JP4786393B2 - 洗浄装置及びめっき被膜付きフィルムの製造装置 - Google Patents
洗浄装置及びめっき被膜付きフィルムの製造装置 Download PDFInfo
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- JP4786393B2 JP4786393B2 JP2006100695A JP2006100695A JP4786393B2 JP 4786393 B2 JP4786393 B2 JP 4786393B2 JP 2006100695 A JP2006100695 A JP 2006100695A JP 2006100695 A JP2006100695 A JP 2006100695A JP 4786393 B2 JP4786393 B2 JP 4786393B2
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- Prior art keywords
- cleaning
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- cleaning liquid
- film
- tank
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- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
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- 238000004140 cleaning Methods 0.000 title claims description 208
- 238000007747 plating Methods 0.000 title claims description 81
- 238000004519 manufacturing process Methods 0.000 title description 11
- 239000007788 liquid Substances 0.000 claims description 107
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 88
- 238000009713 electroplating Methods 0.000 claims description 24
- 238000000034 method Methods 0.000 claims description 15
- GGCZERPQGJTIQP-UHFFFAOYSA-N sodium;9,10-dioxoanthracene-2-sulfonic acid Chemical compound [Na+].C1=CC=C2C(=O)C3=CC(S(=O)(=O)O)=CC=C3C(=O)C2=C1 GGCZERPQGJTIQP-UHFFFAOYSA-N 0.000 description 23
- 229910052709 silver Inorganic materials 0.000 description 22
- 239000004332 silver Substances 0.000 description 22
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 21
- 238000005406 washing Methods 0.000 description 19
- 239000010410 layer Substances 0.000 description 17
- 239000002184 metal Substances 0.000 description 15
- 229910052751 metal Inorganic materials 0.000 description 15
- 239000000463 material Substances 0.000 description 11
- -1 nitrogen-containing heterocyclic compounds Chemical class 0.000 description 10
- 230000002093 peripheral effect Effects 0.000 description 10
- 239000004065 semiconductor Substances 0.000 description 10
- 238000003860 storage Methods 0.000 description 10
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 9
- 229910052802 copper Inorganic materials 0.000 description 9
- 239000010949 copper Substances 0.000 description 9
- 230000032258 transport Effects 0.000 description 9
- 238000011144 upstream manufacturing Methods 0.000 description 7
- 238000012545 processing Methods 0.000 description 5
- 239000011241 protective layer Substances 0.000 description 5
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 4
- 239000000839 emulsion Substances 0.000 description 4
- 229920000139 polyethylene terephthalate Polymers 0.000 description 4
- 239000005020 polyethylene terephthalate Substances 0.000 description 4
- 229920002284 Cellulose triacetate Polymers 0.000 description 3
- NNLVGZFZQQXQNW-ADJNRHBOSA-N [(2r,3r,4s,5r,6s)-4,5-diacetyloxy-3-[(2s,3r,4s,5r,6r)-3,4,5-triacetyloxy-6-(acetyloxymethyl)oxan-2-yl]oxy-6-[(2r,3r,4s,5r,6s)-4,5,6-triacetyloxy-2-(acetyloxymethyl)oxan-3-yl]oxyoxan-2-yl]methyl acetate Chemical compound O([C@@H]1O[C@@H]([C@H]([C@H](OC(C)=O)[C@H]1OC(C)=O)O[C@H]1[C@@H]([C@@H](OC(C)=O)[C@H](OC(C)=O)[C@@H](COC(C)=O)O1)OC(C)=O)COC(=O)C)[C@@H]1[C@@H](COC(C)=O)O[C@@H](OC(C)=O)[C@H](OC(C)=O)[C@H]1OC(C)=O NNLVGZFZQQXQNW-ADJNRHBOSA-N 0.000 description 3
