JP2008524590A5 - - Google Patents

Download PDF

Info

Publication number
JP2008524590A5
JP2008524590A5 JP2007546828A JP2007546828A JP2008524590A5 JP 2008524590 A5 JP2008524590 A5 JP 2008524590A5 JP 2007546828 A JP2007546828 A JP 2007546828A JP 2007546828 A JP2007546828 A JP 2007546828A JP 2008524590 A5 JP2008524590 A5 JP 2008524590A5
Authority
JP
Japan
Prior art keywords
sensor chip
saw
sensing elements
center
diaphragm
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
JP2007546828A
Other languages
English (en)
Japanese (ja)
Other versions
JP2008524590A (ja
Filing date
Publication date
Priority claimed from US11/017,171 external-priority patent/US7165455B2/en
Application filed filed Critical
Publication of JP2008524590A publication Critical patent/JP2008524590A/ja
Publication of JP2008524590A5 publication Critical patent/JP2008524590A5/ja
Withdrawn legal-status Critical Current

Links

JP2007546828A 2004-12-18 2005-12-12 表面弾性波検知方法およびシステム Withdrawn JP2008524590A (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US11/017,171 US7165455B2 (en) 2004-12-18 2004-12-18 Surface acoustic wave sensor methods and systems
PCT/US2005/045068 WO2006065813A1 (en) 2004-12-18 2005-12-12 Surface acoustic wave sensor methods and systems

Publications (2)

Publication Number Publication Date
JP2008524590A JP2008524590A (ja) 2008-07-10
JP2008524590A5 true JP2008524590A5 (enExample) 2008-09-11

Family

ID=36088574

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2007546828A Withdrawn JP2008524590A (ja) 2004-12-18 2005-12-12 表面弾性波検知方法およびシステム

Country Status (5)

Country Link
US (1) US7165455B2 (enExample)
EP (1) EP1825240A1 (enExample)
JP (1) JP2008524590A (enExample)
CN (1) CN101120237A (enExample)
WO (1) WO2006065813A1 (enExample)

