JP4979641B2 - 液体吐出ヘッドの製造方法 - Google Patents

液体吐出ヘッドの製造方法 Download PDF

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Publication number
JP4979641B2
JP4979641B2 JP2008159317A JP2008159317A JP4979641B2 JP 4979641 B2 JP4979641 B2 JP 4979641B2 JP 2008159317 A JP2008159317 A JP 2008159317A JP 2008159317 A JP2008159317 A JP 2008159317A JP 4979641 B2 JP4979641 B2 JP 4979641B2
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Japan
Prior art keywords
layer
discharge port
manufacturing
flow path
forming member
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Active
Application number
JP2008159317A
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English (en)
Japanese (ja)
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JP2009023344A (ja
JP2009023344A5 (enExample
Inventor
光則 利重
義則 田川
秀男 田村
太地 米本
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Publication date
Application filed by Canon Inc filed Critical Canon Inc
Priority to JP2008159317A priority Critical patent/JP4979641B2/ja
Publication of JP2009023344A publication Critical patent/JP2009023344A/ja
Publication of JP2009023344A5 publication Critical patent/JP2009023344A5/ja
Application granted granted Critical
Publication of JP4979641B2 publication Critical patent/JP4979641B2/ja
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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1601—Production of bubble jet print heads
    • B41J2/1603—Production of bubble jet print heads of the front shooter type
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1626—Manufacturing processes etching
    • B41J2/1628—Manufacturing processes etching dry etching
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1626—Manufacturing processes etching
    • B41J2/1629—Manufacturing processes etching wet etching
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1631—Manufacturing processes photolithography
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1632—Manufacturing processes machining
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1637—Manufacturing processes molding
    • B41J2/1639—Manufacturing processes molding sacrificial molding
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/164—Manufacturing processes thin film formation
    • B41J2/1645—Manufacturing processes thin film formation thin film formation by spincoating

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Particle Formation And Scattering Control In Inkjet Printers (AREA)
JP2008159317A 2007-06-20 2008-06-18 液体吐出ヘッドの製造方法 Active JP4979641B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2008159317A JP4979641B2 (ja) 2007-06-20 2008-06-18 液体吐出ヘッドの製造方法

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2007162488 2007-06-20
JP2007162488 2007-06-20
JP2008159317A JP4979641B2 (ja) 2007-06-20 2008-06-18 液体吐出ヘッドの製造方法

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP2012049663A Division JP5038539B2 (ja) 2007-06-20 2012-03-06 液体吐出ヘッドの製造方法

Publications (3)

Publication Number Publication Date
JP2009023344A JP2009023344A (ja) 2009-02-05
JP2009023344A5 JP2009023344A5 (enExample) 2012-04-19
JP4979641B2 true JP4979641B2 (ja) 2012-07-18

Family

ID=40136790

Family Applications (2)

Application Number Title Priority Date Filing Date
JP2008159317A Active JP4979641B2 (ja) 2007-06-20 2008-06-18 液体吐出ヘッドの製造方法
JP2012049663A Expired - Fee Related JP5038539B2 (ja) 2007-06-20 2012-03-06 液体吐出ヘッドの製造方法

Family Applications After (1)

Application Number Title Priority Date Filing Date
JP2012049663A Expired - Fee Related JP5038539B2 (ja) 2007-06-20 2012-03-06 液体吐出ヘッドの製造方法

Country Status (2)

Country Link
US (1) US8323519B2 (enExample)
JP (2) JP4979641B2 (enExample)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5828702B2 (ja) * 2011-07-26 2015-12-09 キヤノン株式会社 液体吐出ヘッドの製造方法
JP6000831B2 (ja) * 2012-11-30 2016-10-05 キヤノン株式会社 液体吐出ヘッドの製造方法
JP6552293B2 (ja) * 2015-06-18 2019-07-31 キヤノン株式会社 液体吐出ヘッドの製造方法

