JP5153951B2 - インクジェット記録ヘッドの製造方法 - Google Patents
インクジェット記録ヘッドの製造方法 Download PDFInfo
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- JP5153951B2 JP5153951B2 JP2012120780A JP2012120780A JP5153951B2 JP 5153951 B2 JP5153951 B2 JP 5153951B2 JP 2012120780 A JP2012120780 A JP 2012120780A JP 2012120780 A JP2012120780 A JP 2012120780A JP 5153951 B2 JP5153951 B2 JP 5153951B2
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Images
Classifications
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/0035—Multiple processes, e.g. applying a further resist layer on an already in a previously step, processed pattern or textured surface
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1601—Production of bubble jet print heads
- B41J2/1603—Production of bubble jet print heads of the front shooter type
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/1626—Manufacturing processes etching
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/1631—Manufacturing processes photolithography
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/1632—Manufacturing processes machining
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/1632—Manufacturing processes machining
- B41J2/1634—Manufacturing processes machining laser machining
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/1637—Manufacturing processes molding
- B41J2/1639—Manufacturing processes molding sacrificial molding
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/164—Manufacturing processes thin film formation
- B41J2/1645—Manufacturing processes thin film formation thin film formation by spincoating
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Particle Formation And Scattering Control In Inkjet Printers (AREA)
Description
なお、本明細書では、ポジ型レジストやそのパターンに、特定の吸収剤を特定量含まない場合の説明もしているが、それらの説明は参考用である。
ポリメチルイソプロペニルケトン、ポリビニルケトン等のビニルケトン系高分子化合物;ポリメタクリル酸、ポリメチルメタクリレート、ポリエチルメタクリレート、ポリn−ブチルメタクリレート、ポリフェニルメタクリレート、ポリメタクリルアミド、ポリメタクリロニトリル等のメタクリル系高分子化合物;ポリブデン−1−スルフォン、ポリメチルペンテン−1−スルフォン等のオレフィンスルフォン系高分子化合物;等。
これらのモノマー単位を複数有する共重合体でもよい。
2,4−ジ−ヒドロキシベンゾフェノン、2−ヒドロキシ−4−メトキシベンゾフェノン、2−ヒドロキシ−4−n−オクトキシベンゾフェノン、2−ヒドロキシ−4−n−ドデシルオキシベンゾフェノン、2−ヒドロキシ−4−ベンジルオキシベンゾフェノン、2,2'−ヒドロキシ−4−メトキシベンゾフェノン、フェニルサリシレート、4−t−ブチルフェニルサリシレート、2−ヒドロキシ−4−メトキシベンゾフェノン、2,4−ジ−t−ブチルフェニル−3',5'−ジ−t−ブチル−4−ヒドロキシベンゾエート等。
本実施例では、前述した操作手順(図2(a)〜(g))に準じて、インクジェット記録ヘッドを作製した。
実施例1及び2と異なる点として、被覆樹脂層形成材料として、表1及び表2に記載する組成物から増感剤を除いた組成物を用い、吐出口形成の露光時に波長300nm以下をカットするフィルターを用いず、300nm以下の光も照射した。それ以外は、それぞれ実施例1及び2と同様にしてインクジェット記録ヘッドを作製した。
2 エネルギー発生素子(インク吐出エネルギー発生素子)
3 供給口
4 パターン
5 被覆樹脂層
