JP4797782B2 - 半導体光素子 - Google Patents
半導体光素子 Download PDFInfo
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- JP4797782B2 JP4797782B2 JP2006125937A JP2006125937A JP4797782B2 JP 4797782 B2 JP4797782 B2 JP 4797782B2 JP 2006125937 A JP2006125937 A JP 2006125937A JP 2006125937 A JP2006125937 A JP 2006125937A JP 4797782 B2 JP4797782 B2 JP 4797782B2
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S5/00—Semiconductor lasers
- H01S5/04—Processes or apparatus for excitation, e.g. pumping, e.g. by electron beams
- H01S5/042—Electrical excitation ; Circuits therefor
- H01S5/0421—Electrical excitation ; Circuits therefor characterised by the semiconducting contacting layers
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- B82Y20/00—Nanooptics, e.g. quantum optics or photonic crystals
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S5/00—Semiconductor lasers
- H01S5/20—Structure or shape of the semiconductor body to guide the optical wave ; Confining structures perpendicular to the optical axis, e.g. index or gain guiding, stripe geometry, broad area lasers, gain tailoring, transverse or lateral reflectors, special cladding structures, MQW barrier reflection layers
- H01S5/22—Structure or shape of the semiconductor body to guide the optical wave ; Confining structures perpendicular to the optical axis, e.g. index or gain guiding, stripe geometry, broad area lasers, gain tailoring, transverse or lateral reflectors, special cladding structures, MQW barrier reflection layers having a ridge or stripe structure
- H01S5/2205—Structure or shape of the semiconductor body to guide the optical wave ; Confining structures perpendicular to the optical axis, e.g. index or gain guiding, stripe geometry, broad area lasers, gain tailoring, transverse or lateral reflectors, special cladding structures, MQW barrier reflection layers having a ridge or stripe structure comprising special burying or current confinement layers
- H01S5/2222—Structure or shape of the semiconductor body to guide the optical wave ; Confining structures perpendicular to the optical axis, e.g. index or gain guiding, stripe geometry, broad area lasers, gain tailoring, transverse or lateral reflectors, special cladding structures, MQW barrier reflection layers having a ridge or stripe structure comprising special burying or current confinement layers having special electric properties
- H01S5/2224—Structure or shape of the semiconductor body to guide the optical wave ; Confining structures perpendicular to the optical axis, e.g. index or gain guiding, stripe geometry, broad area lasers, gain tailoring, transverse or lateral reflectors, special cladding structures, MQW barrier reflection layers having a ridge or stripe structure comprising special burying or current confinement layers having special electric properties semi-insulating semiconductors
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S5/00—Semiconductor lasers
- H01S5/20—Structure or shape of the semiconductor body to guide the optical wave ; Confining structures perpendicular to the optical axis, e.g. index or gain guiding, stripe geometry, broad area lasers, gain tailoring, transverse or lateral reflectors, special cladding structures, MQW barrier reflection layers
- H01S5/22—Structure or shape of the semiconductor body to guide the optical wave ; Confining structures perpendicular to the optical axis, e.g. index or gain guiding, stripe geometry, broad area lasers, gain tailoring, transverse or lateral reflectors, special cladding structures, MQW barrier reflection layers having a ridge or stripe structure
- H01S5/227—Buried mesa structure ; Striped active layer
- H01S5/2275—Buried mesa structure ; Striped active layer mesa created by etching
