JP4984119B2 - 窒化物半導体結晶ないしそれを用いた発光素子及びその製造方法 - Google Patents
窒化物半導体結晶ないしそれを用いた発光素子及びその製造方法 Download PDFInfo
- Publication number
- JP4984119B2 JP4984119B2 JP2006230484A JP2006230484A JP4984119B2 JP 4984119 B2 JP4984119 B2 JP 4984119B2 JP 2006230484 A JP2006230484 A JP 2006230484A JP 2006230484 A JP2006230484 A JP 2006230484A JP 4984119 B2 JP4984119 B2 JP 4984119B2
- Authority
- JP
- Japan
- Prior art keywords
- nitride semiconductor
- light emitting
- layer
- semiconductor crystal
- emitting device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 239000004065 semiconductor Substances 0.000 title claims description 91
- 150000004767 nitrides Chemical class 0.000 title claims description 85
- 239000013078 crystal Substances 0.000 title claims description 29
- 238000000034 method Methods 0.000 title claims description 26
- 238000004519 manufacturing process Methods 0.000 title claims description 15
- 239000000758 substrate Substances 0.000 claims description 63
- 238000009826 distribution Methods 0.000 claims description 12
- 238000005530 etching Methods 0.000 claims description 10
- 230000008859 change Effects 0.000 claims description 8
- 239000000203 mixture Substances 0.000 claims description 7
- 238000010030 laminating Methods 0.000 claims description 2
- 239000000463 material Substances 0.000 claims description 2
- 229910002601 GaN Inorganic materials 0.000 description 34
- XCZXGTMEAKBVPV-UHFFFAOYSA-N trimethylgallium Chemical compound C[Ga](C)C XCZXGTMEAKBVPV-UHFFFAOYSA-N 0.000 description 26
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 20
- 239000011777 magnesium Substances 0.000 description 16
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 11
- 239000012298 atmosphere Substances 0.000 description 11
- 239000001257 hydrogen Substances 0.000 description 11
- 229910052739 hydrogen Inorganic materials 0.000 description 11
- 229910052757 nitrogen Inorganic materials 0.000 description 10
- KFZMGEQAYNKOFK-UHFFFAOYSA-N Isopropanol Chemical compound CC(C)O KFZMGEQAYNKOFK-UHFFFAOYSA-N 0.000 description 9
- 229920002120 photoresistant polymer Polymers 0.000 description 8
- 229910052751 metal Inorganic materials 0.000 description 7
- 239000002184 metal Substances 0.000 description 7
- 238000000059 patterning Methods 0.000 description 5
- CSCPPACGZOOCGX-UHFFFAOYSA-N Acetone Chemical compound CC(C)=O CSCPPACGZOOCGX-UHFFFAOYSA-N 0.000 description 4
- 238000001312 dry etching Methods 0.000 description 4
- 239000013074 reference sample Substances 0.000 description 4
- JMASRVWKEDWRBT-UHFFFAOYSA-N Gallium nitride Chemical compound [Ga]#N JMASRVWKEDWRBT-UHFFFAOYSA-N 0.000 description 3
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 3
- 230000004888 barrier function Effects 0.000 description 3
- 238000004140 cleaning Methods 0.000 description 3
- 239000007789 gas Substances 0.000 description 3
- 230000006872 improvement Effects 0.000 description 3
- 239000012535 impurity Substances 0.000 description 3
- 238000009616 inductively coupled plasma Methods 0.000 description 3
