JP4926711B2 - 高速応答性および調整可能伝導性を有するフェイルセイフ空気圧作動弁 - Google Patents
高速応答性および調整可能伝導性を有するフェイルセイフ空気圧作動弁 Download PDFInfo
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Images
Classifications
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K7/00—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves
- F16K7/12—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves with flat, dished, or bowl-shaped diaphragm
- F16K7/14—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves with flat, dished, or bowl-shaped diaphragm arranged to be deformed against a flat seat
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K31/00—Actuating devices; Operating means; Releasing devices
- F16K31/003—Actuating devices; Operating means; Releasing devices operated without a stable intermediate position, e.g. with snap action
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K31/00—Actuating devices; Operating means; Releasing devices
- F16K31/12—Actuating devices; Operating means; Releasing devices actuated by fluid
- F16K31/122—Actuating devices; Operating means; Releasing devices actuated by fluid the fluid acting on a piston
- F16K31/1221—Actuating devices; Operating means; Releasing devices actuated by fluid the fluid acting on a piston one side of the piston being spring-loaded
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K7/00—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves
- F16K7/12—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves with flat, dished, or bowl-shaped diaphragm
- F16K7/14—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves with flat, dished, or bowl-shaped diaphragm arranged to be deformed against a flat seat
- F16K7/17—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves with flat, dished, or bowl-shaped diaphragm arranged to be deformed against a flat seat the diaphragm being actuated by fluid pressure
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T137/00—Fluid handling
- Y10T137/8593—Systems
- Y10T137/87169—Supply and exhaust
- Y10T137/87193—Pilot-actuated
- Y10T137/87209—Electric
Landscapes
- Engineering & Computer Science (AREA)
- General Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Physics & Mathematics (AREA)
- Fluid Mechanics (AREA)
- Fluid-Driven Valves (AREA)
- Diaphragms And Bellows (AREA)
- Earth Drilling (AREA)
- Emergency Lowering Means (AREA)
- Lift Valve (AREA)
Description
