KR20070090885A - 메카니컬 실링장치 - Google Patents
메카니컬 실링장치 Download PDFInfo
- Publication number
- KR20070090885A KR20070090885A KR1020077010402A KR20077010402A KR20070090885A KR 20070090885 A KR20070090885 A KR 20070090885A KR 1020077010402 A KR1020077010402 A KR 1020077010402A KR 20077010402 A KR20077010402 A KR 20077010402A KR 20070090885 A KR20070090885 A KR 20070090885A
- Authority
- KR
- South Korea
- Prior art keywords
- sealing ring
- sealing
- discharge opening
- stationary
- mechanical
- Prior art date
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Classifications
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16J—PISTONS; CYLINDERS; SEALINGS
- F16J15/00—Sealings
- F16J15/16—Sealings between relatively-moving surfaces
- F16J15/34—Sealings between relatively-moving surfaces with slip-ring pressed against a more or less radial face on one member
- F16J15/3404—Sealings between relatively-moving surfaces with slip-ring pressed against a more or less radial face on one member and characterised by parts or details relating to lubrication, cooling or venting of the seal
- F16J15/3408—Sealings between relatively-moving surfaces with slip-ring pressed against a more or less radial face on one member and characterised by parts or details relating to lubrication, cooling or venting of the seal at least one ring having an uneven slipping surface
- F16J15/3412—Sealings between relatively-moving surfaces with slip-ring pressed against a more or less radial face on one member and characterised by parts or details relating to lubrication, cooling or venting of the seal at least one ring having an uneven slipping surface with cavities
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16J—PISTONS; CYLINDERS; SEALINGS
- F16J15/00—Sealings
- F16J15/16—Sealings between relatively-moving surfaces
- F16J15/34—Sealings between relatively-moving surfaces with slip-ring pressed against a more or less radial face on one member
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16J—PISTONS; CYLINDERS; SEALINGS
- F16J15/00—Sealings
- F16J15/16—Sealings between relatively-moving surfaces
- F16J15/34—Sealings between relatively-moving surfaces with slip-ring pressed against a more or less radial face on one member
- F16J15/3404—Sealings between relatively-moving surfaces with slip-ring pressed against a more or less radial face on one member and characterised by parts or details relating to lubrication, cooling or venting of the seal
- F16J15/3408—Sealings between relatively-moving surfaces with slip-ring pressed against a more or less radial face on one member and characterised by parts or details relating to lubrication, cooling or venting of the seal at least one ring having an uneven slipping surface
- F16J15/3412—Sealings between relatively-moving surfaces with slip-ring pressed against a more or less radial face on one member and characterised by parts or details relating to lubrication, cooling or venting of the seal at least one ring having an uneven slipping surface with cavities
- F16J15/342—Sealings between relatively-moving surfaces with slip-ring pressed against a more or less radial face on one member and characterised by parts or details relating to lubrication, cooling or venting of the seal at least one ring having an uneven slipping surface with cavities with means for feeding fluid directly to the face
Landscapes
- Engineering & Computer Science (AREA)
- General Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Mechanical Sealing (AREA)
Abstract
Description
원호상홈 | 칸막이벽 | 토출개구부 | |||||||
유무 | 깊이(t1)[mm] | 주방향길이(W2)[mm] | 주방향길이(W1)[mm] | 절삭유무 | 절삭량((t1-t0)[mm] | 유무 | 깊이(t2)[mm] | 주방향길이(W3)[mm] | |
실시예1 | 유 | 1 | 112 | 4 | 무 | - | 무 | - | 2 |
실시예2 | 유 | 1 | 112 | 4 | 유 | 0.07 | 무 | 2 | |
실시예3 | 유 | 0.05 | 112 | 4 | 무 | - | 유 | 0.5 | 15.4 |
비교예 | 무 | - | - | - | 무 | - | 유 | 0.25 | 112 |
Claims (4)
- 회전축과 하우징과의 끼워맞춤간에 회전밀봉환과 정지밀봉환이 대향하여 배치된 메카니컬 실링장치로서,상기 회전축에 연결되어 회전실링면을 가지며, 상기 회전축의 축심을 중심으로 하여 원환상으로 배치됨과 동시에 칸막이벽에 의해 구획되어 형성된 복수의 원호상홈이 상기 회전실링면에 마련된 상기 회전밀봉환과,상기 회전밀봉환의 회전실링면에 대향하는 정지실링면을 가지는 상기 정지밀봉환과,상기 정지밀봉환을 상기 회전밀봉환을 향해 압압하는 탄성바이어스수단과,상기 정지밀봉환의 상기 정지실링면에 형성되어 유체압력을 공급하는 유체공급통로와 연통가능한 토출개구부를 구비하여,상기 토출개구부의 주방향길이(W3)가 칸막이벽(13)의 주방향길이(W1)에 대해서 1/2이상(W3≥W1/2)으로 형성되고,상기 토출개구부의 주방향길이(W3)가 상기 원호상홈의 주방향길이(W2)보다 작게(W3<W2) 형성되어 있는 메카니컬 실링장치.
