JP4769572B2 - 耐熱性透明電極の製造方法および色素増感太陽電池 - Google Patents
耐熱性透明電極の製造方法および色素増感太陽電池 Download PDFInfo
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- 238000004519 manufacturing process Methods 0.000 title claims description 26
- 239000004020 conductor Substances 0.000 claims description 59
- XOLBLPGZBRYERU-UHFFFAOYSA-N tin dioxide Chemical compound O=[Sn]=O XOLBLPGZBRYERU-UHFFFAOYSA-N 0.000 claims description 22
- 229910001887 tin oxide Inorganic materials 0.000 claims description 22
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 claims description 19
- 229910003437 indium oxide Inorganic materials 0.000 claims description 17
- PJXISJQVUVHSOJ-UHFFFAOYSA-N indium(iii) oxide Chemical compound [O-2].[O-2].[O-2].[In+3].[In+3] PJXISJQVUVHSOJ-UHFFFAOYSA-N 0.000 claims description 17
- 239000002904 solvent Substances 0.000 claims description 17
- XLOMVQKBTHCTTD-UHFFFAOYSA-N Zinc monoxide Chemical compound [Zn]=O XLOMVQKBTHCTTD-UHFFFAOYSA-N 0.000 claims description 16
- 229910052696 pnictogen Inorganic materials 0.000 claims description 15
- 150000001875 compounds Chemical class 0.000 claims description 13
- 229910021478 group 5 element Inorganic materials 0.000 claims description 12
- 238000010438 heat treatment Methods 0.000 claims description 12
- OKKJLVBELUTLKV-UHFFFAOYSA-N Methanol Chemical compound OC OKKJLVBELUTLKV-UHFFFAOYSA-N 0.000 claims description 9
- 229910052738 indium Inorganic materials 0.000 claims description 9
- 239000000203 mixture Substances 0.000 claims description 9
- 239000003792 electrolyte Substances 0.000 claims description 8
- 239000011787 zinc oxide Substances 0.000 claims description 8
- GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical compound O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 claims description 7
- OGIDPMRJRNCKJF-UHFFFAOYSA-N titanium oxide Inorganic materials [Ti]=O OGIDPMRJRNCKJF-UHFFFAOYSA-N 0.000 claims description 7
- LRHPLDYGYMQRHN-UHFFFAOYSA-N N-Butanol Chemical compound CCCCO LRHPLDYGYMQRHN-UHFFFAOYSA-N 0.000 claims description 6
- 229910000314 transition metal oxide Inorganic materials 0.000 claims description 5
- 229910019800 NbF 5 Inorganic materials 0.000 claims description 4
- 229910004529 TaF 5 Inorganic materials 0.000 claims description 4
- 229910052785 arsenic Inorganic materials 0.000 claims description 4
- APFVFJFRJDLVQX-UHFFFAOYSA-N indium atom Chemical compound [In] APFVFJFRJDLVQX-UHFFFAOYSA-N 0.000 claims description 4
- AMGQUBHHOARCQH-UHFFFAOYSA-N indium;oxotin Chemical compound [In].[Sn]=O AMGQUBHHOARCQH-UHFFFAOYSA-N 0.000 claims description 4
- 229910052757 nitrogen Inorganic materials 0.000 claims description 4
- 229910052698 phosphorus Inorganic materials 0.000 claims description 4
- 238000000034 method Methods 0.000 description 20
- 238000007740 vapor deposition Methods 0.000 description 17
- 239000000523 sample Substances 0.000 description 16
- 239000000243 solution Substances 0.000 description 14
- 239000010955 niobium Substances 0.000 description 7
