JP4881620B2 - 半導体装置及びその製造方法 - Google Patents
半導体装置及びその製造方法 Download PDFInfo
- Publication number
- JP4881620B2 JP4881620B2 JP2006001027A JP2006001027A JP4881620B2 JP 4881620 B2 JP4881620 B2 JP 4881620B2 JP 2006001027 A JP2006001027 A JP 2006001027A JP 2006001027 A JP2006001027 A JP 2006001027A JP 4881620 B2 JP4881620 B2 JP 4881620B2
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- Prior art keywords
- semiconductor chip
- main surface
- wiring board
- wires
- wire
- Prior art date
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- H—ELECTRICITY
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- H10P72/70—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for supporting or gripping
- H10P72/74—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for supporting or gripping using temporarily an auxiliary support
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- H10W70/60—Insulating or insulated package substrates; Interposers; Redistribution layers
- H10W70/62—Insulating or insulated package substrates; Interposers; Redistribution layers characterised by their interconnections
- H10W70/65—Shapes or dispositions of interconnections
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- H10W74/10—Encapsulations, e.g. protective coatings characterised by their shape or disposition
- H10W74/111—Encapsulations, e.g. protective coatings characterised by their shape or disposition the semiconductor body being completely enclosed
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- H10W74/111—Encapsulations, e.g. protective coatings characterised by their shape or disposition the semiconductor body being completely enclosed
- H10W74/114—Encapsulations, e.g. protective coatings characterised by their shape or disposition the semiconductor body being completely enclosed by a substrate and the encapsulations
- H10W74/117—Encapsulations, e.g. protective coatings characterised by their shape or disposition the semiconductor body being completely enclosed by a substrate and the encapsulations the substrate having spherical bumps for external connection
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- H10P72/70—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for supporting or gripping
- H10P72/74—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for supporting or gripping using temporarily an auxiliary support
- H10P72/7416—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for supporting or gripping using temporarily an auxiliary support used during dicing or grinding
- H10P72/7418—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for supporting or gripping using temporarily an auxiliary support used during dicing or grinding of passive members, e.g. a chip mounting substrate
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- H10W46/607—Located on parts of packages, e.g. on encapsulations or on package substrates
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- H10W72/07511—Treating the bonding area before connecting, e.g. by applying flux or cleaning
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- H10W72/07531—Techniques
- H10W72/07532—Compression bonding, e.g. thermocompression bonding
- H10W72/07533—Ultrasonic bonding, e.g. thermosonic bonding
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- H10W72/07541—Controlling the environment, e.g. atmosphere composition or temperature
- H10W72/07553—Controlling the environment, e.g. atmosphere composition or temperature changes in shapes
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- H10W72/00—Interconnections or connectors in packages
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- H10W72/00—Interconnections or connectors in packages
- H10W72/50—Bond wires
- H10W72/541—Dispositions of bond wires
- H10W72/5434—Dispositions of bond wires the connected ends being on auxiliary connecting means on bond pads, e.g. on other bond wires
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- H10W72/00—Interconnections or connectors in packages
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- H10W72/5445—Dispositions of bond wires being orthogonal to a side surface of the chip, e.g. parallel arrangements
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- H10W72/00—Interconnections or connectors in packages
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- H10W72/50—Bond wires
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- H10W72/00—Interconnections or connectors in packages
- H10W72/50—Bond wires
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- H10W72/5522—Materials of bond wires comprising metals or metalloids, e.g. silver comprising gold [Au]
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- H10W72/5525—Materials of bond wires comprising metals or metalloids, e.g. silver comprising copper [Cu]
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- H10W72/874—On different surfaces
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- H10W90/28—Configurations of stacked chips the stacked chips having different sizes, e.g. chip stacks having a pyramidal shape
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- H10W90/00—Package configurations
- H10W90/701—Package configurations characterised by the relative positions of pads or connectors relative to package parts
- H10W90/731—Package configurations characterised by the relative positions of pads or connectors relative to package parts of die-attach connectors
- H10W90/732—Package configurations characterised by the relative positions of pads or connectors relative to package parts of die-attach connectors between stacked chips