- 238000002488 metal-organic chemical vapour deposition Methods 0.000 description 3
- 239000012299 nitrogen atmosphere Substances 0.000 description 3
- 230000008569 process Effects 0.000 description 3
- QGZKDVFQNNGYKY-UHFFFAOYSA-N Ammonia Chemical compound N QGZKDVFQNNGYKY-UHFFFAOYSA-N 0.000 description 2
- 238000010306 acid treatment Methods 0.000 description 2
- 238000000089 atomic force micrograph Methods 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 2
- 239000000460 chlorine Substances 0.000 description 2
- 238000002189 fluorescence spectrum Methods 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 2
- 229910052738 indium Inorganic materials 0.000 description 2
- APFVFJFRJDLVQX-UHFFFAOYSA-N indium atom Chemical compound [In] APFVFJFRJDLVQX-UHFFFAOYSA-N 0.000 description 2
- 238000009877 rendering Methods 0.000 description 2
- 239000011347 resin Substances 0.000 description 2
- 229920005989 resin Polymers 0.000 description 2
- 229910052594 sapphire Inorganic materials 0.000 description 2
- 239000010980 sapphire Substances 0.000 description 2
- JLTRXTDYQLMHGR-UHFFFAOYSA-N trimethylaluminium Chemical compound C[Al](C)C JLTRXTDYQLMHGR-UHFFFAOYSA-N 0.000 description 2
- IBEFSUTVZWZJEL-UHFFFAOYSA-N trimethylindium Chemical compound C[In](C)C IBEFSUTVZWZJEL-UHFFFAOYSA-N 0.000 description 2
- ZAMOUSCENKQFHK-UHFFFAOYSA-N Chlorine atom Chemical compound [Cl] ZAMOUSCENKQFHK-UHFFFAOYSA-N 0.000 description 1
- 229910005191 Ga 2 O 3 Inorganic materials 0.000 description 1
- FYYHWMGAXLPEAU-UHFFFAOYSA-N Magnesium Chemical compound [Mg] FYYHWMGAXLPEAU-UHFFFAOYSA-N 0.000 description 1
- 230000004913 activation Effects 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- RNQKDQAVIXDKAG-UHFFFAOYSA-N aluminum gallium Chemical compound [Al].[Ga] RNQKDQAVIXDKAG-UHFFFAOYSA-N 0.000 description 1
- 229910021529 ammonia Inorganic materials 0.000 description 1
- QZPSXPBJTPJTSZ-UHFFFAOYSA-N aqua regia Chemical compound Cl.O[N+]([O-])=O QZPSXPBJTPJTSZ-UHFFFAOYSA-N 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 238000005229 chemical vapour deposition Methods 0.000 description 1
- 229910052801 chlorine Inorganic materials 0.000 description 1
- 238000005253 cladding Methods 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- SWXVUIWOUIDPGS-UHFFFAOYSA-N diacetone alcohol Natural products CC(=O)CC(C)(C)O SWXVUIWOUIDPGS-UHFFFAOYSA-N 0.000 description 1
- 239000007772 electrode material Substances 0.000 description 1
- 238000000295 emission spectrum Methods 0.000 description 1
- 230000005284 excitation Effects 0.000 description 1
- CABDFQZZWFMZOD-UHFFFAOYSA-N hydrogen peroxide;hydrochloride Chemical compound Cl.OO CABDFQZZWFMZOD-UHFFFAOYSA-N 0.000 description 1
- XEMZLVDIUVCKGL-UHFFFAOYSA-N hydrogen peroxide;sulfuric acid Chemical compound OO.OS(O)(=O)=O XEMZLVDIUVCKGL-UHFFFAOYSA-N 0.000 description 1
- 125000002887 hydroxy group Chemical group [H]O* 0.000 description 1
