JP4948213B2 - 変位測定システムおよびリソグラフィ装置 - Google Patents
変位測定システムおよびリソグラフィ装置 Download PDFInfo
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Classifications
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70691—Handling of masks or workpieces
- G03F7/70775—Position control, e.g. interferometers or encoders for determining the stage position
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
- G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
- G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
- G01D5/36—Forming the light into pulses
- G01D5/38—Forming the light into pulses by diffraction gratings
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70483—Information management; Active and passive control; Testing; Wafer monitoring, e.g. pattern monitoring
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/708—Construction of apparatus, e.g. environment aspects, hygiene aspects or materials
- G03F7/7085—Detection arrangement, e.g. detectors of apparatus alignment possibly mounted on wafers, exposure dose, photo-cleaning flux, stray light, thermal load
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/708—Construction of apparatus, e.g. environment aspects, hygiene aspects or materials
- G03F7/70858—Environment aspects, e.g. pressure of beam-path gas, temperature
- G03F7/70883—Environment aspects, e.g. pressure of beam-path gas, temperature of optical system
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67242—Apparatus for monitoring, sorting or marking
- H01L21/67259—Position monitoring, e.g. misposition detection or presence detection
Description
Claims (10)
- 第1コンポーネントおよび第2のコンポーネントの間の変位を測定するように構成された変位測定システムであって、
前記第1のコンポーネントに取り付けられ、その長手方向が第1の方向に実質的に平行でその溝の長手方向に実質的に平行になるように向きが定められた第1の細長い回折格子と、
前記第2のコンポーネントに取り付けられ、その長手方向が前記第1の方向とは平行でない第2の方向に実質的に平行でその溝の長手方向に実質的に垂直になるように向きが定められた第2の細長い回折格子と、
前記第1および第2の細長い回折格子による少なくとも1つの放射ビームの回折によって生成された第1の放射パターンを検出するように構成された第1のセンサと、
前記第1のコンポーネントに取り付けられ、その長手方向が前記第1の方向に実質的に平行でその溝の長手方向に実質的に平行になるように向きが定められた第3の細長い回折格子と、
前記第2のコンポーネントに取り付けられ、その長手方向が前記第2の方向に実質的に平行でその溝の長手方向に実質的に垂直になるように向きが定められた第4の細長い回折格子と、
前記第3および第4の細長い回折格子による少なくとも1つの放射ビームの回折によって生成された第2の放射パターンを検出するように構成された第2のセンサと
を含み、
前記第1の放射パターンが、前記第2の方向の前記第2の細長い回折格子に対する前記第1の細長い回折格子の変位を表し、
前記第2の放射パターンが、前記第2の方向の前記第4の細長い回折格子に対する前記第3の細長い回折格子の変位を表し、
前記第1および第2の細長い回折格子が交差する第1の測定点と前記第3および第4の細長い回折格子が交差する第2の測定点との間の、前記第1の方向に実質的に平行な方向の離隔距離が増大するように、前記第1、第2、第3および第4の細長い回折格子が配置される、
変位測定システム。 - 前記第1および第2の回折格子の溝の長手方向が前記第2の方向に実質的に垂直である、
請求項1に記載の変位測定システム。 - 前記変位測定システムが、前記第1の方向と前記第2の方向の両方に実質的に垂直な第3の方向に実質的に平行な軸のまわりの前記第2のコンポーネントに対する前記第1のコンポーネントの回転変位を、前記第1および第2の放射パターンによって示された前記第2の方向の変位の差から決定する、
請求項1または2に記載の変位測定システム。 - 前記変位測定システムが、前記第1のコンポーネントにおける関心の点の前記第2の方向の変位を、前記第1および第2のパターンによって示された前記第2の方向の変位の平均から決定する、
請求項1乃至3のいずれかに記載の変位測定システム。 - 前記第3および第4の細長い回折格子の溝の長手方向が前記第2の方向に実質的に垂直である、
請求項1乃至4のいずれかに記載の変位測定システム。 - 前記第1のコンポーネントに取り付けられ、その長手方向が前記第2の方向に実質的に平行でその溝の長手方向に実質的に平行になるように向きが定められた第5の細長い回折格子と、
前記第2のコンポーネントに取り付けられ、その長手方向が前記第1の方向に実質的に平行でその溝の長手方向に実質的に垂直になるように向きが定められた第6の細長い回折格子と、
前記第5および第6の細長い回折格子による少なくとも1つの放射ビームの回折によって生成された第3の放射パターンを検出するように構成された第3のセンサと
をさらに含み、
前記第3の放射パターンが、前記第1の方向の前記第6の細長い回折格子に対する前記第5の細長い格子の変位を表す、
請求項1乃至5のいずれかに記載の変位測定システム。 - 前記第5および第6の回折格子の溝の長手方向が前記第1の方向に実質的に垂直である、
請求項6に記載の変位測定システム。 - 前記第1の方向が前記第2の方向に実質的に垂直である、
請求項1乃至7のいずれかに記載の変位測定システム。 - 前記第2のコンポーネントに対する前記第1のコンポーネントの変位を自由度6で測定するように構成された、
請求項1乃至8のいずれかに記載の変位測定システム。 - パターニングデバイスから基板上へパターンを転写するように配置されたリソグラフィ装置であって、リソグラフィ装置の第2のコンポーネントに対するリソグラフィ装置の第1のコンポーネントの変位を測定するように構成された、
請求項1乃至9のいずれかに記載の変位測定システムを含むリソグラフィ装置。
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US11/384,834 US7636165B2 (en) | 2006-03-21 | 2006-03-21 | Displacement measurement systems lithographic apparatus and device manufacturing method |
US11/384,834 | 2006-03-21 |
Publications (2)
Publication Number | Publication Date |
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JP2007292735A JP2007292735A (ja) | 2007-11-08 |
JP4948213B2 true JP4948213B2 (ja) | 2012-06-06 |
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JP2007064291A Active JP4948213B2 (ja) | 2006-03-21 | 2007-03-14 | 変位測定システムおよびリソグラフィ装置 |
Country Status (8)
Country | Link |
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US (2) | US7636165B2 (ja) |
EP (2) | EP1837630B1 (ja) |
JP (1) | JP4948213B2 (ja) |
KR (3) | KR20070095805A (ja) |
CN (1) | CN101042542B (ja) |
DE (1) | DE602007000251D1 (ja) |
SG (1) | SG136092A1 (ja) |
TW (1) | TWI344060B (ja) |
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CN101042542A (zh) | 2007-09-26 |
US7636165B2 (en) | 2009-12-22 |
JP2007292735A (ja) | 2007-11-08 |
EP1865291B1 (en) | 2015-08-19 |
US20070223007A1 (en) | 2007-09-27 |
DE602007000251D1 (de) | 2009-01-02 |
EP1837630B1 (en) | 2008-11-19 |
US20100053586A1 (en) | 2010-03-04 |
TW200739242A (en) | 2007-10-16 |
US8390820B2 (en) | 2013-03-05 |
EP1865291A2 (en) | 2007-12-12 |
EP1837630A1 (en) | 2007-09-26 |
SG136092A1 (en) | 2007-10-29 |
KR20090081351A (ko) | 2009-07-28 |
KR20080089548A (ko) | 2008-10-07 |
KR100983909B1 (ko) | 2010-09-28 |
TWI344060B (en) | 2011-06-21 |
EP1865291A3 (en) | 2009-07-15 |
KR100950068B1 (ko) | 2010-03-26 |
KR20070095805A (ko) | 2007-10-01 |
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