Family Cites Families (24)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4609427A (en) * 1982-06-25 1986-09-02 Canon Kabushiki Kaisha Method for producing ink jet recording head
US5300403A (en) * 1992-06-18 1994-04-05 International Business Machines Corporation Line width control in a radiation sensitive polyimide
US5478681A (en) * 1993-11-10 1995-12-26 Nippon Oil Co., Ltd. Method for producing color filter
JP3372739B2 (ja) * 1996-01-12 2003-02-04 キヤノン株式会社 液体噴射記録ヘッドの製造方法
JPH09201968A (ja) * 1996-01-30 1997-08-05 Canon Inc 液体噴射記録ヘッド及びその製造方法
JPH106510A (ja) * 1996-06-25 1998-01-13 Canon Inc インクジェット記録ヘッドの製造方法
JPH1044437A (ja) * 1996-07-30 1998-02-17 Canon Inc インクジェット記録ヘッドおよびその製造方法
JP4146933B2 (ja) * 1998-06-03 2008-09-10 キヤノン株式会社 インクジェットヘッドおよびインクジェットヘッドの製造方法
ES2232047T3 (es) 1998-06-03 2005-05-16 Canon Kabushiki Kaisha Cabezal para chorros de tinta, sustrato para cabezal para chorros de tinta y metodo para la fabricacion del cabezal.
JP2001301177A (ja) * 2000-04-24 2001-10-30 Casio Comput Co Ltd インクジェットプリンタヘッドの製造方法
JP4054583B2 (ja) * 2001-02-28 2008-02-27 キヤノン株式会社 インクジェットプリントヘッドの製造方法
US6793314B2 (en) * 2001-07-27 2004-09-21 Eastman Kodak Company Cleaning ink jet print heads using ultra-violet and green Nd-YAG lasers
JP3963456B2 (ja) * 2003-06-16 2007-08-22 キヤノン株式会社 感光性樹脂組成物およびこれを用いたインクジェット記録ヘッドおよびその製造方法
JP2005161711A (ja) * 2003-12-03 2005-06-23 Canon Inc インクジェット記録ヘッド
JP2005186528A (ja) * 2003-12-26 2005-07-14 Canon Inc 液体吐出ヘッドおよびその製造方法
KR100598290B1 (ko) * 2004-05-20 2006-07-07 동부일렉트로닉스 주식회사 리소그래피 공정의 감광막 패턴 형성 방법
CN101056893B (zh) * 2004-11-09 2011-06-08 西巴特殊化学品控股有限公司 作为聚合引发剂的n-取代酰亚胺
JP4929607B2 (ja) * 2005-03-24 2012-05-09 ブラザー工業株式会社 インクジェットヘッドの製造方法及びインクジェットヘッド
US20060243701A1 (en) * 2005-04-19 2006-11-02 Shogo Ono Liquid discharge head and liquid discharge head manufacturing method, chip element, and printing apparatus
JP2007001067A (ja) * 2005-06-22 2007-01-11 Fuji Xerox Co Ltd 液滴吐出装置及び液滴吐出面のクリーニング方法
JP4881081B2 (ja) * 2005-07-25 2012-02-22 キヤノン株式会社 液体吐出ヘッドの製造方法
JP2007038451A (ja) * 2005-08-01 2007-02-15 Canon Inc インクジェット記録ヘッド
JP2007126692A (ja) * 2005-11-01 2007-05-24 Seiko Epson Corp 凹部付き基板の製造方法および凹部付き基板
US7523553B2 (en) * 2006-02-02 2009-04-28 Canon Kabushiki Kaisha Method of manufacturing ink jet recording head

Also Published As

Publication number Publication date
JP5038539B2 (ja) 2012-10-03
JP2012106512A (ja) 2012-06-07
US20080317971A1 (en) 2008-12-25
JP2009023344A (ja) 2009-02-05
US8323519B2 (en) 2012-12-04

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