JP4773444B2 - 低駆動容量のアクチュエータ - Google Patents

低駆動容量のアクチュエータ Download PDF

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Publication number
JP4773444B2
JP4773444B2 JP2007524993A JP2007524993A JP4773444B2 JP 4773444 B2 JP4773444 B2 JP 4773444B2 JP 2007524993 A JP2007524993 A JP 2007524993A JP 2007524993 A JP2007524993 A JP 2007524993A JP 4773444 B2 JP4773444 B2 JP 4773444B2
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JP
Japan
Prior art keywords
electrode
layer
piezoelectric layer
actuator
piezoelectric
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP2007524993A
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English (en)
Japanese (ja)
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JP2008508850A5 (enExample
JP2008508850A (ja
Inventor
アンドレアス バイブル，
ジェフリー バークマイアー，
Original Assignee
フジフィルム ディマティックス， インコーポレイテッド
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Application filed by フジフィルム ディマティックス， インコーポレイテッド filed Critical フジフィルム ディマティックス， インコーポレイテッド
Publication of JP2008508850A publication Critical patent/JP2008508850A/ja
Publication of JP2008508850A5 publication Critical patent/JP2008508850A5/ja
Application granted granted Critical
Publication of JP4773444B2 publication Critical patent/JP4773444B2/ja
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Classifications

    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2/14201—Structure of print heads with piezoelectric elements
    • B41J2/14233—Structure of print heads with piezoelectric elements of film type, deformed by bending and disposed on a diaphragm
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/015—Ink jet characterised by the jet generation process
    • B41J2/04—Ink jet characterised by the jet generation process generating single droplets or particles on demand
    • B41J2/045—Ink jet characterised by the jet generation process generating single droplets or particles on demand by pressure, e.g. electromechanical transducers
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1607—Production of print heads with piezoelectric elements
    • B41J2/161—Production of print heads with piezoelectric elements of film type, deformed by bending and disposed on a diaphragm
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1626—Manufacturing processes etching
    • B41J2/1628—Manufacturing processes etching dry etching
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1631—Manufacturing processes photolithography
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/01—Manufacture or treatment
    • H10N30/06—Forming electrodes or interconnections, e.g. leads or terminals
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/20—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
    • H10N30/204—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators using bending displacement, e.g. unimorph, bimorph or multimorph cantilever or membrane benders
    • H10N30/2047—Membrane type
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/80—Constructional details
    • H10N30/87—Electrodes or interconnections, e.g. leads or terminals
    • H10N30/875—Further connection or lead arrangements, e.g. flexible wiring boards, terminal pins
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2002/14491—Electrical connection

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Particle Formation And Scattering Control In Inkjet Printers (AREA)
  • General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
  • Fluid-Damping Devices (AREA)
  • Valve-Gear Or Valve Arrangements (AREA)
  • Valve Device For Special Equipments (AREA)
JP2007524993A 2004-08-02 2005-08-01 低駆動容量のアクチュエータ Expired - Lifetime JP4773444B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US10/910,450 US7344228B2 (en) 2004-08-02 2004-08-02 Actuator with reduced drive capacitance
US10/910,450 2004-08-02
PCT/US2005/027752 WO2006015378A2 (en) 2004-08-02 2005-08-01 Actuator with reduced drive capacitance

Publications (3)

Publication Number Publication Date
JP2008508850A JP2008508850A (ja) 2008-03-21
JP2008508850A5 JP2008508850A5 (enExample) 2008-09-04
JP4773444B2 true JP4773444B2 (ja) 2011-09-14

Family

ID=35517302

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2007524993A Expired - Lifetime JP4773444B2 (ja) 2004-08-02 2005-08-01 低駆動容量のアクチュエータ

Country Status (8)

Country Link
US (1) US7344228B2 (enExample)
EP (1) EP1779445B1 (enExample)
JP (1) JP4773444B2 (enExample)
KR (1) KR101114143B1 (enExample)
CN (1) CN100514691C (enExample)
AT (1) ATE422714T1 (enExample)
DE (1) DE602005012704D1 (enExample)
WO (1) WO2006015378A2 (enExample)

