JP4995016B2 - 絶対位置の計測装置及び計測方法 - Google Patents

絶対位置の計測装置及び計測方法 Download PDF

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Publication number
JP4995016B2
JP4995016B2 JP2007240135A JP2007240135A JP4995016B2 JP 4995016 B2 JP4995016 B2 JP 4995016B2 JP 2007240135 A JP2007240135 A JP 2007240135A JP 2007240135 A JP2007240135 A JP 2007240135A JP 4995016 B2 JP4995016 B2 JP 4995016B2
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signal
phase
period
signals
output
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Japanese (ja)
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JP2009069083A (ja
JP2009069083A5 (enExample
Inventor
雄三 瀬尾
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Canon Inc
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Canon Inc
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Priority to JP2007240135A priority Critical patent/JP4995016B2/ja
Priority to US12/206,822 priority patent/US7945420B2/en
Publication of JP2009069083A publication Critical patent/JP2009069083A/ja
Publication of JP2009069083A5 publication Critical patent/JP2009069083A5/ja
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G01D5/266—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light by interferometric means
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/12—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
    • G01D5/244—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing characteristics of pulses or pulse trains; generating pulses or pulse trains
    • G01D5/245—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing characteristics of pulses or pulse trains; generating pulses or pulse trains using a variable number of pulses in a train
    • G01D5/2454—Encoders incorporating incremental and absolute signals
    • G01D5/2455—Encoders incorporating incremental and absolute signals with incremental and absolute tracks on the same encoder
    • G01D5/2457—Incremental encoders having reference marks

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optical Transform (AREA)
  • Instruments For Measurement Of Length By Optical Means (AREA)
  • Length Measuring Devices By Optical Means (AREA)
JP2007240135A 2007-09-14 2007-09-14 絶対位置の計測装置及び計測方法 Active JP4995016B2 (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP2007240135A JP4995016B2 (ja) 2007-09-14 2007-09-14 絶対位置の計測装置及び計測方法
US12/206,822 US7945420B2 (en) 2007-09-14 2008-09-09 Absolute position measurement apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2007240135A JP4995016B2 (ja) 2007-09-14 2007-09-14 絶対位置の計測装置及び計測方法

Publications (3)

Publication Number Publication Date
JP2009069083A JP2009069083A (ja) 2009-04-02
JP2009069083A5 JP2009069083A5 (enExample) 2010-10-21
JP4995016B2 true JP4995016B2 (ja) 2012-08-08

Family

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Family Applications (1)

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JP2007240135A Active JP4995016B2 (ja) 2007-09-14 2007-09-14 絶対位置の計測装置及び計測方法

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US (1) US7945420B2 (enExample)
JP (1) JP4995016B2 (enExample)

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5188127B2 (ja) * 2007-09-14 2013-04-24 キヤノン株式会社 絶対位置の計測装置および計測方法
CN101968658B (zh) * 2010-09-27 2012-07-11 中国计量学院 基于外差式激光干涉仪的纳米静态锁定定位方法
CN102288282B (zh) * 2011-05-04 2012-10-31 浙江大学 具有基于直线光栅尺反馈控制装置的振动台系统
CN103630161B (zh) * 2012-08-30 2016-06-15 长春理工大学 中小尺寸高精度编码器的精度校核方法及装置
CN107367250A (zh) * 2016-05-12 2017-11-21 哈尔滨工业大学 宏微结合的电感位移传感器校准方法与装置
CN107367221B (zh) * 2016-05-12 2019-07-16 哈尔滨工业大学 超声波电机驱动主从结构电感传感器校准装置
CN107367220A (zh) * 2016-05-12 2017-11-21 哈尔滨工业大学 双气浮导轨导向的电感传感器校准方法与装置
CN107367218A (zh) * 2016-05-12 2017-11-21 哈尔滨工业大学 偏角误差补偿的电感传感器校准方法与装置
CN107367222A (zh) * 2016-05-12 2017-11-21 哈尔滨工业大学 电涡流传感器直线度补偿的电感传感器校准方法与装置
CN107367224B (zh) * 2016-05-12 2019-01-11 哈尔滨工业大学 三光轴激光干涉仪测量的电感传感器校准装置
CN107367219B (zh) * 2016-05-12 2019-01-11 哈尔滨工业大学 洛伦兹力电机直驱式电感传感器校准装置

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2645268B2 (ja) * 1983-03-25 1997-08-25 ヒューレット・パッカード・カンパニー 角度測定用変換機
US4697168A (en) * 1983-03-25 1987-09-29 Baker Alan J Angle transducer storing an integral number of revolutions' worth of rotor-pole transition data in memory
JP2515891B2 (ja) * 1989-09-20 1996-07-10 株式会社日立製作所 角度センサ及びトルクセンサ、そのセンサの出力に応じて制御される電動パワ―ステアリング装置
EP0700116A3 (en) * 1994-08-29 1998-01-07 Atr Optical And Radio Communications Research Laboratories Apparatus and method for controlling array antenna comprising a plurality of antenna elements with improved incoming beam tracking
US6034378A (en) * 1995-02-01 2000-03-07 Nikon Corporation Method of detecting position of mark on substrate, position detection apparatus using this method, and exposure apparatus using this position detection apparatus
JP3622249B2 (ja) * 1995-02-01 2005-02-23 株式会社ニコン 位置検出方法及び装置
JPH08261795A (ja) * 1995-03-17 1996-10-11 Yaskawa Electric Corp エンコーダの基準位置検出方法
JP3893033B2 (ja) * 2001-06-29 2007-03-14 オークマ株式会社 位置検出装置
CA2478611A1 (en) * 2002-03-06 2003-09-18 Advanced Photometrics, Inc. Method and apparatus for radiation encoding and analysis
JP2004333156A (ja) * 2003-04-30 2004-11-25 Harmonic Drive Syst Ind Co Ltd エンコーダ信号内挿分割器
US7436519B2 (en) * 2005-06-01 2008-10-14 Agilent Technologies, Inc. System and method for interferometer non-linearity compensation
JP4804058B2 (ja) 2005-07-28 2011-10-26 キヤノン株式会社 干渉測定装置

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Publication number Publication date
JP2009069083A (ja) 2009-04-02
US20090076768A1 (en) 2009-03-19
US7945420B2 (en) 2011-05-17

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