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S5/00—Semiconductor lasers
- H01S5/30—Structure or shape of the active region; Materials used for the active region
- H01S5/32—Structure or shape of the active region; Materials used for the active region comprising PN junctions, e.g. hetero- or double- heterostructures
- H01S5/3211—Structure or shape of the active region; Materials used for the active region comprising PN junctions, e.g. hetero- or double- heterostructures characterised by special cladding layers, e.g. details on band-discontinuities
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S5/00—Semiconductor lasers
- H01S5/30—Structure or shape of the active region; Materials used for the active region
- H01S5/34—Structure or shape of the active region; Materials used for the active region comprising quantum well or superlattice structures, e.g. single quantum well [SQW] lasers, multiple quantum well [MQW] lasers or graded index separate confinement heterostructure [GRINSCH] lasers
- H01S5/343—Structure or shape of the active region; Materials used for the active region comprising quantum well or superlattice structures, e.g. single quantum well [SQW] lasers, multiple quantum well [MQW] lasers or graded index separate confinement heterostructure [GRINSCH] lasers in AIIIBV compounds, e.g. AlGaAs-laser, InP-based laser
- H01S5/34346—Structure or shape of the active region; Materials used for the active region comprising quantum well or superlattice structures, e.g. single quantum well [SQW] lasers, multiple quantum well [MQW] lasers or graded index separate confinement heterostructure [GRINSCH] lasers in AIIIBV compounds, e.g. AlGaAs-laser, InP-based laser characterised by the materials of the barrier layers
- H01S5/34373—Structure or shape of the active region; Materials used for the active region comprising quantum well or superlattice structures, e.g. single quantum well [SQW] lasers, multiple quantum well [MQW] lasers or graded index separate confinement heterostructure [GRINSCH] lasers in AIIIBV compounds, e.g. AlGaAs-laser, InP-based laser characterised by the materials of the barrier layers based on InGa(Al)AsP
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- Optics & Photonics (AREA)
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Nanotechnology (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Electromagnetism (AREA)
- Life Sciences & Earth Sciences (AREA)
- Biophysics (AREA)
- Crystallography & Structural Chemistry (AREA)
- Semiconductor Lasers (AREA)
Description
第1導電型半導体領域13: n型InP基板
第1導電型クラッド領域25:n型InP(シリコン添加)
埋め込み領域17:高抵抗InP(鉄添加)
活性層19:GaInAsP量子井戸構造
第2導電型クラッド層21:p型InP(亜鉛添加)
第2導電型コンタクト層23:p型AlInAs(炭素添加)
絶縁物27:SiO2
第1の電極29(アノード):Au/Zn/Ti/Pt/Au
第2の電極31(カソード):AuGeNi
である。p型コンタクト層に、半導体レーザの発振波長より短いバンドギャップ波長をもつ材料を用いている。
n型InP基板を有機金属気相成長(OMVPE)炉に配置する。炉内の圧力は例えば60Torrである。まず、OMVPE炉に水素(H2)を流しながら炉の温度を摂氏400度まで昇温する。摂氏400度においてPH3ガスを炉に供給して、基板表面からの燐抜けを抑制する。次いで、摂氏660度に到達したら、n型InPバッファ層、GaInAsP活性層(厚み300nm程度)、GaInAsP回折格子形成層を順次成長して、エピタキシャル基板を作製する。その後、干渉露光法およびエッチング法を用いて深さ40nm程度の回折格子構造をGaInAsP回折格子形成層に形成する。回折格子を形成した後に、再びエピタキシャル基板をOMVPE炉に配置する。アルシンおよびフォスフィンを含む雰囲気中(1%AsH3およびPH3)で摂氏550度に昇温する。摂氏550度において、第1のp型InP層を成長する。ドーパントとして、亜鉛(Zn)を用いる。第1のp型InP層のキャリア濃度は、5×10 17 cm −3 であり、厚さは100nmである。次いで、フォスフィン(PH3)を流しながら、摂氏660度に昇温する。ドーパントとして亜鉛(Zn)を用いて、摂氏660度において第2のp型InP層を成長する。第2のp型InP層のキャリア濃度は5×10 17 cm −3 であり、厚さは400nmである。この後に、ドーパントとして亜鉛(Zn)を用いて、摂氏660度において第3のp型InP層を成長する。第3のp型InP層のキャリア濃度は1×10 18 cm −3 であり、厚さは1000nmである。次いで、フォスフィン(PH3)雰囲気中で、摂氏550度に降温する。ドーパントとして亜鉛(Zn)を用いて、摂氏550度においてp型のAlInAsP層を成長する。このAlInAsP層はヘテロ障壁緩和のために設けられる。AlInAsP層のキャリア濃度は2×10 18 cm −3 および厚さは100nmである。続けて、ドーパントとして炭素(CBr4)を用いて、p型のAlInAs層を成長する。AlInAs層のキャリア濃度は2×10 19 cm −3 および厚さは400nmである。
Claims (4)
- 半導体光素子であって、
