JP4867973B2 - Cpp型磁気抵抗効果素子 - Google Patents
Cpp型磁気抵抗効果素子 Download PDFInfo
- Publication number
- JP4867973B2 JP4867973B2 JP2008276690A JP2008276690A JP4867973B2 JP 4867973 B2 JP4867973 B2 JP 4867973B2 JP 2008276690 A JP2008276690 A JP 2008276690A JP 2008276690 A JP2008276690 A JP 2008276690A JP 4867973 B2 JP4867973 B2 JP 4867973B2
- Authority
- JP
- Japan
- Prior art keywords
- layer
- film
- slider
- cofeb
- pair
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
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Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- B82Y10/00—Nanotechnology for information processing, storage or transmission, e.g. quantum computing or single electron logic
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- B82Y25/00—Nanomagnetism, e.g. magnetoimpedance, anisotropic magnetoresistance, giant magnetoresistance or tunneling magnetoresistance
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/127—Structure or manufacture of heads, e.g. inductive
- G11B5/33—Structure or manufacture of flux-sensitive heads, i.e. for reproduction only; Combination of such heads with means for recording or erasing only
- G11B5/39—Structure or manufacture of flux-sensitive heads, i.e. for reproduction only; Combination of such heads with means for recording or erasing only using magneto-resistive devices or effects
- G11B5/3903—Structure or manufacture of flux-sensitive heads, i.e. for reproduction only; Combination of such heads with means for recording or erasing only using magneto-resistive devices or effects using magnetic thin film layers or their effects, the films being part of integrated structures
- G11B5/3906—Details related to the use of magnetic thin film layers or to their effects
- G11B5/3909—Arrangements using a magnetic tunnel junction
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/127—Structure or manufacture of heads, e.g. inductive
- G11B5/33—Structure or manufacture of flux-sensitive heads, i.e. for reproduction only; Combination of such heads with means for recording or erasing only
- G11B5/39—Structure or manufacture of flux-sensitive heads, i.e. for reproduction only; Combination of such heads with means for recording or erasing only using magneto-resistive devices or effects
- G11B5/3903—Structure or manufacture of flux-sensitive heads, i.e. for reproduction only; Combination of such heads with means for recording or erasing only using magneto-resistive devices or effects using magnetic thin film layers or their effects, the films being part of integrated structures
- G11B5/3906—Details related to the use of magnetic thin film layers or to their effects
- G11B5/3929—Disposition of magnetic thin films not used for directly coupling magnetic flux from the track to the MR film or for shielding
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N50/00—Galvanomagnetic devices
- H10N50/10—Magnetoresistive devices
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N50/00—Galvanomagnetic devices
- H10N50/80—Constructional details
- H10N50/85—Magnetic active materials
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/127—Structure or manufacture of heads, e.g. inductive
- G11B5/33—Structure or manufacture of flux-sensitive heads, i.e. for reproduction only; Combination of such heads with means for recording or erasing only
- G11B5/39—Structure or manufacture of flux-sensitive heads, i.e. for reproduction only; Combination of such heads with means for recording or erasing only using magneto-resistive devices or effects