- 229910052749 magnesium Inorganic materials 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 239000010453 quartz Substances 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- 230000003595 spectral effect Effects 0.000 description 1
- 230000037303 wrinkles Effects 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L33/00—Semiconductor devices with at least one potential-jump barrier or surface barrier specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L33/02—Semiconductor devices with at least one potential-jump barrier or surface barrier specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies
- H01L33/20—Semiconductor devices with at least one potential-jump barrier or surface barrier specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies with a particular shape, e.g. curved or truncated substrate
- H01L33/24—Semiconductor devices with at least one potential-jump barrier or surface barrier specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies with a particular shape, e.g. curved or truncated substrate of the light emitting region, e.g. non-planar junction
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L33/00—Semiconductor devices with at least one potential-jump barrier or surface barrier specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L33/02—Semiconductor devices with at least one potential-jump barrier or surface barrier specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies
- H01L33/08—Semiconductor devices with at least one potential-jump barrier or surface barrier specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies with a plurality of light emitting regions, e.g. laterally discontinuous light emitting layer or photoluminescent region integrated within the semiconductor body
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L33/00—Semiconductor devices with at least one potential-jump barrier or surface barrier specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L33/005—Processes
- H01L33/0062—Processes for devices with an active region comprising only III-V compounds
- H01L33/0075—Processes for devices with an active region comprising only III-V compounds comprising nitride compounds
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L33/00—Semiconductor devices with at least one potential-jump barrier or surface barrier specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L33/02—Semiconductor devices with at least one potential-jump barrier or surface barrier specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies
- H01L33/26—Materials of the light emitting region
- H01L33/30—Materials of the light emitting region containing only elements of group III and group V of the periodic system
- H01L33/32—Materials of the light emitting region containing only elements of group III and group V of the periodic system containing nitrogen
Description
2 第1窒化物半導体層(テンプレート)
2r 再成長層
3 フォトレジスト
3p レジストパターン
4 ウェル層
5 バリア層
6 第2窒化物半導体層
7n n型電極
7p p型電極
8 マスク
8m 金属パターン
8s マスク基板
9 ドット(開口)
101 青色発光部
102 赤色発光部
103 緑色発光部
Claims (16)
- (a)基板上の第1窒化物半導体層に、該基板に垂直な断面における基板表面に対する傾斜角が滑らかに変化する部分を有するレジストパターンを形成する工程と、
