JP7445314B2 - ダイヤフラム、バルブ、およびダイヤフラムの製造方法 - Google Patents
ダイヤフラム、バルブ、およびダイヤフラムの製造方法 Download PDFInfo
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- JP7445314B2 JP7445314B2 JP2021515955A JP2021515955A JP7445314B2 JP 7445314 B2 JP7445314 B2 JP 7445314B2 JP 2021515955 A JP2021515955 A JP 2021515955A JP 2021515955 A JP2021515955 A JP 2021515955A JP 7445314 B2 JP7445314 B2 JP 7445314B2
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- Prior art keywords
- diaphragm
- film layer
- thin film
- valve
- thin
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- 238000004519 manufacturing process Methods 0.000 title claims description 21
- 239000010409 thin film Substances 0.000 claims description 43
- 239000012530 fluid Substances 0.000 claims description 26
- 239000010408 film Substances 0.000 claims description 21
- 238000000034 method Methods 0.000 claims description 21
- 230000003746 surface roughness Effects 0.000 claims description 18
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical group [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims description 9
- 229910052799 carbon Inorganic materials 0.000 claims description 9
- 239000002184 metal Substances 0.000 claims description 5
- 229910052751 metal Inorganic materials 0.000 claims description 5
- 239000002245 particle Substances 0.000 description 16
- 239000004065 semiconductor Substances 0.000 description 13
- 230000006835 compression Effects 0.000 description 6
- 238000007906 compression Methods 0.000 description 6
- 238000005192 partition Methods 0.000 description 6
- 239000007788 liquid Substances 0.000 description 5
- 238000005229 chemical vapour deposition Methods 0.000 description 2
- 229920001577 copolymer Polymers 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 238000005240 physical vapour deposition Methods 0.000 description 2
- 238000000623 plasma-assisted chemical vapour deposition Methods 0.000 description 2
- 239000011347 resin Substances 0.000 description 2
- 229920005989 resin Polymers 0.000 description 2
- BFKJFAAPBSQJPD-UHFFFAOYSA-N tetrafluoroethene Chemical group FC(F)=C(F)F BFKJFAAPBSQJPD-UHFFFAOYSA-N 0.000 description 2
- 229910000531 Co alloy Inorganic materials 0.000 description 1
- QXZUUHYBWMWJHK-UHFFFAOYSA-N [Co].[Ni] Chemical compound [Co].[Ni] QXZUUHYBWMWJHK-UHFFFAOYSA-N 0.000 description 1
- 238000007792 addition Methods 0.000 description 1
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 238000004891 communication Methods 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 238000005520 cutting process Methods 0.000 description 1
- 238000003618 dip coating Methods 0.000 description 1
- 238000009503 electrostatic coating Methods 0.000 description 1
- 238000001755 magnetron sputter deposition Methods 0.000 description 1
- 239000004810 polytetrafluoroethylene Substances 0.000 description 1
- 229920001343 polytetrafluoroethylene Polymers 0.000 description 1
- 238000010926 purge Methods 0.000 description 1
- 238000005507 spraying Methods 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
Images
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K7/00—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves
- F16K7/12—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves with flat, dished, or bowl-shaped diaphragm
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K7/00—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves
- F16K7/12—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves with flat, dished, or bowl-shaped diaphragm
- F16K7/126—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves with flat, dished, or bowl-shaped diaphragm the seat being formed on a rib perpendicular to the fluid line
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K25/00—Details relating to contact between valve members and seats
- F16K25/005—Particular materials for seats or closure elements
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K31/00—Actuating devices; Operating means; Releasing devices
- F16K31/12—Actuating devices; Operating means; Releasing devices actuated by fluid
- F16K31/122—Actuating devices; Operating means; Releasing devices actuated by fluid the fluid acting on a piston
- F16K31/1221—Actuating devices; Operating means; Releasing devices actuated by fluid the fluid acting on a piston one side of the piston being spring-loaded