- G11B2005/3996—Structure or manufacture of flux-sensitive heads, i.e. for reproduction only; Combination of such heads with means for recording or erasing only using magneto-resistive devices or effects large or giant magnetoresistive effects [GMR], e.g. as generated in spin-valve [SV] devices
Description
2 磁気抵抗効果素子
3 上部電極兼シールド
4 下部電極兼シールド
5 バッファ層
6 反強磁性層
7 ピンド層
8 非磁性のスペーサ層
9 フリー層
10 キャップ層
12 ハードバイアス膜
22 センス電流
71 アウターピンド層
72 中間層
73 インナーピンド層
Claims (8)
- 一対の磁性層であって、該一対の磁性層の磁化方向がなす相対角度が外部磁界に応じて変化するようにされた一対の磁性層と、
前記一対の磁性層の間に挟まれた結晶質のスペーサ層と、
を有し、
センス電流が前記一対の磁性層および前記スペーサ層の膜面に対して直交方向に流れるようにされ、
前記スペーサ層は、結晶質酸化物を含み、
前記一対の磁性層のうち、外部磁界に応じて磁化方向が変化する少なくとも一方の磁性層は、CoFe層とNiFe層の間にCoFeB層が挟まれ、かつ該CoFeB層が前記スペーサ層と前記NiFe層との間に位置する膜構成を有し、前記スペーサ層は、Cu層とZn層の間にZnO層が挟まれた膜構成を有している、磁気抵抗効果素子。 - 前記一対の磁性層は、外部磁界に対し磁化方向が固定されたピンド層と、外部磁界に応じて磁化方向が変化するフリー層である、請求項1に記載の磁気抵抗効果素子。
- 前記CoFeB層中のCoFe部におけるCoの原子分率は、70%以上、90%以下である、請求項1または2に記載の磁気抵抗効果素子。
- 請求項1から3のいずれか1項に記載の磁気抵抗効果素子を含む薄膜磁気ヘッド。
- 請求項1から3のいずれか1項に記載の磁気抵抗効果素子を含む積層体と、
前記積層体を挟んで設けられ、該積層体に前記センス電流を供給する一対の電極と、
を有するスライダ。 - 請求項1から3のいずれか1項に記載の磁気抵抗効果素子が形成されたウエハ。
- 請求項5に記載のスライダと、
前記スライダを弾性的に支持するサスペンションと、
を有するヘッドジンバルアセンブリ。 - 請求項5に記載のスライダと、
前記スライダを支持するとともに、該スライダを記録媒体に対して位置決めする装置と、
を有するハードディスク装置。
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US11/968,788 US20090174971A1 (en) | 2008-01-03 | 2008-01-03 | Cpp-type magneto resistive effect element having a pair of magnetic layers |
US11/968,788 | 2008-01-03 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2009164579A JP2009164579A (ja) | 2009-07-23 |
JP4867973B2 true JP4867973B2 (ja) | 2012-02-01 |
Family
ID=40838685
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2008276690A Expired - Fee Related JP4867973B2 (ja) | 2008-01-03 | 2008-10-28 | Cpp型磁気抵抗効果素子 |
Country Status (3)
Country | Link |
---|---|
US (1) | US20090174971A1 (ja) |
JP (1) | JP4867973B2 (ja) |
CN (1) | CN101478028A (ja) |
Families Citing this family (22)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7826180B2 (en) * | 2007-06-26 | 2010-11-02 | Tdk Corporation | Magneto-resistive effect device of the CPP structure, and magnetic disk system |
US8345390B2 (en) * | 2009-02-26 | 2013-01-01 | Tdk Corporation | Magnetoresistive effect element in CPP-type structure and magnetic disk device |
US8441756B1 (en) | 2010-12-16 | 2013-05-14 | Western Digital (Fremont), Llc | Method and system for providing an antiferromagnetically coupled writer |
US9123359B1 (en) | 2010-12-22 | 2015-09-01 | Western Digital (Fremont), Llc | Magnetic recording transducer with sputtered antiferromagnetic coupling trilayer between plated ferromagnetic shields and method of fabrication |
US8760819B1 (en) * | 2010-12-23 | 2014-06-24 | Western Digital (Fremont), Llc | Magnetic recording sensor with sputtered antiferromagnetic coupling trilayer between plated ferromagnetic shields |
JP5739685B2 (ja) * | 2011-02-14 | 2015-06-24 | 株式会社東芝 | 磁気抵抗効果素子、磁気ヘッドアセンブリ及び磁気記録再生装置 |
US8564911B2 (en) * | 2011-02-17 | 2013-10-22 | Tdk Corporation | Magneto-resistive effect element having spacer layer including gallium oxide layer with metal element |
US8593766B2 (en) * | 2011-02-22 | 2013-11-26 | Tdk Corporation | Magneto-resistive effect element having spacer layer including main spacer layer containing gallium oxide and metal intermediate layer |
US8498083B2 (en) * | 2011-03-16 | 2013-07-30 | Tdk Corporation | Magneto-resistive effect element having spacer layer containing gallium oxide, partially oxidized copper |