- 239000013078 crystal Substances 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- JEIPFZHSYJVQDO-UHFFFAOYSA-N iron(III) oxide Inorganic materials O=[Fe]O[Fe]=O JEIPFZHSYJVQDO-UHFFFAOYSA-N 0.000 description 3
- 239000002985 plastic film Substances 0.000 description 3
- 229920006255 plastic film Polymers 0.000 description 3
- 230000002265 prevention Effects 0.000 description 3
- 239000004696 Poly ether ether ketone Substances 0.000 description 2
- 239000004698 Polyethylene Substances 0.000 description 2
- 239000004743 Polypropylene Substances 0.000 description 2
- 239000004372 Polyvinyl alcohol Substances 0.000 description 2
- QAOWNCQODCNURD-UHFFFAOYSA-N Sulfuric acid Chemical compound OS(O)(=O)=O QAOWNCQODCNURD-UHFFFAOYSA-N 0.000 description 2
- 239000000654 additive Substances 0.000 description 2
- 229910000365 copper sulfate Inorganic materials 0.000 description 2
- ARUVKPQLZAKDPS-UHFFFAOYSA-L copper(II) sulfate Chemical compound [Cu+2].[O-][S+2]([O-])([O-])[O-] ARUVKPQLZAKDPS-UHFFFAOYSA-L 0.000 description 2
- 238000001035 drying Methods 0.000 description 2
- 229920001971 elastomer Polymers 0.000 description 2
- 239000000203 mixture Substances 0.000 description 2
- 229910052759 nickel Inorganic materials 0.000 description 2
- 230000003287 optical effect Effects 0.000 description 2
- 229920002492 poly(sulfone) Polymers 0.000 description 2
- 229920002530 polyetherether ketone Polymers 0.000 description 2
- 229920000573 polyethylene Polymers 0.000 description 2
- 229920001721 polyimide Polymers 0.000 description 2
- 229920001155 polypropylene Polymers 0.000 description 2
- 229920002451 polyvinyl alcohol Polymers 0.000 description 2
- 239000005060 rubber Substances 0.000 description 2
- 239000007787 solid Substances 0.000 description 2
- 239000004925 Acrylic resin Substances 0.000 description 1
- 229920000178 Acrylic resin Polymers 0.000 description 1
- ROFVEXUMMXZLPA-UHFFFAOYSA-N Bipyridyl Chemical compound N1=CC=CC=C1C1=CC=CC=N1 ROFVEXUMMXZLPA-UHFFFAOYSA-N 0.000 description 1
- ZAMOUSCENKQFHK-UHFFFAOYSA-N Chlorine atom Chemical compound [Cl] ZAMOUSCENKQFHK-UHFFFAOYSA-N 0.000 description 1
- 108010010803 Gelatin Proteins 0.000 description 1
- 229910013641 LiNbO 3 Inorganic materials 0.000 description 1
- 229920003171 Poly (ethylene oxide) Polymers 0.000 description 1
- 229920012266 Poly(ether sulfone) PES Polymers 0.000 description 1
- 239000004952 Polyamide Substances 0.000 description 1
- 239000002202 Polyethylene glycol Substances 0.000 description 1
- 239000004642 Polyimide Substances 0.000 description 1
- 239000004793 Polystyrene Substances 0.000 description 1
- 229920001328 Polyvinylidene chloride Polymers 0.000 description 1
- 229920006311 Urethane elastomer Polymers 0.000 description 1
- 235000010724 Wisteria floribunda Nutrition 0.000 description 1
- 230000001133 acceleration Effects 0.000 description 1
- 230000002378 acidificating effect Effects 0.000 description 1
- QRUDEWIWKLJBPS-UHFFFAOYSA-N benzotriazole Chemical compound C1=CC=C2N[N][N]C2=C1 QRUDEWIWKLJBPS-UHFFFAOYSA-N 0.000 description 1
- 239000012964 benzotriazole Substances 0.000 description 1
- 239000011230 binding agent Substances 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 239000013626 chemical specie Substances 0.000 description 1