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 6
- 229910052731 fluorine Inorganic materials 0.000 description 6
- 229910052760 oxygen Inorganic materials 0.000 description 6
- 239000001301 oxygen Substances 0.000 description 6
- 239000004065 semiconductor Substances 0.000 description 6
- 229910052787 antimony Inorganic materials 0.000 description 5
- 230000006866 deterioration Effects 0.000 description 5
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- 230000033116 oxidation-reduction process Effects 0.000 description 4
- WEVYAHXRMPXWCK-UHFFFAOYSA-N Acetonitrile Chemical compound CC#N WEVYAHXRMPXWCK-UHFFFAOYSA-N 0.000 description 3
- 238000010521 absorption reaction Methods 0.000 description 3
- 229910052797 bismuth Inorganic materials 0.000 description 3
- 239000013522 chelant Substances 0.000 description 3
- -1 for example Substances 0.000 description 3
- 229910052758 niobium Inorganic materials 0.000 description 3
- 230000027756 respiratory electron transport chain Effects 0.000 description 3
- YAYGSLOSTXKUBW-UHFFFAOYSA-N ruthenium(2+) Chemical compound [Ru+2] YAYGSLOSTXKUBW-UHFFFAOYSA-N 0.000 description 3
- 239000000758 substrate Substances 0.000 description 3
- 229910052718 tin Inorganic materials 0.000 description 3
- FXPLCAKVOYHAJA-UHFFFAOYSA-N 2-(4-carboxypyridin-2-yl)pyridine-4-carboxylic acid Chemical compound OC(=O)C1=CC=NC(C=2N=CC=C(C=2)C(O)=O)=C1 FXPLCAKVOYHAJA-UHFFFAOYSA-N 0.000 description 2
- ZCYVEMRRCGMTRW-UHFFFAOYSA-N 7553-56-2 Chemical compound [I] ZCYVEMRRCGMTRW-UHFFFAOYSA-N 0.000 description 2
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- VEXZGXHMUGYJMC-UHFFFAOYSA-M Chloride anion Chemical compound [Cl-] VEXZGXHMUGYJMC-UHFFFAOYSA-M 0.000 description 2
- KRHYYFGTRYWZRS-UHFFFAOYSA-M Fluoride anion Chemical compound [F-] KRHYYFGTRYWZRS-UHFFFAOYSA-M 0.000 description 2
- QIGBRXMKCJKVMJ-UHFFFAOYSA-N Hydroquinone Chemical compound OC1=CC=C(O)C=C1 QIGBRXMKCJKVMJ-UHFFFAOYSA-N 0.000 description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 2
- 229920003182 Surlyn® Polymers 0.000 description 2
- ZMZDMBWJUHKJPS-UHFFFAOYSA-M Thiocyanate anion Chemical compound [S-]C#N ZMZDMBWJUHKJPS-UHFFFAOYSA-M 0.000 description 2
- 238000000576 coating method Methods 0.000 description 2
- 230000000052 comparative effect Effects 0.000 description 2
- XMBWDFGMSWQBCA-UHFFFAOYSA-N hydrogen iodide Chemical compound I XMBWDFGMSWQBCA-UHFFFAOYSA-N 0.000 description 2
- ZMZDMBWJUHKJPS-UHFFFAOYSA-N hydrogen thiocyanate Natural products SC#N ZMZDMBWJUHKJPS-UHFFFAOYSA-N 0.000 description 2
- 229910052740 iodine Inorganic materials 0.000 description 2
- 239000011630 iodine Substances 0.000 description 2
- 125000002346 iodo group Chemical group I* 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 239000002245 particle Substances 0.000 description 2
- 230000000737 periodic effect Effects 0.000 description 2
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 2
- 229920006254 polymer film Polymers 0.000 description 2
