JP4737138B2 - 半導体装置及びその製造方法 - Google Patents
半導体装置及びその製造方法 Download PDFInfo
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- JP4737138B2 JP4737138B2 JP2007128452A JP2007128452A JP4737138B2 JP 4737138 B2 JP4737138 B2 JP 4737138B2 JP 2007128452 A JP2007128452 A JP 2007128452A JP 2007128452 A JP2007128452 A JP 2007128452A JP 4737138 B2 JP4737138 B2 JP 4737138B2
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- QTWJRLJHJPIABL-UHFFFAOYSA-N 2-methylphenol;3-methylphenol;4-methylphenol Chemical compound CC1=CC=C(O)C=C1.CC1=CC=CC(O)=C1.CC1=CC=CC=C1O QTWJRLJHJPIABL-UHFFFAOYSA-N 0.000 claims description 11
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- 229910052751 metal Inorganic materials 0.000 description 12
- 239000002184 metal Substances 0.000 description 12
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 4
- 229910052782 aluminium Inorganic materials 0.000 description 3
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 3
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 3
- 229910052737 gold Inorganic materials 0.000 description 3
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- 229910052582 BN Inorganic materials 0.000 description 1
- PZNSFCLAULLKQX-UHFFFAOYSA-N Boron nitride Chemical compound N#B PZNSFCLAULLKQX-UHFFFAOYSA-N 0.000 description 1
- 229910000881 Cu alloy Inorganic materials 0.000 description 1
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 1
- 239000002390 adhesive tape Substances 0.000 description 1
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- PMHQVHHXPFUNSP-UHFFFAOYSA-M copper(1+);methylsulfanylmethane;bromide Chemical compound Br[Cu].CSC PMHQVHHXPFUNSP-UHFFFAOYSA-M 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 239000010419 fine particle Substances 0.000 description 1
- 239000011888 foil Substances 0.000 description 1
- 230000001771 impaired effect Effects 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
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- 238000005498 polishing Methods 0.000 description 1
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- 238000007788 roughening Methods 0.000 description 1
- 238000005488 sandblasting Methods 0.000 description 1
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 description 1
- 229910010271 silicon carbide Inorganic materials 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
- 239000004332 silver Substances 0.000 description 1
- 229910000679 solder Inorganic materials 0.000 description 1
- 238000005476 soldering Methods 0.000 description 1
- 238000001721 transfer moulding Methods 0.000 description 1
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Classifications
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/26—Layer connectors, e.g. plate connectors, solder or adhesive layers; Manufacturing methods related thereto
- H01L2224/31—Structure, shape, material or disposition of the layer connectors after the connecting process
- H01L2224/32—Structure, shape, material or disposition of the layer connectors after the connecting process of an individual layer connector
- H01L2224/321—Disposition
- H01L2224/32151—Disposition the layer connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
- H01L2224/32221—Disposition the layer connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
- H01L2224/32245—Disposition the layer connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being metallic
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/42—Wire connectors; Manufacturing methods related thereto
- H01L2224/47—Structure, shape, material or disposition of the wire connectors after the connecting process
- H01L2224/48—Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
- H01L2224/481—Disposition