- 239000000460 chlorine Substances 0.000 description 1
- 229910052801 chlorine Inorganic materials 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 238000011109 contamination Methods 0.000 description 1
- ORTQZVOHEJQUHG-UHFFFAOYSA-L copper(II) chloride Chemical compound Cl[Cu]Cl ORTQZVOHEJQUHG-UHFFFAOYSA-L 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- PEVJCYPAFCUXEZ-UHFFFAOYSA-J dicopper;phosphonato phosphate Chemical compound [Cu+2].[Cu+2].[O-]P([O-])(=O)OP([O-])([O-])=O PEVJCYPAFCUXEZ-UHFFFAOYSA-J 0.000 description 1
- 238000004090 dissolution Methods 0.000 description 1
- 238000004070 electrodeposition Methods 0.000 description 1
- 239000010419 fine particle Substances 0.000 description 1
- 239000007789 gas Substances 0.000 description 1
- 229920000159 gelatin Polymers 0.000 description 1
- 239000008273 gelatin Substances 0.000 description 1
- 235000019322 gelatine Nutrition 0.000 description 1
- 235000011852 gelatine desserts Nutrition 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 239000002923 metal particle Substances 0.000 description 1
- 238000002156 mixing Methods 0.000 description 1
- 230000010355 oscillation Effects 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 229920003207 poly(ethylene-2,6-naphthalate) Polymers 0.000 description 1
- 229920002647 polyamide Polymers 0.000 description 1
- 239000004417 polycarbonate Substances 0.000 description 1
- 229920000515 polycarbonate Polymers 0.000 description 1
- 229920000728 polyester Polymers 0.000 description 1
- 229920001223 polyethylene glycol Polymers 0.000 description 1
- 239000011112 polyethylene naphthalate Substances 0.000 description 1
- 229920000642 polymer Polymers 0.000 description 1
- 229920000098 polyolefin Polymers 0.000 description 1
- 229920002223 polystyrene Polymers 0.000 description 1
- 239000004800 polyvinyl chloride Substances 0.000 description 1
- 229920000915 polyvinyl chloride Polymers 0.000 description 1
- 239000005033 polyvinylidene chloride Substances 0.000 description 1
- 238000012805 post-processing Methods 0.000 description 1
- 238000003825 pressing Methods 0.000 description 1
- 239000002994 raw material Substances 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- 239000002356 single layer Substances 0.000 description 1
- 238000005507 spraying Methods 0.000 description 1
- 230000006641 stabilisation Effects 0.000 description 1
- 238000011105 stabilization Methods 0.000 description 1
- 230000000087 stabilizing effect Effects 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 238000002834 transmittance Methods 0.000 description 1
- 238000004804 winding Methods 0.000 description 1
Images
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B3/00—Cleaning by methods involving the use or presence of liquid or steam
- B08B3/04—Cleaning involving contact with liquid
- B08B3/041—Cleaning travelling work
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B1/00—Cleaning by methods involving the use of tools
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B1/00—Cleaning by methods involving the use of tools
- B08B1/10—Cleaning by methods involving the use of tools characterised by the type of cleaning tool