- 125000004424 polypyridyl Polymers 0.000 description 2
- 229910052710 silicon Inorganic materials 0.000 description 2
- 239000010703 silicon Substances 0.000 description 2
- 239000002356 single layer Substances 0.000 description 2
- 229910052715 tantalum Inorganic materials 0.000 description 2
- GKXDJYKZFZVASJ-UHFFFAOYSA-M tetrapropylazanium;iodide Chemical compound [I-].CCC[N+](CCC)(CCC)CCC GKXDJYKZFZVASJ-UHFFFAOYSA-M 0.000 description 2
- 229920001169 thermoplastic Polymers 0.000 description 2
- 229910052720 vanadium Inorganic materials 0.000 description 2
- 229910052725 zinc Inorganic materials 0.000 description 2
- 239000011701 zinc Substances 0.000 description 2
- POILWHVDKZOXJZ-ARJAWSKDSA-M (z)-4-oxopent-2-en-2-olate Chemical compound C\C([O-])=C\C(C)=O POILWHVDKZOXJZ-ARJAWSKDSA-M 0.000 description 1
- JVKYQNKBSRUGAE-UHFFFAOYSA-N 1-hexyl-2,4-dimethyl-1h-imidazol-1-ium;iodide Chemical compound [I-].CCCCCC[NH+]1C=C(C)N=C1C JVKYQNKBSRUGAE-UHFFFAOYSA-N 0.000 description 1
- CPELXLSAUQHCOX-UHFFFAOYSA-M Bromide Chemical compound [Br-] CPELXLSAUQHCOX-UHFFFAOYSA-M 0.000 description 1
- WKBOTKDWSSQWDR-UHFFFAOYSA-N Bromine atom Chemical compound [Br] WKBOTKDWSSQWDR-UHFFFAOYSA-N 0.000 description 1
- KMTRUDSVKNLOMY-UHFFFAOYSA-N Ethylene carbonate Chemical compound O=C1OCCO1 KMTRUDSVKNLOMY-UHFFFAOYSA-N 0.000 description 1
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 1
- 206010070834 Sensitisation Diseases 0.000 description 1
- 229910006404 SnO 2 Inorganic materials 0.000 description 1
- 239000000654 additive Substances 0.000 description 1
- 230000000996 additive effect Effects 0.000 description 1
- WATWJIUSRGPENY-UHFFFAOYSA-N antimony atom Chemical compound [Sb] WATWJIUSRGPENY-UHFFFAOYSA-N 0.000 description 1
- RQNWIZPPADIBDY-UHFFFAOYSA-N arsenic atom Chemical compound [As] RQNWIZPPADIBDY-UHFFFAOYSA-N 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- JCXGWMGPZLAOME-UHFFFAOYSA-N bismuth atom Chemical compound [Bi] JCXGWMGPZLAOME-UHFFFAOYSA-N 0.000 description 1
- GDTBXPJZTBHREO-UHFFFAOYSA-N bromine Substances BrBr GDTBXPJZTBHREO-UHFFFAOYSA-N 0.000 description 1
- 229910052794 bromium Inorganic materials 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 238000010351 charge transfer process Methods 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 238000005229 chemical vapour deposition Methods 0.000 description 1
- 239000006059 cover glass Substances 0.000 description 1
- 238000005336 cracking Methods 0.000 description 1
- 125000004093 cyano group Chemical group *C#N 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 238000007598 dipping method Methods 0.000 description 1
- 238000007606 doctor blade method Methods 0.000 description 1
- 238000004070 electrodeposition Methods 0.000 description 1
- 238000000313 electron-beam-induced deposition Methods 0.000 description 1
- 238000006056 electrooxidation reaction Methods 0.000 description 1
- 230000005281 excited state Effects 0.000 description 1
- 230000005283 ground state Effects 0.000 description 1