Families Citing this family (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7420317B2 (en) * 2004-10-15 2008-09-02 Fujifilm Dimatix, Inc. Forming piezoelectric actuators
US7388319B2 (en) * 2004-10-15 2008-06-17 Fujifilm Dimatix, Inc. Forming piezoelectric actuators
JP5639738B2 (ja) * 2008-02-14 2014-12-10 日本碍子株式会社 圧電／電歪素子の製造方法
US8857020B2 (en) * 2008-05-23 2014-10-14 Fujifilm Corporation Actuators and methods of making the same
US8454132B2 (en) 2009-12-14 2013-06-04 Fujifilm Corporation Moisture protection of fluid ejector
US8297742B2 (en) * 2010-03-19 2012-10-30 Fujifilm Corporation Bonded circuits and seals in a printing device
US8556364B2 (en) * 2010-07-01 2013-10-15 Fujifilm Dimatix, Inc. Determining whether a flow path is ready for ejecting a drop
CN102794989A (zh) * 2011-05-27 2012-11-28 研能科技股份有限公司 压电式喷墨头结构
JP2013154611A (ja) * 2012-01-31 2013-08-15 Seiko Epson Corp 液体噴射ヘッドおよび液体噴射装置
ITUB20159497A1 (it) * 2015-12-24 2017-06-24 St Microelectronics Srl Dispositivo piezoelettrico mems e relativo procedimento di fabbricazione
GB2546097B (en) 2016-01-08 2020-12-30 Xaar Technology Ltd Droplet deposition head
US10406811B2 (en) 2016-12-19 2019-09-10 Fujifilm Dimatix, Inc. Actuators for fluid delivery systems
JP7214468B2 (ja) 2018-12-25 2023-01-30 キヤノン株式会社 液体吐出ヘッド

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH10226071A (ja) * 1996-12-09 1998-08-25 Seiko Epson Corp インクジェット式記録ヘッド
JP2003266686A (ja) * 2002-03-15 2003-09-24 Seiko Epson Corp インクジェット式記録ヘッド及びその製造方法並びにインクジェット式記録装置

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3344888B2 (ja) 1995-12-28 2002-11-18 日本碍子株式会社 圧電／電歪膜型素子及びその製造方法
US6089701A (en) * 1996-04-10 2000-07-18 Seiko Epson Corporation Ink jet recording head having reduced stress concentration near the boundaries of pressure generating chambers
DE69811333T2 (de) * 1997-07-25 2003-07-10 Seiko Epson Corp., Tokio/Tokyo Tintenstrahlaufzeichnungskopf und tintenstrahlaufzeichnungsgerät
EP1256450B1 (en) 2000-02-18 2012-01-11 FUJIFILM Corporation Ink-jet recording head and method for manufacturing the same
JP3846406B2 (ja) 2002-01-10 2006-11-15 株式会社村田製作所 電子部品、その製造方法、それを用いたフィルタおよびデュプレクサならびに電子通信機器
DE60332174D1 (de) * 2002-02-19 2010-05-27 Brother Ind Ltd Tintenstrahldruckkopf und dazugehöriges Herstellungsverfahren, Tintenstrahldrucker und Herstellungsverfahren eines Aktors
JP3991894B2 (ja) 2002-03-18 2007-10-17 セイコーエプソン株式会社 圧電アクチュエータの製造方法、液体噴射ヘッドの製造方法、及び、アクチュエータ母部材
JP2004001431A (ja) 2002-03-25 2004-01-08 Seiko Epson Corp 液体噴射ヘッド及び液体噴射装置
JP4186494B2 (ja) 2002-04-01 2008-11-26 セイコーエプソン株式会社 液体噴射ヘッド

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH10226071A (ja) * 1996-12-09 1998-08-25 Seiko Epson Corp インクジェット式記録ヘッド
JP2003266686A (ja) * 2002-03-15 2003-09-24 Seiko Epson Corp インクジェット式記録ヘッド及びその製造方法並びにインクジェット式記録装置

Also Published As

Publication number Publication date
CN100514691C (zh) 2009-07-15
KR20070047318A (ko) 2007-05-04
DE602005012704D1 (de) 2009-03-26
KR101114143B1 (ko) 2012-03-13
JP2008508850A (ja) 2008-03-21
EP1779445A2 (en) 2007-05-02
US20060023032A1 (en) 2006-02-02
WO2006015378A2 (en) 2006-02-09
WO2006015378A3 (en) 2006-03-23
CN101040394A (zh) 2007-09-19
EP1779445B1 (en) 2009-02-11
US7344228B2 (en) 2008-03-18
ATE422714T1 (de) 2009-02-15

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