- B08B1/16—Rigid blades, e.g. scrapers; Flexible blades, e.g. wipers
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B3/00—Cleaning by methods involving the use or presence of liquid or steam
- B08B3/04—Cleaning involving contact with liquid
-
- C—CHEMISTRY; METALLURGY
- C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
- C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
- C25D17/00—Constructional parts, or assemblies thereof, of cells for electrolytic coating
-
- C—CHEMISTRY; METALLURGY
- C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
- C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
- C25D7/00—Electroplating characterised by the article coated
- C25D7/06—Wires; Strips; Foils
- C25D7/0614—Strips or foils
- C25D7/0628—In vertical cells
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Electrochemistry (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Electroplating Methods And Accessories (AREA)
Description
18 感光ウエブ(フィルム)
60A めっき槽
60B めっき槽
61 めっき液
70A 洗浄装置
70B 洗浄装置
74 ローラ
76 ローラ
200A 洗浄装置
202A 洗浄装置
204 洗浄液受け槽
205 洗浄水(洗浄液)
206 オーバーフロー堰
208 排出路
212 フレキシブルブレード
216 供給管(送液路)
218 導入管(送液路)
220 洗浄水管理槽(洗浄液管理槽)
222 流量調整バルブ
224 洗浄水貯蔵槽
226 オーバーフロー配管
238 供給管
240 ポンプ
Claims (5)
- フィルムの導電面をカソード給電ローラに接触させ、前記導電面にめっき被膜を形成する電解めっき浴の下流側に配置され、次工程へ前記フィルムを空中搬送するローラを洗浄する洗浄装置であって、
前記ローラの下部が洗浄液に浸漬される洗浄液受け槽と、
前記洗浄液受け槽に洗浄液を供給する供給手段と、
を有することを特徴とする洗浄装置。 - 前記洗浄液受け槽の側部に、前記洗浄液受け槽内の洗浄液をオーバーフローさせて洗浄液量を一定に保つオーバーフロー堰を設けたことを特徴とする請求項1に記載の洗浄装置。
- 前記供給手段は、水位が一定に管理された洗浄液管理槽と、
前記洗浄液管理槽から各前記洗浄液受け槽までの水頭差が一定とされた送液路と、
前記送液路に設けられた流量調整バルブと、
を備えることを特徴とする請求項1又は請求項2に記載の洗浄装置。 - 前記洗浄液受け槽内の下部に、洗浄液中で前記ローラの周面に当接するフレキシブルブレードを設けたことを特徴とする請求項1から請求項3までのいずれか1項に記載の洗浄装置。
- フィルムの導電面をカソード給電ローラに接触させ、前記導電面にめっき被膜を形成する電解めっき浴と、
前記電解めっき浴の下流側に配置され、次工程へ前記フィルムを空中搬送するローラと、
前記ローラを洗浄する請求項1から請求項4までのいずれか1項に記載の洗浄装置と、
を有することを特徴とするめっき被膜付きフィルムの製造装置。
Priority Applications (5)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2006100695A JP4786393B2 (ja) | 2006-03-31 | 2006-03-31 | 洗浄装置及びめっき被膜付きフィルムの製造装置 |
US11/994,414 US20090166189A1 (en) | 2006-03-31 | 2007-03-20 | Washing apparatus for fabricating plating-filmed web |
PCT/JP2007/056509 WO2007116774A1 (en) | 2006-03-31 | 2007-03-20 | Washing apparatus and apparatus for fabricating plating-filmed web |
CN2007800007564A CN101331248B (zh) | 2006-03-31 | 2007-03-20 | 清洗装置及镀膜料片制造装置 |
DE112007000757T DE112007000757B4 (de) | 2006-03-31 | 2007-03-20 | Vorrichtung zum Herstellen einer Bahn mit einem Plattierungsfilm |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2006100695A JP4786393B2 (ja) | 2006-03-31 | 2006-03-31 | 洗浄装置及びめっき被膜付きフィルムの製造装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2007270322A JP2007270322A (ja) | 2007-10-18 |
JP4786393B2 true JP4786393B2 (ja) | 2011-10-05 |
Family
ID=38581070
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2006100695A Expired - Fee Related JP4786393B2 (ja) | 2006-03-31 | 2006-03-31 | 洗浄装置及びめっき被膜付きフィルムの製造装置 |
Country Status (5)
Country | Link |
---|---|
US (1) | US20090166189A1 (ja) |
JP (1) | JP4786393B2 (ja) |
CN (1) | CN101331248B (ja) |
DE (1) | DE112007000757B4 (ja) |
WO (1) | WO2007116774A1 (ja) |
Families Citing this family (18)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP5588597B2 (ja) | 2007-03-23 | 2014-09-10 | 富士フイルム株式会社 | 導電性材料の製造方法及び製造装置 |
