JP4907124B2 - スパッタ・コーティング用アノード - Google Patents

スパッタ・コーティング用アノード Download PDF

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Publication number
JP4907124B2
JP4907124B2 JP2005237830A JP2005237830A JP4907124B2 JP 4907124 B2 JP4907124 B2 JP 4907124B2 JP 2005237830 A JP2005237830 A JP 2005237830A JP 2005237830 A JP2005237830 A JP 2005237830A JP 4907124 B2 JP4907124 B2 JP 4907124B2
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JP
Japan
Prior art keywords
anode
cathode
sputtering apparatus
coating
container
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP2005237830A
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English (en)
Japanese (ja)
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JP2006057181A (ja
Inventor
ジェイ． オッケンフス ゲオルグ
ケイ． ティルシュ マーカス
アイ． セドン リチャード
イー． ハン ロバート
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Viavi Solutions Inc
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JDS Uniphase Corp
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Filing date
Publication date
Priority claimed from US11/074,249 external-priority patent/US20060049041A1/en
Application filed by JDS Uniphase Corp filed Critical JDS Uniphase Corp
Publication of JP2006057181A publication Critical patent/JP2006057181A/ja
Application granted granted Critical
Publication of JP4907124B2 publication Critical patent/JP4907124B2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/34—Gas-filled discharge tubes operating with cathodic sputtering
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32431—Constructional details of the reactor
    • H01J37/32532—Electrodes
    • H01J37/32541—Shape
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/34—Gas-filled discharge tubes operating with cathodic sputtering
    • H01J37/3411—Constructional aspects of the reactor
    • H01J37/3438—Electrodes other than cathode

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
  • Coating By Spraying Or Casting (AREA)
  • Apparatuses And Processes For Manufacturing Resistors (AREA)
  • Drying Of Semiconductors (AREA)
  • Magnetic Heads (AREA)
  • Thin Magnetic Films (AREA)
JP2005237830A 2004-08-20 2005-08-18 スパッタ・コーティング用アノード Expired - Lifetime JP4907124B2 (ja)

Applications Claiming Priority (6)

Application Number Priority Date Filing Date Title
US60321104P 2004-08-20 2004-08-20
US60/603,211 2004-08-20
US11/074,249 US20060049041A1 (en) 2004-08-20 2005-03-07 Anode for sputter coating
US11/074,249 2005-03-07
US11/177,465 2005-07-08
US11/177,465 US7879209B2 (en) 2004-08-20 2005-07-08 Cathode for sputter coating

Publications (2)

Publication Number Publication Date
JP2006057181A JP2006057181A (ja) 2006-03-02
JP4907124B2 true JP4907124B2 (ja) 2012-03-28

Family

ID=35722363

Family Applications (2)

Application Number Title Priority Date Filing Date
JP2005237830A Expired - Lifetime JP4907124B2 (ja) 2004-08-20 2005-08-18 スパッタ・コーティング用アノード
JP2005238264A Expired - Lifetime JP5048229B2 (ja) 2004-08-20 2005-08-19 マグネトロン・スパッタリング・デバイス

Family Applications After (1)

Application Number Title Priority Date Filing Date
JP2005238264A Expired - Lifetime JP5048229B2 (ja) 2004-08-20 2005-08-19 マグネトロン・スパッタリング・デバイス

Country Status (7)

Country Link
US (2) US7879209B2 (enExample)
EP (2) EP1628323B1 (enExample)
JP (2) JP4907124B2 (enExample)
CN (2) CN1737188B (enExample)
AT (1) ATE492025T1 (enExample)
DE (1) DE602005025293D1 (enExample)
ES (1) ES2626641T3 (enExample)

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Also Published As

Publication number Publication date
DE602005025293D1 (de) 2011-01-27
ATE492025T1 (de) 2011-01-15
ES2626641T3 (es) 2017-07-25
US20060070877A1 (en) 2006-04-06
JP2006057181A (ja) 2006-03-02
EP1628324A3 (en) 2007-07-04
JP5048229B2 (ja) 2012-10-17
EP1628323B1 (en) 2017-03-29
JP2006057184A (ja) 2006-03-02
EP1628324B8 (en) 2011-01-26
EP1628323A2 (en) 2006-02-22
EP1628324B1 (en) 2010-12-15
EP1628324A2 (en) 2006-02-22
CN1737190A (zh) 2006-02-22
EP1628323A3 (en) 2009-04-22
US20060049042A1 (en) 2006-03-09
CN1737188B (zh) 2011-12-14
CN1737190B (zh) 2012-05-23
US7879209B2 (en) 2011-02-01
CN1737188A (zh) 2006-02-22
US8163144B2 (en) 2012-04-24

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