JP4911289B2 - アクチュエータ装置及び液体噴射ヘッド並びに液体噴射装置 - Google Patents

アクチュエータ装置及び液体噴射ヘッド並びに液体噴射装置 Download PDF

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Publication number
JP4911289B2
JP4911289B2 JP2006102356A JP2006102356A JP4911289B2 JP 4911289 B2 JP4911289 B2 JP 4911289B2 JP 2006102356 A JP2006102356 A JP 2006102356A JP 2006102356 A JP2006102356 A JP 2006102356A JP 4911289 B2 JP4911289 B2 JP 4911289B2
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Japan
Prior art keywords
piezoelectric element
protective film
actuator device
piezoelectric
diaphragm
Prior art date
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Expired - Fee Related
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JP2006102356A
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English (en)
Japanese (ja)
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JP2007281033A5 (enExample
JP2007281033A (ja
Inventor
士郎 矢崎
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Seiko Epson Corp
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Seiko Epson Corp
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Priority to JP2006102356A priority Critical patent/JP4911289B2/ja
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Publication of JP2007281033A5 publication Critical patent/JP2007281033A5/ja
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JP2006102356A 2006-04-03 2006-04-03 アクチュエータ装置及び液体噴射ヘッド並びに液体噴射装置 Expired - Fee Related JP4911289B2 (ja)

Priority Applications (1)

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JP2006102356A JP4911289B2 (ja) 2006-04-03 2006-04-03 アクチュエータ装置及び液体噴射ヘッド並びに液体噴射装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2006102356A JP4911289B2 (ja) 2006-04-03 2006-04-03 アクチュエータ装置及び液体噴射ヘッド並びに液体噴射装置

Publications (3)

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JP2007281033A JP2007281033A (ja) 2007-10-25
JP2007281033A5 JP2007281033A5 (enExample) 2009-05-28
JP4911289B2 true JP4911289B2 (ja) 2012-04-04

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ID=38682207

Family Applications (1)

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JP2006102356A Expired - Fee Related JP4911289B2 (ja) 2006-04-03 2006-04-03 アクチュエータ装置及び液体噴射ヘッド並びに液体噴射装置

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JP (1) JP4911289B2 (enExample)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009255528A (ja) 2008-03-28 2009-11-05 Seiko Epson Corp 液体噴射ヘッド、圧電素子及び液体噴射装置
JP5522346B2 (ja) * 2009-03-09 2014-06-18 セイコーエプソン株式会社 液体噴射ヘッド及びその製造方法並びに液体噴射装置
JP5196184B2 (ja) * 2009-03-11 2013-05-15 セイコーエプソン株式会社 液体噴射ヘッド及び液体噴射装置並びにアクチュエーター
JP5305018B2 (ja) * 2009-03-26 2013-10-02 セイコーエプソン株式会社 液体噴射ヘッド、液体噴射装置及びアクチュエーター装置

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3552013B2 (ja) * 1996-12-09 2004-08-11 セイコーエプソン株式会社 インクジェット式記録ヘッド
JPH11245406A (ja) * 1998-03-03 1999-09-14 Ricoh Co Ltd インクジェットヘッド
JP4114321B2 (ja) * 2001-01-31 2008-07-09 富士ゼロックス株式会社 インクジェットプリンタヘッド及びインクジェットプリンタヘッド用の圧電／電歪アクチュエータ
JP2004209740A (ja) * 2002-12-27 2004-07-29 Canon Inc 液体吐出ヘッド

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JP2007281033A (ja) 2007-10-25

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