JP4691691B2 - 微細電極イオン発生素子を有する除電装置 - Google Patents

微細電極イオン発生素子を有する除電装置 Download PDF

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Publication number
JP4691691B2
JP4691691B2 JP2005006115A JP2005006115A JP4691691B2 JP 4691691 B2 JP4691691 B2 JP 4691691B2 JP 2005006115 A JP2005006115 A JP 2005006115A JP 2005006115 A JP2005006115 A JP 2005006115A JP 4691691 B2 JP4691691 B2 JP 4691691B2
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Japan
Prior art keywords
ion generating
electrode
generating element
positive
ion
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JP2005006115A
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Japanese (ja)
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JP2006196291A (ja
JP2006196291A5 (enExample
Inventor
章文 瀬戸
誠一 平澤
正明 辻
明 奥山
進 斎藤
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National Institute of Advanced Industrial Science and Technology AIST
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National Institute of Advanced Industrial Science and Technology AIST
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Priority to JP2005006115A priority Critical patent/JP4691691B2/ja
Priority to TW095108784A priority patent/TW200735722A/zh
Publication of JP2006196291A publication Critical patent/JP2006196291A/ja
Publication of JP2006196291A5 publication Critical patent/JP2006196291A5/ja
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Publication of JP4691691B2 publication Critical patent/JP4691691B2/ja
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  • Elimination Of Static Electricity (AREA)
JP2005006115A 2005-01-13 2005-01-13 微細電極イオン発生素子を有する除電装置 Expired - Lifetime JP4691691B2 (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP2005006115A JP4691691B2 (ja) 2005-01-13 2005-01-13 微細電極イオン発生素子を有する除電装置
TW095108784A TW200735722A (en) 2005-01-13 2006-03-15 Static eliminator with fine electrode ion generating element

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2005006115A JP4691691B2 (ja) 2005-01-13 2005-01-13 微細電極イオン発生素子を有する除電装置

Publications (3)

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JP2006196291A JP2006196291A (ja) 2006-07-27
JP2006196291A5 JP2006196291A5 (enExample) 2006-09-07
JP4691691B2 true JP4691691B2 (ja) 2011-06-01

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JP2005006115A Expired - Lifetime JP4691691B2 (ja) 2005-01-13 2005-01-13 微細電極イオン発生素子を有する除電装置

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JP (1) JP4691691B2 (enExample)
TW (1) TW200735722A (enExample)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4547506B2 (ja) * 2005-11-24 2010-09-22 株式会社司測研 エアロゾル荷電中和装置
JP5156993B2 (ja) * 2007-02-09 2013-03-06 独立行政法人産業技術総合研究所 イオン発生器及び除電器
US8253098B2 (en) 2008-06-27 2012-08-28 University Of Yamanashi Ionization analysis method and apparatus
JP5932592B2 (ja) * 2011-12-05 2016-06-08 東京エレクトロン株式会社 除電用治具及びそれを用いた基板処理装置並びに基板処理装置の除電方法
CN104505713A (zh) * 2014-10-28 2015-04-08 张义卿 一种网眼状氧化钛膜的电极材料及其制造方法及其用途
JP6778624B2 (ja) * 2017-01-31 2020-11-04 株式会社Ｓｃｒｅｅｎホールディングス 基板処理装置、基板処理システムおよび基板処理方法
JP7161327B2 (ja) * 2018-07-11 2022-10-26 株式会社キーエンス 除電装置

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2794117B2 (ja) * 1989-04-25 1998-09-03 増田 佳子 除電装置
JP2003249327A (ja) * 2002-02-26 2003-09-05 Okabe Mica Co Ltd イオン発生装置
JP2004105517A (ja) * 2002-09-19 2004-04-08 Sharp Corp イオン発生素子、イオン発生素子の製造方法、イオン発生装置およびそれを備えた電気機器
JP4063784B2 (ja) * 2003-05-15 2008-03-19 シャープ株式会社 イオン発生素子、イオン発生装置

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Publication number Publication date
JP2006196291A (ja) 2006-07-27
TW200735722A (en) 2007-09-16

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