JP2008270491A5 - - Google Patents

Download PDF

Info

Publication number
JP2008270491A5
JP2008270491A5 JP2007110833A JP2007110833A JP2008270491A5 JP 2008270491 A5 JP2008270491 A5 JP 2008270491A5 JP 2007110833 A JP2007110833 A JP 2007110833A JP 2007110833 A JP2007110833 A JP 2007110833A JP 2008270491 A5 JP2008270491 A5 JP 2008270491A5
Authority
JP
Japan
Prior art keywords
stage
length
holding
less
holding portion
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2007110833A
Other languages
English (en)
Japanese (ja)
Other versions
JP5013941B2 (ja
JP2008270491A (ja
Filing date
Publication date
Application filed filed Critical
Priority claimed from JP2007110833A external-priority patent/JP5013941B2/ja
Priority to JP2007110833A priority Critical patent/JP5013941B2/ja
Priority to EP08153901.7A priority patent/EP1983371B1/en
Priority to US12/060,395 priority patent/US7952686B2/en
Priority to KR1020080032517A priority patent/KR101013943B1/ko
Priority to TW097113959A priority patent/TWI405045B/zh
Publication of JP2008270491A publication Critical patent/JP2008270491A/ja
Publication of JP2008270491A5 publication Critical patent/JP2008270491A5/ja
Publication of JP5013941B2 publication Critical patent/JP5013941B2/ja
Application granted granted Critical
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

JP2007110833A 2007-04-19 2007-04-19 ステージ装置、露光装置、及びデバイス製造方法 Active JP5013941B2 (ja)

Priority Applications (5)

Application Number Priority Date Filing Date Title
JP2007110833A JP5013941B2 (ja) 2007-04-19 2007-04-19 ステージ装置、露光装置、及びデバイス製造方法
EP08153901.7A EP1983371B1 (en) 2007-04-19 2008-04-01 Stage apparatus, exposure apparatus, and device manufacturing method
US12/060,395 US7952686B2 (en) 2007-04-19 2008-04-01 Stage apparatus, exposure apparatus, and device manufacturing method
KR1020080032517A KR101013943B1 (ko) 2007-04-19 2008-04-08 스테이지 장치, 노광장치 및 디바이스 제조방법
TW097113959A TWI405045B (zh) 2007-04-19 2008-04-17 載台設備，曝光設備及裝置製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2007110833A JP5013941B2 (ja) 2007-04-19 2007-04-19 ステージ装置、露光装置、及びデバイス製造方法

Publications (3)

Publication Number Publication Date
JP2008270491A JP2008270491A (ja) 2008-11-06
JP2008270491A5 true JP2008270491A5 (enExample) 2012-01-05
JP5013941B2 JP5013941B2 (ja) 2012-08-29

Family

ID=39591965

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2007110833A Active JP5013941B2 (ja) 2007-04-19 2007-04-19 ステージ装置、露光装置、及びデバイス製造方法

Country Status (5)

Country Link
US (1) US7952686B2 (enExample)
EP (1) EP1983371B1 (enExample)
JP (1) JP5013941B2 (enExample)
KR (1) KR101013943B1 (enExample)
TW (1) TWI405045B (enExample)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5406510B2 (ja) 2008-11-18 2014-02-05 キヤノン株式会社 走査露光装置およびデバイス製造方法
NL2006190A (en) * 2010-03-11 2011-09-13 Asml Netherlands Bv Lithographic apparatus and device manufacturing method.
JP2014134771A (ja) * 2012-12-12 2014-07-24 Dainippon Printing Co Ltd 光学フィルム、画像表示装置、露光用部材、露光マスクの保持部材
JP6251559B2 (ja) * 2013-02-28 2017-12-20 株式会社ニューフレアテクノロジー 試料支持装置
WO2017089214A1 (en) * 2015-11-23 2017-06-01 Asml Netherlands B.V. Positioning device, lithographic apparatus and device manufacturing method
WO2020225017A1 (en) * 2019-05-08 2020-11-12 Asml Holding N.V. Reticle cage actuator with shape memory alloy and magnetic coupling mechanisms
JP2025517618A (ja) * 2022-05-12 2025-06-10 エーエスエムエル ネザーランズ ビー．ブイ． リソグラフィ装置のための可動式ステージ
WO2025242380A1 (en) * 2024-05-20 2025-11-27 Asml Netherlands B.V. Split chuck

