JP2008241287A5 - - Google Patents

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Publication number
JP2008241287A5
JP2008241287A5 JP2007078383A JP2007078383A JP2008241287A5 JP 2008241287 A5 JP2008241287 A5 JP 2008241287A5 JP 2007078383 A JP2007078383 A JP 2007078383A JP 2007078383 A JP2007078383 A JP 2007078383A JP 2008241287 A5 JP2008241287 A5 JP 2008241287A5
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JP
Japan
Prior art keywords
pair
pressure
diaphragm
sensitive element
main surface
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2007078383A
Other languages
English (en)
Japanese (ja)
Other versions
JP4888715B2 (ja
JP2008241287A (ja
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Publication date
Application filed filed Critical
Priority to JP2007078383A priority Critical patent/JP4888715B2/ja
Priority claimed from JP2007078383A external-priority patent/JP4888715B2/ja
Publication of JP2008241287A publication Critical patent/JP2008241287A/ja
Publication of JP2008241287A5 publication Critical patent/JP2008241287A5/ja
Application granted granted Critical
Publication of JP4888715B2 publication Critical patent/JP4888715B2/ja
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

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JP2007078383A 2007-03-26 2007-03-26 圧力センサ用の感圧素子、及びその製造方法 Expired - Fee Related JP4888715B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2007078383A JP4888715B2 (ja) 2007-03-26 2007-03-26 圧力センサ用の感圧素子、及びその製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2007078383A JP4888715B2 (ja) 2007-03-26 2007-03-26 圧力センサ用の感圧素子、及びその製造方法

Publications (3)

Publication Number Publication Date
JP2008241287A JP2008241287A (ja) 2008-10-09
JP2008241287A5 true JP2008241287A5 (enExample) 2010-05-06
JP4888715B2 JP4888715B2 (ja) 2012-02-29

Family

ID=39912844

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2007078383A Expired - Fee Related JP4888715B2 (ja) 2007-03-26 2007-03-26 圧力センサ用の感圧素子、及びその製造方法

Country Status (1)

Country Link
JP (1) JP4888715B2 (enExample)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5305028B2 (ja) * 2008-10-16 2013-10-02 セイコーエプソン株式会社 圧力センサー
JP4998860B2 (ja) 2009-02-26 2012-08-15 セイコーエプソン株式会社 圧力センサー素子、圧力センサー
JP2010230401A (ja) * 2009-03-26 2010-10-14 Seiko Epson Corp 圧力センサー
JP2010281573A (ja) * 2009-06-02 2010-12-16 Seiko Epson Corp 圧力センサー
JP2011013062A (ja) * 2009-07-01 2011-01-20 Seiko Epson Corp 圧力センサー
JP2011220722A (ja) * 2010-04-05 2011-11-04 Seiko Epson Corp 圧力センサー

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