JP5033305B2 - 炭化珪素半導体装置 - Google Patents
炭化珪素半導体装置 Download PDFInfo
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- JP5033305B2 JP5033305B2 JP2004289821A JP2004289821A JP5033305B2 JP 5033305 B2 JP5033305 B2 JP 5033305B2 JP 2004289821 A JP2004289821 A JP 2004289821A JP 2004289821 A JP2004289821 A JP 2004289821A JP 5033305 B2 JP5033305 B2 JP 5033305B2
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- 239000004065 semiconductor Substances 0.000 title claims description 66
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 title claims description 34
- 229910010271 silicon carbide Inorganic materials 0.000 title claims description 34
- 229910052751 metal Inorganic materials 0.000 claims description 52
- 239000002184 metal Substances 0.000 claims description 52
- 239000000758 substrate Substances 0.000 claims description 38
- WABPQHHGFIMREM-UHFFFAOYSA-N lead(0) Chemical compound [Pb] WABPQHHGFIMREM-UHFFFAOYSA-N 0.000 claims description 20
- 230000000630 rising effect Effects 0.000 claims description 16
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 14
- 229910052814 silicon oxide Inorganic materials 0.000 claims description 14
- 238000000605 extraction Methods 0.000 claims description 12
- 230000005669 field effect Effects 0.000 claims description 8
- 239000012535 impurity Substances 0.000 claims description 6
- 239000012528 membrane Substances 0.000 claims 1
- 239000010410 layer Substances 0.000 description 44
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 28
- 238000004519 manufacturing process Methods 0.000 description 24
- 238000010586 diagram Methods 0.000 description 17
- 229910052759 nickel Inorganic materials 0.000 description 14
- 238000000034 method Methods 0.000 description 13
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 12
- 229910052721 tungsten Inorganic materials 0.000 description 12
- 239000010937 tungsten Substances 0.000 description 12
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 11
- 229910052782 aluminium Inorganic materials 0.000 description 10
- 238000005468 ion implantation Methods 0.000 description 7
- 238000000151 deposition Methods 0.000 description 4
- 229920002120 photoresistant polymer Polymers 0.000 description 4
- 239000011229 interlayer Substances 0.000 description 3
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 2
- 238000000137 annealing Methods 0.000 description 2
- 230000015556 catabolic process Effects 0.000 description 2
- 239000002019 doping agent Substances 0.000 description 2
- 230000006698 induction Effects 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 229910052710 silicon Inorganic materials 0.000 description 2
- 239000010703 silicon Substances 0.000 description 2
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 description 1
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 1
- 229910052581 Si3N4 Inorganic materials 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 229910052796 boron Inorganic materials 0.000 description 1
- 238000005229 chemical vapour deposition Methods 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000001312 dry etching Methods 0.000 description 1
- 230000005684 electric field Effects 0.000 description 1
- 239000012212 insulator Substances 0.000 description 1
- 150000002500 ions Chemical class 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- 238000000059 patterning Methods 0.000 description 1