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3745167B2 (ja) * 1998-07-29 2006-02-15 キヤノン株式会社 ステージ装置、露光装置およびデバイス製造方法ならびにステージ駆動方法
JP2001201846A (ja) * 2000-01-21 2001-07-27 Nikon Corp 枠部材、マスクと露光装置
JP2003324053A (ja) * 2002-04-30 2003-11-14 Nikon Corp ステージ装置および露光装置
JP4447872B2 (ja) * 2003-09-17 2010-04-07 キヤノン株式会社 ステージ装置、該ステージ装置を用いた露光装置および該露光装置を用いたデバイス製造方法
WO2005074015A1 (ja) * 2004-01-29 2005-08-11 Nikon Corporation 板部材の支持方法、板部材支持装置、ステージ装置、露光装置、及びデバイスの製造方法
JP4411100B2 (ja) 2004-02-18 2010-02-10 キヤノン株式会社 露光装置
JP4307288B2 (ja) * 2004-02-25 2009-08-05 キヤノン株式会社 位置決め装置
JP4298547B2 (ja) * 2004-03-01 2009-07-22 キヤノン株式会社 位置決め装置およびそれを用いた露光装置
JP4411158B2 (ja) * 2004-07-29 2010-02-10 キヤノン株式会社 露光装置
JP2006261156A (ja) * 2005-03-15 2006-09-28 Canon Inc 原版保持装置およびそれを用いた露光装置

Similar Documents

Publication Publication Date Title
JP2008270491A5 (enExample)
JP2015502668A5 (enExample)
JP2014066711A5 (enExample)
EP1286218A3 (en) Lithographic patterning using a high transmission attenuated phase-shift mask and multiple exposures of optimised coherence
EP1571698A4 (en) EXPOSURE APPARATUS, EXPOSURE METHOD, AND DEVICE MANUFACTURING METHOD
SG141385A1 (en) Lithographic apparatus and device manufacturing method
SG125933A1 (en) Mask and its manufacturing method, exposure, and device fabrication method
TW200802538A (en) Exposure apparatus, exposure method, and device manufacturing method
DE602004030247D1 (de) Belichtungsvorrichtung und verfahren zur bauelementherstellung
JP2010528463A5 (enExample)
WO2010030018A3 (en) Pattern forming method and device production method
WO2006128713A3 (en) Optical imaging arrangement
JP6486388B2 (ja) モノリシックメッシュ支持型ｅｕｖ膜
TW200736852A (en) Resist composition, method for forming resist pattern, and semiconductor device and method for manufacturing the same
TW200616101A (en) Method for manufacturing semiconductor device
ATE529781T1 (de) Beleuchtungssystem mit zoomobjetiv
DE602004017385D1 (de) Optisches Projektionssystem für maskenlose Lithographie
CN110419004A (zh) 光刻装置及方法
SG108316A1 (en) Euv lithographic projection apparatus comprising an optical element with a self-assembled monolayer, optical element with a self-assembled monolayer, method of applying a self-assembled monolayer, device manufacturing method and device manufactured there
JP2006270057A5 (enExample)
JP2007266504A5 (enExample)
JP2005055878A5 (enExample)
TW200721260A (en) Substrate processing method, photomask manufacturing method, photomask and device manufacturing method
JP2013219089A5 (enExample)
JP2013174728A (ja) フォトマスク及び半導体装置の製造方法