(b)前記レジストパターンをマスクとして基板にエッチングを施して、前記第1窒化物半導体層にパターンを転写する工程と、
(c)パターニングした前記第1窒化物半導体層上に活性層を複数積層する工程であって、前記活性層は各層ごとに前記基板表面に垂直な断面における前記基板表面に対する前記傾斜角が異なり、前記複数の活性層の下層ほど前記傾斜角の変化が急であり、前記複数の活性層の上層ほど前記傾斜角の変化が緩やかであり、前記発光層は幅広い傾斜角分布を有するように形成される工程と
を含む窒化物半導体結晶ないしそれを用いた発光素子の製造方法。 - 前記工程(a)は、
(a−1)前記第1窒化物半導体層にレジストを塗布する工程と、
(a−2)マスクを用いて露光し、その後現像して、前記基板に垂直な断面における傾斜角が滑らかに変化する部分を有するレジストパターンを形成する工程と
を含む請求項1に記載の窒化物半導体結晶ないしそれを用いた発光素子の製造方法。 - 前記活性層が、互いに異なる発光波長域を持つ複数の発光部を含む請求項2に記載の窒化物半導体結晶ないしそれを用いた発光素子の製造方法。
- 前記傾斜角がa軸方向に0°〜30°である、又は、m軸方向に0°〜90°である請求項2または3に記載の窒化物半導体結晶ないしそれを用いた発光素子の製造方法。
- 前記レジストパターンが複数の突起を有する形態である請求項2から4のいずれか1項に記載の窒化物半導体結晶ないしそれを用いた発光素子の製造方法。
- 前記突起が稠密充填配置に分布されている請求項5に記載の窒化物半導体結晶ないしそれを用いた発光素子の製造方法。
- 前記突起が畝である請求項5に記載の窒化物半導体結晶ないしそれを用いた発光素子の製造方法。
- 前記工程(a−2)において、コンタクト露光法を用いる請求項2から7のいずれか1項に記載の窒化物半導体結晶ないしそれを用いた発光素子の製造方法。
- 前記工程(a−2)において、プロキシミティ露光法を用いる請求項2から7のいずれか1項に記載の窒化物半導体結晶ないしそれを用いた発光素子の製造方法。
- 基板と、
前記基板上に積層され、前記基板に垂直な断面における基板表面に対する傾斜角が滑らかに変化する部分を含んだ表面を持つ活性層とを有し、
前記活性層は上下方向に複数積層されることで発光層を形成し、
前記発光層中の前記活性層は各層ごとに前記基板表面に垂直な断面における前記基板表面に対する前記傾斜角が異なっており、
前記複数の活性層の下層ほど前記傾斜角の変化が急であり、
前記複数の活性層の上層ほど前記傾斜角の変化が緩やかであり、
前記発光層は幅広い傾斜角分布を有する窒化物半導体結晶ないしそれを用いた発光素子。 - 前記活性層が、n型窒化物半導体層、p型窒化物半導体層を含み、互いに異なる発光波長域を持つ複数の発光部を含む請求項10に記載の窒化物半導体結晶ないしそれを用いた発光素子。
- 前記傾斜角がa軸方向に0°〜30°である、又は、m軸方向に0°〜90°である請求項10または11に記載の窒化物半導体結晶ないしそれを用いた発光素子。
- 前記表面が、複数の突起を有する請求項10から12のいずれか1項に記載の窒化物半導体結晶ないしそれを用いた発光素子。
- 前記突起が稠密充填配置に分布されている請求項13に記載の窒化物半導体結晶ないしそれを用いた発光素子。
- 前記突起が畝である請求項13に記載の窒化物半導体結晶ないしそれを用いた発光素子。
- 前記活性層を形成する材料として、組成式AlxInyGa(1−x−y)N[0≦x≦1、0≦y≦1、0≦x+y≦1]で表される窒化物半導体を含む請求項10から15のいずれか1項に記載の窒化物半導体結晶ないしそれを用いた発光素子。
Priority Applications (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2006230484A JP4984119B2 (ja) | 2006-08-28 | 2006-08-28 | 窒化物半導体結晶ないしそれを用いた発光素子及びその製造方法 |
EP07016102.1A EP1895601B1 (en) | 2006-08-28 | 2007-08-16 | Nitride semiconductor light emitting device with surface texture |
US11/843,916 US8158993B2 (en) | 2006-08-28 | 2007-08-23 | Nitride semiconductor crystal with surface texture |
US13/311,644 US8658440B2 (en) | 2006-08-28 | 2011-12-06 | Nitride semiconductor crystal with surface texture |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2006230484A JP4984119B2 (ja) | 2006-08-28 | 2006-08-28 | 窒化物半導体結晶ないしそれを用いた発光素子及びその製造方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2008053608A JP2008053608A (ja) | 2008-03-06 |
JP4984119B2 true JP4984119B2 (ja) | 2012-07-25 |
Family
ID=38667217
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2006230484A Expired - Fee Related JP4984119B2 (ja) | 2006-08-28 | 2006-08-28 | 窒化物半導体結晶ないしそれを用いた発光素子及びその製造方法 |
Country Status (3)
Country | Link |
---|---|
US (2) | US8158993B2 (ja) |
EP (1) | EP1895601B1 (ja) |
JP (1) | JP4984119B2 (ja) |
Cited By (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR20170080598A (ko) | 2014-11-07 | 2017-07-10 | 스탠리 일렉트릭 컴퍼니, 리미티드 | 반도체 발광 소자 |
US9972749B2 (en) | 2015-03-23 | 2018-05-15 | Stanley Electric Co., Ltd. | Semiconductor light-emitting element |
US9991420B2 (en) | 2015-03-23 | 2018-06-05 | Stanley Electric Co., Ltd. | Semiconductor light-emitting element |