- 229910052698 phosphorus Inorganic materials 0.000 description 1
- 239000011574 phosphorus Substances 0.000 description 1
- 238000005268 plasma chemical vapour deposition Methods 0.000 description 1
- 238000004904 shortening Methods 0.000 description 1
- 229910021332 silicide Inorganic materials 0.000 description 1
- FVBUAEGBCNSCDD-UHFFFAOYSA-N silicide(4-) Chemical compound [Si-4] FVBUAEGBCNSCDD-UHFFFAOYSA-N 0.000 description 1
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 1
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Classifications
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/77—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate
- H01L21/78—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices
- H01L21/82—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices to produce devices, e.g. integrated circuits, each consisting of a plurality of components
- H01L21/822—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices to produce devices, e.g. integrated circuits, each consisting of a plurality of components the substrate being a semiconductor, using silicon technology
- H01L21/8232—Field-effect technology
- H01L21/8234—MIS technology, i.e. integration processes of field effect transistors of the conductor-insulator-semiconductor type
- H01L21/823487—MIS technology, i.e. integration processes of field effect transistors of the conductor-insulator-semiconductor type with a particular manufacturing method of vertical transistor structures, i.e. with channel vertical to the substrate surface
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
- H01L29/76—Unipolar devices, e.g. field effect transistors
- H01L29/772—Field effect transistors
- H01L29/7722—Field effect transistors using static field induced regions, e.g. SIT, PBT
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- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Ceramic Engineering (AREA)
- Manufacturing & Machinery (AREA)
- Junction Field-Effect Transistors (AREA)
- Electrodes Of Semiconductors (AREA)
Description
Claims (2)
- バンドギャップが2.0eV以上の半導体基体であって、対向する一面と他面とを有する第1導電型(n又はp)の基板と、前記基板の他面側に形成され、前記基板より低不純物濃度の第1導電型のエピタキシャル層と、からなる半導体基体と、前記基板の一面側に形成されたドレイン電極と、前記エピタキシャル層の前記基板側の面とは反対の他面に沿って形成された第1導電型のソース領域と、前記エピタキシャル層の前記他面から形成された複数の溝と、前記複数の溝に沿って前記エピタキシャル層に形成された第2導電型(p又はn)のゲート領域と、前記ソース領域に前記エピタキシャル層の前記他面側からオーミック接触するソース用オーミック接触金属膜と、前記ソース用オーミック接触金属膜に接触したソース引出し金属膜を備えた縦型の電界効果トランジスタを備えた炭化珪素半導体装置において、
前記溝の底部で、シリサイデーション層を介して前記ゲート領域の引出し層とオーミック接触するとともに、前記エピタキシャル層の前記他面へ立上がるゲート立上げ金属膜と、
前記複数の溝間であって前記エピタキシャル層の前記他面に沿って形成され、前記ゲート領域と接触する第2導電型の表面引出し層と、
前記エピタキシャル層の前記他面側から前記表面引出し層及び前記ゲート立上げ金属膜にわたって接触したゲート用オーミック接触金属膜と、
前記ゲート用オーミック接触金属膜に接触し、前記ゲート用オーミック接触金属膜及び前記ゲート立上げ金属膜を介して、前記溝の上部で前記ゲート領域の引出し層に電気的に接続されたゲート引出し金属膜を備え、
前記ソース引出し金属膜と前記ゲート引出し金属膜を同一平面上に配置するとともに、前記ソース引出し金属膜は、前記ゲート立上げ金属膜と重なる位置に配置されていることを特徴とする炭化珪素半導体装置。 - 請求項1において、前記ゲート立上げ金属膜と前記溝の壁面間に埋め込まれたシリコン酸化膜を含む絶縁膜を備えたことを特徴とする炭化珪素半導体装置。
Priority Applications (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2004289821A JP5033305B2 (ja) | 2004-10-01 | 2004-10-01 | 炭化珪素半導体装置 |
DE102005039131.1A DE102005039131B4 (de) | 2004-10-01 | 2005-08-18 | Halbleiterbauteil und Siliciumcarbid-Halbleiterbauteil |
US11/206,271 US7663181B2 (en) | 2004-10-01 | 2005-08-18 | Semiconductor device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2004289821A JP5033305B2 (ja) | 2004-10-01 | 2004-10-01 | 炭化珪素半導体装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2006108217A JP2006108217A (ja) | 2006-04-20 |
