JP4759577B2 - 高周波プローブ及びプローブカード - Google Patents

高周波プローブ及びプローブカード Download PDF

Info

Publication number
JP4759577B2
JP4759577B2 JP2008001719A JP2008001719A JP4759577B2 JP 4759577 B2 JP4759577 B2 JP 4759577B2 JP 2008001719 A JP2008001719 A JP 2008001719A JP 2008001719 A JP2008001719 A JP 2008001719A JP 4759577 B2 JP4759577 B2 JP 4759577B2
Authority
JP
Japan
Prior art keywords
probe
signal
metal needle
metal
ground
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
JP2008001719A
Other languages
English (en)
Japanese (ja)
Other versions
JP2008170441A (ja
Inventor
偉正 顧
嘉泰 張
建和 林
志浩 何
合輝 林
Original Assignee
旺▲夕▼科技股▲分▼有限公司
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 旺▲夕▼科技股▲分▼有限公司 filed Critical 旺▲夕▼科技股▲分▼有限公司
Publication of JP2008170441A publication Critical patent/JP2008170441A/ja
Application granted granted Critical
Publication of JP4759577B2 publication Critical patent/JP4759577B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G01R1/06772—High frequency probes

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Measuring Leads Or Probes (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Testing Of Individual Semiconductor Devices (AREA)
JP2008001719A 2007-01-08 2008-01-08 高周波プローブ及びプローブカード Active JP4759577B2 (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
TW096100746A TW200829922A (en) 2007-01-08 2007-01-08 High frequency probe
TW096100746 2007-01-08

Publications (2)

Publication Number Publication Date
JP2008170441A JP2008170441A (ja) 2008-07-24
JP4759577B2 true JP4759577B2 (ja) 2011-08-31

Family

ID=39510088

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2008001719A Active JP4759577B2 (ja) 2007-01-08 2008-01-08 高周波プローブ及びプローブカード

Country Status (7)

Country Link
US (2) US7791359B2 (enExample)
JP (1) JP4759577B2 (enExample)
KR (1) KR100959599B1 (enExample)
DE (1) DE102008003534B4 (enExample)
FR (1) FR2911190B1 (enExample)
SG (1) SG144799A1 (enExample)
TW (1) TW200829922A (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9535093B2 (en) 2013-07-23 2017-01-03 Mpi Corporation High frequency probe card for probing photoelectric device

Families Citing this family (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7683645B2 (en) * 2006-07-06 2010-03-23 Mpi Corporation High-frequency probe card and transmission line for high-frequency probe card
TW200829922A (en) * 2007-01-08 2008-07-16 Microelectonics Technology Inc High frequency probe
TWI447397B (zh) * 2010-05-17 2014-08-01 Star Techn Inc 探針卡
TWI397695B (zh) * 2010-06-10 2013-06-01 Allstron Inc 用於積體電路測試之探測裝置
CN103221833B (zh) * 2010-10-29 2016-06-08 爱德万测试公司 具有专用电子模块的测试器和并入或使用该测试器的系统和方法
TWI482975B (zh) * 2011-05-27 2015-05-01 Mpi Corp Spring-type micro-high-frequency probe
WO2013006770A2 (en) * 2011-07-06 2013-01-10 Celadon Systems, Inc. Test apparatus having a probe card and connector mechanism
CN103858218B (zh) * 2011-07-06 2017-02-15 塞莱敦体系股份有限公司 具有一探针装置的测试系统及转位机构
TWI444625B (zh) * 2012-03-20 2014-07-11 Mpi Corp High frequency probe card
JP5748709B2 (ja) * 2012-06-05 2015-07-15 三菱電機株式会社 プローブカード
TWI471570B (zh) * 2012-12-26 2015-02-01 Mpi Corp High frequency probe card
TWI512300B (zh) * 2013-07-15 2015-12-11 Mpi Corp Cantilever high frequency probe card
JP6118710B2 (ja) * 2013-10-30 2017-04-19 日本電子材料株式会社 プローブカード
TWI506280B (zh) * 2013-12-13 2015-11-01 Mpi Corp Probe module (2)
TWI522623B (zh) * 2013-12-13 2016-02-21 Mpi Corp Probe module (1)
CN109001500B (zh) * 2018-08-21 2024-01-02 淮阴师范学院 一种内嵌电感的射频器件测试探针
CN111721976B (zh) * 2019-03-18 2023-04-28 台湾中华精测科技股份有限公司 探针卡装置及其导电探针
KR102088205B1 (ko) * 2019-08-30 2020-03-16 주식회사 프로이천 디스플레이 패널 검사용 프로브 핀