Families Citing this family (48)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7174433B2 (en) 2003-04-03 2007-02-06 Commvault Systems, Inc. System and method for dynamically sharing media in a computer network
DE102005001097A1 (de) * 2005-01-08 2006-07-27 Abb Patent Gmbh Drucksensor (I)
US7347106B2 (en) * 2005-04-26 2008-03-25 Honeywell International Inc. Torque sensor with inverted sensing element and integral shaft housing
GB2426336A (en) * 2005-05-20 2006-11-22 Transense Technologies Plc SAW based torque and temperature sensor
GB2426590B (en) * 2005-05-26 2009-01-14 Transense Technologies Plc Pressure sensor
AT501760B1 (de) * 2005-06-14 2006-11-15 Electrovac Anordnung zur druckmessung
US20070028692A1 (en) * 2005-08-05 2007-02-08 Honeywell International Inc. Acoustic wave sensor packaging for reduced hysteresis and creep
US20070028700A1 (en) * 2005-08-08 2007-02-08 Liu James Z Acoustic wave torque sensor
US7434989B2 (en) * 2005-09-07 2008-10-14 Applied Sensor Research & Development Corporation SAW temperature sensor and system
DE602005027072D1 (de) * 2005-09-16 2011-05-05 St Microelectronics Srl Druckwandler mit akoustischen Oberflächenwellen
US7302864B2 (en) * 2005-09-23 2007-12-04 Honeywell International Inc. Torque sensor
US7377168B2 (en) * 2005-12-13 2008-05-27 Honeywell International Inc. Wireless sensor antenna configuration
AU2007211276B2 (en) 2006-01-31 2013-06-06 Synta Pharmaceuticals Corp. Pyridylphenyl compounds for inflammation and immune-related uses
US20070188054A1 (en) * 2006-02-13 2007-08-16 Honeywell International Inc. Surface acoustic wave packages and methods of forming same
US20080084135A1 (en) * 2006-10-10 2008-04-10 Honeywell International Inc. Universal platform for surface acoustic wave (SAW) based sensors
WO2008103288A2 (en) * 2007-02-16 2008-08-28 Flowserve Management Company Non-contact torque sensing for valve actuators
GB2450168B (en) * 2007-06-15 2012-03-07 Transense Technologies Plc A SAW torque and temperature sensor with improved temperature sensitivity
US7843363B2 (en) * 2007-07-12 2010-11-30 Rosemount Aerospace Inc. Mechanical latch locking detection sensors
US7661321B2 (en) * 2007-09-25 2010-02-16 Rosemount Aerospace Inc. Force sensing clevis insert
FR2922305B1 (fr) * 2007-10-12 2010-02-26 Senseor Procede de fabrication collective de capteurs de temperature et de pression sans calibrage a base de dispositifs a ondes acoustiques
EP2056084A1 (en) 2007-10-29 2009-05-06 Schott AG Package for a strain sensor
JP2009109495A (ja) * 2007-10-29 2009-05-21 Schott Ag ひずみセンサ用パッケージ
FR2965050B1 (fr) 2010-09-22 2013-06-28 Senseor Capteur de pression et de temperature bas cout comportant des resonateurs saw et son procede de fabrication
US8479590B2 (en) 2010-11-18 2013-07-09 Honeywell International Inc. System for monitoring structural assets
DE102010056053B4 (de) * 2010-12-23 2014-12-18 Epcos Ag Drehmomentsensor und Anordnung mit einem Gegenstand und einem Drehmomentsensor
CN102288339A (zh) * 2011-05-04 2011-12-21 北京理工大学 温度、振动自补偿的无源无线声表面波扭矩传感器
JPWO2014002416A1 (ja) * 2012-06-25 2016-05-30 パナソニックＩｐマネジメント株式会社 歪センサ
CN103565425B (zh) * 2012-08-09 2016-01-27 广州三星通信技术研究有限公司 人体体征测量方法及应用此的便携式终端
WO2014031380A1 (en) * 2012-08-21 2014-02-27 Board Of Regents, The University Of Texas System Acoustic sensor
JP5983493B2 (ja) * 2013-03-26 2016-08-31 株式会社デンソー 圧力センサ
US9429486B2 (en) 2013-05-11 2016-08-30 Mnemonics, Inc. Strain sensor using saw technology
DE102013209262A1 (de) * 2013-05-17 2014-11-20 Robert Bosch Gmbh Motorisch und mit Muskelkraft betreibbares Fahrzeug mit verbessertem Drehmomentsensor
WO2015089175A1 (en) 2013-12-11 2015-06-18 The Board Of Regents Of The University Of Texas System Devices and methods for parameter measurement
US9702772B2 (en) 2014-03-26 2017-07-11 Mnemonics, Inc. Surface acoustic wave (SAW) based strain sensor
US10432168B2 (en) 2015-08-31 2019-10-01 General Electric Company Systems and methods for quartz wafer bonding
CN105784189B (zh) * 2016-05-05 2018-12-25 厦门纵能电子科技有限公司 硅-玻璃-硅结构声表面波温度和压力集成传感器及制备
US10450863B2 (en) 2016-06-02 2019-10-22 General Electric Company Turbine engine shaft torque sensing
GB201616090D0 (en) * 2016-09-21 2016-11-02 Imp Innovations Ltd Method and apparatus
CN109204443A (zh) * 2017-07-09 2019-01-15 东北林业大学 一种汽车eps系统有线无源式扭矩测量装置
CN107289883B (zh) * 2017-07-25 2019-09-03 中国科学院声学研究所 一种差分式谐振器型的无线无源声表面波应变传感器
CN108802433B (zh) * 2018-03-15 2020-12-22 中国科学院苏州纳米技术与纳米仿生研究所 基于声表面波的原子力显微镜探针、制备方法及表征方法
FR3079053B1 (fr) * 2018-03-16 2020-03-27 Frec'n'sys Substrats composites pour les dispositifs d'etiquette a ondes acoustiques de surface pour applications de rfid et de capteurs
CN108917668B (zh) * 2018-06-12 2024-07-05 重庆大学 一种差分式双谐振器声波拉伸应变传感器芯片
US11835414B2 (en) 2018-12-05 2023-12-05 Murata Manufacturing Co., Ltd. Passive pressure sensor with a piezoelectric diaphragm and a non-piezoelectric substrate
US11143561B2 (en) * 2018-12-05 2021-10-12 Resonant Inc. Passive microphone/pressure sensor using a piezoelectric diaphragm
FR3094484B1 (fr) * 2019-03-29 2021-07-16 Frecnsys Dispositif résonateur
CN110307811A (zh) * 2019-06-21 2019-10-08 中国科学院声学研究所 基于AlN压电薄膜的无线无源声表面波高温应变传感器
US11209398B2 (en) 2019-09-13 2021-12-28 Applied Materials, Inc. High quality factor embedded resonator wafers

