JP4614929B2 - 位置測定ユニット、測定システム、および該位置測定ユニットを備えたリソグラフィ装置 - Google Patents
位置測定ユニット、測定システム、および該位置測定ユニットを備えたリソグラフィ装置 Download PDFInfo
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- JP4614929B2 JP4614929B2 JP2006249172A JP2006249172A JP4614929B2 JP 4614929 B2 JP4614929 B2 JP 4614929B2 JP 2006249172 A JP2006249172 A JP 2006249172A JP 2006249172 A JP2006249172 A JP 2006249172A JP 4614929 B2 JP4614929 B2 JP 4614929B2
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Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B9/00—Measuring instruments characterised by the use of optical techniques
- G01B9/02—Interferometers
- G01B9/02049—Interferometers characterised by particular mechanical design details
- G01B9/02051—Integrated design, e.g. on-chip or monolithic
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B9/00—Measuring instruments characterised by the use of optical techniques
- G01B9/02—Interferometers
- G01B9/02015—Interferometers characterised by the beam path configuration
- G01B9/02029—Combination with non-interferometric systems, i.e. for measuring the object
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70691—Handling of masks or workpieces
- G03F7/70775—Position control, e.g. interferometers or encoders for determining the stage position
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B2290/00—Aspects of interferometers not specifically covered by any group under G01B9/02
- G01B2290/70—Using polarization in the interferometer
Description
1. ステップモードにおいては、マスクテーブルMTすなわち「マスク支持体」、および基板テーブルWTすなわち「基板支持体」を基本的に静止状態に保ちつつ、放射線ビームに付与されたパターン全体を一度に(すなわち、一回の静止露光)ターゲット部分C上に投影する。基板テーブルWTすなわち「基板支持体」は、つぎにXおよび/またはY方向に移動され、それによって別のターゲット部分Cが露光されることが可能になる。ステップモードにおいては、露光フィールドの最大サイズよって、一回の静止露光時に投影されるターゲット部分Cのサイズが限定される。
Claims (18)
- 第1および第2次元内の位置を測定する測定ユニットであって、
第1および第2回折格子上のエンコーダ測定ビームの回折によって、第1格子に対する第2格子の第1次元内の位置を測定する回折型エンコーダと、
基準経路および測定経路のそれぞれを進む干渉計測定ビームの間の干渉によって、測定経路内のミラーの第2次元内の位置を測定する干渉計と、
前記エンコーダ測定ビームならびに前記干渉計測定ビームを転送する複合光学ユニットと、
前記エンコーダならびに前記干渉計用の単一の複合光源と、
前記光源からの単一の入射ビームを受けるべく配置された入射ビームスプリッタと、を備え、
前記入射ビームスプリッタは、前記入射ビームを前記エンコーダ測定ビームと前記干渉計測定ビームとに分割する、
測定ユニット。 - 前記光学ユニットは、前記エンコーダのプリズムおよび前記干渉計の偏光ビームスプリッタを有する、
請求項1記載の測定ユニット。 - 前記プリズムは、第1および第2格子によって形成された平面に対して実質的に45度の角度をなす表面を有し、当該表面は前記干渉計測定ビームを前記偏光ビームスプリッタへ転送する、
請求項2記載の測定ユニット。 - 前記プリズムの表面は、前記干渉計の前記偏光ビームスプリッタの表面に対して実質的に平行である、
請求項3記載の測定ユニット。 - 前記干渉計は、ホモダイン干渉計である、
請求項1記載の測定ユニット。 - 前記入射ビームスプリッタは、前記エンコーダのプリズムの表面上に配置され、第1および第2格子によって形成された平面に対して実質的に45度の角度をなしている、
請求項1記載の測定ユニット。 - 前記入射ビームスプリッタは、無偏光ビームスプリッタである、
請求項1記載の測定ユニット。 - 前記第1および第2回折格子の1つは、前記干渉計の前記ミラーを提供するために0次反射を有する、
請求項1記載の測定ユニット。 - 前記エンコーダ測定ビームを検出するエンコーダ検出器、および前記干渉計測定ビームを検出する干渉計検出器を有する単一検出器ユニットを備える、
請求項1記載の測定ユニット。 - 前記複合光学ユニットと前記干渉計検出器との間の干渉計ビームの光路内に配置された格子プレートを備える、
請求項9記載の測定ユニット。 - 前記単一検出器ユニットは、単一プリント回路基板を備える、
請求項10記載の測定ユニット。 - 前記干渉計のコーナキューブは、第1次元に対して実質的に垂直な方向に前記干渉計測定ビームを偏向させるべく構成されている、
請求項1記載の測定ユニット。 - 前記干渉計のコーナキューブは、第1次元に対して実質的に平行な方向に前記干渉計測定ビームを偏向させるべく構成されている、
請求項1記載の測定ユニット。 - 6自由度で目標物の位置を測定する測定システムであって、請求項1記載の測定ユニットを3つ備える、
測定システム。 - 3つの前記測定ユニットは、表面に沿って配置されおり、3つの前記ユニットの干渉計のそれぞれは、当該表面に対して実質的に垂直な次元内でそれぞれのユニットの位置を測定し、エンコーダのそれぞれは、当該表面に対して実質的に平行な次元内の位置を測定する、
請求項14記載の測定システム。 - 3つの前記測定ユニットは、共通の第2回折格子を備え、格子は、干渉計のミラーを設けるために0次反射を有する、
請求項15記載の測定システム。 - 請求項1記載の測定ユニットを備えたリソグラフィ装置であって、
前記測定ユニットは、基板テーブルの位置を測定するために基板テーブルに接続されている、
リソグラフィ装置。 - 請求項1記載の測定ユニットを備えたリソグラフィ装置であって、
前記測定ユニットは、マスクテーブルの位置を測定するためにマスクテーブルに接続されている、
リソグラフィ装置。
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US11/226,460 US7362446B2 (en) | 2005-09-15 | 2005-09-15 | Position measurement unit, measurement system and lithographic apparatus comprising such position measurement unit |
Publications (2)
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JP2007127625A JP2007127625A (ja) | 2007-05-24 |
JP4614929B2 true JP4614929B2 (ja) | 2011-01-19 |
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JP2006249172A Active JP4614929B2 (ja) | 2005-09-15 | 2006-09-14 | 位置測定ユニット、測定システム、および該位置測定ユニットを備えたリソグラフィ装置 |
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