- 239000003779 heat-resistant material Substances 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 238000002347 injection Methods 0.000 description 1
- 239000007924 injection Substances 0.000 description 1
- 229910052741 iridium Inorganic materials 0.000 description 1
- GKOZUEZYRPOHIO-UHFFFAOYSA-N iridium atom Chemical compound [Ir] GKOZUEZYRPOHIO-UHFFFAOYSA-N 0.000 description 1
- 229910052742 iron Inorganic materials 0.000 description 1
- 239000003446 ligand Substances 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- 238000005551 mechanical alloying Methods 0.000 description 1
- 239000012528 membrane Substances 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 229910044991 metal oxide Inorganic materials 0.000 description 1
- 150000004706 metal oxides Chemical class 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 230000007935 neutral effect Effects 0.000 description 1
- GUCVJGMIXFAOAE-UHFFFAOYSA-N niobium atom Chemical compound [Nb] GUCVJGMIXFAOAE-UHFFFAOYSA-N 0.000 description 1
- 231100000956 nontoxicity Toxicity 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- SOQBVABWOPYFQZ-UHFFFAOYSA-N oxygen(2-);titanium(4+) Chemical compound [O-2].[O-2].[Ti+4] SOQBVABWOPYFQZ-UHFFFAOYSA-N 0.000 description 1
- 229910052763 palladium Inorganic materials 0.000 description 1
- 239000011574 phosphorus Substances 0.000 description 1
- 229910052697 platinum Inorganic materials 0.000 description 1
- 230000002265 prevention Effects 0.000 description 1
- 238000006722 reduction reaction Methods 0.000 description 1
- 238000011160 research Methods 0.000 description 1
- 229910052707 ruthenium Inorganic materials 0.000 description 1
- 230000008313 sensitization Effects 0.000 description 1
- 238000001179 sorption measurement Methods 0.000 description 1
- 238000004528 spin coating Methods 0.000 description 1
- 238000005507 spraying Methods 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
- GUVRBAGPIYLISA-UHFFFAOYSA-N tantalum atom Chemical compound [Ta] GUVRBAGPIYLISA-UHFFFAOYSA-N 0.000 description 1
- 230000001988 toxicity Effects 0.000 description 1
- 231100000419 toxicity Toxicity 0.000 description 1
- 238000012546 transfer Methods 0.000 description 1
- 230000007704 transition Effects 0.000 description 1
- 229910052723 transition metal Inorganic materials 0.000 description 1
- 150000003624 transition metals Chemical class 0.000 description 1
- WRTMQOHKMFDUKX-UHFFFAOYSA-N triiodide Chemical compound I[I-]I WRTMQOHKMFDUKX-UHFFFAOYSA-N 0.000 description 1
- 229940006158 triiodide ion Drugs 0.000 description 1
- LEONUFNNVUYDNQ-UHFFFAOYSA-N vanadium atom Chemical compound [V] LEONUFNNVUYDNQ-UHFFFAOYSA-N 0.000 description 1
- 238000005019 vapor deposition process Methods 0.000 description 1
- TYHJXGDMRRJCRY-UHFFFAOYSA-N zinc indium(3+) oxygen(2-) tin(4+) Chemical compound [O-2].[Zn+2].[Sn+4].[In+3] TYHJXGDMRRJCRY-UHFFFAOYSA-N 0.000 description 1
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- H10K30/80—Constructional details
- H10K30/81—Electrodes