III−V化合物半導体からなるn導電型半導体領域と、
前記n導電型半導体領域上に設けられた半導体メサと、
前記n導電型半導体領域上に設けられており前記半導体メサを埋め込む埋め込み領域と、
前記半導体メサ上に設けられた電極と、
を備え、
前記半導体メサは、活性層、p導電型クラッド層およびp導電型コンタクト層を含み、
前記p導電型クラッド層は前記活性層と前記p導電型コンタクト層との間に設けられており、
前記p導電型コンタクト層には、ドーパントとして炭素が添加されており、
前記p導電型クラッド層の厚さは0.5マイクロメートル以上2.5マイクロメートル未満であり、
前記p導電型クラッド層はInPからなり、
前記電極は、前記半導体メサ内の前記p導電型コンタクト層の上面に接触を成し、
前記p導電型コンタクト層は、III族元素としてアルミニウムおよびインジウムを含むと共にV族元素としてヒ素を含むIII−V化合物半導体から成り、前記p導電型コンタクト層は、AlGaInAs又はAlInAsから成り、
当該半導体光素子は半導体レーザを含む、ことを特徴とする半導体光素子。 - 前記p導電型クラッド層と前記p導電型コンタクト層との間に、p型のAlInAsPからなるヘテロ障壁緩和層を更に備え、
前記ヘテロ障壁緩和層のバンドギャップ波長は、前記p導電型クラッド層のバンドギャップ波長と前記p導電型コンタクト層のバンドギャップ波長との間の値を有する、ことを特徴とする請求項1に記載された半導体光素子。 - 前記p導電型コンタクト層は、AlGaInAsから成る、ことを特徴とする請求項1または請求項2に記載された半導体光素子。
- 前記p導電型コンタクト層は、AlInAsから成る、ことを特徴とする請求項1または請求項2に記載された半導体光素子。
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2006125937A JP4797782B2 (ja) | 2006-04-28 | 2006-04-28 | 半導体光素子 |
US11/790,280 US7408965B2 (en) | 2006-04-28 | 2007-04-24 | Semiconductor laser diode with emission efficiency independent of thickness of p-type cladding layer |
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JP2006125937A JP4797782B2 (ja) | 2006-04-28 | 2006-04-28 | 半導体光素子 |
Publications (2)
Publication Number | Publication Date |
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JP2007299882A JP2007299882A (ja) | 2007-11-15 |
JP4797782B2 true JP4797782B2 (ja) | 2011-10-19 |
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JP2006125937A Expired - Fee Related JP4797782B2 (ja) | 2006-04-28 | 2006-04-28 | 半導体光素子 |
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US (1) | US7408965B2 (ja) |
JP (1) | JP4797782B2 (ja) |
Families Citing this family (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP4894576B2 (ja) * | 2007-03-16 | 2012-03-14 | 三菱電機株式会社 | 半導体光素子の製造方法 |
JP6200158B2 (ja) * | 2013-01-24 | 2017-09-20 | 古河電気工業株式会社 | 半導体発光素子およびその製造方法 |
FR3007589B1 (fr) * | 2013-06-24 | 2015-07-24 | St Microelectronics Crolles 2 | Circuit integre photonique et procede de fabrication |
JP6487236B2 (ja) * | 2015-02-18 | 2019-03-20 | 日本オクラロ株式会社 | 半導体光素子、及びその製造方法 |
US10447006B2 (en) * | 2017-02-22 | 2019-10-15 | International Business Machines Corporation | Electro-optical device with asymmetric, vertical current injection ohmic contacts |
JP6785331B2 (ja) * | 2018-03-30 | 2020-11-18 | Dowaエレクトロニクス株式会社 | 半導体光デバイスの製造方法及び半導体光デバイスの中間体 |
Family Cites Families (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0555711A (ja) * | 1991-08-22 | 1993-03-05 | Furukawa Electric Co Ltd:The | 半導体レーザ素子とその製造方法 |
JPH0582891A (ja) | 1991-09-20 | 1993-04-02 | Fujitsu Ltd | 半導体レーザ |
JPH0786679A (ja) * | 1993-09-17 | 1995-03-31 | Fujitsu Ltd | 半導体発光装置及びその製造方法 |
JP2003060311A (ja) | 2001-08-21 | 2003-02-28 | Nippon Telegr & Teleph Corp <Ntt> | 半導体光素子及びその製造方法 |
JP3654435B2 (ja) | 2001-08-21 | 2005-06-02 | 日本電信電話株式会社 | 半導体光素子及びその製造方法 |
JP2004235649A (ja) * | 2003-01-31 | 2004-08-19 | Osram Opto Semiconductors Gmbh | 電気コンタクト領域を備えたモジュールの製造方法および半導体層列および活性ゾーンを有するモジュール |
JP4517653B2 (ja) * | 2004-01-29 | 2010-08-04 | 住友電気工業株式会社 | 光半導体デバイス |
JP4258640B2 (ja) * | 2004-03-26 | 2009-04-30 | セイコーエプソン株式会社 | 導波路型光素子の製造方法 |
JP2007184491A (ja) * | 2006-01-10 | 2007-07-19 | Sumitomo Electric Ind Ltd | 分布帰還型半導体レーザ |
-
2006
- 2006-04-28 JP JP2006125937A patent/JP4797782B2/ja not_active Expired - Fee Related
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2007
- 2007-04-24 US US11/790,280 patent/US7408965B2/en not_active Expired - Fee Related
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Publication number | Publication date |
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JP2007299882A (ja) | 2007-11-15 |
US7408965B2 (en) | 2008-08-05 |
US20070258498A1 (en) | 2007-11-08 |
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