6 マスク
7 吐出口
8 流路
9 供給部材
10 密着向上層
11 流路形成部材(流路壁)
11a 側壁部分
11b 吐出口形成樹脂
12 ポジ型レジスト
Claims (11)
- インクを吐出するために利用されるエネルギーを発生するエネルギー発生素子と、基板と、インクを吐出する吐出口及び前記吐出口と連通するインクの流路を形成する流路形成部材と、を有するインクジェット記録ヘッドの製造方法であって、
前記基板上に、ポジ型感光性樹脂にて、前記流路のパターンを設ける工程;
前記基板上に、前記パターンを被覆するように前記流路形成部材となるネガ型感光性樹脂の被覆樹脂層を設ける工程;
前記ネガ型感光性樹脂が感度を持つ波長の光で前記被覆樹脂層を露光して、前記吐出口を形成する工程;および
前記パターンを除去して前記流路を形成する工程;
を有し、前記ポジ型感光性樹脂中に吸収剤を0.1〜5.0重量%含み、該吸収剤は、前記ネガ型感光性樹脂と、該吸収剤を含まない該ポジ型感光性樹脂とが共に感度を持つ波長の光を吸収し、前記パターンは、前記被覆樹脂層を露光するために用いられる光に対しては、感度をもたないインクジェット記録ヘッドの製造方法。 - 前記ポジ型感光性樹脂が、MMA(メチルメタクリレート)単位を有する重合体を含有する請求項1に記載のインクジェット記録ヘッドの製造方法。
- 前記被覆樹脂層が、光カチオン重合開始剤として芳香族スルホニウム塩と、300nm以上の波長の光に対する増感剤としてアントラセン誘導体とを含む光カチオン重合性樹脂により形成される請求項1または2に記載のインクジェット記録ヘッドの製造方法。
- 前記被覆樹脂層を露光するために用いられる光はi線である請求項1乃至3のいずれかに記載のインクジェット記録ヘッドの製造方法。
- 前記吸収剤が紫外線吸収剤である請求項1乃至4のいずれかに記載のインクジェット記録ヘッドの製造方法。
- 前記パターンを形成する前に、前記基板上に、紫外線吸収剤と熱可塑性の樹脂とで形成される密着向上層を形成する工程を有する請求項1乃至5のいずれかに記載のインクジェット記録ヘッドの製造方法。
- 前記密着向上層における前記紫外線吸収剤の含有量は前記熱可塑性の樹脂に対して1重量%以上10重量%以下である請求項6に記載のインクジェット記録ヘッドの製造方法。
- 前記熱可塑性の樹脂は、ポリエーテルアミド樹脂である請求項6または7に記載のインクジェット記録ヘッドの製造方法。
- 前記流路のパターンが、前記ポジ型感光性樹脂を、該ポジ型感光性樹脂が感度を持つ波長の光で露光することで形成される請求項1乃至8のいずれかに記載のインクジェット記録ヘッドの製造方法。
- インクを吐出するために利用されるエネルギーを発生するエネルギー発生素子と、基板と、インクを吐出する吐出口及び前記吐出口と連通するインクの流路を形成する流路形成部材と、を有するインクジェット記録ヘッドの製造方法であって、
前記基板上に、前記流路の側壁を設ける工程;
前記基板上に、前記側壁を被覆するように、ポジ型感光性樹脂を設ける工程;
前記ポジ型感光性樹脂を前記基板に向かって研磨して、前記側壁と前記ポジ型感光性樹脂とを平坦化する工程;
平坦化された前記側壁と前記ポジ型感光性樹脂との上に吐出口形成用樹脂層を設ける工程;
前記吐出口形成用樹脂層が感度を持つ波長の光で該吐出口形成用樹脂層を露光して、前記吐出口を形成する工程;および
前記ポジ型感光性樹脂を除去して前記流路を形成する工程;
を有し、前記ポジ型感光性樹脂中に吸収剤を0.1〜5.0重量%含み、該吸収剤は、前記吐出口形成用樹脂層と、該吸収剤を含まない該ポジ型感光性樹脂とが共に感度を持つ波長の光を吸収し、該ポジ型感光性樹脂は、該吐出口形成用樹脂層を露光するために用いられる光に対しては感度をもたないインクジェット記録ヘッドの製造方法。 - 前記吐出口形成用樹脂層を露光するために用いられる光はi線である請求項10に記載のインクジェット記録ヘッドの製造方法。
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JP2010131954A (ja) * | 2007-12-19 | 2010-06-17 | Canon Inc | 液体吐出ヘッドの製造方法 |
US20090162797A1 (en) * | 2007-12-19 | 2009-06-25 | Canon Kabushiki Kaisha | Method of manufacturing liquid ejection head |
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JP5783854B2 (ja) | 2011-09-01 | 2015-09-24 | キヤノン株式会社 | 液体吐出ヘッドの製造方法、および液体吐出ヘッド |
JP5904779B2 (ja) * | 2011-12-16 | 2016-04-20 | キヤノン株式会社 | 液体吐出ヘッドの製造方法 |
KR101961115B1 (ko) * | 2012-02-07 | 2019-03-26 | 삼성전자주식회사 | 성형품, 이의 제조 방법 및 상기 성형품을 포함하는 디스플레이 장치 |
JP2016221866A (ja) * | 2015-06-01 | 2016-12-28 | キヤノン株式会社 | 液体吐出ヘッドの製造方法 |
US10363746B2 (en) | 2016-12-20 | 2019-07-30 | Canon Kabushiki Kaisha | Method for producing liquid ejection head |
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