JP4940743B2 - 半導体装置 - Google Patents
半導体装置 Download PDFInfo
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- JP4940743B2 JP4940743B2 JP2006116585A JP2006116585A JP4940743B2 JP 4940743 B2 JP4940743 B2 JP 4940743B2 JP 2006116585 A JP2006116585 A JP 2006116585A JP 2006116585 A JP2006116585 A JP 2006116585A JP 4940743 B2 JP4940743 B2 JP 4940743B2
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- lead frame
- semiconductor chip
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- spot
- insulating substrate
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- 239000004065 semiconductor Substances 0.000 title claims description 80
- 238000003756 stirring Methods 0.000 claims description 49
- 239000000758 substrate Substances 0.000 claims description 44
- 238000005304 joining Methods 0.000 claims description 42
- 238000003466 welding Methods 0.000 claims description 42
- 229910052751 metal Inorganic materials 0.000 claims description 21
- 239000002184 metal Substances 0.000 claims description 21
- 239000004020 conductor Substances 0.000 claims description 19
- 239000000463 material Substances 0.000 claims description 17
- 229910052782 aluminium Inorganic materials 0.000 claims description 14
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 14
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims description 10
- 229910052802 copper Inorganic materials 0.000 claims description 10
- 239000010949 copper Substances 0.000 claims description 10
- 238000000034 method Methods 0.000 description 18
- 238000010586 diagram Methods 0.000 description 8
- 239000000919 ceramic Substances 0.000 description 6
- 238000003825 pressing Methods 0.000 description 6
- 230000035882 stress Effects 0.000 description 6
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 5
- 229910000679 solder Inorganic materials 0.000 description 5
- 238000005243 fluidization Methods 0.000 description 4
- 229910052710 silicon Inorganic materials 0.000 description 4
- 239000010703 silicon Substances 0.000 description 4
- 239000007790 solid phase Substances 0.000 description 3
- 229910000881 Cu alloy Inorganic materials 0.000 description 2
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 description 2
- 230000013011 mating Effects 0.000 description 2
- 229910052750 molybdenum Inorganic materials 0.000 description 2
- 239000011733 molybdenum Substances 0.000 description 2
- 230000002250 progressing effect Effects 0.000 description 2
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 2
- 229910052721 tungsten Inorganic materials 0.000 description 2
- 239000010937 tungsten Substances 0.000 description 2
- 238000005452 bending Methods 0.000 description 1
- 239000011889 copper foil Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 230000017525 heat dissipation Effects 0.000 description 1
- 230000002452 interceptive effect Effects 0.000 description 1
- 229910000765 intermetallic Inorganic materials 0.000 description 1
- 238000002844 melting Methods 0.000 description 1
- 230000008018 melting Effects 0.000 description 1
- 239000007769 metal material Substances 0.000 description 1
- 238000001465 metallisation Methods 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 230000000149 penetrating effect Effects 0.000 description 1
- 238000005476 soldering Methods 0.000 description 1
- 230000008646 thermal stress Effects 0.000 description 1
