JP4703865B2 - パーフルオロカーボン類の製造方法およびその用途 - Google Patents

パーフルオロカーボン類の製造方法およびその用途 Download PDF

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Publication number
JP4703865B2
JP4703865B2 JP2001048985A JP2001048985A JP4703865B2 JP 4703865 B2 JP4703865 B2 JP 4703865B2 JP 2001048985 A JP2001048985 A JP 2001048985A JP 2001048985 A JP2001048985 A JP 2001048985A JP 4703865 B2 JP4703865 B2 JP 4703865B2
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JP
Japan
Prior art keywords
gas
perfluorocarbons
organic compound
oxygen
producing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
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JP2001048985A
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English (en)
Japanese (ja)
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JP2002255868A5 (ru
JP2002255868A (ja
Inventor
野 博 基 大
井 敏 夫 大
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Showa Denko KK
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Showa Denko KK
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Publication date
Priority to JP2001048985A priority Critical patent/JP4703865B2/ja
Application filed by Showa Denko KK filed Critical Showa Denko KK
Priority to KR10-2002-7014134A priority patent/KR100519140B1/ko
Priority to CNB028004043A priority patent/CN1301947C/zh
Priority to US10/258,172 priority patent/US7064240B2/en
Priority to PCT/JP2002/001549 priority patent/WO2002066408A2/en
Priority to AU2002233670A priority patent/AU2002233670A1/en
Priority to TW91103190A priority patent/TWI320035B/zh
Publication of JP2002255868A publication Critical patent/JP2002255868A/ja
Priority to US10/778,239 priority patent/US7176337B2/en
Publication of JP2002255868A5 publication Critical patent/JP2002255868A5/ja
Application granted granted Critical
Publication of JP4703865B2 publication Critical patent/JP4703865B2/ja
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Expired - Lifetime legal-status Critical Current

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  • Organic Low-Molecular-Weight Compounds And Preparation Thereof (AREA)
  • Drying Of Semiconductors (AREA)
JP2001048985A 2001-02-23 2001-02-23 パーフルオロカーボン類の製造方法およびその用途 Expired - Lifetime JP4703865B2 (ja)

Priority Applications (8)

Application Number Priority Date Filing Date Title
JP2001048985A JP4703865B2 (ja) 2001-02-23 2001-02-23 パーフルオロカーボン類の製造方法およびその用途
CNB028004043A CN1301947C (zh) 2001-02-23 2002-02-21 全氟化碳的生产方法及其用途
US10/258,172 US7064240B2 (en) 2001-02-23 2002-02-21 Process for producing perfluorocarbons and use thereof
PCT/JP2002/001549 WO2002066408A2 (en) 2001-02-23 2002-02-21 Process for producing perfluorocarbons and use thereof
KR10-2002-7014134A KR100519140B1 (ko) 2001-02-23 2002-02-21 퍼플루오로탄소의 제조방법 및 그 용도
AU2002233670A AU2002233670A1 (en) 2001-02-23 2002-02-21 Process for producing perfluorocarbons and use thereof
TW91103190A TWI320035B (en) 2001-02-23 2002-02-22 Process for producing perfluorocarbons and use thereof
US10/778,239 US7176337B2 (en) 2001-02-23 2004-02-17 Process for producing perfluorocarbons and use thereof

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2001048985A JP4703865B2 (ja) 2001-02-23 2001-02-23 パーフルオロカーボン類の製造方法およびその用途

Publications (3)

Publication Number Publication Date
JP2002255868A JP2002255868A (ja) 2002-09-11
JP2002255868A5 JP2002255868A5 (ru) 2009-01-08
JP4703865B2 true JP4703865B2 (ja) 2011-06-15

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Family Applications (1)

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JP2001048985A Expired - Lifetime JP4703865B2 (ja) 2001-02-23 2001-02-23 パーフルオロカーボン類の製造方法およびその用途

Country Status (2)

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JP (1) JP4703865B2 (ru)
TW (1) TWI320035B (ru)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4828208B2 (ja) * 2005-11-09 2011-11-30 昭和電工株式会社 ペンタフルオロエタンの分離回収方法および該方法を含むペンタフルオロエタンの製造方法
JP2007176842A (ja) * 2005-12-27 2007-07-12 Showa Denko Kk オクタフルオロプロパンの製造方法
EP2960224B1 (en) * 2013-02-21 2019-03-27 Zeon Corporation High-purity 1h-heptafluorocyclopentene
EP3725759B1 (en) * 2017-12-12 2024-06-12 Resonac Corporation Method for producing fluorine-containing organic compounds
CN112778077A (zh) * 2021-01-18 2021-05-11 福建德尔科技有限公司 基于微反应器的电子级c2f6制备方法
CN115197044B (zh) * 2022-08-09 2023-07-04 浙江诺亚氟化工有限公司 一种全氟异己烷的绿色合成工艺
CN116283479B (zh) * 2023-03-27 2024-01-26 福建德尔科技股份有限公司 一种制备电子级八氟丙烷的方法

Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS53119802A (en) * 1977-03-23 1978-10-19 Hoechst Ag Process for preparing octafluoropropane
JPS56103123A (en) * 1979-12-26 1981-08-18 Allied Chem Manufacture of fluorinated organic compound using fluorine and melt alumina porous reactor
JPH07504435A (ja) * 1992-03-10 1995-05-18 イー・アイ・デユポン・ドウ・ヌムール・アンド・カンパニー ヘキサフルオロエタン製品の精製
JPH0881399A (ja) * 1994-09-08 1996-03-26 Showa Denko Kk テトラフルオロメタンの精製方法
JPH09241186A (ja) * 1996-03-07 1997-09-16 Showa Denko Kk ヘキサフルオロエタンの製造方法
JPH09255598A (ja) * 1996-03-26 1997-09-30 Showa Denko Kk パーフルオロカーボンの製造方法
JPH10506107A (ja) * 1994-09-20 1998-06-16 イー・アイ・デュポン・ドゥ・ヌムール・アンド・カンパニー ヘキサフルオロエタン生成物の精製方法

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS53119802A (en) * 1977-03-23 1978-10-19 Hoechst Ag Process for preparing octafluoropropane
JPS56103123A (en) * 1979-12-26 1981-08-18 Allied Chem Manufacture of fluorinated organic compound using fluorine and melt alumina porous reactor
JPH07504435A (ja) * 1992-03-10 1995-05-18 イー・アイ・デユポン・ドウ・ヌムール・アンド・カンパニー ヘキサフルオロエタン製品の精製
JPH0881399A (ja) * 1994-09-08 1996-03-26 Showa Denko Kk テトラフルオロメタンの精製方法
JPH10506107A (ja) * 1994-09-20 1998-06-16 イー・アイ・デュポン・ドゥ・ヌムール・アンド・カンパニー ヘキサフルオロエタン生成物の精製方法
JPH09241186A (ja) * 1996-03-07 1997-09-16 Showa Denko Kk ヘキサフルオロエタンの製造方法
JPH09255598A (ja) * 1996-03-26 1997-09-30 Showa Denko Kk パーフルオロカーボンの製造方法

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Publication number Publication date
TWI320035B (en) 2010-02-01
JP2002255868A (ja) 2002-09-11

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