CN101120237A - 表面声波传感器方法和系统 - Google Patents

表面声波传感器方法和系统 Download PDF

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Publication number
CN101120237A
CN101120237A CNA2005800482041A CN200580048204A CN101120237A CN 101120237 A CN101120237 A CN 101120237A CN A2005800482041 A CNA2005800482041 A CN A2005800482041A CN 200580048204 A CN200580048204 A CN 200580048204A CN 101120237 A CN101120237 A CN 101120237A
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CN
China
Prior art keywords
saw
sensor chip
sensor
barrier film
sensing elements
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Pending
Application number
CNA2005800482041A
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English (en)
Chinese (zh)
Inventor
S·J·马吉
J·Z·刘
J·D·库克
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Honeywell International Inc
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Honeywell International Inc
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Filing date
Publication date
Application filed by Honeywell International Inc filed Critical Honeywell International Inc
Publication of CN101120237A publication Critical patent/CN101120237A/zh
Pending legal-status Critical Current

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L1/00—Measuring force or stress, in general
    • G01L1/16—Measuring force or stress, in general using properties of piezoelectric devices
    • G01L1/162—Measuring force or stress, in general using properties of piezoelectric devices using piezoelectric resonators
    • G01L1/165—Measuring force or stress, in general using properties of piezoelectric devices using piezoelectric resonators with acoustic surface waves
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L3/00—Measuring torque, work, mechanical power, or mechanical efficiency, in general
    • G01L3/02—Rotary-transmission dynamometers
    • G01L3/04—Rotary-transmission dynamometers wherein the torque-transmitting element comprises a torsionally-flexible shaft
    • G01L3/10—Rotary-transmission dynamometers wherein the torque-transmitting element comprises a torsionally-flexible shaft involving electric or magnetic means for indicating
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0001—Transmitting or indicating the displacement of elastically deformable gauges by electric, electro-mechanical, magnetic or electro-magnetic means
    • G01L9/0008—Transmitting or indicating the displacement of elastically deformable gauges by electric, electro-mechanical, magnetic or electro-magnetic means using vibrations
    • G01L9/0022—Transmitting or indicating the displacement of elastically deformable gauges by electric, electro-mechanical, magnetic or electro-magnetic means using vibrations of a piezoelectric element
    • G01L9/0025—Transmitting or indicating the displacement of elastically deformable gauges by electric, electro-mechanical, magnetic or electro-magnetic means using vibrations of a piezoelectric element with acoustic surface waves

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Surface Acoustic Wave Elements And Circuit Networks Thereof (AREA)
  • Measuring Fluid Pressure (AREA)
CNA2005800482041A 2004-12-18 2005-12-12 表面声波传感器方法和系统 Pending CN101120237A (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US11/017,171 2004-12-18
US11/017,171 US7165455B2 (en) 2004-12-18 2004-12-18 Surface acoustic wave sensor methods and systems

Publications (1)

Publication Number Publication Date
CN101120237A true CN101120237A (zh) 2008-02-06

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ID=36088574

Family Applications (1)

Application Number Title Priority Date Filing Date
CNA2005800482041A Pending CN101120237A (zh) 2004-12-18 2005-12-12 表面声波传感器方法和系统

Country Status (5)

Country Link
US (1) US7165455B2 (enExample)
EP (1) EP1825240A1 (enExample)
JP (1) JP2008524590A (enExample)
CN (1) CN101120237A (enExample)
WO (1) WO2006065813A1 (enExample)

