JP4888715B2 - 圧力センサ用の感圧素子、及びその製造方法 - Google Patents

圧力センサ用の感圧素子、及びその製造方法 Download PDF

Info

Publication number
JP4888715B2
JP4888715B2 JP2007078383A JP2007078383A JP4888715B2 JP 4888715 B2 JP4888715 B2 JP 4888715B2 JP 2007078383 A JP2007078383 A JP 2007078383A JP 2007078383 A JP2007078383 A JP 2007078383A JP 4888715 B2 JP4888715 B2 JP 4888715B2
Authority
JP
Japan
Prior art keywords
diaphragm
pressure
pedestal
sensitive element
frame
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP2007078383A
Other languages
English (en)
Japanese (ja)
Other versions
JP2008241287A5 (enExample
JP2008241287A (ja
Inventor
俊信 櫻井
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Seiko Epson Corp
Original Assignee
Seiko Epson Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Seiko Epson Corp filed Critical Seiko Epson Corp
Priority to JP2007078383A priority Critical patent/JP4888715B2/ja
Publication of JP2008241287A publication Critical patent/JP2008241287A/ja
Publication of JP2008241287A5 publication Critical patent/JP2008241287A5/ja
Application granted granted Critical
Publication of JP4888715B2 publication Critical patent/JP4888715B2/ja
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Landscapes

  • Measuring Fluid Pressure (AREA)
JP2007078383A 2007-03-26 2007-03-26 圧力センサ用の感圧素子、及びその製造方法 Expired - Fee Related JP4888715B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2007078383A JP4888715B2 (ja) 2007-03-26 2007-03-26 圧力センサ用の感圧素子、及びその製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2007078383A JP4888715B2 (ja) 2007-03-26 2007-03-26 圧力センサ用の感圧素子、及びその製造方法

Publications (3)

Publication Number Publication Date
JP2008241287A JP2008241287A (ja) 2008-10-09
JP2008241287A5 JP2008241287A5 (enExample) 2010-05-06
JP4888715B2 true JP4888715B2 (ja) 2012-02-29

Family

ID=39912844

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2007078383A Expired - Fee Related JP4888715B2 (ja) 2007-03-26 2007-03-26 圧力センサ用の感圧素子、及びその製造方法

Country Status (1)

Country Link
JP (1) JP4888715B2 (enExample)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5305028B2 (ja) * 2008-10-16 2013-10-02 セイコーエプソン株式会社 圧力センサー
JP4998860B2 (ja) 2009-02-26 2012-08-15 セイコーエプソン株式会社 圧力センサー素子、圧力センサー
JP2010230401A (ja) * 2009-03-26 2010-10-14 Seiko Epson Corp 圧力センサー
JP2010281573A (ja) * 2009-06-02 2010-12-16 Seiko Epson Corp 圧力センサー
JP2011013062A (ja) * 2009-07-01 2011-01-20 Seiko Epson Corp 圧力センサー
JP2011220722A (ja) * 2010-04-05 2011-11-04 Seiko Epson Corp 圧力センサー

Also Published As

Publication number Publication date
JP2008241287A (ja) 2008-10-09

Similar Documents

Publication Publication Date Title
KR101837516B1 (ko) 압전 진동편, 압전 진동자, 압전 진동편의 제조 방법, 및 압전 진동자의 제조 방법
JP4888715B2 (ja) 圧力センサ用の感圧素子、及びその製造方法
JP5305028B2 (ja) 圧力センサー
CN102809669B (zh) 物理量检测器的制造方法、物理量检测器
US7856886B2 (en) Pressure sensor having a diaphragm having a pressure-receiving portion receiving a pressure and a thick portion adjacent to the pressure-receiving portion
JP5402031B2 (ja) 水晶振動片の加工方法及び水晶ウェーハ
KR20000076671A (ko) 표면 탄성파 장치 및 이의 제조방법
JP2020141358A (ja) 圧電振動板及び圧電振動デバイス
JP6531616B2 (ja) 水晶振動板、及び水晶振動デバイス
JP2018110292A (ja) 圧電振動子
JP4420038B2 (ja) 応力感応素子
JP2018006901A (ja) 水晶振動板、および水晶振動デバイス
JP5088672B2 (ja) 圧力センサおよびその製造方法
JP2010243259A (ja) ウェハの積層構造、圧力センサー素子、圧電振動子、ウェハの積層方法
JP2011102772A (ja) 圧力センサー
JP2010249659A (ja) 圧力センサー素子
TWI876487B (zh) 振動裝置及振動裝置之製造方法
JP2010230401A (ja) 圧力センサー
JPWO2020111041A1 (ja) 多軸角速度センサ
JP2010043926A (ja) 加速度検知ユニット、及び加速度センサ
JPH08139339A (ja) 半導体部品およびその製造方法
CN117811536A (zh) 振动元件
JP2025079990A (ja) 音叉型圧電振動デバイス
JP2010243207A (ja) 電子部品
JP2018006902A (ja) 水晶フィルタ板、および水晶フィルタ

Legal Events

Date Code Title Description
A521 Written amendment

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20100317

A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20100317

A711 Notification of change in applicant

Free format text: JAPANESE INTERMEDIATE CODE: A712

Effective date: 20110729

RD03 Notification of appointment of power of attorney

Free format text: JAPANESE INTERMEDIATE CODE: A7423

Effective date: 20110729

A521 Written amendment

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20110819

A977 Report on retrieval

Free format text: JAPANESE INTERMEDIATE CODE: A971007

Effective date: 20111114

TRDD Decision of grant or rejection written
A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

Effective date: 20111117

A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

A61 First payment of annual fees (during grant procedure)

Free format text: JAPANESE INTERMEDIATE CODE: A61

Effective date: 20111130

R150 Certificate of patent or registration of utility model

Free format text: JAPANESE INTERMEDIATE CODE: R150

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20141222

Year of fee payment: 3

S531 Written request for registration of change of domicile

Free format text: JAPANESE INTERMEDIATE CODE: R313531

R350 Written notification of registration of transfer

Free format text: JAPANESE INTERMEDIATE CODE: R350

LAPS Cancellation because of no payment of annual fees