本発明によるいくつかの実施形態では、標準のダイアフラムとともに標準のおよび修正された超高純度弁座設計を使用して、大半の厳しいアプリケーションに適した高速なFSNC弁を実現している。他の実施形態では、波形ダイアフラムおよび適当なベローズ配列を使用して、伝導性、使用温度、およびデッドスペース低減などの高い特性を持つFSNC弁を実現する。
ダイアフラム弁のサイクル寿命は、ダイアフラムの変位と相関する。ダイアフラムおよび弁座の損傷を実質的に最小にするには、前の節で説明されているように、弁200装置および方法を使用する。したがって、流体作動に関連する信頼性の改善は、ある程度、ALDに有利なより高い伝導性の弁を実現することとトレードオフの関係にありうる。しかし、上で説明されているよう、費用効果のあるALDに必要な長いサイクル寿命仕様には、トレードオフのための実質的余地は残されていない。
ALDマニホールドの技術および類似の技術における弁のいくつかの有利な実装は、「パルス弁」設計を伴うのが最もよい。「パルス弁」は、流体を送出管路から室に導入するために使用され、好ましくは弁座と室との間の不利な導管を回避するか、または最小にする弁として定義される。「パルス弁」の定義およびパルス弁と従来の弁との違いよく理解するには、当業者は、従来の流路を持つ弁500を示す図6および対照的に、パルス弁流路が示されている図8を参照する。比較すると、図6に示されている弁500は、それぞれ関連する容積545および555を有する口540および550を含む。導管545および555に関連するデッドスペースは、避けられない。対照的に、図8に示されている弁600は、出口602に最小限のデッドボリュームのみ有し、これは、ALDシャワーヘッドなどのALDガス分配モジュールへのALD流出物のパルス送出などのガス送出のいくつかのアプリケーションにおいて有利である。
超高純度弁の技術では、さまざまな弁座材料および形状が知られており、実装はうまくいっている。最も一般的に使用される材料は、弾性、引っ張り強度、耐衝撃性、硬さ、化学的親和性、多孔性、安全性、および圧縮永久歪みなどの特性の面で異なる。
いくつかのアプリケーション、特に、低揮発性化学物質蒸気をALD反応炉に導入するには(例えばシャワーベッドモジュールを通じて)、非常に大きな伝導性を保つ弁が必要である。したがって、本発明では、スプリング式ベローズ、好ましくは溶接または薄い電気鋳造ベローズが弁室内に実装され、密封を行うFSNC弁の一実施形態を教示する。例えば、図15は、そのような実施形態の概略側断面図を示している。弁900は、出口918を通じて蒸発ガスをプロセス室またはシャワーヘッド内に直接注入することができる高伝導性パルス弁である。弁座916は、シャワーヘッドまたは室の外壁920内に一体化される。図に示されている弁座916のシールは、シール820(図14)に類似しており、図に示されている場合は、弁座に組み込まれ、超ロープロファイル経路918を形成する。
近年、200℃以上の高温で動作可能な信頼性の高い弁が次第に必要になってきている。特に、多くの有用な材料のALDは、低揮発性化学物質に制限され、所望の化学物質の有用な蒸発に高温弁マニホールドを必要としていた。高温弁の問題は以下のようにいくつかある。
a.シール材料の高温適合性と特性。
b.ダイアフラムおよびスプリング材料の高温弾力性。
c.濡れた表面の化学的親和性および純度。
d.空気圧式アクチュエータの高温適合性。
e.パイロット弁の高温適合性。
ALDマニホールドは、パルス弁により実装されるのが好ましい。この実装では、遅延および交差汚染を最小に抑えつつALDに必要な不活性ガスおよび反応ガスを供給し、必要なときに、最高伝導性の弁実装を可能にする。図18は、4つの弁からなるALD注入システム1100の概略を例示している。弁1140は、内部空間1120およびノズルアレイ1130を有するシャワーヘッドの上部壁に組み込まれる。バッフル円板1125は、通常、弁1140の開口部の真向かいの空間1120内に取り付けられこれにより、弁1140開口部の真向かいの「視野方向」ノズルを通して流れの挿入の局在化を回避する。図18の実施例では、弁1140は、ベローズ弁であり、これは、図15を参照しつつ説明される実施形態に類似している。しかし、多くのさまざまな実装が適しており、必要な温度範囲および伝導性に適合するように適宜選択することができる。また、マニホールド1100内では、異なる伝導性範囲に対する異なる設計の弁は、特定のALDプロセスに合わせてマニホールドを最適化するために実装することができる。しかし、通常、シャワーヘッドとともに、すべての弁が同じ温度に保持される。
超高純度密閉弁設計を本発明で開示されている実施形態に適応させるには、流体制御下の金属製ダイアフラムの適切な機能を保証する対策を講じる必要がある。特に、従来のドーム型ダイアフラムは、本発明のいくつかの実施形態を参照しつつ説明されているように、「活性遮断」状態で漏れのないシールが必ず得られるように取り付けるか、または他の何らかの方法で成形しなおさなければならない。図19は、本発明を実施するのに実質的に不適切なドーム型ダイアフラム(19a)の従来技術の取り付け、一般的解決方法(19b)、本発明によりさらに教示される相補的弁座再設計(19c)、および有利な形で実装される波形ダイアフラム(19d)を例示している。
Claims (5)
- 流体制御弁であって、
弁座と、
前記弁座を通る流路と、
ダイアフラムと、
常閉空気圧式アクチュエータと、
弁制御室と、
第1空気圧供給管路と、
第2空気圧供給管路と、
パイロット弁とを備え、
前記ダイアフラムは、前記弁座と前記弁制御室との間に配置され、
前記常閉空気圧式アクチュエータは、前記ダイアフラムをたわませて前記弁座を密封することにより前記流路を通常閉じるように構成され、
