051860B2 true JP5051860B2 (ja) | 2012-10-17 |
Family
ID=36336384
Family Applications (2)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2006544835A Active JP4820471B2 (ja) | 2004-11-09 | 2005-10-28 | メカニカルシール装置 |
JP2011143621A Active JP5051860B2 (ja) | 2004-11-09 | 2011-06-29 | メカニカルシール装置 |
Family Applications Before (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2006544835A Active JP4820471B2 (ja) | 2004-11-09 | 2005-10-28 | メカニカルシール装置 |
Country Status (6)
Country | Link |
---|---|
US (1) | US7744094B2 (ja) |
JP (2) | JP4820471B2 (ja) |
KR (2) | KR101119547B1 (ja) |
CN (2) | CN101057093B (ja) |
TW (2) | TWI382133B (ja) |
WO (1) | WO2006051702A1 (ja) |
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EE01022U1 (et) * | 2009-12-11 | 2011-04-15 | Eesti Energia ?litööstus AS | Trummelreaktori otstihenduss?lm |
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- 2005-10-28 US US11/667,166 patent/US7744094B2/en active Active
- 2005-10-28 WO PCT/JP2005/019923 patent/WO2006051702A1/ja active Application Filing
- 2005-10-28 KR KR1020117023226A patent/KR101119547B1/ko active IP Right Grant
- 2005-10-28 KR KR1020077010402A patent/KR101119546B1/ko active IP Right Grant
- 2005-10-28 JP JP2006544835A patent/JP4820471B2/ja active Active
- 2005-11-08 TW TW094139130A patent/TWI382133B/zh active
- 2005-11-08 TW TW101126256A patent/TWI471495B/zh active
-
2011
- 2011-06-29 JP JP2011143621A patent/JP5051860B2/ja active Active
Also Published As
Publication number | Publication date |
---|---|
CN102322526A (zh) | 2012-01-18 |
KR20070090885A (ko) | 2007-09-06 |
TWI382133B (zh) | 2013-01-11 |
US7744094B2 (en) | 2010-06-29 |
KR101119546B1 (ko) | 2012-02-28 |
CN101057093A (zh) | 2007-10-17 |
JP4820471B2 (ja) | 2011-11-24 |
CN101057093B (zh) | 2013-02-13 |
JPWO2006051702A1 (ja) | 2008-05-29 |
TW200628712A (en) | 2006-08-16 |
CN102322526B (zh) | 2014-10-22 |
TWI471495B (zh) | 2015-02-01 |
US20070296156A1 (en) | 2007-12-27 |
KR101119547B1 (ko) | 2012-02-28 |
KR20110118842A (ko) | 2011-11-01 |
JP2011220528A (ja) | 2011-11-04 |
TW201243190A (en) | 2012-11-01 |
WO2006051702A1 (ja) | 2006-05-18 |
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