- H01L2224/48135—Connecting between different semiconductor or solid-state bodies, i.e. chip-to-chip
- H01L2224/48137—Connecting between different semiconductor or solid-state bodies, i.e. chip-to-chip the bodies being arranged next to each other, e.g. on a common substrate
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/42—Wire connectors; Manufacturing methods related thereto
- H01L2224/47—Structure, shape, material or disposition of the wire connectors after the connecting process
- H01L2224/48—Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
- H01L2224/481—Disposition
- H01L2224/48135—Connecting between different semiconductor or solid-state bodies, i.e. chip-to-chip
- H01L2224/48137—Connecting between different semiconductor or solid-state bodies, i.e. chip-to-chip the bodies being arranged next to each other, e.g. on a common substrate
- H01L2224/48139—Connecting between different semiconductor or solid-state bodies, i.e. chip-to-chip the bodies being arranged next to each other, e.g. on a common substrate with an intermediate bond, e.g. continuous wire daisy chain
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/42—Wire connectors; Manufacturing methods related thereto
- H01L2224/47—Structure, shape, material or disposition of the wire connectors after the connecting process
- H01L2224/48—Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
- H01L2224/481—Disposition
- H01L2224/48151—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
- H01L2224/48221—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
- H01L2224/48245—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being metallic
- H01L2224/48247—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being metallic connecting the wire to a bond pad of the item
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/73—Means for bonding being of different types provided for in two or more of groups H01L2224/10, H01L2224/18, H01L2224/26, H01L2224/34, H01L2224/42, H01L2224/50, H01L2224/63, H01L2224/71
- H01L2224/732—Location after the connecting process
- H01L2224/73251—Location after the connecting process on different surfaces
- H01L2224/73265—Layer and wire connectors
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
- H01L24/73—Means for bonding being of different types provided for in two or more of groups H01L24/10, H01L24/18, H01L24/26, H01L24/34, H01L24/42, H01L24/50, H01L24/63, H01L24/71
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/10—Details of semiconductor or other solid state devices to be connected
- H01L2924/11—Device type
- H01L2924/13—Discrete devices, e.g. 3 terminal devices
- H01L2924/1304—Transistor
- H01L2924/1305—Bipolar Junction Transistor [BJT]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/10—Details of semiconductor or other solid state devices to be connected
- H01L2924/11—Device type
- H01L2924/13—Discrete devices, e.g. 3 terminal devices
- H01L2924/1304—Transistor
- H01L2924/1305—Bipolar Junction Transistor [BJT]
- H01L2924/13055—Insulated gate bipolar transistor [IGBT]
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- Encapsulation Of And Coatings For Semiconductor Or Solid State Devices (AREA)
- Lead Frames For Integrated Circuits (AREA)
Description
図1は、本発明の実施の形態に係る半導体装置を示す断面図である。リードフレーム11は、1枚の銅又は銅合金からなる金属薄板を加工して、ダイパッド12、ボンディングパッド、端子などを形成したものである。このダイパッド12上に、パワーチップであるIGBT(Insulate Gate Bipolar Transistor)13(半導体チップ)とフリーホイールダイオード(Free Wheeling Diode)14が半田(図示せず)により搭載されている。
本発明の実施の形態2に係る半導体装置の製造方法について説明する。ここでは、実施の形態1と異なる点について説明し、同様の点については説明を省略する。
本発明の実施の形態3に係る半導体装置の製造方法について説明する。ここでは、実施の形態1,2と異なる点について説明し、同様の点については説明を省略する。
12 ダイパッド
13 IGBT(半導体チップ)
18 ヒートシンク
19 絶縁性樹脂シート
20 モールド樹脂
21 モールド金型
24 突起
Claims (6)
- ダイパッドを有するリードフレームと、
前記ダイパッド上に搭載された半導体チップと、
前記ダイパッドの前記半導体チップ側とは反対側の面に絶縁性樹脂シートを介して配置されたヒートシンクと、