- 제1항에 있어서, 상기 토출개구부는 상기 유체공급통로보다 주방향길이가 넓게 개구되도록 형성되며,당해 토출개구부가 상기 복수의 원호상홈과 거의 동일 원환상이 되도록 상기 정지실링면에 배치되어 있으며,상기 토출개구부의 주방향길이(W3)가 상기 칸막이벽의 주방향길이(W1)보다 크게(W3>W2) 형성되며,상기 토출개구부의 주방향길이(W3)가 상기 원호상홈의 주방향길이(W2)에 대해서 1/2보다 작게(W3<W2/2) 형성되어 있는 메카니컬 실링장치.
- 제1항 또는 제2항에 있어서, 상기 토출개구부는 원형상 또는 원호상으로 개구되도록 형성되어 있는 메카니컬 실링장치.
- 제1항 내지 제3항 중 어느 하나의 항에 있어서, 상기 칸막이벽은 상기 회전실링면보다 상대적으로 낮고, 또한 상기 원호상홈의 저면보다 상대적으로 높게 형성되어 있는 메카니컬 실링장치
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JPJP-P-2004-00325471 | 2004-11-09 | ||
JP2004325471 | 2004-11-09 | ||
PCT/JP2005/019923 WO2006051702A1 (ja) | 2004-11-09 | 2005-10-28 | メカニカルシール装置 |
Related Child Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR1020117023226A Division KR101119547B1 (ko) | 2004-11-09 | 2005-10-28 | 메카니컬 실링장치 |
Publications (2)
Publication Number | Publication Date |
---|---|
KR20070090885A true KR20070090885A (ko) | 2007-09-06 |
KR101119546B1 KR101119546B1 (ko) | 2012-02-28 |
Family
ID=36336384
Family Applications (2)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR1020077010402A KR101119546B1 (ko) | 2004-11-09 | 2005-10-28 | 메카니컬 실링장치 |
KR1020117023226A KR101119547B1 (ko) | 2004-11-09 | 2005-10-28 | 메카니컬 실링장치 |
Family Applications After (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR1020117023226A KR101119547B1 (ko) | 2004-11-09 | 2005-10-28 | 메카니컬 실링장치 |
Country Status (6)
Country | Link |
---|---|
US (1) | US7744094B2 (ko) |
JP (2) | JP4820471B2 (ko) |
KR (2) | KR101119546B1 (ko) |
CN (2) | CN101057093B (ko) |
TW (2) | TWI382133B (ko) |
WO (1) | WO2006051702A1 (ko) |
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2005
- 2005-10-28 CN CN2005800382433A patent/CN101057093B/zh active Active
- 2005-10-28 JP JP2006544835A patent/JP4820471B2/ja active Active
- 2005-10-28 KR KR1020077010402A patent/KR101119546B1/ko active IP Right Grant
- 2005-10-28 WO PCT/JP2005/019923 patent/WO2006051702A1/ja active Application Filing
- 2005-10-28 US US11/667,166 patent/US7744094B2/en active Active
- 2005-10-28 KR KR1020117023226A patent/KR101119547B1/ko active IP Right Grant
- 2005-10-28 CN CN201110280891.7A patent/CN102322526B/zh active Active
- 2005-11-08 TW TW094139130A patent/TWI382133B/zh active
- 2005-11-08 TW TW101126256A patent/TWI471495B/zh active
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2011
- 2011-06-29 JP JP2011143621A patent/JP5051860B2/ja active Active
Also Published As
Publication number | Publication date |
---|---|
JP5051860B2 (ja) | 2012-10-17 |
JP2011220528A (ja) | 2011-11-04 |
TW200628712A (en) | 2006-08-16 |
TWI471495B (zh) | 2015-02-01 |
CN102322526A (zh) | 2012-01-18 |
CN102322526B (zh) | 2014-10-22 |
TW201243190A (en) | 2012-11-01 |
US7744094B2 (en) | 2010-06-29 |
JP4820471B2 (ja) | 2011-11-24 |
TWI382133B (zh) | 2013-01-11 |
JPWO2006051702A1 (ja) | 2008-05-29 |
WO2006051702A1 (ja) | 2006-05-18 |
KR20110118842A (ko) | 2011-11-01 |
KR101119546B1 (ko) | 2012-02-28 |
CN101057093A (zh) | 2007-10-17 |
CN101057093B (zh) | 2013-02-13 |
US20070296156A1 (en) | 2007-12-27 |
KR101119547B1 (ko) | 2012-02-28 |
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