CN102487124B (zh) * | 2011-09-19 | 2014-07-23 | 中国科学院物理研究所 | 纳米多层膜、场效应管、传感器、随机存储器及制备方法 |
US8503135B2 (en) * | 2011-09-21 | 2013-08-06 | Seagate Technology Llc | Magnetic sensor with enhanced magnetoresistance ratio |
CN102364618B (zh) * | 2011-11-10 | 2013-03-06 | 中国科学院物理研究所 | 一种具有垂直磁各向异性的多层膜材料 |
US8947835B2 (en) * | 2011-12-22 | 2015-02-03 | HGST Netherlands B.V. | Tunneling magnetoresistance (TMR) read sensor with a long diffusion path and ex-situ interfaces in a sense layer structure |
JP5935444B2 (ja) * | 2012-03-29 | 2016-06-15 | Tdk株式会社 | スピン伝導素子、及びスピン伝導を用いた磁気センサ及び磁気ヘッド |
US8797692B1 (en) | 2012-09-07 | 2014-08-05 | Western Digital (Fremont), Llc | Magnetic recording sensor with AFM exchange coupled shield stabilization |
US8780505B1 (en) | 2013-03-12 | 2014-07-15 | Western Digital (Fremont), Llc | Method and system for providing a read transducer having an improved composite magnetic shield |
US9013836B1 (en) | 2013-04-02 | 2015-04-21 | Western Digital (Fremont), Llc | Method and system for providing an antiferromagnetically coupled return pole |
US10074387B1 (en) | 2014-12-21 | 2018-09-11 | Western Digital (Fremont), Llc | Method and system for providing a read transducer having symmetric antiferromagnetically coupled shields |
JP2017040509A (ja) * | 2015-08-18 | 2017-02-23 | アルプス電気株式会社 | 磁気センサおよび電流センサ |
CN112635652B (zh) * | 2019-10-08 | 2023-05-26 | 上海磁宇信息科技有限公司 | 磁性随机存储器的磁性隧道结结构 |
CN112652702B (zh) * | 2019-10-10 | 2023-12-22 | 上海磁宇信息科技有限公司 | 磁性随机存储器的磁性隧道结结构 |
CN112993148A (zh) * | 2019-12-17 | 2021-06-18 | Tdk株式会社 | 磁阻效应元件 |
Family Cites Families (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6937446B2 (en) * | 2000-10-20 | 2005-08-30 | Kabushiki Kaisha Toshiba | Magnetoresistance effect element, magnetic head and magnetic recording and/or reproducing system |
JP3565268B2 (ja) * | 2001-06-22 | 2004-09-15 | 株式会社東芝 | 磁気抵抗効果素子、磁気ヘッド及び磁気再生装置 |
JP3607678B2 (ja) * | 2002-01-24 | 2005-01-05 | アルプス電気株式会社 | 磁気検出素子 |
JP4382333B2 (ja) * | 2002-03-28 | 2009-12-09 | 株式会社東芝 | 磁気抵抗効果素子、磁気ヘッド及び磁気再生装置 |
JP3749873B2 (ja) * | 2002-03-28 | 2006-03-01 | 株式会社東芝 | 磁気抵抗効果素子、磁気ヘッド及び磁気再生装置 |
US7446985B2 (en) * | 2003-12-19 | 2008-11-04 | Agency For Science Technology And Research | Epitaxial oxide cap layers for enhancing GMR performance |
US7241631B2 (en) * | 2004-12-29 | 2007-07-10 | Grandis, Inc. | MTJ elements with high spin polarization layers configured for spin-transfer switching and spintronics devices using the magnetic elements |
US7499249B2 (en) * | 2005-04-28 | 2009-03-03 | Tdk Corporation | Spin valve-GMR element in which a non-metal laminate layer is provided as a free magnetic layer and method of manufacturing the same |
US7333306B2 (en) * | 2005-08-23 | 2008-02-19 | Headway Technologies, Inc. | Magnetoresistive spin valve sensor with tri-layer free layer |
US8031441B2 (en) * | 2007-05-11 | 2011-10-04 | Headway Technologies, Inc. | CPP device with an enhanced dR/R ratio |
JP4914495B2 (ja) * | 2007-05-22 | 2012-04-11 | アルプス電気株式会社 | トンネル型磁気検出素子 |
-
2008
- 2008-01-03 US US11/968,788 patent/US20090174971A1/en not_active Abandoned
- 2008-10-28 JP JP2008276690A patent/JP4867973B2/ja not_active Expired - Fee Related
- 2008-12-24 CN CNA2008101852520A patent/CN101478028A/zh active Pending
Also Published As
Publication number | Publication date |
---|---|
US20090174971A1 (en) | 2009-07-09 |
JP2009164579A (ja) | 2009-07-23 |
CN101478028A (zh) | 2009-07-08 |
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