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Description
この摩擦攪拌接合法は、2枚の被接合金属板を突き合わせ,または重ね合わせた上で、その接合部に高速回転するピン状の回転ツール(工具と同様な超硬合金製)を押し込み、その回転により発生する摩擦熱で金属材を軟化,塑性流動させて被接合金属板を固相接合する方法であり、薄板(板厚0.2mm)のアルミ材を重ね合わせて回転ツールにより接合したマイクロスポット摩擦攪拌接合法の実験例も報告されている(非特許文献1参照)。
また、塑性流動範囲を拡大するために、回転ツールがリードフレームと重ね合わせた下側の接合相手部材の領域まで達するように深く押し込むようにすると、高速回転する回転ツールが絶縁基板2の導体パターン(厚さ0.2mm程度),半導体チップ3の表面にメタライズした金属膜(厚さ10μm程度)を貫通して絶縁基板2のセラミック基板2a,半導体チップ3のシリコンチップに直接当たって脆い材質のセラミック基板2a,半導体チップ3が破損するおそれがある。
(1)前記リードフレームの接合脚片について、そのスポット接合部の厚さを500μm以下に薄肉化し、この接合部に回転ツールを押し込んで摩擦攪拌接合する際の塑性流動化を促進するようにし、リードフレームを接合する半導体チップの電極面にメタライズした金属膜の厚さを30μm以上に厚膜化して、塑性流動範囲の拡大と併せて回転ツールがシリコンチップに当たるのを防ぐようにする(請求項1)。
(2)銅材で作られたリードフレームに対して、少なくとも接合脚片のスポット接合部を
銅材に比べて塑性流動性の高いアルミ材で形成する(請求項2)。
(3)配線部品として板厚を0.5〜1.5mmとしたリードフレームに対し、その先端側に形成した接合脚片のスポット接合部には肉厚30〜200μmを残してその上面側に凹状の窪みを形成し、摩擦攪拌接合時に接合部の塑性流動化を高めるようにする(請求項3)。(4)前項(3)のリードフレーム接合脚片に対し、スポット接合部の地点から外れた部位に応力緩和ホールを形成し、材質の線膨張係数差に起因して実使用時の熱サイクルで接合界面に加わる熱応力の低減化を図る(請求項4)。
まず、リードフレームをスポット摩擦攪拌接合法により接合して組み立てた半導体装置の全体構造,および回転ツールを用いてスポット摩擦攪拌接合したリードフレーム接合部の模式図を図1(a)〜(c)に、またリードフレームのスポット接合箇所を図2に示す。図1(a)は図7に示した半導体装置に対応する組立構造図であり、図7の組立構造ではリードフレーム4,5の端部にL形に屈曲形成した接合脚片4a.5aが絶縁基板2,半導体チップ3の上面に半田接合されているのに対し、図1の構造ではリードフレーム4,5の接合脚片4a.5aを絶縁基板2の導体パターン2a,半導体チップ3の上面側金属膜3aに重ね合わせた上で、その上方から高速回転する回転ツール7を押し込んでスポット摩擦攪拌接合するようにしている。
まず、板厚が0.5〜1.5mm程度の銅合金で作られたリードフレーム4,5の端部に屈曲形成した接合脚片4a,5aについては、回転ツール7の押し込みにより接合脚片の接合部が短時間で塑性流動化するのを促進するために、プレス加工などにより接合脚片4a,5aの厚さt1が500μm以下(10〜500μmの範囲)となるように薄板化する。
そして、前記条件でリードフレームを接合相手部材にスポット摩擦攪拌接合する際には、図2に示したリードフレーム5の接合脚片5a(外形□3mm程度)に対して、その上面の複数箇所に分けて先端径φ0.5〜2mmの回転ツール7を押し込んで接合する。なお、図中の符号9がスポット接合部を表しており、このようにリードフレーム5の接合脚片5aを複数箇所でスポット接合することで、パワー半導体装置として要求される通電性,放熱性,および接合強度が得られる。
にスリット状のホール5cが形成されている。この構造によれば、半導体装置の熱サイクルに起因してスポット接合部9に加わる面方向の剪断応力をホール5cが吸収緩和して、接合強度の信頼性を向上できる。なお、この応力緩和ホール5cはスリット状のホールに限定されるものではなく、スポット接合部9の配列の間に丸穴を分散穿孔しても同等な効果を奏することができる。
なお、上記の実施例では、半導体チップ3の上面側金属膜3aにリードフレーム4を摩擦攪拌接合する場合を例に説明したが、これに限るものではない。例えば、半導体チップ3の上面側電極にヒートスプレッダを接合した上で、リードフレーム4をヒートスプレッダの上面に摩擦攪拌接合するようにしてもよい。
なお、ヒートスプレッダの材質としては、リードフレームの材料である銅やアルミニウムに比べて熱膨張係数が半導体チップに近いモリブデンやタングステンなどが好適である。熱膨張係数や融点などの違いから、モリブデンやタングステンと銅やアルミニウムとを接合するのは難しいが、摩擦攪拌接合法によれば良好な接合が得られる。
2a セラミック基板
2b 導体パターン
3 半導体チップ
3a 金属膜
4,5 リードフレーム
4a,5a 接合脚片
5b 凹状窪み
5c 応力緩和ホール
7 回転ツール
8 摩擦攪拌接合部
9 スポット接合部
10 アルミ材
11 スポット摩擦攪拌接合装置
11c 押え込み脚
Claims (4)
- 絶縁基板と、該絶縁基板にマウントした半導体チップと、絶縁基板の導体パターン,半導体チップの上面電極,半導体チップの上面電極に接合されたヒートスプレッダの上面のいずれかに接合したリードフレームを有し、該リードフレームの端部に形成した接合脚片を接合相手である半導体チップの上面側電極面にメタライズした金属膜に重ね合わせ、その上から回転ツールを押し込んでリードフレームと半導体チップの金属膜との間を摩擦攪拌接合法によりスポット接合した半導体装置において、
前記接合脚片におけるスポット接合部の厚さを500μm以下に定め、
前記リードフレームを接合する半導体チップの電極面に形成した金属膜の厚さを30μm以上に定めたことを特徴とする半導体装置。 - 絶縁基板と、該絶縁基板にマウントした半導体チップと、絶縁基板の導体パターン,半導体チップの上面電極,半導体チップの上面電極に接合されたヒートスプレッダの上面のいずれかに接合したリードフレームを有し、該リードフレームの端部に形成した接合脚片を接合相手である半導体チップの上面側電極面にメタライズした金属膜に重ね合わせ、その上から回転ツールを押し込んでリードフレームと半導体チップの金属膜との間を摩擦攪拌接合法によりスポット接合した半導体装置において、
前記接合脚片におけるスポット接合部の厚さを500μm以下に定め、
銅材のリードフレームに対し、少なくとも接合脚片のスポット接合部をアルミ材で形成したことを特徴とする半導体装置。 - 絶縁基板と、該絶縁基板にマウントした半導体チップと、絶縁基板の導体パターン,半導体チップの上面電極,半導体チップの上面電極に接合されたヒートスプレッダの上面のいずれかに接合したリードフレームを有し、該リードフレームの端部に形成した接合脚片を接合相手である半導体チップの上面側電極面にメタライズした金属膜に重ね合わせ、その上から回転ツールを押し込んでリードフレームと半導体チップの金属膜との間を摩擦攪拌接合法によりスポット接合した半導体装置において、
前記接合脚片におけるスポット接合部の厚さを500μm以下に定め、
板厚が0.5〜1.5mmであるリードフレームの接合脚片のスポット接合部に、肉厚30〜200μmを残してその上面側に凹状の窪みを形成したことを特徴とする半導体装置。 - 請求項3に記載の半導体装置において、リードフレームの接合脚片に対し、スポット接合部の地点から外れた部位に応力緩和ホールを形成したことを特徴とする半導体装置。
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