JP4936677B2 - スマートセンサーおよびスマートセンサーの製造方法 - Google Patents

スマートセンサーおよびスマートセンサーの製造方法 Download PDF

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JP4936677B2
JP4936677B2 JP2005106025A JP2005106025A JP4936677B2 JP 4936677 B2 JP4936677 B2 JP 4936677B2 JP 2005106025 A JP2005106025 A JP 2005106025A JP 2005106025 A JP2005106025 A JP 2005106025A JP 4936677 B2 JP4936677 B2 JP 4936677B2
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gas
smart sensor
sensitive layer
layer
heater
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JP2006194853A (ja
JP2006194853A5 (enExample
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ウィリアム ガードナー ジュリアン
アンソニー コヴィントン ジェームズ
ウドレア フローリン
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ユニバーシティー オブ ウォリック
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
    • G01N27/04—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance
    • G01N27/12—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of a solid body in dependence upon absorption of a fluid; of a solid body in dependence upon reaction with a fluid, for detecting components in the fluid
    • G01N27/128—Microapparatus

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  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Electrochemistry (AREA)
  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)
  • Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
JP2005106025A 2005-01-10 2005-04-01 スマートセンサーおよびスマートセンサーの製造方法 Expired - Lifetime JP4936677B2 (ja)

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GB0500393.4 2005-01-10
GBGB0500393.4A GB0500393D0 (en) 2005-01-10 2005-01-10 Microheaters

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JP2006194853A JP2006194853A (ja) 2006-07-27
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Publication number Publication date
US7495300B2 (en) 2009-02-24
GB0505192D0 (en) 2005-04-20
GB2422017A (en) 2006-07-12
US20060154401A1 (en) 2006-07-13
GB2422017B (en) 2010-04-14
GB0500393D0 (en) 2005-02-16
JP2006194853A (ja) 2006-07-27

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