US10056524B2 (en) | 2014-11-07 | 2018-08-21 | Stanley Electric Co., Ltd. | Semiconductor light-emitting element |
US10062805B2 (en) | 2014-11-07 | 2018-08-28 | Stanley Electric Co., Ltd. | Semiconductor light-emitting element |
US10186671B2 (en) | 2014-11-07 | 2019-01-22 | Stanley Electric Co., Ltd. | Semiconductor light-emitting element |
US10193021B2 (en) | 2015-03-23 | 2019-01-29 | Stanley Electric Co., Ltd. | Semiconductor light-emitting element, and manufacturing method for same |
Families Citing this family (20)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR101008285B1 (ko) * | 2005-10-28 | 2011-01-13 | 주식회사 에피밸리 | 3족 질화물 반도체 발광소자 |
JPWO2008152945A1 (ja) * | 2007-06-15 | 2010-08-26 | ローム株式会社 | 半導体発光装置及びその製造方法 |
TWI381547B (zh) * | 2007-11-14 | 2013-01-01 | Advanced Optoelectronic Tech | 三族氮化合物半導體發光二極體及其製造方法 |
US8633501B2 (en) * | 2008-08-12 | 2014-01-21 | Epistar Corporation | Light-emitting device having a patterned surface |
JP2010087217A (ja) * | 2008-09-30 | 2010-04-15 | Toyoda Gosei Co Ltd | Iii族窒化物半導体発光素子およびその製造方法 |
KR20110067046A (ko) * | 2008-10-09 | 2011-06-20 | 더 리전츠 오브 더 유니버시티 오브 캘리포니아 | 발광 다이오드의 칩 형상화를 위한 광전기화학 식각 |
JP2010118647A (ja) * | 2008-10-17 | 2010-05-27 | Sumitomo Electric Ind Ltd | 窒化物系半導体発光素子、窒化物系半導体発光素子を作製する方法、及び発光装置 |
JP4486701B1 (ja) * | 2008-11-06 | 2010-06-23 | パナソニック株式会社 | 窒化物系半導体素子およびその製造方法 |
US8304784B2 (en) * | 2009-02-24 | 2012-11-06 | Andrew Locke | Illumination device |
KR101603777B1 (ko) | 2009-04-16 | 2016-03-15 | 삼성전자주식회사 | 백색 발광 다이오드 |
JP5491065B2 (ja) * | 2009-04-30 | 2014-05-14 | 住友電気工業株式会社 | ウエハ生産物を作製する方法、及び窒化ガリウム系半導体光素子を作製する方法 |
JP5310604B2 (ja) * | 2010-03-05 | 2013-10-09 | 豊田合成株式会社 | 半導体発光素子の製造方法および半導体発光素子、ランプ、電子機器、機械装置 |
JP2012015154A (ja) * | 2010-06-29 | 2012-01-19 | Ngk Insulators Ltd | 半導体発光素子および半導体発光素子の製造方法 |
JP5361925B2 (ja) * | 2011-03-08 | 2013-12-04 | 株式会社東芝 | 半導体発光素子およびその製造方法 |
US9934310B2 (en) | 2012-01-18 | 2018-04-03 | International Business Machines Corporation | Determining repeat website users via browser uniqueness tracking |
JP2016063175A (ja) * | 2014-09-22 | 2016-04-25 | スタンレー電気株式会社 | 半導体発光素子 |
JP2017220586A (ja) * | 2016-06-08 | 2017-12-14 | 国立大学法人 東京大学 | 半導体発光素子 |
JP6927481B2 (ja) * | 2016-07-07 | 2021-09-01 | 国立大学法人京都大学 | Led素子 |
JP6846913B2 (ja) * | 2016-11-11 | 2021-03-24 | 日本碍子株式会社 | 広波長域発光素子および広波長域発光素子の作製方法 |
CN113451466B (zh) * | 2020-10-29 | 2022-08-05 | 重庆康佳光电技术研究院有限公司 | 一种led芯片、制备方法及背光模组、显示屏 |
Family Cites Families (20)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB241532A (ja) * | 1924-10-16 | 1926-04-01 | Sigismund Rhode | |
JPH08195505A (ja) * | 1995-01-17 | 1996-07-30 | Toshiba Corp | 半導体発光素子及びその製造方法 |
JP3955367B2 (ja) * | 1997-09-30 | 2007-08-08 | フィリップス ルミレッズ ライティング カンパニー リミテッド ライアビリティ カンパニー | 光半導体素子およびその製造方法 |
US6849472B2 (en) * | 1997-09-30 | 2005-02-01 | Lumileds Lighting U.S., Llc | Nitride semiconductor device with reduced polarization fields |
JP3978858B2 (ja) | 1998-04-03 | 2007-09-19 | 松下電器産業株式会社 | 窒化ガリウム系化合物半導体発光素子 |
