JP5013754B2 - 電磁波検出装置、放射線検出装置、放射線検出システム及びレーザ加工方法 - Google Patents

電磁波検出装置、放射線検出装置、放射線検出システム及びレーザ加工方法 Download PDF

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Publication number
JP5013754B2
JP5013754B2 JP2006151865A JP2006151865A JP5013754B2 JP 5013754 B2 JP5013754 B2 JP 5013754B2 JP 2006151865 A JP2006151865 A JP 2006151865A JP 2006151865 A JP2006151865 A JP 2006151865A JP 5013754 B2 JP5013754 B2 JP 5013754B2
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Japan
Prior art keywords
switching element
photoelectric conversion
disposed
conversion element
wiring
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JP2006151865A
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Japanese (ja)
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JP2007027691A5 (enExample
JP2007027691A (ja
Inventor
朋之 八木
忠夫 遠藤
登志男 亀島
克郎 竹中
啓吾 横山
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Canon Inc
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Canon Inc
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Priority to JP2006151865A priority Critical patent/JP5013754B2/ja
Priority to US11/449,621 priority patent/US7541595B2/en
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Publication of JP2007027691A5 publication Critical patent/JP2007027691A5/ja
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01T—MEASUREMENT OF NUCLEAR OR X-RADIATION
    • G01T1/00—Measuring X-radiation, gamma radiation, corpuscular radiation, or cosmic radiation
    • G01T1/16—Measuring radiation intensity
    • G01T1/24—Measuring radiation intensity with semiconductor detectors

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  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • High Energy & Nuclear Physics (AREA)
  • Molecular Biology (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Solid State Image Pick-Up Elements (AREA)
  • Measurement Of Radiation (AREA)
  • Transforming Light Signals Into Electric Signals (AREA)
JP2006151865A 2005-06-13 2006-05-31 電磁波検出装置、放射線検出装置、放射線検出システム及びレーザ加工方法 Expired - Fee Related JP5013754B2 (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP2006151865A JP5013754B2 (ja) 2005-06-13 2006-05-31 電磁波検出装置、放射線検出装置、放射線検出システム及びレーザ加工方法
US11/449,621 US7541595B2 (en) 2005-06-13 2006-06-09 Electromagnetic radiation detecting apparatus, radiation detecting apparatus, radiation detecting system and laser processing method

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2005172466 2005-06-13
JP2005172466 2005-06-13
JP2006151865A JP5013754B2 (ja) 2005-06-13 2006-05-31 電磁波検出装置、放射線検出装置、放射線検出システム及びレーザ加工方法

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JP2007027691A JP2007027691A (ja) 2007-02-01
JP2007027691A5 JP2007027691A5 (enExample) 2009-06-25
JP5013754B2 true JP5013754B2 (ja) 2012-08-29

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JP2006151865A Expired - Fee Related JP5013754B2 (ja) 2005-06-13 2006-05-31 電磁波検出装置、放射線検出装置、放射線検出システム及びレーザ加工方法

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US (1) US7541595B2 (enExample)
JP (1) JP5013754B2 (enExample)

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4773768B2 (ja) 2005-08-16 2011-09-14 キヤノン株式会社 放射線撮像装置、その制御方法及び放射線撮像システム
JP5105940B2 (ja) * 2007-04-06 2012-12-26 キヤノン株式会社 撮像装置、撮像システム、その制御方法及びプログラム
JP2009290171A (ja) * 2008-06-02 2009-12-10 Epson Imaging Devices Corp 固体撮像装置
JP2010003752A (ja) * 2008-06-18 2010-01-07 Epson Imaging Devices Corp 光電変換装置及び放射線検出装置
KR101469042B1 (ko) * 2008-08-29 2014-12-05 삼성디스플레이 주식회사 엑스레이 검출 패널 및 엑스레이 검출기
KR101733755B1 (ko) 2010-01-15 2017-05-08 가부시키가이샤 한도오따이 에네루기 켄큐쇼 반도체 장치 및 전자 기기
JP5763474B2 (ja) * 2010-08-27 2015-08-12 株式会社半導体エネルギー研究所 光センサ
JP2014116429A (ja) * 2012-12-07 2014-06-26 Japan Display Inc 撮像装置及び撮像表示システム
KR102424552B1 (ko) * 2017-09-05 2022-07-22 엘지디스플레이 주식회사 엑스레이 검출기용 어레이 기판과 이를 포함하는 엑스레이 검출기 및 그 제조 방법
CN109276268A (zh) * 2018-11-21 2019-01-29 京东方科技集团股份有限公司 X射线探测装置及其制造方法
KR102774286B1 (ko) * 2019-12-05 2025-02-26 엘지디스플레이 주식회사 디지털 엑스레이 검출기용 박막 트랜지스터 어레이 기판과 디지털 엑스레이 검출기 및 그 제조 방법

Family Cites Families (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0264482B1 (en) * 1986-10-23 1991-12-18 International Business Machines Corporation Method for contactless testing of integrated circuit packaging boards under atmospheric conditions
DE3685331D1 (de) * 1986-10-23 1992-06-17 Ibm Verfahren zur pruefung von platinen fuer integrierte schaltungen mittels eines lasers im vakuum.
JPH06120474A (ja) * 1991-08-16 1994-04-28 Fuji Xerox Co Ltd ２次元密着型イメージセンサ
JP3957803B2 (ja) * 1996-02-22 2007-08-15 キヤノン株式会社 光電変換装置
US6271880B1 (en) * 1996-02-26 2001-08-07 Canon Kabushiki Kaisha Apparatus having a photoelectric conversion element and a transistor, in which the duration of the on time of the transistor is based on a detected temperature of the conversion element or transistor
JP2000046646A (ja) * 1998-07-31 2000-02-18 Canon Inc 光電変換装置及びその駆動方法及びｘ線撮像装置
US6529618B1 (en) * 1998-09-04 2003-03-04 Konica Corporation Radiation image processing apparatus
DE60045404D1 (de) * 1999-07-30 2011-02-03 Canon Kk Strahlungsbildaufnahmeapparatus
JP4298081B2 (ja) * 1999-09-01 2009-07-15 キヤノン株式会社 半導体装置及びそれを備えた放射線撮像システム
JP2002009272A (ja) * 2000-06-26 2002-01-11 Canon Inc 光電変換装置及びそのリペア方法
US6818899B2 (en) * 2001-06-07 2004-11-16 Canon Kabushiki Kaisha Radiographic image pickup apparatus and method of driving the apparatus
KR100740938B1 (ko) * 2001-08-30 2007-07-19 삼성전자주식회사 레이저 조사 표지를 가지는 박막 트랜지스터 기판
US6953934B2 (en) * 2002-03-06 2005-10-11 Canon Kabushiki Kaisha Radiation detection apparatus and system
DE60336291D1 (de) * 2002-11-13 2011-04-21 Canon Kk Bildaufnahmevorrichtung, Strahlungsbildaufnahmevorrichtung und Strahlungsbildaufnahmesystem
JP4938961B2 (ja) * 2002-11-13 2012-05-23 キヤノン株式会社 撮像装置、放射線撮像装置及び放射線撮像システム

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US20060289769A1 (en) 2006-12-28
JP2007027691A (ja) 2007-02-01
US7541595B2 (en) 2009-06-02

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