前記ヒートシンクの前記半導体チップ側とは反対側の面が露出するように、前記半導体チップ、前記ダイパッド、前記絶縁性樹脂シート及び前記ヒートシンクを樹脂封止するクレゾールノボラック型エポキシ樹脂とを備え、
前記ヒートシンクの前記半導体チップ側とは反対側の面の十点平均高さが3〜8μmであることを特徴とする半導体装置。 - リードフレームのダイパッド上に半導体チップを搭載する工程と、
前記ダイパッドの前記半導体チップ側とは反対側の面に絶縁性樹脂シートを介してヒートシンクを配置する工程と、
前記ヒートシンクの前記半導体チップ側とは反対側の面が露出するように、前記半導体チップ、前記ダイパッド、前記絶縁性樹脂シート及び前記ヒートシンクをモールド金型内でクレゾールノボラック型エポキシ樹脂により樹脂封止するモールド工程とを備え、
前記ヒートシンクとして、前記半導体チップ側とは反対側の面の十点平均高さが3〜8μmのものを用いることを特徴とする半導体装置の製造方法。 - リードフレームのダイパッド上に半導体チップを搭載する工程と、
前記ダイパッドの前記半導体チップ側とは反対側の面に絶縁性樹脂シートを介してヒートシンクを配置する工程と、
前記ヒートシンクの前記半導体チップ側とは反対側の面が露出するように、前記半導体チップ、前記ダイパッド、前記絶縁性樹脂シート及び前記ヒートシンクをモールド金型内でクレゾールノボラック型エポキシ樹脂により樹脂封止するモールド工程とを備え、
前記モールド金型として、前記ヒートシンクの前記半導体チップ側とは反対側の面の外周に沿って前記クレゾールノボラック型エポキシ樹脂を堰き止める突起を有するものを用い、
前記ヒートシンクとして、前記半導体チップ側とは反対側の面の十点平均高さが3〜8μmのものを用いることを特徴とする半導体装置の製造方法。 - 前記モールド金型として、前記ヒートシンクの前記半導体チップ側とは反対側の面と対向する内面の十点平均高さが3μm以下のものを用いることを特徴とする請求項2〜3の何れか1項に記載の半導体装置の製造方法。
- 前記モールド金型から前記半導体装置を取り出した後、前記モールド金型の内面に付着した前記クレゾールノボラック型エポキシ樹脂を清掃機械により自動除去することを特徴とする請求項4に記載の半導体装置の製造方法。
- 前記モールド工程に先立って前記モールド金型内を真空排気することを特徴とする請求項2〜5の何れか1項に記載の半導体装置の製造方法。
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JP4737138B2 true JP4737138B2 (ja) | 2011-07-27 |
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Families Citing this family (4)
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JP2010140930A (ja) * | 2008-12-09 | 2010-06-24 | Denso Corp | モールドパッケージの製造方法 |
JP2012119488A (ja) * | 2010-11-30 | 2012-06-21 | Sanken Electric Co Ltd | 半導体装置の製造方法及び半導体装置 |
JP6316708B2 (ja) | 2014-08-26 | 2018-04-25 | ルネサスエレクトロニクス株式会社 | 半導体装置の製造方法 |
WO2024029235A1 (ja) * | 2022-08-01 | 2024-02-08 | ローム株式会社 | 半導体装置 |
Citations (11)
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JPH05235070A (ja) * | 1992-02-19 | 1993-09-10 | Nec Corp | 半導体集積回路の樹脂封止装置 |
JPH05315511A (ja) * | 1991-12-25 | 1993-11-26 | Nikko Kinzoku Kk | リードフレーム材およびその製造方法 |
JPH0653390A (ja) * | 1992-06-03 | 1994-02-25 | Seiko Epson Corp | 半導体装置及びその製造方法 |
JPH0864623A (ja) * | 1994-08-22 | 1996-03-08 | Nec Corp | 半導体装置の樹脂封止方法、及び該樹脂封止方法に用いられる樹脂封止装置 |
JPH08288447A (ja) * | 1995-04-14 | 1996-11-01 | Nippon Motorola Ltd | リードフレーム |
JPH11150216A (ja) * | 1997-11-19 | 1999-06-02 | Denso Corp | 樹脂封止型半導体部品及びその製造方法 |
JP2001035868A (ja) * | 1999-07-22 | 2001-02-09 | Nec Corp | 非絶縁型半導体装置の製造方法 |
JP2002134535A (ja) * | 2000-10-19 | 2002-05-10 | Towa Corp | 半導体樹脂封止成形方法 |
JP2003007951A (ja) * | 2001-06-27 | 2003-01-10 | Matsushita Electric Ind Co Ltd | リードフレームおよび樹脂封止型半導体装置の製造方法 |
JP2003311786A (ja) * | 2002-04-25 | 2003-11-05 | Nec Kyushu Ltd | 半導体装置の製造装置及びその製造方法 |
JP2005109100A (ja) * | 2003-09-30 | 2005-04-21 | Mitsubishi Electric Corp | 半導体装置およびその製造方法 |
-
2007
- 2007-05-14 JP JP2007128452A patent/JP4737138B2/ja active Active
Patent Citations (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH05315511A (ja) * | 1991-12-25 | 1993-11-26 | Nikko Kinzoku Kk | リードフレーム材およびその製造方法 |
JPH05235070A (ja) * | 1992-02-19 | 1993-09-10 | Nec Corp | 半導体集積回路の樹脂封止装置 |
JPH0653390A (ja) * | 1992-06-03 | 1994-02-25 | Seiko Epson Corp | 半導体装置及びその製造方法 |
JPH0864623A (ja) * | 1994-08-22 | 1996-03-08 | Nec Corp | 半導体装置の樹脂封止方法、及び該樹脂封止方法に用いられる樹脂封止装置 |
JPH08288447A (ja) * | 1995-04-14 | 1996-11-01 | Nippon Motorola Ltd | リードフレーム |
JPH11150216A (ja) * | 1997-11-19 | 1999-06-02 | Denso Corp | 樹脂封止型半導体部品及びその製造方法 |
JP2001035868A (ja) * | 1999-07-22 | 2001-02-09 | Nec Corp | 非絶縁型半導体装置の製造方法 |
JP2002134535A (ja) * | 2000-10-19 | 2002-05-10 | Towa Corp | 半導体樹脂封止成形方法 |
JP2003007951A (ja) * | 2001-06-27 | 2003-01-10 | Matsushita Electric Ind Co Ltd | リードフレームおよび樹脂封止型半導体装置の製造方法 |
JP2003311786A (ja) * | 2002-04-25 | 2003-11-05 | Nec Kyushu Ltd | 半導体装置の製造装置及びその製造方法 |
JP2005109100A (ja) * | 2003-09-30 | 2005-04-21 | Mitsubishi Electric Corp | 半導体装置およびその製造方法 |
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