US6335546B1 (en) * | 1998-07-31 | 2002-01-01 | Sharp Kabushiki Kaisha | Nitride semiconductor structure, method for producing a nitride semiconductor structure, and light emitting device |
JP3469484B2 (ja) * | 1998-12-24 | 2003-11-25 | 株式会社東芝 | 半導体発光素子およびその製造方法 |
JP2000286506A (ja) * | 1999-03-31 | 2000-10-13 | Furukawa Electric Co Ltd:The | GaN系発光素子 |
JP3556916B2 (ja) * | 2000-09-18 | 2004-08-25 | 三菱電線工業株式会社 | 半導体基材の製造方法 |
JP4595198B2 (ja) * | 2000-12-15 | 2010-12-08 | ソニー株式会社 | 半導体発光素子及び半導体発光素子の製造方法 |
US6461944B2 (en) * | 2001-02-07 | 2002-10-08 | The United States Of America As Represented By The Administrator Of The National Aeronautics And Space Administration | Methods for growth of relatively large step-free SiC crystal surfaces |
JP4055503B2 (ja) * | 2001-07-24 | 2008-03-05 | 日亜化学工業株式会社 | 半導体発光素子 |
JP3697406B2 (ja) | 2001-09-26 | 2005-09-21 | 株式会社東芝 | 半導体発光装置及びその製造方法 |
JP3997827B2 (ja) * | 2002-04-30 | 2007-10-24 | 住友電気工業株式会社 | 窒化ガリウム成長用基板及び窒化ガリウム成長用基板の製造方法並びに窒化ガリウム基板の製造方法 |
US7348600B2 (en) * | 2003-10-20 | 2008-03-25 | Nichia Corporation | Nitride semiconductor device, and its fabrication process |
KR20050071238A (ko) * | 2003-12-31 | 2005-07-07 | 엘지전자 주식회사 | 고휘도 발광 소자 및 그 제조 방법 |
US7808011B2 (en) * | 2004-03-19 | 2010-10-05 | Koninklijke Philips Electronics N.V. | Semiconductor light emitting devices including in-plane light emitting layers |
US8227820B2 (en) * | 2005-02-09 | 2012-07-24 | The Regents Of The University Of California | Semiconductor light-emitting device |
US7161188B2 (en) * | 2004-06-28 | 2007-01-09 | Matsushita Electric Industrial Co., Ltd. | Semiconductor light emitting element, semiconductor light emitting device, and method for fabricating semiconductor light emitting element |
US20060237735A1 (en) * | 2005-04-22 | 2006-10-26 | Jean-Yves Naulin | High-efficiency light extraction structures and methods for solid-state lighting |
-
2006
- 2006-08-28 JP JP2006230484A patent/JP4984119B2/ja not_active Expired - Fee Related
-
2007
- 2007-08-16 EP EP07016102.1A patent/EP1895601B1/en active Active
- 2007-08-23 US US11/843,916 patent/US8158993B2/en not_active Expired - Fee Related
-
2011
- 2011-12-06 US US13/311,644 patent/US8658440B2/en not_active Expired - Fee Related
Cited By (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR20170080598A (ko) | 2014-11-07 | 2017-07-10 | 스탠리 일렉트릭 컴퍼니, 리미티드 | 반도체 발광 소자 |
US10056524B2 (en) | 2014-11-07 | 2018-08-21 | Stanley Electric Co., Ltd. | Semiconductor light-emitting element |
US10062805B2 (en) | 2014-11-07 | 2018-08-28 | Stanley Electric Co., Ltd. | Semiconductor light-emitting element |
US10186671B2 (en) | 2014-11-07 | 2019-01-22 | Stanley Electric Co., Ltd. | Semiconductor light-emitting element |
US10270045B2 (en) | 2014-11-07 | 2019-04-23 | Stanley Electric Co., Ltd. | Semiconductor light-emitting element |
US9972749B2 (en) | 2015-03-23 | 2018-05-15 | Stanley Electric Co., Ltd. | Semiconductor light-emitting element |
US9991420B2 (en) | 2015-03-23 | 2018-06-05 | Stanley Electric Co., Ltd. | Semiconductor light-emitting element |