JP5033305B2 true JP5033305B2 (ja) | 2012-09-26 |
Family
ID=36124655
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2004289821A Expired - Fee Related JP5033305B2 (ja) | 2004-10-01 | 2004-10-01 | 炭化珪素半導体装置 |
Country Status (3)
Country | Link |
---|---|
US (1) | US7663181B2 (ja) |
JP (1) | JP5033305B2 (ja) |
DE (1) | DE102005039131B4 (ja) |
Families Citing this family (14)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP4935160B2 (ja) * | 2006-04-11 | 2012-05-23 | 株式会社デンソー | 炭化珪素半導体装置およびその製造方法 |
JP2007294716A (ja) * | 2006-04-26 | 2007-11-08 | Hitachi Ltd | 半導体装置 |
US7595241B2 (en) * | 2006-08-23 | 2009-09-29 | General Electric Company | Method for fabricating silicon carbide vertical MOSFET devices |
JP4858791B2 (ja) * | 2009-05-22 | 2012-01-18 | 住友電気工業株式会社 | 半導体装置およびその製造方法 |
US20110049532A1 (en) * | 2009-08-28 | 2011-03-03 | Microsemi Corporation | Silicon carbide dual-mesa static induction transistor |
CN102403256B (zh) * | 2010-09-08 | 2014-02-26 | 上海华虹宏力半导体制造有限公司 | 赝埋层及制造方法、深孔接触及三极管 |
US8519410B1 (en) | 2010-12-20 | 2013-08-27 | Microsemi Corporation | Silicon carbide vertical-sidewall dual-mesa static induction transistor |
JP6135364B2 (ja) * | 2013-07-26 | 2017-05-31 | 住友電気工業株式会社 | 炭化珪素半導体装置およびその製造方法 |
US10396215B2 (en) | 2015-03-10 | 2019-08-27 | United Silicon Carbide, Inc. | Trench vertical JFET with improved threshold voltage control |
US10050154B2 (en) | 2015-07-14 | 2018-08-14 | United Silicon Carbide, Inc. | Trench vertical JFET with ladder termination |
US20170018657A1 (en) | 2015-07-14 | 2017-01-19 | United Silicon Carbide, Inc. | Vertical jfet made using a reduced mask set |
CN107785366B (zh) * | 2016-08-31 | 2020-04-14 | 无锡华润上华科技有限公司 | 集成有结型场效应晶体管的器件及其制造方法 |
DE102019109368A1 (de) | 2018-05-15 | 2019-11-21 | Infineon Technologies Ag | Halbleitervorrichtung mit siliziumcarbidkörper und herstellungsverfahren |
CN108899363B (zh) * | 2018-08-29 | 2023-08-15 | 江苏中科君芯科技有限公司 | 能降低导通压降和关断损耗的沟槽栅igbt器件 |
Family Cites Families (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4985738A (en) * | 1978-01-06 | 1991-01-15 | Zaidan Hojin Handotai Kenkyu Shinkokai | Semiconductor switching device |
JPH06275849A (ja) * | 1993-03-22 | 1994-09-30 | Toyota Central Res & Dev Lab Inc | 静電誘導半導体装置 |
US5396085A (en) | 1993-12-28 | 1995-03-07 | North Carolina State University | Silicon carbide switching device with rectifying-gate |
JP2700870B2 (ja) * | 1995-05-22 | 1998-01-21 | 財団法人半導体研究振興会 | 静電誘導トランジスタ及びその製造方法 |
JP4671314B2 (ja) * | 2000-09-18 | 2011-04-13 | 独立行政法人産業技術総合研究所 | オーミック電極構造体の製造方法、接合型fet又は接合型sitのオーミック電極構造体の製造方法、及び半導体装置の製造方法 |
JP2003031592A (ja) * | 2001-07-19 | 2003-01-31 | Auto Network Gijutsu Kenkyusho:Kk | 接合型電界効果トランジスタおよびその製造方法 |
US6855970B2 (en) * | 2002-03-25 | 2005-02-15 | Kabushiki Kaisha Toshiba | High-breakdown-voltage semiconductor device |
-
2004
- 2004-10-01 JP JP2004289821A patent/JP5033305B2/ja not_active Expired - Fee Related
-
2005
- 2005-08-18 DE DE102005039131.1A patent/DE102005039131B4/de not_active Expired - Fee Related
- 2005-08-18 US US11/206,271 patent/US7663181B2/en not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
US20060071217A1 (en) | 2006-04-06 |
JP2006108217A (ja) | 2006-04-20 |
DE102005039131B4 (de) | 2015-01-22 |
DE102005039131A1 (de) | 2006-04-27 |
US7663181B2 (en) | 2010-02-16 |
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