Family Cites Families (26)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2918164B2 (ja) * 1989-01-10 1999-07-12 富士通株式会社 プローブカード
JPH048973U (enExample) * 1990-05-14 1992-01-27
JPH0436239U (enExample) * 1990-07-20 1992-03-26
US5264788A (en) 1992-06-12 1993-11-23 Cascade Microtech, Inc. Adjustable strap implemented return line for a probe station
US5382898A (en) * 1992-09-21 1995-01-17 Cerprobe Corporation High density probe card for testing electrical circuits
US5594358A (en) * 1993-09-02 1997-01-14 Matsushita Electric Industrial Co., Ltd. Radio frequency probe and probe card including a signal needle and grounding needle coupled to a microstrip transmission line
CN1036945C (zh) 1994-03-15 1998-01-07 吉林大学 共面集成电路芯片微波探针
JPH09218222A (ja) * 1996-02-08 1997-08-19 Advantest Corp プローブカード
US6603322B1 (en) * 1996-12-12 2003-08-05 Ggb Industries, Inc. Probe card for high speed testing
JPH11108955A (ja) * 1997-09-30 1999-04-23 Mitsubishi Electric Corp ウエハプローバー
US6298312B1 (en) * 1998-07-22 2001-10-02 Taiwan Semiconductor Manufacturing Company, Ltd. Method of determining the tip angle of a probe card needle
JP2001091543A (ja) * 1999-09-27 2001-04-06 Hitachi Ltd 半導体検査装置
US6727716B1 (en) * 2002-12-16 2004-04-27 Newport Fab, Llc Probe card and probe needle for high frequency testing
JP2004309257A (ja) * 2003-04-04 2004-11-04 Micronics Japan Co Ltd プローブカード
CN2715341Y (zh) 2004-07-09 2005-08-03 威盛电子股份有限公司 探针卡
KR100711292B1 (ko) * 2005-04-14 2007-04-25 한국과학기술원 프로브 카드 및 그 제조방법
TWI279548B (en) * 2005-08-04 2007-04-21 Mjc Probe Inc High frequency cantilever type probe card
TWI274161B (en) * 2005-08-29 2007-02-21 Mjc Probe Inc Electrical contact device of probe card
US7683645B2 (en) * 2006-07-06 2010-03-23 Mpi Corporation High-frequency probe card and transmission line for high-frequency probe card
US7368928B2 (en) * 2006-08-29 2008-05-06 Mjc Probe Incorporation Vertical type high frequency probe card
KR100795909B1 (ko) 2006-12-12 2008-01-21 삼성전자주식회사 반도체 검사 장치의 프로브 카드
KR100806379B1 (ko) 2006-12-22 2008-02-27 세크론 주식회사 프로브 및 이를 포함하는 프로브 카드
TW200829922A (en) 2007-01-08 2008-07-16 Microelectonics Technology Inc High frequency probe
US7724009B2 (en) * 2007-02-09 2010-05-25 Mpi Corporation Method of making high-frequency probe, probe card using the high-frequency probe
US7595651B2 (en) * 2007-02-13 2009-09-29 Mpi Corporation Cantilever-type probe card for high frequency application
TWI367329B (en) * 2008-06-19 2012-07-01 King Yuan Electronics Co Ltd Probe card assembly

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9535093B2 (en) 2013-07-23 2017-01-03 Mpi Corporation High frequency probe card for probing photoelectric device

Also Published As

Publication number Publication date
US7791359B2 (en) 2010-09-07
FR2911190B1 (fr) 2014-08-08
SG144799A1 (en) 2008-08-28
US8106673B2 (en) 2012-01-31
DE102008003534A1 (de) 2008-07-17
KR100959599B1 (ko) 2010-05-27
FR2911190A1 (fr) 2008-07-11
US20080164900A1 (en) 2008-07-10
DE102008003534B4 (de) 2013-05-29
JP2008170441A (ja) 2008-07-24
TW200829922A (en) 2008-07-16
KR20080065235A (ko) 2008-07-11
US20100253378A1 (en) 2010-10-07
TWI322890B (enExample) 2010-04-01

Similar Documents

Publication Publication Date Title
JP4759577B2 (ja) 高周波プローブ及びプローブカード
US7368928B2 (en) Vertical type high frequency probe card
KR950006472A (ko) 프로브카드, 프로브카드용 동축 프로브빔 및 그 제조방법
US7595651B2 (en) Cantilever-type probe card for high frequency application
CN101221194B (zh) 高频探针
JP2007502429A (ja) デバイス試験用のプローブ
TWI444625B (zh) High frequency probe card
TWI741531B (zh) 測試裝置
WO2021215334A1 (ja) 検査用コネクタ及び検査用ユニット
TWI447397B (zh) 探針卡
CN118330276A (zh) 用于测试半导体器件的插座装置
JP2005351731A (ja) テストソケット
JP3878578B2 (ja) コンタクトプローブ、これを用いた半導体及び電気検査装置
TWI761964B (zh) 連接器測定用探針及連接器之測定方法
CN101236215A (zh) 高频悬臂式探针
CN202916309U (zh) 探针卡针层结构及使用该结构的探针卡
JP4709707B2 (ja) 高周波プローブカード
TWI303315B (enExample)
US20110043192A1 (en) Coaxial-cable probe structure
JP7782913B2 (ja) プローブカード
TWI867823B (zh) 電性測試載板結構及其測試系統
JP2008045950A (ja) プローブカード
JP4343789B2 (ja) プローブ針
JP6455451B2 (ja) 同軸プローブ
JP4979190B2 (ja) 検査プローブ治具

Legal Events

Date Code Title Description
A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20101122

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20110131

TRDD Decision of grant or rejection written
A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

Effective date: 20110512

A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

A61 First payment of annual fees (during grant procedure)

Free format text: JAPANESE INTERMEDIATE CODE: A61

Effective date: 20110606

R150 Certificate of patent or registration of utility model

Ref document number: 4759577

Country of ref document: JP

Free format text: JAPANESE INTERMEDIATE CODE: R150

Free format text: JAPANESE INTERMEDIATE CODE: R150

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20140610

Year of fee payment: 3

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250