- H10K30/82—Transparent electrodes, e.g. indium tin oxide [ITO] electrodes
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- H01G—CAPACITORS; CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES OR LIGHT-SENSITIVE DEVICES, OF THE ELECTROLYTIC TYPE
- H01G9/00—Electrolytic capacitors, rectifiers, detectors, switching devices, light-sensitive or temperature-sensitive devices; Processes of their manufacture
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Description
0.1μmの厚さを有するスズ酸化物からなる伝導体を準備し,エタノールに溶解された20mMのNbCl5溶液に浸漬させた。30秒後,上記伝導体をエタノールで洗浄し,常温で乾燥させた。乾燥された伝導体を500℃の熱処理炉に入れ,30分間熱処理した。これから得た電極をサンプル1とする。
20mMのNbCl5溶液の代わりに,10mMのNbCl5溶液を使用したという点を除いては,上記実施例1と同じ方法で電極を製造した。これをサンプル2とする。
20mMのNbCl5溶液の代わりに,15mMのNbCl5溶液を使用したという点を除いては,上記実施例1と同じ方法で電極を製造した。これをサンプル3とする。
0.1μmの厚さを有するスズ酸化物からなる伝導体を準備した。これをサンプルAとする。
上記サンプル1及びAの熱処理前後の界面抵抗を評価し,その結果を表1に表した。界面抵抗評価のために,各サンプルの初期界面抵抗を4ポイントプローブ(four point probe)測定装備を利用して測定した後,各サンプルを500℃の温度で30分間熱処理した後の界面抵抗をさらに測定し,これを比較した。
本製造例は,上記実施例1から得たサンプル1を基板として利用した色素増感太陽電池の製造を説明したものである。
光負極製造時に使われた基板でもって,上記実施例1から得たサンプル1の代わりに上記サンプルAを使用したという点を除いては,上記実施例1に記載された方法と同じ方法で色素増感太陽電池を製造した。これから得た色素増感太陽電池を太陽電池Aとする。
太陽電池1及びAの性能評価のために,効率,開放電圧,短絡電流及び充密度を評価し,下記表2に記載した。各太陽電池の効率,開放電圧,短絡電流及び充密度は,各太陽電池に対する100mW/cm2強度の光源とSi標準セルとを利用した電流−電圧曲線から評価した。太陽電池Aの電流−電圧曲線は,図2に表し,太陽電池1の電流−電圧曲線は,図3に表した。また,電流−電圧曲線から太陽電池の効率及び開放電圧,短絡電流,充密度を計算した。
2 第2電極
3 多孔質膜
5 色素分子
Claims (10)
- 五価元素を含有した透明伝導性物質からなる耐熱性透明電極の製造方法であって,
透明伝導性物質からなる透明伝導体を作製する工程と,
前記透明伝導性物質からなる前記透明伝導体を,五価元素の供給源と溶媒との混合物に接触させる工程と,
前記五価元素の供給源および前記溶媒との混合物と接触させた前記透明伝導体を熱処理する工程と,
を含み,
前記五価元素の供給源は,5族元素含有の化合物および15族元素含有の化合物からなる群から選択された一つ以上であることを特徴とする,耐熱性透明電極の製造方法。 - 前記透明伝導性物質は,スズ酸化物,インジウムもしくはフッ素ドーピングされたスズ酸化物,インジウム酸化物,スズドーピングされたインジウム酸化物,亜鉛酸化物,およびインジウムスズ酸化物からなる群より選択された一つであることを特徴とする,請求項1に記載の耐熱性透明電極の製造方法。
- 前記五価元素の供給源は,PF5,AsF5,VF5,NbF5,TaF5,VCl5,NbCl5,およびTaCl5からなる群より選択された一つ以上であることを特徴とする,請求項1または2に記載の耐熱性透明電極の製造方法。
- 前記溶媒は,メタノール,エタノールおよびブタノールからなる群より選択された一つ以上であることを特徴とする,請求項1〜3のいずれか1項に記載の耐熱性透明電極の製造方法。
- 前記五価元素の供給源と前記溶媒との混合物のうち,前記五価元素の供給源の濃度は,1mM〜60mMであることを特徴とする,請求項1〜4のいずれか1項に記載の耐熱性透明電極の製造方法。
- 前記熱処理工程は,300℃〜600℃の温度で行うことを特徴とする,請求項1〜5のいずれか1項に記載の耐熱性透明電極の製造方法。
- 前記五価元素の供給源と前記溶媒との混合物のうち,前記五価元素の供給源の濃度は,10mM〜20mMであることを特徴とする,請求項1〜6のいずれか1項に記載の耐熱性透明電極の製造方法。
- 互いに対向した第1電極および第2電極と,
前記第1電極及び前記第2電極間に介在され,色素が吸着された遷移金属酸化物からなる多孔質膜と,
前記第1電極及び前記第2電極間に介在された電解質と,
を備え,
前記第1電極は,五価元素を含有する透明伝導性物質からなる耐熱性透明電極であり,
前記五価元素は,15族元素であり,
前記15族元素は,N,P,Asからなる群より選択され,
前記透明伝導性物質は,インジウムもしくはフッ素ドーピングされたスズ酸化物,スズドーピングされたインジウム酸化物,およびインジウムスズ酸化物からなる群より選択された一つであることを特徴とする,色素増感太陽電池。 - 前記耐熱性透明電極中の前記五価元素の含有量は,0.01原子%〜20原子%であることを特徴とする,請求項8に記載の色素増感太陽電池。
- 前記遷移金属酸化物からなる多孔質膜は,多孔性チタン酸化物膜であることを特徴とする,請求項8または9に記載の色素増感太陽電池。
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DE102007024986A1 (de) | 2007-05-28 | 2008-12-04 | Forschungszentrum Jülich GmbH | Temperaturstabile TCO-Schicht, Verfahren zur Herstellung und Anwendung |
US20090293955A1 (en) * | 2007-11-07 | 2009-12-03 | Qualcomm Incorporated | Photovoltaics with interferometric masks |