US10193021B2 (en) | 2015-03-23 | 2019-01-29 | Stanley Electric Co., Ltd. | Semiconductor light-emitting element, and manufacturing method for same |
Also Published As
Publication number | Publication date |
---|---|
EP1895601A2 (en) | 2008-03-05 |
EP1895601A3 (en) | 2011-03-16 |
US8658440B2 (en) | 2014-02-25 |
US8158993B2 (en) | 2012-04-17 |
JP2008053608A (ja) | 2008-03-06 |
US20080073657A1 (en) | 2008-03-27 |
EP1895601B1 (en) | 2019-10-02 |
US20120077298A1 (en) | 2012-03-29 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JP4984119B2 (ja) | 窒化物半導体結晶ないしそれを用いた発光素子及びその製造方法 | |
US7180088B2 (en) | Nitride based semiconductor light-emitting device | |
JP5082278B2 (ja) | 発光ダイオードの製造方法、集積型発光ダイオードの製造方法および窒化物系iii−v族化合物半導体の成長方法 | |
KR100649494B1 (ko) | 레이저를 이용하여 발광 다이오드 기판을 표면 처리하는발광 다이오드 제조 방법 및 이 방법에 의해 제조된 발광다이오드 | |
JP5932817B2 (ja) | 結晶緩和構造に基づく半導体発光デバイス | |
JP5187610B2 (ja) | 窒化物半導体ウエハないし窒化物半導体装置及びその製造方法 | |
US7187007B2 (en) | Nitride semiconductor device and method of manufacturing the same | |
JP3852000B2 (ja) | 発光素子 | |
US8709845B2 (en) | Solid state lighting devices with cellular arrays and associated methods of manufacturing | |
KR100709058B1 (ko) | 자외선 발광장치 | |
JP5549338B2 (ja) | 紫外光放射用窒素化合物半導体ledおよびその製造方法 | |
JP2007019318A (ja) | 半導体発光素子、半導体発光素子用基板の製造方法及び半導体発光素子の製造方法 | |
TWI419354B (zh) | Iii族氮化物半導體發光元件及其製造方法 | |
JP2006324331A (ja) | 発光ダイオードおよびその製造方法ならびに集積型発光ダイオードおよびその製造方法ならびに窒化物系iii−v族化合物半導体の成長方法ならびに窒化物系iii−v族化合物半導体成長用基板ならびに発光ダイオードバックライトならびに発光ダイオード照明装置ならびに発光ダイオードディスプレイならびに電子機器 | |
TWI707482B (zh) | 氮化物半導體發光元件 | |
CN112470281A (zh) | 单片led阵列及其前体 | |
JP2007059418A (ja) | 窒化ガリウム系化合物半導体発光素子 | |
JPH11251632A (ja) | GaN系半導体素子の製造方法 | |
WO2004064212A1 (ja) | 窒化物半導体素子及びその製造方法、並びに窒化物半導体基板の製造方法 | |
JP2010092952A (ja) | 白色ledの製造装置と方法 | |
JP2009049044A (ja) | 半導体レーザを作製する方法 | |
JP2007096116A (ja) | 発光素子 | |
JP2011060917A (ja) | 半導体発光素子 | |
JP2007036174A (ja) | 窒化ガリウム系発光ダイオード | |
JP4581478B2 (ja) | 窒化物半導体の製造方法 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20090518 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20110712 |
|
A977 | Report on retrieval |
Free format text: JAPANESE INTERMEDIATE CODE: A971007 Effective date: 20110713 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20110907 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20120306 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20120315 |
|
TRDD | Decision of grant or rejection written | ||
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20120410 |
|
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 |
|
A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20120411 |
|
R150 | Certificate of patent or registration of utility model |
Ref document number: 4984119 Country of ref document: JP Free format text: JAPANESE INTERMEDIATE CODE: R150 Free format text: JAPANESE INTERMEDIATE CODE: R150 |
|
FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20150511 Year of fee payment: 3 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
LAPS | Cancellation because of no payment of annual fees |