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CN102288339A (zh) * 2011-05-04 2011-12-21 北京理工大学 温度、振动自补偿的无源无线声表面波扭矩传感器
CN103565425A (zh) * 2012-08-09 2014-02-12 广州三星通信技术研究有限公司 人体体征测量方法及应用此的便携式终端
CN105784189A (zh) * 2016-05-05 2016-07-20 厦门大学 硅-玻璃-硅结构声表面波温度和压力集成传感器及制备
CN107289883A (zh) * 2017-07-25 2017-10-24 中国科学院声学研究所 一种差分式谐振器型的无线无源声表面波应变传感器
CN108802433A (zh) * 2018-03-15 2018-11-13 中国科学院苏州纳米技术与纳米仿生研究所 基于声表面波的原子力显微镜探针、制备方法及表征方法
CN108917668A (zh) * 2018-06-12 2018-11-30 重庆大学 一种差分式双谐振器声波拉伸应变传感器芯片
CN109204443A (zh) * 2017-07-09 2019-01-15 东北林业大学 一种汽车eps系统有线无源式扭矩测量装置
CN110307811A (zh) * 2019-06-21 2019-10-08 中国科学院声学研究所 基于AlN压电薄膜的无线无源声表面波高温应变传感器

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US7347106B2 (en) * 2005-04-26 2008-03-25 Honeywell International Inc. Torque sensor with inverted sensing element and integral shaft housing
GB2426336A (en) * 2005-05-20 2006-11-22 Transense Technologies Plc SAW based torque and temperature sensor
GB2426590B (en) * 2005-05-26 2009-01-14 Transense Technologies Plc Pressure sensor
AT501760B1 (de) * 2005-06-14 2006-11-15 Electrovac Anordnung zur druckmessung
US20070028692A1 (en) * 2005-08-05 2007-02-08 Honeywell International Inc. Acoustic wave sensor packaging for reduced hysteresis and creep
US20070028700A1 (en) * 2005-08-08 2007-02-08 Liu James Z Acoustic wave torque sensor
US7434989B2 (en) * 2005-09-07 2008-10-14 Applied Sensor Research & Development Corporation SAW temperature sensor and system
DE602005027072D1 (de) * 2005-09-16 2011-05-05 St Microelectronics Srl Druckwandler mit akoustischen Oberflächenwellen
US7302864B2 (en) * 2005-09-23 2007-12-04 Honeywell International Inc. Torque sensor
US7377168B2 (en) * 2005-12-13 2008-05-27 Honeywell International Inc. Wireless sensor antenna configuration
AU2007211276B2 (en) 2006-01-31 2013-06-06 Synta Pharmaceuticals Corp. Pyridylphenyl compounds for inflammation and immune-related uses
US20070188054A1 (en) * 2006-02-13 2007-08-16 Honeywell International Inc. Surface acoustic wave packages and methods of forming same
US20080084135A1 (en) * 2006-10-10 2008-04-10 Honeywell International Inc. Universal platform for surface acoustic wave (SAW) based sensors
WO2008103288A2 (en) * 2007-02-16 2008-08-28 Flowserve Management Company Non-contact torque sensing for valve actuators
GB2450168B (en) * 2007-06-15 2012-03-07 Transense Technologies Plc A SAW torque and temperature sensor with improved temperature sensitivity
US7843363B2 (en) * 2007-07-12 2010-11-30 Rosemount Aerospace Inc. Mechanical latch locking detection sensors
US7661321B2 (en) * 2007-09-25 2010-02-16 Rosemount Aerospace Inc. Force sensing clevis insert
FR2922305B1 (fr) * 2007-10-12 2010-02-26 Senseor Procede de fabrication collective de capteurs de temperature et de pression sans calibrage a base de dispositifs a ondes acoustiques
EP2056084A1 (en) 2007-10-29 2009-05-06 Schott AG Package for a strain sensor
JP2009109495A (ja) * 2007-10-29 2009-05-21 Schott Ag ひずみセンサ用パッケージ
FR2965050B1 (fr) 2010-09-22 2013-06-28 Senseor Capteur de pression et de temperature bas cout comportant des resonateurs saw et son procede de fabrication
US8479590B2 (en) 2010-11-18 2013-07-09 Honeywell International Inc. System for monitoring structural assets
DE102010056053B4 (de) * 2010-12-23 2014-12-18 Epcos Ag Drehmomentsensor und Anordnung mit einem Gegenstand und einem Drehmomentsensor
JPWO2014002416A1 (ja) * 2012-06-25 2016-05-30 パナソニックＩｐマネジメント株式会社 歪センサ
WO2014031380A1 (en) * 2012-08-21 2014-02-27 Board Of Regents, The University Of Texas System Acoustic sensor
JP5983493B2 (ja) * 2013-03-26 2016-08-31 株式会社デンソー 圧力センサ
US9429486B2 (en) 2013-05-11 2016-08-30 Mnemonics, Inc. Strain sensor using saw technology
DE102013209262A1 (de) * 2013-05-17 2014-11-20 Robert Bosch Gmbh Motorisch und mit Muskelkraft betreibbares Fahrzeug mit verbessertem Drehmomentsensor
WO2015089175A1 (en) 2013-12-11 2015-06-18 The Board Of Regents Of The University Of Texas System Devices and methods for parameter measurement
US9702772B2 (en) 2014-03-26 2017-07-11 Mnemonics, Inc. Surface acoustic wave (SAW) based strain sensor
US10432168B2 (en) 2015-08-31 2019-10-01 General Electric Company Systems and methods for quartz wafer bonding
US10450863B2 (en) 2016-06-02 2019-10-22 General Electric Company Turbine engine shaft torque sensing
GB201616090D0 (en) * 2016-09-21 2016-11-02 Imp Innovations Ltd Method and apparatus
FR3079053B1 (fr) * 2018-03-16 2020-03-27 Frec'n'sys Substrats composites pour les dispositifs d'etiquette a ondes acoustiques de surface pour applications de rfid et de capteurs
US11835414B2 (en) 2018-12-05 2023-12-05 Murata Manufacturing Co., Ltd. Passive pressure sensor with a piezoelectric diaphragm and a non-piezoelectric substrate
US11143561B2 (en) * 2018-12-05 2021-10-12 Resonant Inc. Passive microphone/pressure sensor using a piezoelectric diaphragm
FR3094484B1 (fr) * 2019-03-29 2021-07-16 Frecnsys Dispositif résonateur
US11209398B2 (en) 2019-09-13 2021-12-28 Applied Materials, Inc. High quality factor embedded resonator wafers