GB0803702D0 (en) | 2008-02-28 | 2008-04-09 | Isis Innovation | Transparent conducting oxides |
KR101516050B1 (ko) | 2008-08-27 | 2015-05-04 | 이데미쓰 고산 가부시키가이샤 | 전계 효과형 트랜지스터, 그의 제조 방법 및 스퍼터링 타겟 |
GB0915376D0 (en) | 2009-09-03 | 2009-10-07 | Isis Innovation | Transparent conducting oxides |
CN103903864A (zh) * | 2012-12-27 | 2014-07-02 | 中国科学院上海硅酸盐研究所 | 一种染料敏化太阳能电池 |
Family Cites Families (27)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2675314B2 (ja) | 1987-12-04 | 1997-11-12 | 三洋電機株式会社 | 光起電力装置 |
JPH02309511A (ja) | 1989-05-24 | 1990-12-25 | Showa Denko Kk | 透明導電膜 |
JP3058278B2 (ja) | 1989-06-13 | 2000-07-04 | 東ソー株式会社 | 酸化物焼結体及びその用途 |
JP3128124B2 (ja) | 1989-06-13 | 2001-01-29 | 東ソー株式会社 | 導電性金属酸化物焼結体及びその用途 |
GB9217811D0 (en) * | 1992-08-21 | 1992-10-07 | Graetzel Michael | Organic compounds |
JPH06128743A (ja) | 1992-09-04 | 1994-05-10 | Mitsubishi Materials Corp | 透明導電膜とその製造方法およびそれに用いるターゲット |
JP3352772B2 (ja) | 1993-07-30 | 2002-12-03 | 出光興産株式会社 | 透明導電膜およびその製造方法 |
JPH07257945A (ja) | 1994-03-18 | 1995-10-09 | Nippon Soda Co Ltd | 透明導電性積層体及びペン入力タッチパネル |
JP3444655B2 (ja) | 1994-06-14 | 2003-09-08 | 三井金属鉱業株式会社 | 複合導電性粉末及び導電膜 |
JP3447163B2 (ja) | 1995-11-30 | 2003-09-16 | 出光興産株式会社 | 透明導電積層体 |
JP3862385B2 (ja) | 1996-11-08 | 2006-12-27 | Dowaホールディングス株式会社 | 酸化スズ含有酸化インジウム粉及び焼結体の製造方法 |
JPH10173210A (ja) * | 1996-12-13 | 1998-06-26 | Canon Inc | 電極、その形成方法及び該電極を有する光起電力素子 |
JPH1167459A (ja) | 1997-08-12 | 1999-03-09 | Tdk Corp | 有機el素子およびその製造方法 |
FR2775280B1 (fr) | 1998-02-23 | 2000-04-14 | Saint Gobain Vitrage | Procede de gravure d'une couche conductrice |
JPH11302017A (ja) | 1998-04-22 | 1999-11-02 | Central Glass Co Ltd | 透明導電膜 |
JP2000093243A (ja) | 1998-09-25 | 2000-04-04 | Matsushita Electric Works Ltd | 家具用引出し部の構造 |
JP3984404B2 (ja) | 1999-05-27 | 2007-10-03 | 日本板硝子株式会社 | 導電膜付きガラス板とその製造方法、およびこれを用いた光電変換装置 |
CA2287648C (en) | 1999-10-26 | 2007-06-19 | Donald W. Kirk | Amorphous metal/metallic glass electrodes for electrochemical processes |
JP2001210156A (ja) * | 1999-11-17 | 2001-08-03 | Toyo Gosei Kogyo Kk | 透明導電性酸化スズ膜形成用塗布溶液及び透明導電性酸化スズ膜の製造方法並びに透明導電性酸化スズ膜 |
US6524647B1 (en) | 2000-03-24 | 2003-02-25 | Pilkington Plc | Method of forming niobium doped tin oxide coatings on glass and coated glass formed thereby |
JP4083396B2 (ja) * | 2000-07-10 | 2008-04-30 | 独立行政法人科学技術振興機構 | 紫外透明導電膜とその製造方法 |
JP2002260448A (ja) | 2000-11-21 | 2002-09-13 | Nippon Sheet Glass Co Ltd | 導電膜、その製造方法、それを備えた基板および光電変換装置 |
CN1181566C (zh) | 2001-06-29 | 2004-12-22 | 精碟科技股份有限公司 | 透明电极基板及其制造方法和有机发光二极管 |
WO2003034533A1 (fr) * | 2001-10-11 | 2003-04-24 | Bridgestone Corporation | Electrode semi-conductrice a oxyde metallique sensible a un colorant organique et son procede de fabrication, et photopile sensible a un colorant organique |
JP3871562B2 (ja) | 2001-12-10 | 2007-01-24 | 日東電工株式会社 | 光学素子機能を有する透明導電膜およびその製造方法 |
KR100859517B1 (ko) * | 2002-06-10 | 2008-09-22 | 삼성전자주식회사 | 투명 전도막 및 그 제조방법 |
CN1237625C (zh) | 2002-09-24 | 2006-01-18 | 中国科学院化学研究所 | 全固态纳米晶太阳能电池及其制法 |
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