JP5023734B2 - 圧電振動片の製造方法及び圧電振動素子 - Google Patents

圧電振動片の製造方法及び圧電振動素子 Download PDF

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Publication number
JP5023734B2
JP5023734B2 JP2007040432A JP2007040432A JP5023734B2 JP 5023734 B2 JP5023734 B2 JP 5023734B2 JP 2007040432 A JP2007040432 A JP 2007040432A JP 2007040432 A JP2007040432 A JP 2007040432A JP 5023734 B2 JP5023734 B2 JP 5023734B2
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piezoelectric
substrate
etching
vibrating piece
base
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Japanese (ja)
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JP2008205888A5 (enrdf_load_stackoverflow
JP2008205888A (ja
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隆 山崎
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Seiko Epson Corp
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Seiko Epson Corp
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  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
JP2007040432A 2007-02-21 2007-02-21 圧電振動片の製造方法及び圧電振動素子 Expired - Fee Related JP5023734B2 (ja)

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JP2007040432A JP5023734B2 (ja) 2007-02-21 2007-02-21 圧電振動片の製造方法及び圧電振動素子

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JP2007040432A JP5023734B2 (ja) 2007-02-21 2007-02-21 圧電振動片の製造方法及び圧電振動素子

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JP2008205888A JP2008205888A (ja) 2008-09-04
JP2008205888A5 JP2008205888A5 (enrdf_load_stackoverflow) 2010-04-02
JP5023734B2 true JP5023734B2 (ja) 2012-09-12

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Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5347546B2 (ja) * 2009-02-12 2013-11-20 セイコーエプソン株式会社 振動片、振動片の製造方法および振動子
JP2010187195A (ja) * 2009-02-12 2010-08-26 Epson Toyocom Corp 振動片、振動片の製造方法および振動子
JP5786393B2 (ja) * 2011-03-18 2015-09-30 株式会社村田製作所 水晶デバイスの製造方法
JP6110663B2 (ja) * 2012-12-28 2017-04-05 京セラクリスタルデバイス株式会社 水晶振動子の製造方法
JP6004957B2 (ja) * 2013-01-31 2016-10-12 京セラクリスタルデバイス株式会社 水晶振動子及びその製造方法
CN105409119B (zh) * 2013-07-25 2019-04-26 日本碍子株式会社 复合基板及其制造方法
JP6528878B2 (ja) * 2018-03-22 2019-06-12 セイコーエプソン株式会社 電子デバイス、電子機器および移動体

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5866410A (ja) * 1981-10-16 1983-04-20 Seiko Instr & Electronics Ltd 音又型屈曲水晶振動子
JPH06196963A (ja) * 1992-10-20 1994-07-15 Matsushita Electric Ind Co Ltd 圧電フィルタとその製造方法
JPH0746072A (ja) * 1993-08-03 1995-02-14 Matsushita Electric Ind Co Ltd 水晶振動子の製造方法
JPH0750438A (ja) * 1993-08-04 1995-02-21 Matsushita Electric Ind Co Ltd 薄板素材の製造方法
JPH10308640A (ja) * 1997-05-07 1998-11-17 Matsushita Electric Ind Co Ltd 圧電デバイスの製造方法
JP3972790B2 (ja) * 2001-11-27 2007-09-05 松下電器産業株式会社 薄膜微小機械式共振子および薄膜微小機械式共振子ジャイロ
JP4316903B2 (ja) * 2003-03-11 2009-08-19 リバーエレテック株式会社 屈曲振動子
JP4515180B2 (ja) * 2004-07-20 2010-07-28 Ｎｅｃトーキン株式会社 音叉型圧電振動ジャイロ装置
US20060255691A1 (en) * 2005-03-30 2006-11-16 Takahiro Kuroda Piezoelectric resonator and manufacturing method thereof

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