前記第1空気圧供給管路は、前記常閉空気圧式アクチュエータと流体により連絡し、
前記第2空気圧供給管路は、前記パイロット弁を通じて前記弁制御室と流体により連絡し、
前記パイロット弁は、ノーマルオープン3方弁であり、
前記弁制御室は、前記パイロット弁が作動されていない場合に前記パイロット弁を通じて前記第2空気圧供給管路と連絡し、
前記弁制御室は、前記パイロット弁が作動されている場合に前記パイロット弁により前記第2空気圧供給管路から切断され、
前記弁制御室は、前記パイロット弁が作動されている場合に前記パイロット弁を通じて放出管路と連絡する、流体制御弁。 - 前記空気圧式アクチュエータは、弁棒を含み、
前記弁棒は、前記弁制御室の壁を貫き、
スライディングシールが、前記弁棒と前記弁制御室の前記壁との間に配置される請求項1に記載の流体制御弁。 - 請求項1または2に記載の流体制御弁を操作する方法であって、
前記流体制御弁を、空気圧により操作できない不活性状態で閉じたままに機械的に保持する工程と、
前記流体制御弁を、空気圧で開放および閉鎖できる活性状態に変更する工程と、を有し、前記活性状態において、前記第2空気圧供給管路を通して空気圧流体により付与される空気圧は、機械的な媒介を経ずに前記流体制御弁の状態の変化(開放/閉鎖)を生じさせ、
前記方法はさらに、前記流体制御弁を空気圧で開放および閉鎖する工程を含む、方法。 - 前記変更する工程は、常閉空気圧式アクチュエータを空気圧で作動させる工程を含む請求項3に記載の方法。
- 前記機械的に保持する工程は、前記弁をスプリングで閉じたままに保持する工程を含む請求項3に記載の方法。
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2004
- 2004-10-18 TW TW93131543A patent/TWI373583B/zh active
- 2004-10-18 JP JP2006535423A patent/JP4926711B2/ja active Active
- 2004-10-18 DE DE200460026334 patent/DE602004026334D1/de active Active
- 2004-10-18 EP EP04795595A patent/EP1676067B1/en not_active Not-in-force
- 2004-10-18 WO PCT/US2004/034453 patent/WO2005038320A2/en active Application Filing
- 2004-10-18 CN CNA2004800377089A patent/CN1894526A/zh active Pending
- 2004-10-18 US US10/575,443 patent/US7744060B2/en active Active
- 2004-10-18 AT AT04795595T patent/ATE462910T1/de not_active IP Right Cessation
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2010
- 2010-05-19 US US12/783,416 patent/US8083205B2/en active Active
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Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2014084862A1 (en) * | 2012-11-30 | 2014-06-05 | Fluor Technologies Corporation | Positive isolation through isolation of air supply to pneumatic valves |
US9157535B2 (en) | 2012-11-30 | 2015-10-13 | Fluor Technologies Corporation | Positive isolation through isolation of air supply to pneumatic valves |
Also Published As
Publication number | Publication date |
---|---|
TWI373583B (en) | 2012-10-01 |
EP1676067B1 (en) | 2010-03-31 |
WO2005038320A2 (en) | 2005-04-28 |
JP2007509291A (ja) | 2007-04-12 |
EP1676067A2 (en) | 2006-07-05 |
CN1894526A (zh) | 2007-01-10 |
DE602004026334D1 (de) | 2010-05-12 |
US7744060B2 (en) | 2010-06-29 |
US20100224804A1 (en) | 2010-09-09 |
ATE462910T1 (de) | 2010-04-15 |
TW200517613A (en) | 2005-06-01 |
US8083205B2 (en) | 2011-12-27 |
WO2005038320A3 (en) | 2005-07-07 |
US20070187634A1 (en) | 2007-08-16 |
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