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Cited By (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102288339A (zh) * 2011-05-04 2011-12-21 北京理工大学 温度、振动自补偿的无源无线声表面波扭矩传感器
CN103565425A (zh) * 2012-08-09 2014-02-12 广州三星通信技术研究有限公司 人体体征测量方法及应用此的便携式终端
CN103565425B (zh) * 2012-08-09 2016-01-27 广州三星通信技术研究有限公司 人体体征测量方法及应用此的便携式终端
CN105784189A (zh) * 2016-05-05 2016-07-20 厦门大学 硅-玻璃-硅结构声表面波温度和压力集成传感器及制备
CN105784189B (zh) * 2016-05-05 2018-12-25 厦门纵能电子科技有限公司 硅-玻璃-硅结构声表面波温度和压力集成传感器及制备
CN109204443A (zh) * 2017-07-09 2019-01-15 东北林业大学 一种汽车eps系统有线无源式扭矩测量装置
CN107289883A (zh) * 2017-07-25 2017-10-24 中国科学院声学研究所 一种差分式谐振器型的无线无源声表面波应变传感器
CN108802433A (zh) * 2018-03-15 2018-11-13 中国科学院苏州纳米技术与纳米仿生研究所 基于声表面波的原子力显微镜探针、制备方法及表征方法
CN108802433B (zh) * 2018-03-15 2020-12-22 中国科学院苏州纳米技术与纳米仿生研究所 基于声表面波的原子力显微镜探针、制备方法及表征方法
CN108917668A (zh) * 2018-06-12 2018-11-30 重庆大学 一种差分式双谐振器声波拉伸应变传感器芯片
CN110307811A (zh) * 2019-06-21 2019-10-08 中国科学院声学研究所 基于AlN压电薄膜的无线无源声表面波高温应变传感器

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Publication number Publication date
US20060130585A1 (en) 2006-06-22
JP2008524590A (ja) 2008-07-10
WO2006065813A1 (en) 2006-06-22
EP1825240A1 (en) 2007-08-29
US7165455B2 (en) 2007-01-23

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