Landscapes
- Engineering & Computer Science (AREA)
- General Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Fluid-Driven Valves (AREA)
Description
ボディ10は、ボディ本体11と、弁座であるシート12と、ボンネット13と、ダイヤフラム30と、押えアダプタ14と、ダイヤフラム押え15と、ホルダ16と、圧縮コイルスプリング17を備える。
アクチュエータ20は、エア駆動式であり、全体で略円柱形状をなし、ケーシング21と、仕切ディスク22と、第1ピストン部23と、第2ピストン部24と、を備える。
次に、本実施形態に係るバルブ1の開閉動作について説明する。
図2は、閉状態にあるバルブ1におけるダイヤフラム30近傍の拡大断面図である。
次に、ダイヤフラム30の構成について説明する。
11:ボディ本体
11b:流入路
11c:流出路
12:シート
30:ダイヤフラム
31:薄板
31A:接液面
32:薄膜層
Claims (6)
- 金属製の薄板と、
前記薄板の一方側の面の全体に形成された薄膜層と、を備え、
前記薄膜層の表面粗さの最大高さRmaxが0.02μmより小さい、ダイヤフラム。 - 前記薄膜層の表面粗さの最大高さRmaxは0.01μmより小さい、請求項1に記載のダイヤフラム。
- 前記薄膜層は、炭素膜またはフッ素樹脂膜である、請求項1または請求項2に記載のダイヤフラム。
- 前記炭素膜は、DLCにより構成されている、請求項3に記載のダイヤフラム。
- 流体通路が形成されたボディと、
前記ボディに設けられた弁座と、
前記弁座に当接および前記弁座から離間して前記流体通路を開閉する請求項1から請求項4のいずれか一項に記載のダイヤフラムと、を備え、
前記ダイヤフラムの前記薄膜層は、前記弁座側に位置している、バルブ。 - 金属製の薄板と、薄膜層とを備えるダイヤフラムの製造方法であって、
前記薄板を球殻状に成形し、
前記薄板の凹状面の全体に、表面粗さの最大高さRmaxが0.02μmより小さい前記薄膜層を形成する、ダイヤフラムの製造方法。
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2019086334 | 2019-04-26 | ||
JP2019086334 | 2019-04-26 | ||
PCT/JP2020/015584 WO2020217960A1 (ja) | 2019-04-26 | 2020-04-06 | ダイヤフラム、バルブ、およびダイヤフラムの製造方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPWO2020217960A1 JPWO2020217960A1 (ja) | 2020-10-29 |
JP7445314B2 true JP7445314B2 (ja) | 2024-03-07 |
Family
ID=72942267
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2021515955A Active JP7445314B2 (ja) | 2019-04-26 | 2020-04-06 | ダイヤフラム、バルブ、およびダイヤフラムの製造方法 |
Country Status (6)
Country | Link |
---|---|
US (1) | US20220049775A1 (ja) |
JP (1) | JP7445314B2 (ja) |
KR (1) | KR20220002430A (ja) |
CN (1) | CN113710939A (ja) |
TW (1) | TWI742616B (ja) |
WO (1) | WO2020217960A1 (ja) |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2001295948A (ja) | 2000-04-11 | 2001-10-26 | Ckd Corp | 高温対応ガス制御バルブ |
JP2004060741A (ja) | 2002-07-26 | 2004-02-26 | Motoyama Eng Works Ltd | ダイアフラム及びダイアフラム弁並びに成膜装置 |
JP2012026476A (ja) | 2010-07-20 | 2012-02-09 | Dainippon Screen Mfg Co Ltd | ダイヤフラムバルブおよびこれを備えた基板処理装置 |
JP2013249868A (ja) | 2012-05-30 | 2013-12-12 | Fujikin Inc | ダイヤフラム及びダイヤフラム弁 |
Family Cites Families (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH05296356A (ja) * | 1992-04-15 | 1993-11-09 | Hitachi Metals Ltd | メタルダイアフラム弁 |
US5413311A (en) * | 1994-03-01 | 1995-05-09 | Tescom Corporation | Gas valve |
JP4883590B2 (ja) * | 2006-03-17 | 2012-02-22 | 独立行政法人産業技術総合研究所 | 積層体及び炭素膜堆積方法 |
JP5101879B2 (ja) * | 2006-12-28 | 2012-12-19 | 株式会社小松製作所 | 摺動構造 |
JP5741891B2 (ja) * | 2009-06-19 | 2015-07-01 | 株式会社ジェイテクト | Dlc膜形成方法 |
JP5153898B2 (ja) * | 2010-04-28 | 2013-02-27 | セントラル硝子株式会社 | ハロゲンガス又はハロゲン化合物ガスの充填容器用バルブ |
JP6335685B2 (ja) * | 2014-06-30 | 2018-05-30 | 株式会社フジキン | ダイヤフラム弁、流体制御装置、半導体製造装置および半導体製造方法 |
JP6830743B2 (ja) * | 2015-05-15 | 2021-02-17 | イーグル工業株式会社 | シール用しゅう動部材及びその製造方法 |
JP6534123B2 (ja) * | 2016-03-23 | 2019-06-26 | 日本アイ・ティ・エフ株式会社 | 被覆膜とその製造方法およびpvd装置 |
KR20220029730A (ko) * | 2019-08-30 | 2022-03-08 | 가부시키가이샤 후지킨 | 다이어프램 밸브 |
JP2021131104A (ja) * | 2020-02-18 | 2021-09-09 | サーパス工業株式会社 | 流量調整装置及び流量調整装置の制御方法 |
-
2020
- 2020-04-06 CN CN202080029645.1A patent/CN113710939A/zh active Pending
- 2020-04-06 KR KR1020217038134A patent/KR20220002430A/ko active Search and Examination
- 2020-04-06 JP JP2021515955A patent/JP7445314B2/ja active Active
- 2020-04-06 WO PCT/JP2020/015584 patent/WO2020217960A1/ja active Application Filing
- 2020-04-17 TW TW109112910A patent/TWI742616B/zh active
-
2021
- 2021-10-26 US US17/510,805 patent/US20220049775A1/en active Pending
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2001295948A (ja) | 2000-04-11 | 2001-10-26 | Ckd Corp | 高温対応ガス制御バルブ |
JP2004060741A (ja) | 2002-07-26 | 2004-02-26 | Motoyama Eng Works Ltd | ダイアフラム及びダイアフラム弁並びに成膜装置 |
JP2012026476A (ja) | 2010-07-20 | 2012-02-09 | Dainippon Screen Mfg Co Ltd | ダイヤフラムバルブおよびこれを備えた基板処理装置 |
JP2013249868A (ja) | 2012-05-30 | 2013-12-12 | Fujikin Inc | ダイヤフラム及びダイヤフラム弁 |
Also Published As
Publication number | Publication date |
---|---|
JPWO2020217960A1 (ja) | 2020-10-29 |
TWI742616B (zh) | 2021-10-11 |
WO2020217960A1 (ja) | 2020-10-29 |
US20220049775A1 (en) | 2022-02-17 |
TW202117214A (zh) | 2021-05-01 |
CN113710939A (zh) | 2021-11-26 |
KR20220002430A (ko) | 2022-01-06 |
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