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- H10W90/731—Package configurations characterised by the relative positions of pads or connectors relative to package parts of die-attach connectors
- H10W90/734—Package configurations characterised by the relative positions of pads or connectors relative to package parts of die-attach connectors between a chip and a stacked insulating package substrate, interposer or RDL
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- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W90/00—Package configurations
- H10W90/701—Package configurations characterised by the relative positions of pads or connectors relative to package parts
- H10W90/751—Package configurations characterised by the relative positions of pads or connectors relative to package parts of bond wires
- H10W90/752—Package configurations characterised by the relative positions of pads or connectors relative to package parts of bond wires between stacked chips
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- H10W90/00—Package configurations
- H10W90/701—Package configurations characterised by the relative positions of pads or connectors relative to package parts
- H10W90/751—Package configurations characterised by the relative positions of pads or connectors relative to package parts of bond wires
- H10W90/754—Package configurations characterised by the relative positions of pads or connectors relative to package parts of bond wires between a chip and a stacked insulating package substrate, interposer or RDL
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- Wire Bonding (AREA)
- Physics & Mathematics (AREA)
- Geometry (AREA)
Priority Applications (10)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2006001027A JP4881620B2 (ja) | 2006-01-06 | 2006-01-06 | 半導体装置及びその製造方法 |
| US11/606,027 US7889513B2 (en) | 2006-01-06 | 2006-11-30 | Semiconductor device |
| TW102125650A TWI531016B (zh) | 2006-01-06 | 2006-12-04 | Semiconductor device and manufacturing method thereof |
| TW095144886A TWI404148B (zh) | 2006-01-06 | 2006-12-04 | Semiconductor device and manufacturing method thereof |
| TW105106184A TWI598971B (zh) | 2006-01-06 | 2006-12-04 | Semiconductor device |
| CNA2006101562406A CN1996584A (zh) | 2006-01-06 | 2006-12-27 | 半导体器件及其制造方法 |
| KR1020070001430A KR101286874B1 (ko) | 2006-01-06 | 2007-01-05 | 반도체 장치 및 그 제조 방법 |
| US12/985,815 US20110159644A1 (en) | 2006-01-06 | 2011-01-06 | Semiconductor device and a method of manufacturing the same |
| US14/820,282 US9991229B2 (en) | 2006-01-06 | 2015-08-06 | Semiconductor device |
| US15/990,750 US10515934B2 (en) | 2006-01-06 | 2018-05-28 | Semiconductor device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2006001027A JP4881620B2 (ja) | 2006-01-06 | 2006-01-06 | 半導体装置及びその製造方法 |
Related Child Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2011170871A Division JP5266371B2 (ja) | 2011-08-04 | 2011-08-04 | 半導体装置及びその製造方法 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2007184385A JP2007184385A (ja) | 2007-07-19 |
| JP2007184385A5 JP2007184385A5 (enExample) | 2009-02-19 |
| JP4881620B2 true JP4881620B2 (ja) | 2012-02-22 |
Family
ID=38231802
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2006001027A Expired - Lifetime JP4881620B2 (ja) | 2006-01-06 | 2006-01-06 | 半導体装置及びその製造方法 |
Country Status (5)
| Country | Link |
|---|---|
| US (4) | US7889513B2 (enExample) |
| JP (1) | JP4881620B2 (enExample) |
| KR (1) | KR101286874B1 (enExample) |
| CN (1) | CN1996584A (enExample) |
| TW (3) | TWI531016B (enExample) |
Families Citing this family (18)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4397408B2 (ja) * | 2007-09-21 | 2010-01-13 | 株式会社新川 | 半導体装置及びワイヤボンディング方法 |
| JP5205173B2 (ja) * | 2008-08-08 | 2013-06-05 | ルネサスエレクトロニクス株式会社 | 半導体装置及びその製造方法 |
| TWM356216U (en) * | 2008-12-12 | 2009-05-01 | Kun Yuan Technology Co Ltd | Memory chip packaging module |
| JP5411553B2 (ja) * | 2009-03-31 | 2014-02-12 | セミコンダクター・コンポーネンツ・インダストリーズ・リミテッド・ライアビリティ・カンパニー | 半導体装置の製造方法 |
| US8692370B2 (en) | 2009-02-27 | 2014-04-08 | Semiconductor Components Industries, Llc | Semiconductor device with copper wire ball-bonded to electrode pad including buffer layer |
| US8384228B1 (en) * | 2009-04-29 | 2013-02-26 | Triquint Semiconductor, Inc. | Package including wires contacting lead frame edge |
| KR101746614B1 (ko) | 2011-01-07 | 2017-06-27 | 삼성전자 주식회사 | 발광소자 패키지 및 그 제조방법 |
| JP5893266B2 (ja) * | 2011-05-13 | 2016-03-23 | ルネサスエレクトロニクス株式会社 | 半導体装置およびその製造方法 |
| JP6227223B2 (ja) * | 2012-03-30 | 2017-11-08 | 富士通テン株式会社 | 半導体装置、及び半導体装置の製造方法 |
| JP2014220439A (ja) * | 2013-05-10 | 2014-11-20 | ルネサスエレクトロニクス株式会社 | 半導体装置の製造方法および半導体装置 |
| JP2016062962A (ja) * | 2014-09-16 | 2016-04-25 | 株式会社東芝 | ワイヤボンディング装置、及び半導体装置 |
| JP2018137342A (ja) | 2017-02-22 | 2018-08-30 | 株式会社村田製作所 | 半導体装置及びその製造方法 |
| US10535812B2 (en) * | 2017-09-04 | 2020-01-14 | Rohm Co., Ltd. | Semiconductor device |
| TWI767243B (zh) * | 2020-05-29 | 2022-06-11 | 矽品精密工業股份有限公司 | 電子封裝件 |
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| US20110159644A1 (en) | 2011-06-30 |
| US20180277522A1 (en) | 2018-09-27 |
| TW201635402A (zh) | 2016-10-01 |
| US20150348944A1 (en) | 2015-12-03 |
| JP2007184385A (ja) | 2007-07-19 |
| US7889513B2 (en) | 2011-02-15 |
| TW201347061A (zh) | 2013-11-16 |
| US20070158392A1 (en) | 2007-07-12 |
| TW200805526A (en) | 2008-01-16 |
| TWI531016B (zh) | 2016-04-21 |
| US10515934B2 (en) | 2019-12-24 |
| CN1996584A (zh) | 2007-07-11 |
| KR101286874B1 (ko) | 2013-07-16 |
| KR20070074489A (ko) | 2007-07-12 |
| TWI404148B (zh) | 2013-08-01 |
| TWI598971B (zh) | 2017-09-11 |
| US9991229B2 (en) | 2018-06-05 |
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