WO2009125854A1 (ja) | 2008-04-11 | 2009-10-15 | 富士フイルム株式会社 | 車両灯具用前面カバー及び車両灯具用前面カバーの製造方法、並びに、電熱構造 |
CA2720899C (en) | 2008-04-11 | 2014-07-15 | Fujifilm Corporation | Heat generating body |
JP5430921B2 (ja) | 2008-05-16 | 2014-03-05 | 富士フイルム株式会社 | 導電性フイルム及び透明発熱体 |
JP5425459B2 (ja) | 2008-05-19 | 2014-02-26 | 富士フイルム株式会社 | 導電性フイルム及び透明発熱体 |
KR101141053B1 (ko) * | 2009-11-23 | 2012-05-03 | (주)승진기계 | 롤러 도금장치 |
CN102086527B (zh) * | 2009-12-04 | 2014-08-20 | 鸿富锦精密工业(深圳)有限公司 | 镀膜装置 |
CN102095482B (zh) * | 2010-11-09 | 2015-04-01 | 深圳市爱康生物科技有限公司 | 一种洗液检测管理装置和洗液检测管理方法 |
US9487880B2 (en) * | 2011-11-25 | 2016-11-08 | Semiconductor Energy Laboratory Co., Ltd. | Flexible substrate processing apparatus |
JP5761124B2 (ja) * | 2012-05-28 | 2015-08-12 | 住友金属鉱山株式会社 | 連続めっき装置および連続めっき方法 |
JP6207846B2 (ja) | 2013-03-04 | 2017-10-04 | 富士フイルム株式会社 | 透明導電性フィルムおよびタッチパネル |
GB2518387B (en) * | 2013-09-19 | 2017-07-12 | Dst Innovations Ltd | Electronic circuit production |
KR101659462B1 (ko) * | 2014-04-11 | 2016-09-23 | 한국기계연구원 | 전도성 금속 필름 전극 제조장치 |
CN104087991B (zh) * | 2014-06-24 | 2016-08-17 | 河北钢铁股份有限公司邯郸分公司 | 一种电镀锌转向辊耐指纹液清理装置及清理方法 |
CN112626581B (zh) * | 2020-12-10 | 2024-03-29 | 厦门海辰新材料科技有限公司 | 电镀装置及导电基膜的镀膜方法 |
CN113546885A (zh) * | 2021-07-23 | 2021-10-26 | 江西铜博科技有限公司 | 一种铜箔电解池自动清理装置 |
CN113560266B (zh) * | 2021-09-28 | 2021-12-24 | 常州恒锌禹晟智能装备股份有限公司 | 膜萃取清洗用输送系统以及张力自适应调节方法 |
CN114669525A (zh) * | 2022-03-22 | 2022-06-28 | 重庆聚辉电镀有限公司 | 一种用于新能源汽车配件制造的铜件电镀前处理装置 |
Family Cites Families (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS59185273U (ja) * | 1983-05-30 | 1984-12-08 | 新日本製鐵株式会社 | 電気メツキ用通電ロ−ルの附着金属除去装置 |
JPH067256B2 (ja) * | 1986-07-10 | 1994-01-26 | 富士写真フイルム株式会社 | ハロゲン化銀写真感光材料の自動現像装置 |
DE3624481A1 (de) * | 1986-07-19 | 1988-01-28 | Schering Ag | Anordnung zur elektrolytischen behandlung von plattenfoermigen gegenstaenden |
EP0491049B1 (en) * | 1990-07-09 | 1996-01-24 | Fuji Photo Film Co., Ltd. | Device for processing silver halide photosensitive material |
JPH05279881A (ja) | 1992-04-01 | 1993-10-26 | Sumitomo Metal Ind Ltd | 洗浄水絞りロールの洗浄方法 |
JP2942663B2 (ja) * | 1992-07-14 | 1999-08-30 | 富士写真フイルム株式会社 | 感光材料処理装置 |
US5360525A (en) * | 1993-03-16 | 1994-11-01 | United Foils Inc. | Apparatus for making metal foil |
JP2000297397A (ja) * | 1999-02-10 | 2000-10-24 | Canon Inc | 電析方法 |
JP2005264193A (ja) | 2004-03-16 | 2005-09-29 | Sumitomo Metal Mining Co Ltd | 電気めっき装置および電気めっき方法 |
-
2006
- 2006-03-31 JP JP2006100695A patent/JP4786393B2/ja not_active Expired - Fee Related
-
2007
- 2007-03-20 CN CN2007800007564A patent/CN101331248B/zh not_active Expired - Fee Related
- 2007-03-20 US US11/994,414 patent/US20090166189A1/en not_active Abandoned
- 2007-03-20 DE DE112007000757T patent/DE112007000757B4/de not_active Expired - Fee Related
- 2007-03-20 WO PCT/JP2007/056509 patent/WO2007116774A1/en active Application Filing
Also Published As
Publication number | Publication date |
---|---|
DE112007000757T5 (de) | 2009-01-29 |
DE112007000757B4 (de) | 2010-07-08 |
CN101331248A (zh) | 2008-12-24 |
JP2007270322A (ja) | 2007-10-18 |
US20090166189A1 (en) | 2009-07-02 |
WO2007116774A1 (en) | 2007-10-18 |
CN101331248B (zh) | 2010-11-03 |
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