Family Cites Families (20)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4100811A (en) * 1977-03-18 1978-07-18 United Technologies Corporation Differential surface acoustic wave transducer
US4216401A (en) * 1978-12-22 1980-08-05 United Technologies Corporation Surface acoustic wave (SAW) pressure sensor structure
US4454440A (en) * 1978-12-22 1984-06-12 United Technologies Corporation Surface acoustic wave (SAW) pressure sensor structure
FR2454616A1 (fr) * 1979-04-18 1980-11-14 Thomson Csf Capteur de pression a ondes elastiques de surface et systeme d'allumage pour moteur a combustion interne mettant en oeuvre ce capteur
US4361026A (en) * 1980-06-24 1982-11-30 Muller Richard S Method and apparatus for sensing fluids using surface acoustic waves
US5189914A (en) * 1988-02-29 1993-03-02 The Regents Of The University Of California Plate-mode ultrasonic sensor
US5471723A (en) * 1993-08-20 1995-12-05 Endress + Hauser Gmbh + Co. Methods of manufacturing thin-film absolute pressure sensors
US6484585B1 (en) * 1995-02-28 2002-11-26 Rosemount Inc. Pressure sensor for a pressure transmitter
US5637802A (en) * 1995-02-28 1997-06-10 Rosemount Inc. Capacitive pressure sensor for a pressure transmitted where electric field emanates substantially from back sides of plates
US5821425A (en) * 1996-09-30 1998-10-13 The United States Of America As Represented By The Secretary Of The Army Remote sensing of structural integrity using a surface acoustic wave sensor
US6327590B1 (en) * 1999-05-05 2001-12-04 Xerox Corporation System and method for collaborative ranking of search results employing user and group profiles derived from document collection content analysis
US6300706B1 (en) * 1999-07-14 2001-10-09 The United States Of America As Represented By The Secretary Of The Army Compound semiconductor monolithic frequency sources and actuators
JP2001041838A (ja) * 1999-08-03 2001-02-16 Yamatake Corp 圧力センサおよびその製造方法
US6550337B1 (en) * 2000-01-19 2003-04-22 Measurement Specialties, Inc. Isolation technique for pressure sensing structure
JP2003522453A (ja) * 2000-02-02 2003-07-22 ラトガーズ・ザ・ステート・ユニヴァーシティ・オブ・ニュージャージー プログラム可能な表面弾性波（ｓａｗ）フィルタ
DE10054198A1 (de) 2000-03-10 2001-09-13 Siemens Ag Verfahren und Vorrichtung zur Messung eines an einem Bauteil wirkenden Moments
US6571638B2 (en) * 2000-06-30 2003-06-03 Sawtek, Inc. Surface-acoustic-wave pressure sensor and associated methods
EP1438555B1 (en) 2001-10-16 2005-05-11 Transense Technologies PLC Temperature stable saw sensor with third-order elastic constants
WO2003081195A1 (en) 2002-03-21 2003-10-02 Transense Technologies Plc Pressure monitor incorporating saw device
US6907787B2 (en) * 2003-04-30 2005-06-21 Honeywell International Inc. Surface acoustic wave pressure sensor with microstructure sensing elements

Similar Documents

Publication Publication Date Title
JP2008524590A5 (enExample)
WO2002040184A3 (en) Multidimensional ultrasonic transducer arrays
JP2009517129A5 (enExample)
WO2005084284A3 (en) Multiple element electrode cmut devices and fabrication methods
KR20200090774A (ko) 사운드 변환기 장치
DK1615466T3 (da) Akustisk membran
JP2007515073A5 (enExample)
WO2009055767A3 (en) Micromachined piezoelectric ultrasound transducer arrays
EP1821406A3 (en) Lamb wave type frequency device and method thereof
RU2012112811A (ru) Ультразвуковой датчик с большим полем обзора и способ изготовления данного ультразвукового датчика
EP1720251A3 (en) Surface acoustic wave element, method of manufacturing the same and surface acoustic wave device
TW200738036A (en) Acoustic light-emitting device
CN112378509B (zh) 一种高灵敏度中频矢量水听器
WO2012087678A3 (en) Acoustic transducer chip
JP2007060465A5 (enExample)
CA2233835A1 (en) Surface wave device balun resonator filters
ATE368526T1 (de) Gruppe von membran-ultraschallwandlern
JP2002503819A5 (enExample)
JP2004325450A5 (enExample)
JP2008241287A5 (enExample)
JP6107138B2 (ja) 発振装置および電子機器
WO2007017775A3 (en) Ultrasound transducer arrays
CN103018484A (zh) 无源saw加速度计及加速度测试方法
JP2004079578A5 (enExample)
WO2008031409A3 (de) Mit oberflächenwellen arbeitendes elektrisches bauelement