JP5013941B2 - ステージ装置、露光装置、及びデバイス製造方法 - Google Patents

ステージ装置、露光装置、及びデバイス製造方法 Download PDF

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Publication number
JP5013941B2
JP5013941B2 JP2007110833A JP2007110833A JP5013941B2 JP 5013941 B2 JP5013941 B2 JP 5013941B2 JP 2007110833 A JP2007110833 A JP 2007110833A JP 2007110833 A JP2007110833 A JP 2007110833A JP 5013941 B2 JP5013941 B2 JP 5013941B2
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Japan
Prior art keywords
stage
reticle
holding
length
fine movement
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Active
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JP2007110833A
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English (en)
Japanese (ja)
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JP2008270491A (ja
JP2008270491A5 (enExample
Inventor
康裕 藤原
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
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Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Priority to JP2007110833A priority Critical patent/JP5013941B2/ja
Priority to EP08153901.7A priority patent/EP1983371B1/en
Priority to US12/060,395 priority patent/US7952686B2/en
Priority to KR1020080032517A priority patent/KR101013943B1/ko
Priority to TW097113959A priority patent/TWI405045B/zh
Publication of JP2008270491A publication Critical patent/JP2008270491A/ja
Publication of JP2008270491A5 publication Critical patent/JP2008270491A5/ja
Application granted granted Critical
Publication of JP5013941B2 publication Critical patent/JP5013941B2/ja
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    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70691—Handling of masks or workpieces
    • G03F7/70716—Stages
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70691—Handling of masks or workpieces
    • G03F7/70783—Handling stress or warp of chucks, masks or workpieces, e.g. to compensate for imaging errors or considerations related to warpage of masks or workpieces due to their own weight
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70691—Handling of masks or workpieces
    • G03F7/707—Chucks, e.g. chucking or un-chucking operations or structural details
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/708—Construction of apparatus, e.g. environment aspects, hygiene aspects or materials
    • G03F7/70808—Construction details, e.g. housing, load-lock, seals or windows for passing light in or out of apparatus
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Epidemiology (AREA)
  • Public Health (AREA)
  • Health & Medical Sciences (AREA)
  • Environmental & Geological Engineering (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
JP2007110833A 2007-04-19 2007-04-19 ステージ装置、露光装置、及びデバイス製造方法 Active JP5013941B2 (ja)

Priority Applications (5)

Application Number Priority Date Filing Date Title
JP2007110833A JP5013941B2 (ja) 2007-04-19 2007-04-19 ステージ装置、露光装置、及びデバイス製造方法
EP08153901.7A EP1983371B1 (en) 2007-04-19 2008-04-01 Stage apparatus, exposure apparatus, and device manufacturing method
US12/060,395 US7952686B2 (en) 2007-04-19 2008-04-01 Stage apparatus, exposure apparatus, and device manufacturing method
KR1020080032517A KR101013943B1 (ko) 2007-04-19 2008-04-08 스테이지 장치, 노광장치 및 디바이스 제조방법
TW097113959A TWI405045B (zh) 2007-04-19 2008-04-17 載台設備，曝光設備及裝置製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2007110833A JP5013941B2 (ja) 2007-04-19 2007-04-19 ステージ装置、露光装置、及びデバイス製造方法

Publications (3)

Publication Number Publication Date
JP2008270491A JP2008270491A (ja) 2008-11-06
JP2008270491A5 JP2008270491A5 (enExample) 2012-01-05
JP5013941B2 true JP5013941B2 (ja) 2012-08-29

Family

ID=39591965

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2007110833A Active JP5013941B2 (ja) 2007-04-19 2007-04-19 ステージ装置、露光装置、及びデバイス製造方法

Country Status (5)

Country Link
US (1) US7952686B2 (enExample)
EP (1) EP1983371B1 (enExample)
JP (1) JP5013941B2 (enExample)
KR (1) KR101013943B1 (enExample)
TW (1) TWI405045B (enExample)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5406510B2 (ja) 2008-11-18 2014-02-05 キヤノン株式会社 走査露光装置およびデバイス製造方法
NL2006190A (en) * 2010-03-11 2011-09-13 Asml Netherlands Bv Lithographic apparatus and device manufacturing method.
JP2014134771A (ja) * 2012-12-12 2014-07-24 Dainippon Printing Co Ltd 光学フィルム、画像表示装置、露光用部材、露光マスクの保持部材
JP6251559B2 (ja) * 2013-02-28 2017-12-20 株式会社ニューフレアテクノロジー 試料支持装置
WO2017089214A1 (en) * 2015-11-23 2017-06-01 Asml Netherlands B.V. Positioning device, lithographic apparatus and device manufacturing method
WO2020225017A1 (en) * 2019-05-08 2020-11-12 Asml Holding N.V. Reticle cage actuator with shape memory alloy and magnetic coupling mechanisms
JP2025517618A (ja) * 2022-05-12 2025-06-10 エーエスエムエル ネザーランズ ビー．ブイ． リソグラフィ装置のための可動式ステージ
WO2025242380A1 (en) * 2024-05-20 2025-11-27 Asml Netherlands B.V. Split chuck

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3745167B2 (ja) * 1998-07-29 2006-02-15 キヤノン株式会社 ステージ装置、露光装置およびデバイス製造方法ならびにステージ駆動方法
JP2001201846A (ja) * 2000-01-21 2001-07-27 Nikon Corp 枠部材、マスクと露光装置
JP2003324053A (ja) * 2002-04-30 2003-11-14 Nikon Corp ステージ装置および露光装置
JP4447872B2 (ja) * 2003-09-17 2010-04-07 キヤノン株式会社 ステージ装置、該ステージ装置を用いた露光装置および該露光装置を用いたデバイス製造方法
WO2005074015A1 (ja) * 2004-01-29 2005-08-11 Nikon Corporation 板部材の支持方法、板部材支持装置、ステージ装置、露光装置、及びデバイスの製造方法
JP4411100B2 (ja) 2004-02-18 2010-02-10 キヤノン株式会社 露光装置
JP4307288B2 (ja) * 2004-02-25 2009-08-05 キヤノン株式会社 位置決め装置
JP4298547B2 (ja) * 2004-03-01 2009-07-22 キヤノン株式会社 位置決め装置およびそれを用いた露光装置
JP4411158B2 (ja) * 2004-07-29 2010-02-10 キヤノン株式会社 露光装置
JP2006261156A (ja) * 2005-03-15 2006-09-28 Canon Inc 原版保持装置およびそれを用いた露光装置

Also Published As

Publication number Publication date
EP1983371A1 (en) 2008-10-22
US7952686B2 (en) 2011-05-31
JP2008270491A (ja) 2008-11-06
KR101013943B1 (ko) 2011-02-14
US20080259309A1 (en) 2008-10-23
KR20080094566A (ko) 2008-10-23
EP1983371B1 (en) 2014-11-12
TW200910016A (en) 2009-03-01
TWI405045B (zh) 2013-08-11

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